Calibration device of vertical diffusion furnace manipulator and vertical diffusion furnace manipulator
By employing a calibration device on the robotic arm of a vertical diffusion furnace, and utilizing laser sensors and a level to detect the position of the robotic arm, the problems of large errors and low efficiency in manual calibration are solved, achieving high-precision and high-efficiency automated calibration.
Patent Information
- Application Number
- CN202520419095.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-11
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-03-11
AI Technical Summary
The existing calibration methods for vertical diffusion furnace robotic arms rely on manual operation, which suffers from large errors, low efficiency, and the inability to achieve real-time calibration, making it difficult to meet the requirements of high precision and high efficiency.
The calibration device, including a calibration base, first and second calibration brackets, a transmitter assembly, and a receiver assembly, uses a laser sensor to detect the horizontal position of the robot arm and a level to ensure the calibration device is level, thus achieving automated calibration.
It improves the accuracy and efficiency of robotic arm calibration, reduces human error, achieves automated calibration, reduces equipment costs, and improves the reliability and accuracy of calibration.
Smart Images
Figure CN223849296U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of vertical diffusion furnace, in particular to a kind of calibration device of vertical diffusion furnace mechanical hand. BACKGROUND
[0002] The mechanical hand of vertical diffusion furnace needs to be accurately calibrated during use to ensure its operation accuracy and stability.Currently, the commonly used calibration method is manual calibration by using ruler by artificial. However, this traditional calibration method has obvious limitations, first, it is highly dependent on the experience and technical level of operator, only experienced operator can ensure the accuracy of calibration to some extent;Second, due to the interference of human factors, such as visual error, inconsistent operation method, etc., the calibration result often has large error, which is difficult to meet the requirements of high-precision process.In addition, manual calibration is low in efficiency, and real-time calibration cannot be realized, which further affects the production efficiency and stability of product quality. Therefore, a more efficient and accurate calibration method is needed to become the key direction to improve the performance of vertical diffusion furnace mechanical hand. SUMMARY
[0003] The purpose of the utility model is to provide a kind of calibration device of vertical diffusion furnace mechanical hand, solve the problem of large manual calibration error and low efficiency, and achieve the effect of accurate calibration.
[0004] In order to achieve the above purpose, the utility model adopts the following technical scheme: a kind of calibration device of vertical diffusion furnace mechanical hand, including calibration base and controller, calibration base is spaced apart and is provided with first calibration support and second calibration support, first calibration support and second calibration support form calibration space for mechanical hand to extend into between them, first calibration support is equipped with transmitter assembly, second calibration support is equipped with receiver assembly corresponding with transmitter assembly, transmitter assembly and receiver assembly are located at the same height, so that transmitter assembly emits horizontal light signal to receiver assembly, controller judges whether mechanical hand is horizontal according to the signal fed back by receiver assembly.
[0005] The utility model discloses the following advantages are obtained after adopting the above technical scheme: the interval between the first calibration support and the second calibration support on the calibration base forms a calibration space for the mechanical hand to extend into, and a calibration area is provided for the mechanical hand, the transmitter assembly and the receiver assembly are respectively arranged on the first calibration support and the second calibration support and are located at the same height, a calibration position for detecting whether the mechanical hand is horizontal is formed between the transmitter assembly and the receiver assembly, the calibration position limits the calibration range of the mechanical hand, the receiver assembly is connected with the controller, and calibration deviation caused by visual error or operation method in manual calibration is avoided, the transmitter assembly and the receiver assembly are arranged in a corresponding mode, the position deviation of the mechanical hand in the vertical direction can be detected, the mechanical hand can be accurately calibrated, the calibration efficiency is improved, the tedious process of repeated adjustment in manual calibration is avoided, the calibration efficiency is improved, and the calibration device is automated through the cooperation of the transmitter assembly and the receiver assembly, the error of docking hand calibration is reduced, the calibration accuracy is improved, and the reliability of calibration is improved.
[0006] Further, the transmitter assembly includes a first transmitter, and the receiver assembly includes a first receiver, the first transmitter and the first receiver are located at the same height, and the first transmitter is arranged correspondingly to the first receiver; or, the transmitter assembly includes a first transmitter and a second transmitter arranged in sequence and spaced apart along the front-rear direction, the receiver assembly includes a first receiver and a second receiver arranged in sequence and spaced apart along the front-rear direction, the first transmitter, the second transmitter, the first receiver, and the second receiver are located at the same height, the first transmitter is arranged correspondingly to the first receiver, and the second transmitter is arranged correspondingly to the second receiver.
