Leakage monitoring and filtering device

By introducing a monitoring device into the filtration unit to monitor changes in the color or other properties of the leaking medium, the problem of low leakage monitoring efficiency in semiconductor cleaning equipment is solved, enabling timely detection and handling of leaks.

CN223846455UActive Publication Date: 2026-01-30ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202520435753.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-12
Publication Date
2026-01-30
Estimated Expiration
2035-03-12

AI Technical Summary

Technical Problem

The filtration devices in existing semiconductor cleaning equipment have leakage problems and low leakage detection efficiency, especially since it is difficult to detect leaks of small amounts of colorless and transparent liquid with the naked eye.

Method used

A leakage monitoring and filtration device was designed, including a housing, an end cap, and a monitoring element. The monitoring element is located on the outer wall of the housing and is used to detect the leaking medium. It monitors leakage by color change or other characteristic changes, thereby improving the leakage monitoring efficiency.

Benefits of technology

Effective monitoring of filtration device leakage improves the efficiency of leakage monitoring, enabling timely detection and handling of leaks and preventing media contamination.

✦ Generated by Eureka AI based on patent content.

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Abstract

A leakage monitoring and filtering device comprises: a housing; the end cover is fixedly arranged outside the first end of the shell, and the end cover is used for blocking a port of the first end of the shell; and the monitoring part is located on the outer side wall of the first end of the shell and used for monitoring a leaked medium located on the outer side wall of the first end of the shell. By the adoption of the leakage monitoring and filtering device, the leakage monitoring efficiency can be improved.
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Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor manufacturing, and particularly relates to a leakage monitoring filtering device. BACKGROUND

[0002] Filtering devices are important equipment for separating solids from fluids or particles of different sizes, and are widely used in many fields. Common filtering devices include screen type, filter core type, vacuum filtration type, etc. The screen type intercepts larger particles through metal or plastic screens; the filter core type removes smaller impurities, even bacteria and other microorganisms, by relying on filter cores made of specific materials such as activated carbon and ceramics; and the vacuum filtration type uses the principle of negative pressure to make the liquid pass through the filter medium and retain the solid particles. These filtering devices can effectively remove impurities in water, dust in air, or perform operations such as raw material purification in chemical and pharmaceutical industries, to ensure the purity and quality of substances required for production and life.

[0003] In a semiconductor cleaning device, a filter core type filtering device is usually used to filter cleaning liquid. However, in the actual process of filtering the cleaning liquid, the filtering device has the problems of leakage and low leakage monitoring efficiency. Therefore, how to provide a technical solution to improve the leakage monitoring efficiency of the filtering device has become a technical problem that needs to be solved by those skilled in the art. CONTENT OF THE INVENTION

[0004] Therefore, the present disclosure provides a leakage monitoring filtering device, which can monitor the leakage of the filtering device and improve the leakage monitoring efficiency of the filtering device.

[0005] To solve the above technical problems, the present disclosure provides a leakage monitoring filtering device, which comprises a housing, an end cover, and a monitoring member. The end cover is fixedly arranged at the first end of the housing and is used to block the first end port of the housing. The monitoring member is located at the outer side wall of the first end of the housing and is used to monitor the leaked medium located at the outer side wall of the first end of the housing.

[0006] Optionally, the first end of the housing has a first connecting area, and the end cover has a second connecting area. The first connecting area of the housing is screwed with the second connecting area of the end cover.

[0007] Optionally, the housing further has a monitoring area located on the side of the first connecting area away from the first end port of the housing. The monitoring member is fixedly arranged at the outer side wall of the monitoring area.

[0008] Optionally, the housing further has a collecting part located on the side of the monitoring area away from the first end port of the housing and adjacent to the monitoring area, and used to collect the leaked medium.

[0009] Optionally, the outer diameter of the collection part is greater than the outer diameter of the monitoring area.

[0010] Optionally, the end cover has a collection area located on the side of the second connecting area away from the main part of the end cover; wherein the end of the monitoring member away from the first connecting area is located in the area surrounded by the collection area, and has a radial gap with the collection area.

