Air inlet assembly of EFEM equipment

Abstract

The utility model discloses an air inlet assembly of EFEM equipment, which comprises an equipment body, and at least one group of air inlet assembly is arranged at an air inlet of the equipment body; the air inlet assembly comprises a shell; the shell is arranged on the outer side of the air inlet; a filter is arranged on one side of the shell; the shell, the filter and the air inlet form a volume cavity; a fan and a temperature adjusting part are arranged on the inner side of the volume cavity; the temperature adjusting part and the filter are additionally arranged at the air inlet of the EFEM equipment, so that the air pressure in the working cavity of the EFEM equipment is reduced while further temperature control and tiny dust filtration can be realized, the fan is additionally arranged to enable the EFEM equipment to meet the working requirements, and the air inlet assembly is arranged on the outer side of the EFEM equipment, so that the EFEM equipment is convenient to mount or dismount.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment, and in particular to an air intake component for EFEM equipment. Background Technology

[0002] In chip manufacturing, EFEM (Equipment Front End Module) equipment is required, especially plasma etching machines, which are commonly used in chip manufacturing. In the chip manufacturing process, plasma etching machines are mainly used for precise etching of semiconductor materials. Through the physical and chemical reactions between plasma and the material surface, unwanted parts are removed, thereby enabling the transfer of complex circuit patterns and the shaping of microstructures on the chip. Typically, EFEM equipment participates in chip manufacturing, and the working environment is a cleanroom. Currently, the temperature and dust levels inside the EFEM equipment's working chamber can only reach the same range and composition as the overall cleanroom environment. This is due to the characteristics and limitations of its existing environmental control mechanisms.

[0003] Although the cleanroom as a whole has created a relatively clean and stable temperature and humidity environment, the working chamber of the EFEM equipment does not have more refined environmental control measures that are independent of the larger environment. However, the working chamber of the EFEM equipment may still generate additional micro-dust particles during material transfer and equipment operation. Furthermore, it is impossible to filter and remove these internally generated micro-dust particles more efficiently. It can only maintain a micro-dust composition state similar to that of the cleanroom environment, making it difficult to further reduce the concentration of micro-dust or remove specific types of micro-impurities. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an air intake component for EFEM equipment.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: an air inlet assembly for an EFEM device, comprising:

[0006] Equipment body,

[0007] At least one set of air intake components is provided at the air inlet of the device body;

[0008] The air intake assembly includes:

[0009] case;

[0010] The housing is located on the outside of the air inlet;

[0011] A filter is provided on one side of the housing;

[0012] The housing, the filter, and the air inlet form a volumetric cavity;

[0013] A fan and a temperature control device are installed inside the volumetric cavity.

[0014] As a further description of the above technical solution: the housing includes a connecting part and a mounting part, the connecting part is a rectangular frame, and handles are provided on both end faces of the connecting part.

[0015] As a further description of the above technical solution: the mounting part is located on the side away from the device body, and limit grooves are provided on both sides of the mounting part, and the filter is located inside the limit grooves.

[0016] As a further description of the above technical solution: the size of the mounting part is larger than the size of the connecting part, and the size of the filter is larger than the size of the connecting part.

[0017] As a further description of the above technical solution: the air inlet extends into the inner side of the device body to form a recess, and the temperature regulating component is disposed in the recess.

[0018] As a further description of the above technical solution: the temperature regulating element is a thermocouple or a heating resistor.

[0019] As a further description of the above technical solution: the fan is located inside the housing and is installed at the end face of the equipment body.

[0020] As a further description of the above technical solution: the fan is located below the air inlet.

[0021] As a further description of the above technical solution: two fans are provided on the inner side of the housing, and the number of fans is the same as the number of temperature regulating components.

[0022] As a further description of the above technical solution: the air intake assembly is provided in two sets.

[0023] The above technical solution has the following advantages or beneficial effects:

[0024] Temperature control components and filters have been added to the air inlet of the EFEM equipment to achieve further temperature control. While filtering out fine dust, the air pressure inside the working chamber of the EFEM equipment will be reduced. A fan has been added to meet the working requirements. The air inlet components are located on the outside of the EFEM equipment for easy installation or disassembly. Attached Figure Description

[0025] Figure 1 This is a perspective view of the main body of the device in this utility model;

[0026] Figure 2This is a schematic diagram of the air intake assembly proposed in this utility model;

[0027] Figure 3 This is a front view structural diagram of the air intake component proposed in this utility model;

[0028] Figure 4 for Figure 3 Sectional view at point A in the middle.

[0029] Legend:

[0030] 1. Equipment body; 2. Housing; 21. Connecting part; 22. Mounting part; 23. Handle; 24. Limiting groove; 3. Air inlet; 4. Filter; 5. Fan; 6. Temperature control component. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Reference Figures 1-4 An embodiment of this utility model provides an EFEM equipment air intake assembly, comprising: an equipment body 1, at least one set of air intake assemblies being provided at the air inlet of the equipment body 1; the air intake assembly comprising: a housing 2; the housing 2 being disposed outside the air inlet 3; a filter 4 being disposed on one side of the housing 2; the housing 2, the filter 4 and the air inlet 3 forming a volumetric cavity; a fan 5 and a temperature regulating component 6 being disposed inside the volumetric cavity.

