Silicon wafer cache acceleration mechanism

Abstract

The utility model discloses a silicon wafer cache acceleration mechanism, which comprises a back plate and two bearing baskets, two ends of the back plate are fixedly connected with side plates, a screw rod is movably connected between the two side plates, one side of one side plate is provided with a power part for driving the screw rod to rotate, the outer side of the screw rod is movably connected with a first sliding frame, and the first sliding frame is provided with a second sliding frame. A sliding rod is fixedly connected between the bottoms of the two side plates, a second sliding frame is movably connected to the outer side of the sliding rod, connecting plates are fixedly connected to the top of the second sliding frame and the bottom of the first sliding frame, a plurality of second fixing strips are fixedly connected to the surfaces of the connecting plates, and T-shaped grooves are formed in the second fixing strips; the outer wall of the top and the outer wall of the bottom of the bearing basket are each fixedly connected with two first fixing strips. According to the utility model, the silicon wafers can be conveniently and efficiently filled, the working time is saved, and the bearing basket can be conveniently dismounted and mounted.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer caching technology, and in particular to a silicon wafer caching speed-up mechanism. Background Technology

[0002] Silicon wafers are single crystals of silicon, which are crystals with a basically complete lattice structure. Different directions have different properties, making them a good semiconductor material.

[0003] During its processing, it needs to be inserted into a carrying basket for storage. After a carrying basket is full, it needs to wait for a robotic arm to replace it. This process consumes a lot of time and greatly reduces the efficiency of the device. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a silicon wafer cache acceleration mechanism.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A silicon wafer cache acceleration mechanism includes a back plate and two support baskets. Side plates are fixedly connected to both ends of the back plate, and a lead screw is movably connected between the two side plates. One side plate has a power component that drives the lead screw to rotate. A first slide is movably connected to the outer side of the lead screw. A slide rod is fixedly connected between the bottoms of the two side plates, and a second slide rod is movably connected to the outer side of the slide rod. A connecting plate is fixedly connected to the top of the second slide rod and the bottom of the first slide rod. Multiple second fixing strips are fixedly connected to the surface of the connecting plate, and T-slots are formed inside the second fixing strips. Two first fixing strips are fixedly connected to the top and bottom outer walls of the support baskets, and T-slots are slidably connected to one side of the two first fixing strips. Two first vertical plates are fixedly connected between the upper and lower connecting plates, and a detachable fixing assembly is provided between the support baskets and the first vertical plates.

[0007] As a further embodiment of this utility model, the power component is a motor, which is fixed to one side of the side plate by bolts, and one end of the motor output shaft is fixed to the lead screw.

[0008] As a further embodiment of this utility model, the fixing component includes a first magnetic block, which is fixed to one side of the first vertical plate by bolts. A second vertical plate is fixedly connected to one side of the bearing basket, and a second magnetic block is fixedly connected to the back of the second vertical plate.

[0009] As a further embodiment of this invention, the first magnetic block is in contact with the second magnetic block.

[0010] As a further embodiment of this utility model, a reinforcing block is fixedly connected to one side of the side plate, and the reinforcing block is fixed to the outer shell of the motor.

[0011] As a further embodiment of this utility model, the back plate is fixedly connected to a plurality of fixing ears.

[0012] The beneficial effects of this utility model are as follows:

[0013] 1. In this utility model, two carrying baskets facilitate efficient filling of silicon wafers, enabling the device to operate continuously, saving working time, avoiding the waste of time caused by waiting to replace silicon wafers when they are full, and improving the working efficiency of the device.

[0014] 2. In this utility model, the cooperation of the first magnetic block and the second magnetic block makes the carrying basket stably fixed on the device, and at the same time facilitates the disassembly and replacement of the carrying basket by the robot arm, thereby improving the use effect of the device. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the silicon wafer cache acceleration mechanism proposed in this utility model;

[0016] Figure 2 The silicon wafer cache acceleration mechanism proposed in this utility model Figure 1 A partially enlarged structural diagram;

[0017] Figure 3 The silicon wafer cache acceleration mechanism proposed in this utility model Figure 2 A partially enlarged structural diagram;

[0018] Figure 4 This is a schematic diagram of the back structure of the support basket of the silicon wafer cache acceleration mechanism proposed in this utility model.