[0011] Optionally, the inner diameter of the end of the collection area adjacent to the second connecting area is less than or equal to the inner diameter of the end away from the second connecting area.

[0012] Optionally, the collection area is a ring structure composed of transparent material.

[0013] Optionally, the monitoring member contains test paper, the kind of which is adapted to the leaked medium and can change color after contacting the leaked medium.

[0014] Optionally, the outer side wall of the first end of the end cover has a plurality of protrusions and / or recesses, including at least one of the following: a plurality of protrusions, each protrusion being arranged on the outer side wall of the first end of the end cover along the circumference of the end cover; a plurality of recesses, each recess being arranged on the outer side wall of the first end of the end cover along the circumference of the end cover; a plurality of protrusions and a plurality of recesses, each protrusion and recess being arranged on the outer side wall of the first end of the end cover along the circumference of the end cover.

[0015] Compared with the prior art, the technical scheme of the embodiments of the present disclosure has the following advantages:

[0016] The leakage monitoring filter device provided by the embodiments of the present disclosure comprises a shell, an end cover and a monitoring member; the monitoring member is located on the outer side wall of the first end of the shell and is used to monitor the leaked medium located on the outer side wall of the first end of the shell; the end cover is fixedly arranged on the first end of the shell and is used to block the first end port of the shell; when the medium in the shell leaks from the first end port, the leaked medium flows through the monitoring member, which has the opportunity to change the monitoring member, such as color, wrinkle or other characteristics, to determine that the filter device has leaked, thereby improving the efficiency of the leakage monitoring of the filter device. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the following will briefly introduce the drawings needed to be used in the embodiments of the present disclosure or the prior art description. Obviously, the following described drawings are only some embodiments of the present disclosure, and other drawings can also be obtained by those skilled in the art without creating any creative labor.

[0018] Figure 1 is a structural schematic diagram of a filtering device;

[0019] Figures 2 to 5 is a structural schematic diagram of a leakage monitoring filtering device in an embodiment of the present disclosure;

[0020] Figures 6 to 9 is a structural schematic diagram of another leakage monitoring filtering device in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0022] As known from the background, in the actual filtering and cleaning process, the filtering device has the problems of leakage and low leakage monitoring efficiency. The reasons for the leakage and low leakage monitoring efficiency will be analyzed below.

[0023] Figure 1 is a structural schematic diagram of a filtering device.

[0024] The filtering device comprises a shell 100, a shell cover 101, and a filter core 102. The shell cover 101 is fixedly connected to one end 103 of the shell 100. The filter core 102 is arranged in the shell 100. After the to-be-filtered cleaning liquid is filtered by the filter core 102, the filtered cleaning liquid flows into the shell 100.

[0025] The filter core 102 needs to be replaced regularly. When the filter core 102 is replaced, the shell cover 101 needs to be detached from the one end 103 of the shell 100, a new filter core is arranged in the shell 100, and then the shell cover 101 is re-fixed to the one end 103 of the shell 100. However, the following problems exist: after the new filter core 102 is replaced for multiple times, the sealing performance between the shell cover 101 and the one end 103 of the shell 100 deteriorates, and the probability of leakage of the filtered cleaning liquid from between the shell cover 101 and the one end 103 of the shell 100 increases.

[0026] The above filtering device can only be monitored by naked eyes to determine whether there is leakage. However, for a small amount of cleaning liquid leakage, naked eyes cannot effectively monitor the leakage. Moreover, the smaller the amount of the leaked cleaning liquid (for example, a drop per few minutes or even per few tens of minutes) and the more transparent the cleaning liquid is, the more difficult it is for naked eyes to find the leakage, thereby reducing the leakage monitoring efficiency of the filtering device.

[0027] In the filtering device described above, there is a problem of low leakage monitoring efficiency in the filtering process.

[0028] To solve the above technical problems, the utility model discloses a kind of leakage monitoring filtering devices, which can improve the leakage monitoring efficiency of filtering device.

[0029] To make the above purposes, features and beneficial effects of the present disclosure more obvious and easy to understand, the specific embodiments of the present disclosure will be described in detail below with reference to the drawings.