[0007] By using the foregoing technical scheme, the first transmitter and the first receiver are arranged correspondingly and located at the same height, can be used to detect the position deviation of the mechanical hand in the front-rear direction, and single-point calibration is realized, the number of sensors used in this mode is small, and the cost of the equipment is reduced; the first transmitter and the first receiver are arranged correspondingly, the second transmitter is arranged correspondingly to the second receiver, and the first transmitter, the second transmitter, the first receiver, and the second receiver are located at the same height, two position points of the mechanical hand in the front-rear direction can be detected simultaneously through the two groups of correspondingly arranged sensors, the two position points can capture small errors of the mechanical hand in the front-rear direction, the calibration accuracy and precision are improved, and the reliability of the calibration device is improved when one of the two groups of sensors fails.
[0008] Further, the first transmitter and the second transmitter are laser transmitters, and the first receiver and the second receiver are laser receivers, the laser transmitter emits laser to the corresponding laser receiver, and the emission path is horizontal.
[0009] The laser transmitter corresponding to the laser receiver transmits a horizontal laser beam, the laser receiver sensor detects the laser signal, the transmission and reception of the two laser beams can detect two position points of the manipulator in the front-back direction, and the controller can detect whether the manipulator is in a horizontal state in the front-back direction through the feedback signal of the laser receiver, so as to realize the calibration of the manipulator and reduce the calibration error.
[0010] Further, the first calibration support is provided with a plurality of transmitter assemblies, and the second calibration support is provided with a plurality of receiver assemblies; the plurality of transmitter assemblies are arranged in a vertical direction at intervals; the plurality of receiver assemblies are arranged in a vertical direction at intervals; and the transmitter assemblies and the receiver assemblies are arranged one by one in correspondence.
[0011] Further, the calibration device further comprises a sound alarm device; the receiver assembly receives the optical signal transmitted by the transmitter assembly and feeds back a first signal to the controller; and the controller controls the sound alarm device to alarm according to the first signal.
[0012] Further, the top surface of the calibration base is provided with a level instrument for detecting the level of the calibration device; the level instrument comprises a first level instrument arranged perpendicularly to the first calibration support and a second level instrument arranged horizontally to the first calibration support; and the second level instrument is perpendicular to the first level instrument.
[0013] The first level instrument and the second level instrument respectively detect whether the calibration device is in a horizontal state in the front-back and left-right directions, so as to ensure the level of the entire calibration device and avoid calibration errors caused by the inclination of the calibration base, thereby ensuring the accuracy of the calibration benchmark of the manipulator.
[0014] Further, the level instrument is arranged at the center position of the top surface of the calibration base.
[0015] The center position of the calibration base is the symmetry point of the entire calibration base, so the arrangement of the level instrument at the center position of the calibration base can accurately reflect the level state of the entire calibration base, and the center position is not affected by the deformation of the edge of the calibration base, thereby ensuring the detection accuracy.
[0016] Further, the projection of the level instrument on the first calibration support is below the transmitter assembly.
[0017] The projection of the level instrument on the first calibration support is below the transmitter assembly, so as to avoid the interference between the manipulator and the level instrument when the manipulator enters the calibration space.
[0018] A vertical diffusion furnace manipulator comprises a machine table, a manipulator mounted on the machine table, and the calibration device described above; the machine table is provided with a calibration platform; the manipulator is arranged above the calibration platform; and the calibration base is placed on the calibration platform.
[0019] Further, the calibration platform is provided with an adjusting mechanism for keeping the horizontal reference surface horizontal. BRIEF DESCRIPTION OF DRAWINGS
[0020] The utility model will be further described below in combination with the drawings:
[0021] Figure 1 Structure diagram of the calibration device of the vertical diffusion furnace mechanical arm of the utility model Figure 1 ;
[0022] Figure 2 Structure diagram of the calibration device of the vertical diffusion furnace mechanical arm of the utility model Figure 2 ;
[0023] Figure 3 The utility model Figure 2 A place in the utility model DETAILED DESCRIPTION
[0024] In order to make the purpose, technical scheme and advantage of the utility model embodiment clearer, the technical scheme in the utility model embodiment will be clearly and completely described below in combination with the drawings in the utility model embodiment, obviously, the described embodiment is only a part of the utility model embodiment, not all the embodiment.
