Microscopic heat distribution testing equipment

Abstract

The utility model provides microscopic heat distribution test equipment. The microscopic heat distribution test equipment comprises a three-coordinate mobile module; the left side and the right side of the front end of the base are fixedly connected with the outer sides of the left end and the right end of the double-sliding-table module correspondingly, supporting rods are movably connected to the moving ends of the left side and the right side of the top of the double-sliding-table module correspondingly, and the tops of the two supporting rods are movably connected with the left end and the right end of the bottom of the support correspondingly; air supply pipes are fixedly arranged at the left end and the right end of the support, an exhaust pipe is fixedly arranged in the middle of the support, the double-sliding-table module completes adjustment of the working position of the supporting rod, the working heights of the air supply pipes and the exhaust pipe on the rack are changed in cooperation with the support, and the arrangement that air supply outlets of the air supply pipes and air inlets of the exhaust pipe extend to the position above the rack is completed. The air inlet fan and the exhaust fan are matched to carry out heat dissipation treatment on the tested sample on the objective table and the objective table, so that the condition that subsequent sample thermal analysis and detection operation is influenced by heating of the objective table is avoided.

Description

TECHNICAL FIELD

[0001] The utility model mainly relates to the technical field of micro light microscope, concretely relates to a microscopic heat distribution test equipment. BACKGROUND

[0002] Through the cooperation of the thermal infrared lock-in microscope and the micro light microscope, the failure analysis of the components such as the circuit board, the chip, the electronic circuit and the electronic component can be carried out, and the short circuit failure, the electric leakage failure, the CAF failure or the ion migration failure can be investigated.

[0003] In the thermal analysis observation operation of the circuit board and the like, the fault components will appear the heating phenomenon in the electrified observation, the heating phenomenon has the characteristics of small heating area and large heat, if the cooling treatment is not carried out on the stage area, the heating area produced in the previous detection will interfere with the thermal analysis detection of the subsequent sample.

[0004] The inventor proposes a microscopic heat distribution test equipment, air supply pipes and exhaust pipes are additionally arranged at the gap between the rack structure and the base structure outside the stage, and the air inlet fan and the exhaust fan need to be extended to the outside of the micro light microscope, so that the stage and the sample placed thereon can be cooled, and the heating phenomenon in the electrified detection of the measured sample can be avoided to affect the thermal analysis detection of the next sample. UTILITY MODEL CONTENT

[0005] 1. The utility model solves the technical problem that the existing equipment is insufficient in dealing with the heating phenomenon in the thermal analysis detection of the electrified sample.

[0006] The utility model provides a microscopic heat distribution test equipment, and solves the technical problem that the existing equipment is insufficient in dealing with the heating phenomenon in the thermal analysis detection of the electrified sample.

[0007] 2. Technical scheme

[0008] To achieve the above purpose, the utility model provides a technical scheme, that is, a microscopic heat distribution test equipment, which comprises the following structures.

[0009] The three-coordinate moving module is provided with a micro light microscope and a thermal infrared lock-in microscope which are respectively fixed on the left and right sides of the top moving end of the three-coordinate moving module.

[0010] The bottom end of the base is fixedly connected with the left and right ends of the double slide table module, and the top ends of the two supporting rods are movably connected with the left and right ends of the top of the double slide table module.

[0011] Further, the top of the base is fixedly connected with the bottom of the three-coordinate moving module, the top of the base is fixedly provided with a support, the top of the support is fixedly connected with the bottom of the rack, and the middle of the rack is provided with a sample table.

[0012] Further, the rear end of the rack is fixedly provided with an exhaust port, the front end of the rack is fixedly provided with an air inlet on the left and right sides, and the middle of the rack is fixedly provided with a sample area.

[0013] Further, the two air supply pipes are symmetrically arranged on the left and right sides of the middle of the exhaust pipe, and the air supply ports of the two air supply pipes are all directed to the air inlets of the exhaust pipe.