[0030] The leakage monitoring filtering device described in the embodiments of the present disclosure comprises a housing, an end cover fixed to the first end of the housing, the end cover is used to block the first end port of the housing, a monitoring member located on the first end outer wall of the housing, used to monitor the leaked medium located on the first end outer wall of the housing.

[0031] When the medium in the housing leaks from the first end port during filtering of the leakage monitoring filtering device provided in the embodiments of the present disclosure, the leaked medium flows through the monitoring member, which has the opportunity to change the monitoring member, such as color, wrinkle or other characteristics, to determine that the filtering device leaks, thereby improving the efficiency of leakage monitoring of the filtering device.

[0032] It should be noted that the leakage monitoring filtering device in the embodiments of the present disclosure can be used for monitoring gas leakage, and can also be used for monitoring liquid leakage. For the convenience of description, the present application is described by taking liquid leakage as an example, but the present application is not limited thereto.

[0033] Reference Figures 2 to 5 The structure diagram of a leakage monitoring filtering device in the embodiments of the present disclosure is shown in the figure, wherein, Figure 2 The structure diagram of the housing 200 and the filter element 201 is shown in the figure, Figure 3 The structure diagram of the end cover 300 is shown in the figure, Figure 4 The structure diagram of the end cover 300 fixed to the housing 200 is shown in the figure, Figure 5 The space structure diagram of the collection part 210 is shown in the figure.

[0034] The leakage monitoring filtering device can comprise a housing 200.

[0035] The housing 200 is used to contain the liquid filtered by the filtering device, and also used to accommodate the filter element 201 of the filtering device.

[0036] The material of the shell 200 includes: metal material (such as stainless steel material, aluminum material, etc.) or corrosion-resistant plastic material (such as polycarbonate, electric polypropylene, acrylic, etc.); the shell 200 is a ring-shaped cylindrical structure, which includes any one of the following: a ring-shaped cylindrical structure, a ring-shaped elliptical cylindrical structure, a ring-shaped square cylindrical structure, etc. The material and specific ring-shaped cylindrical structure of the shell 200 are not limited in the embodiments of the present application, and those skilled in the art can adjust and set them according to actual conditions. In the embodiments, the material of the shell 200 is plastic material, and the shell 200 is a ring-shaped cylindrical structure.

[0037] With reference to Figures 2 to 4 , the shell 200 has a first end 202, and the first end 202 of the shell 200 has a first connecting area 203, which provides a position space for the connection of the shell 200 and the end cover 300.

[0038] With reference to Figure 2 , the first end 202 of the shell 200 has a port 204, which is connected with the filter element 201 of the filter device, and the unfiltered liquid flows to the filter element 201 through the port 204.

[0039] The shape of the port 204 includes one or more of the following: a circle, an ellipse, a square, and a triangle. In the embodiments, the shape of the port 204 is a circle.

[0040] With reference to Figure 2 , the shell 200 has a second end 205, and the second end 205 of the shell 200 has an opening 206 connected with a pipeline (not shown), and the liquid filtered by the filter element 201 flows to the pipeline through the opening 206.

[0041] The shape of the opening 206 includes one or more of the following: a circle, an ellipse, a square, and a triangle. In the embodiments, the shape of the opening 206 is a circle.

[0042] With reference to Figures 2 to 4 , the leakage monitoring filter device can include an end cover 300.

[0043] The end cover 300 is used to block the port 204 of the first end 202 of the shell 200, so as to reduce the probability of leakage of the liquid filtered by the filter element 201 through the port 204 of the first end 202 of the shell 200.

[0044] The end cover 300 has a second connecting area 301, and the end cover 300 is fixed outside the first end 202 of the shell 200. In this embodiment, the first connecting area 203 of the shell 200 is provided with a first thread 207, and the second connecting area 301 of the end cover 300 is provided with a second thread (not shown) on the inner wall of the first end 303 of the end cover 300. The first connecting area 203 of the shell 200 is screwed with the second connecting area 301 of the end cover 300, that is, the end cover 300 is fixed outside the first end 202 of the shell 200 through the first thread 207 and the second thread. In other embodiments, the end cover 300 is fixed outside the first end 202 of the shell 200 by means of glue or welding.