[0019] In the diagram: 1. Side plate; 2. Back plate; 3. Motor; 4. Lead screw; 5. Bearing basket; 6. First slide; 7. Second slide; 8. Connecting plate; 9. First fixing strip; 10. T-shaped strip; 11. Second fixing strip; 12. T-slot; 13. Slide rod; 14. First vertical plate; 15. Second vertical plate; 16. First magnet; 17. Second magnet. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. The described embodiments are only some embodiments of the present utility model, not all embodiments. Other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are all within the protection scope of the present utility model.

[0021] Reference Figures 1-4 The silicon wafer cache acceleration mechanism includes a back plate 2 and two support baskets 5. Side plates 1 are integrally formed at both ends of the back plate 2. A lead screw 4 is rotatably connected between the two side plates 1. One side plate 1 has a power component that drives the lead screw 4 to rotate. A first slide 6 is threadedly connected to the outer side of the lead screw 4. A slide rod 13 is bolted between the bottoms of the two side plates 1. A second slide 7 is slidably connected to the outer side of the slide rod 13. A connecting plate 8 is bolted to the top of the second slide 7 and the bottom of the first slide 6. Multiple second fixing strips 11 are bolted to the surface of plate 8. T-slots 12 are formed inside the second fixing strips 11. Two first fixing strips 9 are bolted to the top and bottom outer walls of the carrying basket 5. A T-slot 10 is bolted to one side of each of the two first fixing strips 9, and the T-slot 12 is slidably connected to the T-slot 10. The cooperation between the T-slot 12 and the T-slot 10 allows the carrying basket 5 to move stably and facilitates the positioning and installation of the carrying basket 5 by the robotic arm. Two first vertical plates 14 are fixed between the connecting plates 8 by bolts. A detachable fixing component is provided between the carrying basket 5 and the first vertical plates 14. First, the device is fixed to the external lifting device and the device is aligned with the end of the conveyor belt. At this time, the carrying basket 5 away from the power component docks with the conveyor belt. The conveyor belt conveys the silicon wafers into the slots of the carrying basket 5. The external lifting device drives the entire device to move upward, so that the conveyor belt conveys the silicon wafers to different slot positions of the carrying basket 5 until the carrying basket 5 is full of silicon wafers. Then, the power component drives the lead screw 4 to move the first slide 6, so that the carrying basket 5 moves to the right along the slide rod 13 via the second slide 7, so that the carrying basket 5 near the power component docks with the conveyor belt. The above operation is repeated until the carrying basket 5 is full of silicon wafers. During the process of loading silicon wafers into this carrying basket 5, the robot pulls the carrying basket 5 away from the motor 3, so that the T-shaped strip 10 slides along the T-shaped groove 12 until the T-shaped strip 10 separates from the T-shaped groove 12, thus completing the disassembly of the carrying basket 5 for easy replacement.

[0022] In this utility model, it should be noted that the power component is a motor 3, which is fixed to one side of the side plate 1 by bolts. One end of the output shaft of the motor 3 is fixed to the lead screw 4. The rotation of the motor 3 causes the lead screw 4 to rotate. The fixing component includes a first magnetic block 16, which is fixed to one side of the first vertical plate 14 by bolts. A second vertical plate 15 is fixed to one side of the carrying basket 5 by bolts. A second magnetic block 17 is fixed to the back of the second vertical plate 15 by bolts. The first magnetic block 16 and the second magnetic block 17 are in contact. Through the cooperation of the first magnetic block 16 and the second magnetic block 17, the carrying basket 5 is stably fixed between the connecting plates 8, and at the same time, it is convenient for the robot to disassemble the carrying basket 5. A reinforcing block is fixed to one side of the side plate 1 by bolts, and the reinforcing block is fixed to the outer shell of the motor 3. The reinforcing block makes the connection between the motor 3 and the side plate 1 more secure. Multiple fixing ears are fixed to the back of the back plate 2 by bolts.