[0033] In this embodiment, a temperature regulating component 6 and a filter 4 are added to the air inlet of the device body 1 to achieve further temperature control. While filtering micro-dust, the air pressure in the working chamber of the device body 1 will be reduced. A fan 5 is added to one side of the air inlet 3 to meet the working requirements. The air inlet assembly is set on the outside of the device body 1 for easy installation or disassembly.

[0034] The housing 2 includes a connecting part 21 and a mounting part 22. The connecting part 21 is a rectangular frame, and handles 23 are provided on both end faces of the connecting part 21.

[0035] In this embodiment, the device is installed with the device body 1 via the connecting part 21, and the handle 23 facilitates installation and disassembly.

[0036] The mounting part 22 is located on the side away from the device body 1, and the mounting part 22 is provided with limit grooves 24 on both sides, and the filter 4 is located inside the limit grooves 24.

[0037] In this embodiment, the filter 4 is assembled with the mounting part 22. Limiting grooves 24 are provided on both sides of the mounting part 22. The two ends of the filter 4 are placed inside the limiting grooves 24. After filtering the air, it is delivered to the equipment body 1 to further filter the air in the clean room, reduce the amount of dust entering the inside of the equipment body 1, and improve the stability of the quality of the produced products.

[0038] The size of the mounting part 22 is larger than the size of the connecting part 21, and the size of the filter 4 is larger than the size of the connecting part 21.

[0039] In this embodiment, the size of the filter 4 is larger than the size of the connection part 21, so that the air can be filtered sufficiently.

[0040] The air inlet 3 extends into the inner side of the equipment body 1, forming a recess, and the temperature regulating element 6 is set in the recess; the temperature regulating element 6 is a thermocouple or a heating resistor.

[0041] In this embodiment, the air inlet 3 is a rectangular grid-shaped partition that is recessed inward. The temperature regulating component 6 is set in the recess, which optimizes the space occupied by the air inlet assembly and does not affect the maintenance and repair of the equipment body 1.

[0042] During temperature control, the device is closer to the inside of the main body 1, which allows for more accurate temperature monitoring. Temperature control can be achieved through the device's own control system.

[0043] The fan 5 is located inside the housing 2 and installed at the end face of the equipment body 1; the fan 5 is located below the air inlet 3; two fans 5 are provided inside the housing 2, and the number of fans 5 is the same as the number of temperature regulating components 6; two sets of air inlet components are provided.

[0044] In this embodiment, by setting up a fan 5 to draw in air, and because a filter 4 is set up, the equipment body 1 will be in a negative pressure environment when filtering the air, which will not meet the working requirements of the equipment body 1. Therefore, four centrifugal fans are added to regulate the air pressure.

[0045] In this embodiment, the control system of the device body 1 controls the fan 5 and the temperature regulating component 6 to work, and adjusts the wind speed and temperature so that the working chamber of the device body 1 reaches a more suitable temperature, temperature difference and wind pressure.

[0046] All standard parts used in this embodiment can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0047] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An air inlet assembly for an EFEM device, characterized in that, include: Equipment body (1), At least one set of air intake components is provided at the air inlet of the device body (1); The air intake assembly includes: Shell (2); The housing (2) is located outside the air inlet (3); A filter (4) is provided on one side of the housing (2); The housing (2), the filter (4), and the air inlet (3) form a volumetric cavity; A fan (5) and a temperature regulating component (6) are provided on the inner side of the volumetric cavity.

2. The air intake assembly according to claim 1, characterized in that: The housing (2) includes a connecting part (21) and a mounting part (22). The connecting part (21) is a rectangular frame, and handles (23) are provided on both end faces of the connecting part (21).

3. The air intake assembly according to claim 2, characterized in that: The mounting part (22) is located on the side away from the device body (1), and the mounting part (22) has limit grooves (24) on both sides, and the filter (4) is located inside the limit grooves (24).

4. The air intake assembly according to claim 2, characterized in that: The size of the mounting part (22) is larger than the size of the connecting part (21), and the size of the filter (4) is larger than the size of the connecting part (21).

5. The air intake assembly according to claim 1, characterized in that: The air inlet (3) extends into the inside of the equipment body (1) to form a recess, and the temperature regulating component (6) is disposed in the recess.

6. The air intake assembly according to claim 1, characterized in that: The temperature regulating element (6) is a thermocouple or a heating resistor.

7. The air intake assembly according to claim 1, characterized in that: The fan (5) is located inside the housing (2) and is installed on the end face of the equipment body (1).

8. The air intake assembly according to claim 1, characterized in that: The fan (5) is located below the air inlet (3).

9. The air intake assembly according to claim 1, characterized in that: Two fans (5) are provided on the inner side of the housing (2), and the number of fans (5) is the same as the number of temperature regulating components (6).

10. The air intake assembly according to claim 1, characterized in that: The air intake assembly is provided in two sets.

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