[0045] The material of the end cover 300 includes metal materials (such as stainless steel materials, aluminum materials, etc.) or corrosion-resistant plastic materials (such as polycarbonate, electric polypropylene, acrylic, etc.). The material of the end cover 300 is not limited in this embodiment, and those skilled in the art can adjust and set it according to the actual situation. In this embodiment, the material of the end cover 300 is a plastic material.

[0046] Continuing to refer to Figure 2 and Figure 3 , the end cover 300 includes an end cover opening 307.

[0047] The end cover opening 307 is used for the unfiltered liquid to flow to the port 204 through the end cover opening 307.

[0048] The outer side wall of the first end of the end cover has a plurality of protrusions and / or recesses, including at least one of the following: a plurality of protrusions, each protrusion being arranged on the outer side wall of the first end of the end cover along the circumference of the end cover; a plurality of recesses, each recess being arranged on the outer side wall of the first end of the end cover along the circumference of the end cover; and a plurality of protrusions and a plurality of recesses, each protrusion and recess being alternately arranged on the outer side wall of the first end of the end cover along the circumference of the end cover.

[0049] The outer side wall of the first end 303 of the end cover 300 has a plurality of protrusions 304 and / or recesses 305, so as to facilitate tightening the end cover 300 on the first end 202 of the shell 200 or loosening the end cover 300 from the first end 202 of the shell 200.

[0050] In this embodiment, the outer side wall of the first end 303 of the end cover 300 has a plurality of protrusions 304 and a plurality of recesses 305, each protrusion 304 and recess 305 being alternately arranged on the outer side wall of the first end 303 of the end cover 300 along the circumference of the end cover 300.

[0051] With reference to the above Figure 2 , the shell 200 further has a monitoring area 208.

[0052] The monitoring area 208 provides a position space for the monitoring member 209.

[0053] For the convenience of description, in the embodiment, the monitoring area 208 is a first monitoring area 208.

[0054] In the embodiment, the monitoring area 208 is located on the side of the first connecting area 203 away from the first end 202 port 204 of the shell 200, as shown in the figure. Figure 2

[0055] With reference to the above Figures 2 to 4 , the leakage monitoring filter device can include a monitoring member 209.

[0056] The monitoring member 209 is used to monitor the leaked medium located at the outer side wall of the first end 202 of the shell 200. The leaked medium is the medium in the shell 200 that leaks out through the first end 202 port 204.

[0057] It should be noted that the leaked medium includes liquid and gas. In the embodiment, the medium is liquid.

[0058] The monitoring member 209 is located at the outer side wall of the first end 202 of the shell 200, and the monitoring member 209 can also be fixed to the outer side wall of the monitoring area 208.

[0059] In the embodiment, the monitoring member 209 is fixed to the outer side wall of the monitoring area 208, which has the beneficial effect that it can monitor the medium leaking from the first end 202 port 204 and the medium leaking from the opening 307 of the end cover 300.

[0060] In the embodiment, the monitoring member 209 is fixed to the first monitoring area 208 by means of glue.

[0061] The monitoring member 209 includes test paper, and the type of the test paper is adapted to the leaked medium and can change color after contacting the leaked medium.

[0062] For example, the leaked medium is acidic medium, and the test paper includes:

[0063] Litmus paper, when acidic medium is dropped on blue litmus paper, the test paper will turn red, and the color change principle of this test paper is based on the characteristic that litmus indicator turns red when it encounters acid.

[0064] ​PH paper, when the acidic medium flows onto the PH paper, the PH paper changes color, indicating that the leakage monitoring filter device has a case of leaking medium.

[0065] For example, the leaked medium is an alkaline medium, and the test paper includes:

[0066] Phenolphthalein test paper, when the alkaline medium drops on the phenolphthalein test paper, the test paper will turn blue, and the color change principle of this test paper is based on the red color change of phenolphthalein indicator when it comes into contact with alkali.

