Pressure reducing valve assembling tool

Abstract

The utility model relates to the field of assembling tools for semiconductor equipment, and discloses a pressure reducing valve assembling tool, which comprises a gland, a valve body, a pressure reducing valve, a pressure reducing valve, a pressure reducing valve, a pressure reducing valve, a pressure reducing valve, a pressure reducing valve and a pressure reducing valve body, and is characterized in that the gland adopts a hollow structure, and internal threads are arranged on the inner side wall of the hollow structure; the two half inner hexagonal clamps are installed at the hollow structure of the gland through a lead screw structure and extend to the top of the valve body so as to clamp a lock nut to be installed; and the lead screw structure is arranged at the top of the gland, drives the two half inner hexagonal clamps to carry out position adjustment through the lead screw structure, and transmits clamping force to the two half inner hexagonal clamps. The locking nut can be easily and accurately screwed in, and the springback of the spring is effectively avoided.

Description

Technical Field

[0001] This utility model relates to an assembly tooling for semiconductor equipment, and more particularly to an assembly tooling for a pressure reducing valve for semiconductor equipment. Background Technology

[0002] like Figure 1 As shown, the valve body 100 of a pressure reducing valve used in existing semiconductor equipment has a valve hole 110, which requires a spring 120 and a lock nut 200. During installation, due to the large elastic force of the spring 120, the operator needs to use the lock nut 200 to press down the spring 120 and screw the lock nut 200 into the thread 130 of the valve hole 110. The lower part of the outer surface of the lock nut 200 has an external thread, and the upper part is an external hexagonal bolt. However, the large elastic force of the spring 120 makes screwing the lock nut 200 difficult. Therefore, configuring a machining fixture to solve the installation difficulties is a pressing technical problem that needs to be addressed. Summary of the Invention

[0003] To address the aforementioned problems, the purpose of this utility model is to provide a pressure reducing valve assembly fixture that can easily and accurately screw in the lock nut while effectively preventing spring rebound.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a pressure reducing valve assembly fixture, comprising: a pressure cap, which has a hollow structure and an internal thread on the inner side wall of the hollow structure to mate with the external thread on the upper edge of the valve body; two semi-hexagonal clamps, which are installed in the hollow structure of the pressure cap by means of a screw structure and extend to the top of the valve body to clamp the lock nut to be installed; and a screw structure, which is set on the top of the pressure cap and drives the two semi-hexagonal clamps to adjust their position and transmit the clamping force to the two semi-hexagonal clamps.

[0005] Furthermore, the lead screw structure includes a nut, a lead screw, a slider, and a guide rail;

[0006] The lead screw spans across the upper part of the hollow structure of the gland, and both ends of the lead screw are set on the gland;

[0007] A guide rail is provided on each side of the lead screw, and the guide rail is fixed to the top of the pressure plate;

[0008] The lead screw is equipped with two nuts, and each nut has a half-hexagonal clamp fixed at its bottom;

[0009] Each half of the hexagonal clamp has a slider on both sides, and the slider is slidably mounted on the guide rail.

[0010] Furthermore, the threads of the two nuts are in opposite directions, and the threads of the two sections of the lead screw are in opposite directions.

[0011] Furthermore, a rotating disk is provided at one end of the lead screw, which drives the two nuts to move relative to each other or in opposite directions.

[0012] Furthermore, a bearing seat is fixedly installed on the pressure cap, and both ends of the lead screw are respectively mounted on the bearing seat through bearings.

[0013] Furthermore, two guide rails are respectively installed across the upper and lower ends of the hollow structure of the pressure cap, and both ends of each guide rail are fixed to the pressure cap.

[0014] Furthermore, the outer edge of the cap adopts a hexagonal structure.

[0015] Furthermore, the outer edge of the semi-internal hexagonal clip adopts an arc-shaped structure, which corresponds to the inner arc surface of the hollow structure of the cap.

[0016] Furthermore, the semi-internal hexagonal clip has an upper step that engages with the upper surface of the lock nut.

[0017] Furthermore, the inner diameter of the hollow structure of the gland is matched with the outer diameter of the upper part of the valve body.

[0018] This utility model has the following advantages due to the adoption of the above technical solution:

[0019] 1. In this utility model, the rotating disc first drives the pressure cap to be fully tightened with the thread of the valve body, which ensures that the lock nut is fully aligned with the valve hole and that the lock nut can be easily screwed in. Moreover, due to the self-locking of the threads of the pressure cap, it will not be affected by the spring force and will not bounce back.

[0020] 2. In this utility model, the connection between the semi-internal hexagonal clamp and the lock nut at the bottom of the cover can be loosened by reversing the rotating disc. Therefore, when the cover is reversed, the lock nut will not be rotated out. Attached Figure Description

[0021] Figure 1 This is a perspective sectional view of the pressure reducing valve assembly fixture clamping the lock nut in an embodiment of this utility model;

[0022] Figure 2 This is a perspective sectional view of the pressure reducing valve assembly fixture without clamping the lock nut in this embodiment of the utility model.