[0014] Further, the top air supply port of the air supply pipe extends to the air inlet, the air inlet ends of the two air supply pipes are fixedly connected with the air outlet ends of the air inlet fan, and the outer side of the air inlet fan is detachably connected with the top of the front side of the support.

[0015] Further, the front end of the exhaust pipe is fixedly provided with an exhaust fan at the air outlet, the outer side of the exhaust fan is detachably connected with the bottom of the front side of the support, and the top air inlet of the exhaust pipe is directed to the air supply port of the air supply pipe.

[0016] 3. Beneficial effects:

[0017] Compared with the prior art, the technical scheme has the following beneficial effects:

[0018] The utility model discloses a microscopic heat distribution test equipment, and the double slide table module completes the working position adjustment of the supporting rod, the support changes the working height of the air supply pipe and the exhaust pipe on the rack, the air supply port of the air supply pipe and the air inlet of the exhaust pipe are extended to the setting above the rack, the air inlet fan and the exhaust fan cooperate to carry out heat dissipation treatment on the measured sample on the sample table and the sample table, and the heat of the sample table is avoided to influence the development of subsequent sample heat analysis detection operation.

[0019] The parts not involved in the device are the same as or can be realized by the prior art. DRAWINGS

[0020] Figure 1 It is the perspective view of the structure of the utility model;

[0021] Figure 2 It is the perspective view of the rack structure of the utility model;

[0022] Figure 3 It is the perspective view of the support structure of the utility model;

[0023] Figure 4 It is the perspective view of the air supply pipe structure of the utility model;

[0024] Figure 5 is a half cutaway perspective view of the exhaust pipe structure of the utility model.

[0025] Reference signs:

[0026] Three-coordinate moving module-1; low-light microscope-11; thermal infrared phase-locked microscope-12;

[0027] Base-2; support post-21;

[0028] Rack-3; exhaust port-31; air inlet-32;

[0029] Object table-4;

[0030] Double slide table module-5;

[0031] Supporting rod-6;

[0032] Support-7;

[0033] Air supply pipe-8; air inlet fan-81;

[0034] Exhaust pipe-9; exhaust fan-91. DETAILED DESCRIPTION

[0035] In order to facilitate the understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings, the drawings show several embodiments of the utility model, however, the utility model can be realized in many different forms, and is not limited to the embodiments described herein, on the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0036] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on the other element or there can be a middle element; when an element is referred to as "connected" to another element, it can be directly connected to the other element or there can be a middle element; the terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the utility model belongs; the terms used in the specification of the utility model herein are only for the purpose of describing specific embodiments and are not intended to limit the utility model; the term "and / or" used herein includes any and all combinations of one or more related listed items.

[0038] Referring to the drawings Figures 1-5 , the utility model provides a kind of microscopic heat distribution test equipment, including the following structure:

[0039] The three-coordinate moving module 1 is provided with a micro-light microscope 11 and a thermal infrared phase-locked microscope 12 fixedly arranged on the left and right sides of the top moving end of the three-coordinate moving module 1.

[0040] The base 2 is fixedly connected with the left and right ends of the outer side of the double slide module 5, and the left and right ends of the top moving end of the double slide module 5 are movably connected with the support rods 6, and the top of the two support rods 6 is movably connected with the left and right ends of the bottom of the bracket 7. The left and right ends of the bracket 7 are fixedly provided with the air supply pipe 8, and the middle of the bracket 7 is fixedly provided with the exhaust pipe 9.

[0041] In this embodiment, the top of the base 2 is fixedly connected with the bottom of the three-coordinate moving module 1, the top of the base 2 is fixedly provided with the support column 21, the top of the support column 21 is fixedly connected with the bottom of the gantry 3, and the middle of the gantry 3 is provided with the object table 4.