[0067] PH paper, when the alkaline medium flows onto the PH paper, the PH paper changes color, indicating that the leakage monitoring filter device has a case of leaking medium.

[0068] For example, the leaked medium is a redox medium, and the test paper includes:

[0069] Starch potassium iodide test paper, used to detect oxidizing substances (such as Cl2, Br2, NO2, etc.), which turn blue when they come into contact with oxidizing agents.

[0070] Lead acetate test paper: used to detect hydrogen sulfide gas. When it comes into contact with H2S, the test paper turns black.

[0071] For example, the leaked medium is a neutral medium, and the test paper includes:

[0072] PH paper, when the neutral medium drops on the PH paper, the PH value is read and then compared with the standard colorimetric card.

[0073] In this embodiment, the monitoring member 209 can include a color monitor, a wrinkle monitor, and an alarm.

[0074] The color monitor includes one or more of a color difference meter, a spectrophotometer, and a color sensor. In this embodiment, the color monitor is a spectrophotometer.

[0075] When the spectrophotometer monitors the color change of the test paper, the alarm is triggered to prompt the leakage of the medium.

[0076] It should be noted that the monitoring member in this application is not limited to the above-mentioned various test papers, but can also be other objects that can monitor the leakage of the medium, such as a wrinkle monitor. Specifically, the wrinkle monitor can be a cellulose-based hydrogel and / or a polyacrylic acid (PAA) hydrogel, which has the characteristics of shrinking in a dehydrated state and swelling in a water-absorbed state. When the wrinkle monitor monitors the shrinkage or swelling of the test paper, the alarm is triggered to prompt the leakage of the medium.

[0077] Continuing to refer to Figures 2 to 5 , the shell 200 also has a collection part 210.

[0078] The collection unit 210 is used to collect the leaked medium. In this embodiment, the collection unit 210 is used to collect the leaked liquid.

[0079] In this embodiment, the collecting part 210 is located on the side of the monitoring area 208 away from the first end 202 port 204 of the housing 200, and is adjacent to the monitoring area 208.

[0080] In this embodiment, the outer diameter d1 of the collection part 210 is larger than the outer diameter d2 of the monitoring area 208, which has the following beneficial effects: the collection part 210 can have a certain space, which can collect the medium leaking from the port 204 of the first end 202, as well as the medium leaking from the opening 307 of the end cover 300, thus preventing the leaked medium from polluting the environment.

[0081] The material of the collecting part 210 includes: metal (such as stainless steel, aluminum, etc.) or corrosion-resistant plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.). The collecting part 210 is a hollow annular cylindrical structure, which includes any of the following: a hollow annular cylindrical structure, a hollow annular elliptical cylindrical structure, a hollow annular square cylindrical structure, etc. This application embodiment does not limit the material and shape of the collecting part 210; those skilled in the art can adjust the setting according to actual conditions. In this embodiment, the material of the collecting part 210 is plastic; preferably, the material of the collecting part 210 is transparent plastic, and the shape of the collecting part 210 is a hollow annular cylindrical structure.

[0082] like Figure 5 As shown, the hollow annular cylindrical structure has an inner surface 400, an outer surface 401, and a bottom surface 402. The hollow area enclosed by the inner surface 400, the outer surface 401, and the bottom surface 402 is used to contain the leaked medium.

[0083] In this embodiment, the collecting part 210 is integrally formed with the housing 200. In other embodiments, the collecting part 210 is installed on the housing 200 by means of installation.

[0084] The bottom surface 402 of the collection section 210 has a bottom opening 403, which is connected to the waste liquid pipe (not shown). The leaked medium in the collection section 210 flows into the waste liquid pool through the bottom opening 403 and the waste liquid pipe.

[0085] In other embodiments, the monitoring element 209 may also be disposed on the bottom surface 402 of the collecting part 210.