[0023] Figure 3 This is a main sectional view of the pressure reducing valve assembly tool clamping the lock nut in an embodiment of this utility model;

[0024] Figure 4 This is a main sectional view of the pressure reducing valve assembly tooling without clamping the lock nut in this embodiment of the utility model;

[0025] Figure 5 This is a top view of the pressure reducing valve assembly fixture clamping the lock nut in this embodiment of the utility model;

[0026] Figure label:

[0027] 100-Valve body; 110-Valve hole; 120-Spring; 130-Thread of valve hole; 200-Lock nut; 310-Half hexagonal clamp; 320-Nut; 330-Lead screw; 331-Rotating disk; 340-Slider; 350-Guide rail; 360-Gland; 370-Bearing seat. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model are within the protection scope of this utility model.

[0029] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0030] In one embodiment of this utility model, a pressure reducing valve assembly fixture is provided. In this embodiment, as shown... Figure 1 As shown, the pressure reducing valve assembly fixture includes:

[0031] The gland 360 has a hollow structure, and the inner wall of the hollow structure is provided with internal threads to mate with the external threads on the upper edge of the valve body 100.

[0032] Two semi-hexagonal clamps 310 are installed in the hollow structure of the gland 360 via a screw mechanism and extend to the top of the valve body 100 to clamp the lock nut 200 to be installed.

[0033] A lead screw structure is set on the top of the pressure cap 360. Two half hexagonal clamps 310 are set on the lead screw structure. The lead screw structure drives the two half hexagonal clamps 310 to adjust their positions and transmits the clamping force to the two half hexagonal clamps 310.

[0034] In use, the two hexagonal clamps 3 clamp the lock nut 200, and then the pressure cap 360 is installed on the top of the valve body 100 by thread; the two hexagonal clamps 310 are driven by the screw structure to move relative to each other, thereby clamping the lock nut 200, and the pressure cap 360 is screwed into the valve hole 110 of the valve body 100 which is equipped with a spring 120.

[0035] In the above embodiments, in order to facilitate tightening of the cover 360 with a wrench, the outer edge of the cover 360 adopts a hexagonal structure.

[0036] In the above embodiment, the lead screw structure includes a nut 320, a lead screw 330, a slider 340, and a guide rail 350. The lead screw 330 spans the upper part of the hollow structure of the pressure cover 360, is located on the center line of the pressure cover 360, and both ends of the lead screw 330 are set on the pressure cover 360. A guide rail 350 is respectively set on both sides of the lead screw 330, and the guide rail 350 is fixed to the top of the pressure cover 360; two nuts 320 are set on the lead screw 330, and a semi-hexagonal clamp 310 is fixedly set at the bottom of each nut 320. A slider 340 is set on both sides of each semi-hexagonal clamp 310, and the slider 340 is slidably set on the guide rail 350.

[0037] In this embodiment, the threads of the two nuts 320 are in opposite directions. Correspondingly, the threads of the lead screw 330 are in opposite directions at the front and rear ends, so as to engage with the threads of the nuts 320 installed on them respectively.

[0038] In this embodiment, a rotating disk 331 is provided at one end of the lead screw 330. The rotating disk 331 drives the lead screw 330 to rotate. When the rotating disk 331 rotates in the forward direction, it drives the two nuts 320 to move relative to each other. When the rotating disk 331 rotates in the reverse direction, it drives the two nuts 320 to move in opposite directions. When the two nuts 320 move relative to each other, they drive the two hexagonal clamps 310 to move relative to each other, thereby clamping the lock nut 200. When the two nuts 320 move in opposite directions, they drive the two hexagonal clamps 310 to move in opposite directions, thereby releasing the lock nut 200.

[0039] In this embodiment, a bearing seat 370 is fixedly provided on the pressure cover 360, and the two ends of the lead screw 330 are respectively provided on the bearing seat 370 through bearings.

[0040] In this embodiment, the specific structure of the guide rail 350 fixed to the top of the pressure cover 360 is as follows: two guide rails 350 are respectively straddling the upper and lower ends of the hollow structure of the pressure cover 360, and both ends of each guide rail 350 are fixed to the pressure cover 360.

[0041] In the above embodiment, the outer edge of the semi-hexagonal clip 310 adopts an arc-shaped structure, which is correspondingly set with the inner arc surface of the hollow structure of the pressure cover 360, so as to ensure that the semi-hexagonal clip 310 can move away from the lock nut 200 when the lock nut 200 is released, so that when the pressure cover 360 reverses and separates from the valve body 100, it will not drive the lock nut 200 to rotate out.