[0025] The terms "first", "second" and the like (if exist) in the specification and claims of the utility model are used to distinguish similar objects, not to describe a specific order or sequence, even if "second" is used before a certain technical feature to distinguish, it does not mean that it must have "first". It should be understood that in the utility model, "include" and "have" and any modification of them are intended to cover non-exclusive inclusion. It should be understood that in the utility model, "multiple" means two or more than two. "And / or" is only a description of the association between the associated objects, which means that there may be three relationships, for example, X and / or Y, which means that there are three cases of X alone, X and Y at the same time, and Y alone. The character " / " generally represents that the associated objects before and after are in an "or" relationship. "Include X, Y and Z", "include X, Y, Z" means that X, Y and Z are included, "include X, Y or Z" means that one of X, Y and Z is included, "include X, Y and / or Z" means that any one or any two or three of X, Y and Z is included.
[0026] The technical scheme of the utility model will be described in detail below with specific examples. The following several specific examples can be combined or replaced according to the actual situation, and the same or similar concepts or processes may not be described in some embodiments.
[0027] AsFigure 1 The utility model provides a kind of calibration device of vertical diffusion furnace manipulator 2, including calibration pedestal 1, first calibration support 11 and second calibration support 12 are spaced apart and are provided with in calibration pedestal 1, calibration space is formed for manipulator 2 to extend into between first calibration support 11 and second calibration support 12, transmitter assembly 13 is equipped on first calibration support 11, receiver assembly 14 is equipped with and transmitter assembly 13 is correspondingly set in second calibration support 12, transmitter assembly 13 and receiver assembly 14 are located at the same height and the space between them forms calibration position.
[0028] It can be understood that the interval between first calibration support 11 and second calibration support 12 on calibration pedestal 1 forms calibration space for manipulator 2 to extend into, provides calibration area for manipulator 2, transmitter assembly 13 and receiver assembly 14 are respectively equipped on first calibration support 11 and second calibration support 12 and are located at the same height, so that calibration position for detecting whether manipulator 2 is horizontal is formed between transmitter assembly 13 and receiver assembly 14, calibration position limits the calibration range of manipulator 2, avoids calibration deviation caused by visual error or operation method in manual calibration, transmitter assembly 13 and receiver assembly 14 are correspondingly set, can detect the position deviation of manipulator 2 in vertical direction, so that manipulator 2 can be accurately calibrated, improve calibration efficiency, avoid the tedious process of repeated adjustment in manual calibration, thereby improve calibration efficiency, and the cooperation of transmitter assembly 13 and receiver assembly 14 makes calibration device realize automation, reduces the error of docking hand calibration, not only improves calibration accuracy but also improves calibration reliability.
[0029] In the embodiment, transmitter assembly 13 includes first transmitter 131 and second transmitter 132, which are sequentially and spaced apart in the front-back direction, receiver assembly 14 includes first receiver 141 and second receiver 142, which are sequentially and spaced apart in the front-back direction, first transmitter 131, second transmitter 132, first receiver 141 and second receiver 142 are located at the same height, first transmitter 131 is correspondingly set with first receiver 141, and second transmitter 132 is correspondingly set with second receiver 142.
[0030] Through two groups of correspondingly set sensors, two position points of manipulator 2 in front-back direction can be detected simultaneously, two position points can capture small error of manipulator 2 in front-back direction, improve calibration accuracy and accuracy, and the setting of two groups of sensors also avoids calibration of manipulator 2 when one of the sensors fails, improves the reliability of calibration device.
[0031] In other embodiments, the number of sensors can be adjusted according to the need for different calibration accuracy, for example, the transmitter assembly 13 includes a first transmitter 131, the receiver assembly 14 includes a first receiver 141, the first transmitter 131 and the first receiver 141 are located at the same height, and the first transmitter 131 is correspondingly arranged with the first receiver 141.
[0032] Only one set of sensor arrangement can still be used to detect the position deviation of the manipulator 2 in the front-back direction, and single-point calibration is realized, which uses fewer sensors and reduces the cost of the device.
[0033] As preferred, the first transmitter 131 and the second transmitter 132 are laser transmitters, and the first receiver 141 and the second receiver 142 are laser receivers, the laser transmitter emits laser to the corresponding laser receiver, and the emission path is horizontal.