[0086] refer to Figures 6 to 9Fig. 2 is a structural schematic diagram of another leakage monitoring filter device in the embodiments of the present disclosure, wherein Figure 6 Fig. 3 is a structural schematic diagram of an inverted structure of the shell 200 and the filter core 201, Figure 7 Fig. 4 is a structural schematic diagram of the end cover 600, Figure 8 Fig. 5 is a structural schematic diagram of the end cover 300 fixed on the shell 200, Figure 9 Fig. 6 is a spatial structural schematic diagram of the collection area 601.

[0087] The leakage monitoring filter device can further include a second monitoring area 500. Figure 8 The second monitoring area 500 is configured to provide a position space for the monitoring member 209. Figure 4 It can be seen that the present embodiment is different from the foregoing embodiments in two aspects. First, the position relationship between the shell 200 and the end cover 300 in the present embodiment is different. Second, the structure of the collection area 601 in the present embodiment is different. For the sake of simplicity and clarity of the drawings, the structural schematic diagram of the leakage monitoring filter device in the foregoing embodiments is used as the basis for the present embodiment, which does not limit the present disclosure.

[0088] Referring to Figures 6 to 8 , the shell 200 is located above the end cover 300, and the end cover 600 is fixed on the first end 202 of the shell 200.

[0089] In the present embodiment, the shell 200 has a first end 202 and a first connecting area 203, and the end cover 600 has a second connecting area 301. The first connecting area 203 of the shell 200 is provided with a first thread 207, and the second connecting area 301 of the end cover 600 is provided with a second thread (not shown) on the inner wall of the first end 306 of the end cover 600. The first connecting area 203 of the shell 200 is screwed with the second connecting area 301 of the end cover 600, that is, the end cover 600 is fixed on the first end 202 of the shell 200 through the first thread 207 and the second thread. In other embodiments, the end cover 600 is fixed on the first end 202 of the shell 200 by means of glue or welding.

[0090] Continuing to refer to Figure 6 and Figure 8 , the leakage monitoring filter device can include a second monitoring area 500. The second monitoring area 500 is configured to provide a position space for the monitoring member 209.

[0091] As shown in Figure 6 , in the present embodiment, the second monitoring area 500 is located on the side of the first connecting area 203 away from the first end 202 port 204 of the shell 200.

[0092] Continuing to refer to Figures 7 to 8 , the end cover 600 of the present embodiment can include a collection area 601.

[0093] The collection region 601 is used for collecting leaked medium. In the embodiment, the collection region 601 is used for collecting leaked liquid.

[0094] With reference to Figures 7 to 8 , the collection region 601 is located on the side of the second connecting region 301 away from the body part 302 of the end cover 600.

[0095] With reference to Figure 6 and Figure 8 , the end of the monitoring member 209 away from the first connecting region 203 is located in the region surrounded by the collection region 601. In the embodiment, the monitoring member 209 is located at the second monitoring region 500, which is located in the region surrounded by the collection region 601, that is, the monitoring member 209 is located in the region surrounded by the collection region 601.

[0096] With reference to Figure 8 and Figure 9 , the region surrounded by the collection region 601, that is, the hollow truncated cone (also known as a circular truncated cone) obtained by rotating the line segment AC around the axis L for one revolution, has a trapezoidal ACCA cross section in the Y direction, and the axis L is the axis of the shell 200 in the Y direction.

[0097] It should be noted that the monitoring member 209 can be partially or entirely located in the region surrounded by the collection region 601.

[0098] The inner diameter of the end of the collection region adjacent to the second connecting region is less than or equal to the inner diameter of the end away from the second connecting region. With reference to Figure 7 and Figure 9 , in the embodiment, the inner diameter d3 of the end of the collection region 601 adjacent to the second connecting region 301 is less than the inner diameter d4 of the end away from the second connecting region 301, thereby providing a space for accommodating leaked medium.

[0099] With reference to Figure 8 , the monitoring member 209 has a radial gap with the collection region 601.

[0100] In the embodiment, the monitoring member 209 and the collection region 601 surround a radial gap 700, and the radial gap 700 is used for collecting leaked liquid.

[0101] With reference to Figures 7 to 9 , the collection region 601 is a ring structure made of transparent material.