[0042] The three-coordinate moving module 1 adjusts the working position of the micro-light microscope 11 and the thermal infrared phase-locked microscope 12 on the object table 4, which is convenient for the equipment to observe the circuit board and other measured samples on the object table 4.

[0043] In this embodiment, the rear end of the gantry 3 is fixedly provided with the exhaust port 31, the front end of the gantry 3 is fixedly provided with the air inlet 32, and the middle of the gantry 3 is fixedly provided with the object area.

[0044] The exhaust port 31 and the air inlet 32 are arranged on the gantry 3, which is convenient for the air supply pipe 8 and the exhaust pipe 9 to be assembled and lifted on the gantry 3, and the object area and the object table 4 cooperate, which is convenient for the user to place the measured sample on the object table 4.

[0045] In this embodiment, the two air supply pipes 8 are symmetrically arranged about the middle of the exhaust pipe 9, and the air supply ports of the two air supply pipes 8 are all directed to the air inlet 32 of the exhaust pipe 9.

[0046] The air supply port of the air supply pipe 8 cooperates with the air inlet 32 of the exhaust pipe 9, and the position of the exhaust port 31 and the air inlet 32 on the gantry 3, which is convenient for the air in the air supply pipe 8 to flow through the object table 4 and then enter the exhaust pipe 9.

[0047] In this embodiment, the top air supply port of the air supply pipe 8 extends to the air inlet 32, the air inlet ends of the two air supply pipes 8 are fixedly connected with the exhaust ends of the air inlet fans 81, and the outer side of the air inlet fans 81 is detachably connected with the top of the front side of the bracket 7.

[0048] The air inlet fan 81 and the air supply pipe 8 cooperate to blow the circuit board and other measured samples on the object table 4, improve the air flow speed on the surface of the measured sample, and cool the measured sample, which avoids the measured sample from being seriously affected by heating in the charged inspection observation, which causes the object table 4 to be heated and is not conducive to the subsequent sample for thermal analysis observation.

[0049] In the embodiment, the front end of the exhaust pipe 9 is provided with an exhaust fan 91, the outer side of the exhaust fan 91 is detachably connected with the front bottom of the support 7, and the top air inlet 32 of the exhaust pipe 9 is directed to the air outlet of the air supply pipe 8.

[0050] The exhaust fan 91 cooperates with the exhaust pipe 9 to timely guide the air blown by the object table 4 to the outside of the equipment.

[0051] Specific operation process:

[0052] The double slide table module 5 adjusts the working position of the supporting rod 6, cooperates with the support 7 to change the working height of the air supply pipe 8 and the exhaust pipe 9 on the table frame 3, completes the setting of the air supply outlet of the air supply pipe 8 and the air inlet 32 of the exhaust pipe 9 extending above the table frame 3, and the air inlet fan 81 and the exhaust fan 91 cooperate to perform heat dissipation treatment on the measured sample on the object table 4 and the object table 4, so as to avoid the influence of the heating of the object table 4 on the subsequent sample thermal analysis detection operation.

[0053] The above embodiment only expresses a certain embodiment of the utility model, the description is more specific and detailed, but it cannot be understood as the limitation of the utility model patent scope; it should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the utility model, a number of modifications and improvements can be made, which belong to the protection scope of the utility model; therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A micro-thermal profiling test apparatus, characterized by: The utility model provides a three -coordinate movement module, base, double slide platform module, support, air supply pipe, exhaust pipe, air inlet, air outlet, air inlet fan and exhaust fan are arranged, and the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply pipe and exhaust pipe are arranged on the support, the air supply ​ ​ 2. The microscale heat distribution test apparatus of claim 1, wherein: ​ 3. The microscale heat distribution test apparatus of claim 2, wherein: ​ 4. The microscale heat distribution test apparatus of claim 1, wherein: ​ 5. The microscale heat distribution test apparatus of claim 1, wherein: ​ 6. The microscale heat distribution test apparatus of claim 1, wherein: ​

Images