[0042] In the above embodiment, the semi-internal hexagonal clip 310 has an upper step that engages with the upper surface of the lock nut 200.

[0043] In the above embodiment, the inner diameter of the hollow structure of the pressure cap 360 is matched with the outer diameter of the upper part of the valve body 100.

[0044] In summary, when using this utility model, the lock nut 200 is screwed into the valve hole 110 of the valve body 100 through the following operation:

[0045] 1) Insert the spring 120 into the valve hole 110, and drive the screw structure to clamp the two half hexagonal clamps 310 with the screw nut 200 by rotating the rotating disk 331 in the forward direction.

[0046] 2) Using a wrench to tighten the cover 360, which is a carrier with a lead screw structure, first screw the internal thread of the cover 360 into the external thread of the upper edge of the valve body 100, and then continue to rotate the cover 360 to screw the lock nut 200 into the valve hole 110.

[0047] 3) The reverse rotation of the rotating disk 331 drives the lead screw structure to rotate in the opposite direction, so that the two half hexagonal clamps 310 release the lock nut 200 and no longer clamp the lock nut 200.

[0048] 4) Use a wrench to reverse the screw structure carrier cover 360 to disengage the cover 360 from the valve body 100 thread.

[0049] 5) Continue to use the small wrench to fine-tighten the lock nut 200 to the tightest position.

[0050] Through the above-described operation, this invention ensures that the lock nut 200 is fully aligned with the valve hole 110 after the forward rotation of the pressure cap 360 is completely tightened with the thread of the valve body 110, while also ensuring that the lock nut 200 can be easily screwed in. Moreover, due to the self-locking nature of the threads of the pressure cap 360, it will not spring back due to the elastic force of the spring 120. When the pressure cap 360 is reversed, and the rotating disk 331 reverses to loosen the engagement between the semi-hexagonal clamp 310 at the lower part of the pressure cap 360 and the lock nut 200, the lock nut 200 will not be screwed out when the pressure cap 360 is reversed.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A pressure reducing valve assembly fixture, characterized in that, include: The gland (360) has a hollow structure, and the inner wall of the hollow structure is provided with internal threads to mate with the external threads of the upper edge of the valve body (100). Two semi-hexagonal clamps (310) are installed in the hollow structure of the gland (360) via a screw structure and extend to the top of the valve body (100) to clamp the lock nut (200) to be installed. A lead screw structure is set on the top of the pressure cap (360). The lead screw structure drives the two half hexagonal clamps (310) to adjust their positions and transmits the clamping force to the two half hexagonal clamps (310).

2. The pressure reducing valve assembly fixture as described in claim 1, characterized in that, The lead screw structure includes a nut (320), a lead screw (330), a slider (340), and a guide rail (350); The lead screw (330) spans the upper part of the hollow structure of the pressure cap (360), and both ends of the lead screw (330) are set on the pressure cap (360); A guide rail (350) is provided on each side of the lead screw (330), and the guide rail (350) is fixed to the top of the pressure cover (360); Two nuts (320) are provided on the lead screw (330), and a half hexagonal clamp (310) is fixedly provided at the bottom of each nut (320); Each half hexagonal clip (310) has a slider (340) on both sides, and the slider (340) is slidably mounted on the guide rail (350).

3. The pressure reducing valve assembly fixture as described in claim 2, characterized in that, The threads of the two nuts (320) are in opposite directions, and the threads of the two sections of the lead screw (330) are in opposite directions.

4. The pressure reducing valve assembly tooling as described in claim 2, characterized in that, A rotating disk (331) is provided at one end of the lead screw (330), which drives the two nuts (320) to move relative to each other or in opposite directions.

5. The pressure reducing valve assembly tooling as described in claim 2, characterized in that, A bearing seat (370) is fixedly installed on the pressure cap (360), and the two ends of the lead screw (330) are respectively mounted on the bearing seat (370) through bearings.

6. The pressure reducing valve assembly fixture as described in claim 2, characterized in that, Two guide rails (350) are respectively straddling the upper and lower ends of the hollow structure of the cover (360), and both ends of each guide rail (350) are fixed on the cover (360).

7. The pressure reducing valve assembly tooling as described in claim 1, characterized in that, The outer edge of the cap (360) has a hexagonal structure.

8. The pressure reducing valve assembly tooling as described in claim 1, characterized in that, The outer edge of the semi-internal hexagonal clip (310) adopts an arc-shaped structure, which corresponds to the inner arc surface of the hollow structure of the cap (360).

9. The pressure reducing valve assembly tooling as described in claim 1, characterized in that, The structure of the semi-internal hexagonal clip (310) is that it has an upper step that snaps onto the upper surface of the lock nut (200).

10. The pressure reducing valve assembly tooling as described in claim 1, characterized in that, The inner diameter of the hollow structure of the gland (360) is matched with the outer diameter of the upper part of the valve body (100).

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