[0102] ​The transparent material of the collection area 601 comprises one or more of polycarbonate, electric polypropylene and acrylic. In this embodiment, the transparent material of the collection area 601 is acrylic.

[0103] The bottom surface 802 of the annular structure is connected with the end cover 600, and the side surface 801 of the annular structure is coplanar with the side wall 803 of the end cover 600 in the Y direction.

[0104] With reference to the foregoing description of the embodiment, Figure 9 The annular structure is obtained by rotating a right-angled triangle ABC around the axis L.

[0105] In this embodiment, the collection area 601 is integrally formed with the shell 200.

[0106] For other descriptions of the leakage monitoring filter device in this embodiment, reference can be made to the descriptions in the foregoing embodiments, which will not be described herein.

[0107] It can be understood that, in the description of the present application, the terms "bottom", "inner", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0108] It can be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0109] It can be understood that, in the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0110] It can be understood that when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or there can be an intermediate element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intermediate element.

[0111] It can be understood that the term "and / or" in this document merely describes an associated relationship with associated objects, and indicates that there can be three relationships, for example, A and / or B can indicate that A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in this document indicates that the front and rear associated objects are in an "or" relationship.

[0112] In this application, unless otherwise clearly specified and limited, a first feature is "on", "under", "above", or "over" a second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over", and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below", and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0113] It can be understood that the above describes a plurality of embodiment schemes provided by the embodiments of the present disclosure, and each optional mode introduced by each embodiment scheme can be combined, cross-referenced in the case of no conflict, thereby extending a plurality of possible embodiment schemes, which can be considered as disclosed and disclosed embodiment schemes of the present disclosure.

[0114] Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, and therefore the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. A leakage monitoring filter device, characterized by The utility model relates to a kind of leak detection device, including: Shell; End cap, the end cap is fixed to the first end of the shell, the end cap is used to block the first end port of the shell; Monitoring piece, the monitoring piece is located at the first end of the shell Sidewall, for monitoring the leaked medium located at the first end of the shell Sidewall.

2. The leakage monitoring filter device of claim 1, wherein, The first end of the shell has a first connecting area, the end cap has a second connecting area, the first connecting area of the shell is screwed with the second connecting area of the end cap.

3. The leakage monitoring filter device of claim 2, wherein, The shell also has a monitoring area, the monitoring area is located on the side of the first connecting area away from the first end port of the shell; Wherein, the monitoring piece is fixed to the outer sidewall of the monitoring area.

4. The leakage monitoring filter device of claim 3, wherein, The shell also has a collection part, the collection part is located on the side of the monitoring area away from the first end port of the shell, and is adjacent to the monitoring area, for collecting leaked medium.

5. The leakage monitoring filter device of claim 4, wherein, The outer diameter of the collection part is greater than the outer diameter of the monitoring area.

6. The leakage monitoring filter device of claim 2, wherein, The end cap has a collection area, the collection area is located on the side of the second connecting area away from the main part of the end cap; Wherein, the end of the monitoring piece away from the first connecting area is located in the area surrounded by the collection area, and has radial gap between the collection area.

7. The leakage monitoring filter device of claim 6, wherein, The inner diameter of the end of the collection area adjacent to the second connecting area is less than or equal to the inner diameter of the end away from the second connecting area.

8. The leakage monitoring filter device of claim 6, wherein, The collection area is a ring structure made of transparent material.

9. The leakage monitoring filter apparatus of claim 1, wherein, The monitoring piece contains test paper, the kind of test paper is matched with the leaked medium, and can be discolored after contacting the leaked medium.

10. The leakage monitoring filter apparatus of claim 1, wherein, The outer sidewall of the first end of the end cap has a plurality of protrusions and / or recesses, including at least one of the following: A plurality of protrusions, each protrusion is arranged on the outer sidewall of the first end of the end cap along the circumference of the end cap. A plurality of recesses, each recess is arranged on the outer sidewall of the first end of the end cap along the circumference of the end cap. A plurality of protrusions and a plurality of recesses, each protrusion and recess is arranged on the outer sidewall of the first end of the end cap along the circumference of the end cap.