[0034] It can be known that the laser transmitter emits horizontal laser beams to the corresponding laser receiver, and the laser receiver sensor detects the laser signal, through the emission and reception of two laser beams, the two position points of the manipulator 2 in the front-back direction can be detected at the same time, and through the controller receiving the signal feedback by the laser receiver, it can be detected whether the manipulator 2 is in a horizontal state in the front-back direction, so as to realize the calibration of the manipulator 2 and reduce the calibration error.
[0035] Specifically, the first calibration bracket 11 is provided with a plurality of transmitter assemblies 13, the second calibration bracket 12 is provided with a plurality of receiver assemblies 14, the plurality of transmitter assemblies 13 are arranged in a vertical direction, the plurality of receiver assemblies 14 are arranged in a vertical direction, and the transmitter assembly 13 and the receiver assembly 14 are correspondingly arranged.
[0036] As shown in Figure 2 and Figure 3 In order to detect whether the calibration device is in a horizontal state in the front-back and left-right directions, a level 15 for detecting the level of the calibration device is arranged on the top surface of the calibration base 1, the level 15 includes a first level 151 arranged perpendicularly to the first calibration bracket 11 and a second level 152 arranged horizontally to the first calibration bracket 11, and the second level 152 is perpendicular to the first level 151, so that through the arrangement of the level 15, the level of the entire calibration device is ensured, and the calibration error caused by the inclination of the calibration base 1 is avoided, thereby ensuring the accuracy of the calibration reference of the manipulator 2.
[0037] Specifically, the level 15 is arranged at the center of the top surface of the calibration base 1, and the center of the calibration base 1 is the symmetry point of the whole calibration base 1, so that the level 15 arranged at the center of the calibration base 1 can accurately reflect the horizontal state of the whole calibration base 1, and the center position is not affected by the deformation of the edge of the calibration base 1, thereby ensuring the detection accuracy.
[0038] In order to avoid the interference between the manipulator 2 and the level 15 when the manipulator 2 enters the calibration space, the projection of the level 15 on the first calibration support 11 is located below the transmitter assembly 13.
[0039] It should be noted that the manipulator 2 of the vertical diffusion furnace includes a machine table 21, a manipulator 2 mounted on the machine table 21, and the calibration device described above, the machine table 21 is provided with a calibration platform 211, the manipulator 2 is arranged above the calibration platform 211, and the calibration base 1 is placed on the calibration platform 211.
[0040] In the embodiment, the manipulator 2 has five, and the five manipulators 2 are mounted on the machine table 21 in a vertical direction and are stacked in layers, the number of the first transmitter 131, the second transmitter 132, the first receiver 141 and the second receiver 142 is five respectively, the first transmitter 131 corresponds to the first receiver 141, and the second transmitter 132 corresponds to the second receiver 142, and the five manipulators 2 are respectively located on the laser transmission paths of the first transmitter 131 and the first receiver 141, and the second transmitter 132 and the second receiver 142, wherein the front end of the manipulator 2 is located on the transmission path of the first transmitter 131 and the first receiver 141.
[0041] Specifically, when the manipulator 2 is in a horizontal state along the front-back direction (the length direction of the manipulator is the front-back direction), the manipulator 2 will block the first transmitter 131 and the second transmitter 132, and at this time, the first receiver 141 and the second receiver 142 will not receive the signals emitted by the first transmitter 131 and the second transmitter 132; when the manipulator 2 is not horizontal along the front-back direction, the following three situations will occur: 1, the first receiver 141 and the second receiver 142 can receive the signals emitted by the first transmitter 131 and the second transmitter 132; 2, the first receiver 141 can receive the signal emitted by the first transmitter 131, but the second receiver 142 cannot receive the signal emitted by the second transmitter 132; 3, the second receiver 142 can receive the signal emitted by the second transmitter 132, but the first receiver 141 cannot receive the signal emitted by the first transmitter 131.
[0042] The above three situations all indicate that the manipulator 2 is not horizontal along the front-back direction at this time.
[0043] And the calibration device further comprises a sound alarm device, the receiver assembly receives the optical signal transmitted by the transmitter assembly to feed back a first signal to the controller, and the controller controls the sound alarm device to alarm according to the first signal: 1, if the controller receives the first signal, then the sound alarm device alarms, at this time it is indicated that the manipulator is not horizontal; 2, if the controller does not receive the first signal, then the sound alarm device does not alarm, at this time it is indicated that the manipulator is horizontal.