[0023] The working principle of this utility model is as follows: First, the device is fixed on the external lifting device and aligned with the end of the conveyor belt. At this time, the carrying basket 5 away from the motor 3 is connected to the conveyor belt. The conveyor belt transports the silicon wafers into the slots of the carrying basket 5. The external lifting device drives the entire device to move upward, thereby allowing the conveyor belt to transport the silicon wafers to different slot positions in the carrying basket 5 until the carrying basket 5 is full of silicon wafers. Then, the motor 3 is started. The rotation of the motor 3 causes the lead screw 4 to move the first slide 6, thereby allowing the carrying basket 5 to move to the right along the slide rod 13 via the second slide 7, thereby allowing the carrying basket 5 near the motor 3 to connect with the conveyor belt. The above operation is repeated until this carrying basket 5 is full of silicon wafers. During the process of loading silicon wafers into this carrying basket 5, the external robotic arm pulls the carrying basket 5 away from the motor 3, causing the T-shaped strip 10 to slide along the T-shaped groove 12 until the T-shaped strip 10 separates from the T-shaped groove 12. At the same time, the second magnetic block 17 separates from the first magnetic block 16, thereby completing the disassembly of the carrying basket 5 for easy replacement.

[0024] Furthermore, the terms "installation," "setup," "connection," and "socketing" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral constructions; they can refer to mechanical or electrical connections; they can refer to direct connections or indirect connections via an intermediate medium, or internal connections between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

Claims

1. A silicon wafer cache acceleration mechanism, comprising a back plate (2) and two support baskets (5), wherein side plates (1) are fixedly connected to both ends of the back plate (2), characterized in that, A lead screw (4) is movably connected between the two side plates (1). One side plate (1) is provided with a power component that drives the lead screw (4) to rotate. A first slide (6) is movably connected to the outer side of the lead screw (4). A slide rod (13) is fixedly connected between the bottoms of the two side plates (1). A second slide (7) is movably connected to the outer side of the slide rod (13). A connecting plate (8) is fixedly connected to the top of the second slide (7) and the bottom of the first slide (6). Multiple connecting plates (8) are fixedly connected to the surface of the connecting plate (8). The second fixing strip (11) has a T-shaped groove (12) inside. The top and bottom outer walls of the carrying basket (5) are fixedly connected to two first fixing strips (9). A T-shaped strip (10) is fixedly connected to one side of the two first fixing strips (9), and the T-shaped groove (12) and the T-shaped strip (10) are slidably connected. Two first vertical plates (14) are fixedly connected between the upper and lower connecting plates (8). A detachable fixing component is provided between the carrying basket (5) and the first vertical plate (14).

2. The silicon wafer cache acceleration mechanism according to claim 1, characterized in that, The power component is a motor (3), which is fixed to one side of the side plate (1) by bolts, and one end of the output shaft of the motor (3) is fixed to the lead screw (4).

3. The silicon wafer cache acceleration mechanism according to claim 1, characterized in that, The fixing assembly includes a first magnetic block (16), which is fixed to one side of the first vertical plate (14) by bolts. A second vertical plate (15) is fixedly connected to one side of the bearing basket (5), and a second magnetic block (17) is fixedly connected to the back of the second vertical plate (15).

4. The silicon wafer cache acceleration mechanism according to claim 3, characterized in that, The first magnetic block (16) is in contact with the second magnetic block (17).

5. The silicon wafer cache acceleration mechanism according to claim 2, characterized in that, A reinforcing block is fixedly connected to one side of the side plate (1), and the reinforcing block is fixed to the outer shell of the motor (3).

6. The silicon wafer cache acceleration mechanism according to claim 1, characterized in that, The back plate (2) is fixedly connected to a number of fixing ears on its back.

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