Single crystal furnace bottom without water cooling

Abstract

The utility model discloses a single crystal furnace bottom without water cooling, which comprises a furnace bottom main body, a heat reflecting screen is arranged above the furnace bottom main body, and a gap is formed between the heat reflecting screen and the furnace bottom main body; a reflecting screen supporting ring is arranged between the heat reflecting screen and the furnace bottom body, and the heat reflecting screen is supported above the furnace bottom body through the reflecting screen supporting ring. According to the utility model, the principles of vacuum heat preservation and the like are utilized, and a plurality of heat reflecting screens are arranged above and inside the furnace bottom, so that the heat transferred to the furnace bottom from a thermal field is reduced, and the heat is absorbed by heat conduction of the evacuation pipeline and the corrugated pipe in areas with heat convection, such as an extraction opening crucible hole and the like; therefore, the sealing ring can be in a low-temperature state, and the sealing ring is prevented from being damaged due to too high temperature.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace relevant technical field, specifically a kind of single crystal furnace furnace bottom without water cooling cooling. BACKGROUND

[0002] Single crystal furnace is a kind of in inert gas (nitrogen, helium is mainly) environment, with graphite heater to melt polycrystalline silicon etc. Polycrystalline material, uses straight pull method to grow the equipment of dislocation-free single crystal, including furnace bottom plate, main furnace chamber, furnace cover, isolation valve chamber, vice furnace chamber, seed crystal lifting rotation mechanism and crucible lifting rotation mechanism, single crystal furnace furnace bottom plate is installed on single crystal furnace base support, main furnace chamber is installed on it, it is the basic component of single crystal furnace vacuum chamber, according to the type and specification of thermal field on furnace bottom component, install heating electrode and evacuation pipeline and the opening required for the passage of crucible rod, and the detection hole used for vacuum detection.

[0003] Since the competition of existing photovoltaic is increasingly fierce, energy saving becomes the focus of the crystal pulling industry, and enterprises increase production in order to increase production, and the size of thermal field is also larger and larger, and the risk brought by silicon leakage is also higher and higher;The existing single crystal furnace is damaged due to the high temperature of furnace bottom, so that the sealing ring at the furnace bottom is damaged due to the high temperature, so that the silicon is leaked, in order to solve the above technical problems, we propose a single crystal furnace furnace bottom without water cooling cooling. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims at providing a single crystal furnace furnace bottom without water cooling cooling to solve the problems in the prior art.

[0005] To achieve the above object, the utility model provides the following technical scheme: a single crystal furnace furnace bottom without water cooling cooling, including furnace bottom main part, the furnace bottom main part upper portion is provided with heat reflection screen, and the heat reflection screen and furnace bottom main part form gap.

[0006] Preferably, the heat reflection screen and the furnace bottom main part are provided with a reflection screen support ring, and the heat reflection screen is supported above the furnace bottom main part by the reflection screen support ring.

[0007] Preferably, the furnace bottom main part is provided with a heat insulation plate below.

[0008] Preferably, the furnace bottom main part is provided with a vacuum cavity lower sealing plate below, and the vacuum cavity lower sealing plate and the furnace bottom main part form a vacuum cavity, the vacuum cavity lower sealing plate is provided with a vacuum cavity evacuation port, and the vacuum cavity lower sealing plate is provided with a vacuum cavity lower sealing plate.

[0009] Preferably, the furnace bottom body is provided with an air extraction hole, a crucible hole and an electrode port, an air extraction pipeline is installed at the air extraction hole of the furnace bottom body, a crucible bellows is installed at the crucible hole of the furnace bottom body, and an electrode insulation sleeve is installed at the electrode port of the furnace bottom body, and an electrode is installed at the electrode insulation sleeve.

[0010] Preferably, the heat reflecting screen is provided with a reflecting screen crucible hole extension section at the crucible hole, and a reflecting screen air extraction port extension section at the air extraction hole.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] 1. By using the vacuum heat preservation principle, multiple heat reflecting screens are arranged above and inside the furnace bottom, so that the heat transferred from the hot field to the furnace bottom is reduced, and in the area where the air extraction hole, the crucible hole and the like exist heat convection, the heat at the place is absorbed by using the heat conduction of the air extraction pipeline and the bellows, so that the sealing ring can be in a low temperature state, and the sealing ring is protected from damage due to high temperature.

[0013] 2. The water cooling structure of the single crystal furnace bottom is removed, so that the risk of silicon leakage caused by accidental failure of heat preservation and accidental touch of personnel is reduced, and the crystal pulling power is also reduced. BRIEF DESCRIPTION OF DRAWINGS

[0014] The accompanying drawings are used to provide a further understanding of the utility model, and constitute a part of the specification, and are used to explain the utility model together with embodiments of the utility model, and do not constitute a limitation on the utility model. In the drawings:

[0015] Fig. 1 It is a structural schematic view of the utility model;

[0016] Fig. 2 It is a structural schematic view of the left side part of the utility model;

[0017] Fig. 3 It is a structural schematic view of the right side part of the utility model.