[0044] In specific use, the calibration device needs to be placed on the calibration platform 211 first, the calibration platform 211 is provided with a horizontal reference surface arranged horizontally, the lower end surface of the calibration base 1 is a lower reference surface matched with the horizontal reference surface, so as to ensure the horizontal of the calibration device, and the level meter 15 arranged on the calibration device can detect whether the horizontal reference surface is horizontal, if the horizontal reference surface is not horizontal, the adjusting mechanism arranged on the calibration platform 211 for keeping the horizontal reference surface horizontal can be adjusted to keep the horizontal reference surface horizontal.
[0045] In addition to the preferred embodiments, the utility model further has other implementation manners, and all other embodiments obtained by the person skilled in the art based on the embodiments in the utility model without creative labor belong to the range of the utility model claimed.
Claims
1. A calibration device for a mechanical arm of a vertical diffusion furnace, characterized in that, The calibration base and the controller are included, the first calibration support and the second calibration support are arranged at intervals, a calibration space for the mechanical hand to extend into is formed between the first calibration support and the second calibration support, the transmitter assembly is arranged on the first calibration support, the receiver assembly corresponding to the transmitter assembly is arranged on the second calibration support, the transmitter assembly and the receiver assembly are at the same height, so that the transmitter assembly transmits horizontal light signals to the receiver assembly, and the controller judges whether the mechanical hand is horizontal according to the signal fed back by the receiver assembly.
2. A calibration device for a mechanical arm of a vertical diffusion furnace according to claim 1, characterized in that, The transmitter assembly includes a first transmitter, the receiver assembly includes a first receiver, the first transmitter and the first receiver are at the same height, and the first transmitter is arranged corresponding to the first receiver; or the transmitter assembly includes a first transmitter and a second transmitter arranged at intervals along the front-rear direction, the receiver assembly includes a first receiver and a second receiver arranged at intervals along the front-rear direction, the first transmitter, the second transmitter, the first receiver and the second receiver are at the same height, the first transmitter is arranged corresponding to the first receiver, and the second transmitter is arranged corresponding to the second receiver. The first transmitter and the second transmitter are laser transmitters, and the first receiver and the second receiver are laser receivers, the laser transmitter emits laser to the corresponding laser receiver, and the emission path is horizontal.
3. A calibration device for a mechanical arm of a vertical diffusion furnace according to claim 2, characterized in that, A plurality of transmitter assemblies are arranged on the first calibration support, a plurality of receiver assemblies are arranged on the second calibration support, the plurality of transmitter assemblies are arranged at intervals along the vertical direction, the plurality of receiver assemblies are arranged at intervals along the vertical direction, and the transmitter assemblies and the receiver assemblies are arranged one by one corresponding.
4. The calibration device for a mechanical arm of a vertical diffusion furnace according to claim 1, wherein The sound alarm device is further included, the receiver assembly receives the light signal emitted by the transmitter assembly to feed back a first signal to the controller, and the controller controls the sound alarm device to alarm according to the first signal.
5. The calibration device for a mechanical arm of a vertical diffusion furnace according to claim 1, wherein The top surface of the calibration base is provided with a level instrument for detecting the level of the calibration device, the level instrument includes a first level instrument arranged perpendicularly to the first calibration support and a second level instrument arranged horizontally to the first calibration support, and the second level instrument is perpendicular to the first level instrument.
6. The calibration apparatus for a mechanical arm of a vertical diffusion furnace according to claim 1, wherein The level instrument is arranged at the center position of the top surface of the calibration base.
7. A calibration device for a mechanical arm of a vertical diffusion furnace according to claim 6, characterized in that, The projection of the level instrument on the first calibration support is below the transmitter assembly.
8. A calibration device for a mechanical arm of a vertical diffusion furnace according to claim 6, characterized in that, The calibration device includes a machine table, a mechanical hand mounted on the machine table and the calibration device of claim 1, the machine table is provided with a calibration platform, the mechanical hand is arranged above the calibration platform, and the calibration base is placed on the calibration platform.
9. A vertical diffusion furnace robot characterized by comprising: The calibration platform is provided with a horizontal reference surface arranged horizontally and an adjusting mechanism for keeping the horizontal reference surface horizontal.
10. A mechanical hand for a vertical diffusion furnace as defined in claim 9, wherein