[0018] In the drawings: 1, furnace bottom body; 2, heat reflecting screen; 3, reflecting screen support ring; 4, electrode; 5, electrode insulation sleeve; 6, heat insulation plate; 7, crucible bellows; 8, air extraction pipeline; 11, vacuum cavity lower sealing plate; 12, air extraction hole; 13, crucible hole; 14, electrode port; 15, vacuum cavity air extraction port; 16, vacuum cavity blocking plate; 21, reflecting screen crucible hole extension section; 22, reflecting screen air extraction port extension section. DETAILED DESCRIPTION

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0020] Please see Figs. 1-3 In this embodiment of the invention, a single-crystal furnace bottom that does not require water cooling includes a furnace bottom body 1. A heat reflector 2 is disposed above the furnace bottom body 1, with a gap between the heat reflector 2 and the furnace bottom body 1. A reflector support ring 3 is disposed between the heat reflector 2 and the furnace bottom body 1, and the heat reflector 2 is supported above the furnace bottom body 1 by the reflector support ring 3. Both sides of the heat reflector 2 are polished to a mirror finish to reduce the heat transferred to the furnace bottom. The furnace bottom is then configured as a sandwich structure, with both the upper and lower surfaces of the sandwich polished to a mirror finish. During use, a vacuum pump is used to evacuate the sandwich to an absolute vacuum state, so that the heat transfer mode of the furnace bottom sandwich is only radiation. Furthermore, due to the very low heat absorption rate of the mirror, the heat absorbed by the lower furnace bottom plate can be significantly reduced. In addition, an insulation material is placed below the lower furnace bottom plate to prevent workers from coming into contact with the lower furnace bottom plate.

[0021] like Figs. 1-3 A heat insulation plate 6 is installed below the furnace bottom body 1; a vacuum chamber lower sealing plate 11 is installed below the furnace bottom body 1, and a vacuum chamber is formed between the vacuum chamber lower sealing plate 11 and the furnace bottom body 1. The vacuum chamber lower sealing plate 11 has a vacuum chamber evacuation port 15, and a vacuum chamber blocking plate 16 is installed at the vacuum chamber evacuation port 15; the vacuum chamber lower sealing plate 11 is located between the furnace bottom body 1 and the heat insulation plate 6.

[0022] like Figs. 1-3The furnace bottom main body 1 is provided with an air extraction hole 12, a crucible hole 13 and an electrode hole 14, the air extraction pipe 8 is installed at the air extraction hole 12 of the furnace bottom main body 1, the crucible bellow 7 is installed at the crucible hole 13 of the furnace bottom main body 1, the electrode insulation sleeve 5 is installed at the electrode hole 14 of the furnace bottom main body 1, and the electrode 4 is installed at the electrode insulation sleeve 5; the heat reflecting screen 2 is provided with a reflecting screen crucible hole extension section 21 at the crucible hole 13, and the heat reflecting screen 2 is provided with a reflecting screen air extraction hole extension section 22 at the air extraction hole 12.

[0023] At the electrode hole position, the copper electrode is cooled by water cooling, in the conventional scheme, the common insulation material of the furnace bottom and the electrode is a polytetrafluoroethylene sleeve, due to the material performance, the electrode cannot effectively cool the furnace bottom electrode hole, in the utility model, the phenolic resin added with aluminum nitride is used as the insulation material, the material thermal conductivity coefficient can be close to 30 W / (mK), thereby solving the problem of no water cooling of the furnace bottom electrode hole.

[0024] The working principle of the utility model is: using the principle of vacuum heat preservation, a plurality of heat reflecting screens are arranged above and inside the furnace bottom, thereby reducing the heat transferred to the furnace bottom from the hot field, in the region where the air extraction hole, the crucible hole and the like exist heat convection, the heat at the region is absorbed by using the heat conduction of the air extraction pipe and the bellow, so that the sealing ring can be in a low temperature state, and the sealing ring is protected from being damaged due to high temperature; the reflecting screen firstly reflects a wave of heat radiation, so that the heat transferred to the upper plate of the furnace bottom is reduced by a part, then a part of the heat is reserved by the vacuum heat insulation cavity on the furnace bottom, so that the heat on the lower plate of the furnace bottom is further reduced, and then the heat insulation plate is further increased to protect the personnel from being mistaken to touch when the heat preservation occasionally fails, in the key positions such as the electrode hole and the air extraction hole, the water cooling parts installed on the furnace bottom are used to reduce the heat at the positions by enhancing the heat conduction, and the sealing structure is protected.

[0025] Finally, it should be noted that: the above only for the preferred embodiments of the utility model, and not for limiting the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, still can modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A single crystal furnace bottom without water cooling, comprising a furnace bottom body (1), characterized in that: The furnace bottom body (1) is provided with a heat reflecting screen (2) above it, a gap is formed between the heat reflecting screen (2) and the furnace bottom body (1); a reflecting screen supporting ring (3) is arranged between the heat reflecting screen (2) and the furnace bottom body (1), the heat reflecting screen (2) is supported above the furnace bottom body (1) through the reflecting screen supporting ring (3); a heat insulation plate (6) is installed below the furnace bottom body (1); a vacuum cavity lower sealing plate (11) is installed below the furnace bottom body (1), a vacuum cavity is formed between the vacuum cavity lower sealing plate (11) and the furnace bottom body (1), the vacuum cavity lower sealing plate (11) is provided with a vacuum cavity evacuation port (15), and a vacuum cavity blocking plate (16) is installed at the vacuum cavity evacuation port (15); the vacuum cavity lower sealing plate (11) is located between the furnace bottom body (1) and the heat insulation plate (6).

2. A water-cooling-free single crystal furnace bottom according to claim 1, characterized in that: The furnace bottom body (1) is provided with a gas extraction hole (12), a crucible hole (13) and an electrode port (14), the furnace bottom body (1) is provided with a gas extraction pipeline (8) at the gas extraction hole (12), the furnace bottom body (1) is provided with a crucible bellows (7) at the crucible hole (13), and the furnace bottom body (1) is provided with an electrode insulation sleeve (5) at the electrode port (14), and the electrode insulation sleeve (5) is provided with an electrode (4).

3. A water-cooling-free single crystal furnace bottom according to claim 2, characterized in that: The heat reflecting screen (2) is provided with a reflecting screen crucible hole extension section (21) at the crucible hole (13), and the heat reflecting screen (2) is provided with a reflecting screen gas extraction port extension section (22) at the gas extraction hole (12).

Images