Sleeve type scanning electron microscope objective table

Abstract

The utility model provides a sleeve type scanning electron microscope objective table, which relates to the technical field of scanning electron microscope sample tables and comprises a main body, a sleeve and a base assembly. The main body is made of 7075 aviation grade aluminum alloy, a cylindrical through hole with the diameter of 35mm is formed in the center of the main body, a circular ring structure with the diameter of 34mm is designed at the top of the main body, and a positioning groove with the width of 2mm and the depth of 1mm is formed in the inner wall of the main body along a diagonal line; the inner diameter of the sleeve is 30mm, 25mm and 20mm, the outer diameter of the sleeve is 34.5 mm, the outer wall of the sleeve is provided with a convex groove which is in interference fit with the groove of the main body, and the inner diameter of the top circular ring is 1mm smaller than that of the sleeve so as to fix a sample; the base is fixed on the main body through four M4 screws, and three compression springs which are uniformly distributed are arranged in the base to provide stable support; the surfaces of all the parts are subjected to conductive anodic oxidation treatment, key contact surfaces are plated with gold, and conductivity is ensured. Through the simple sleeve type structural design, the limitation that a traditional objective table can only adapt to samples of a single size is solved, the experiment efficiency is improved, and the operation process is simplified.

Description

TECHNICAL FIELD

[0001] The utility model relates to scanning electron microscope sample stage technical field, specifically, especially, it relates to a sleeve type scanning electron microscope stage. BACKGROUND

[0002] As an indispensable characterization device in modern scientific research, the performance of the sample stage of scanning electron microscope (SEM) directly affects the sample stability and imaging quality. The conventional scanning electron microscope stage is generally designed with fixed size, such as the commonly used 20mm, 25mm and 30mm specifications, which leads to the need for laboratories to configure multiple sets of different size stages to meet the diversified sample requirements. According to statistics, about 80% of laboratories face the problem of sample size adaptation, and frequent replacement of stages not only increases the cost of equipment purchase (usually accounting for 15%-20% of the laboratory budget), but also significantly reduces the experimental efficiency. Although the existing improved schemes propose adjustable stage designs, they generally have the defects of complex structure and high price (the price of some products exceeds 2-3 times that of conventional stages), and are difficult to meet the high-precision detection requirements in terms of conductivity and mechanical stability. For example, some adjustable stages cause sample deviation due to insufficient positioning accuracy (tolerance exceeding ±0.05mm), or affect electron beam imaging due to uneven conductive coating. In addition, for cylindrical light sheet samples, the conventional design lacks effective anti-skid structure, which easily causes sample displacement or falling. Therefore, it is urgent to develop a scanning electron microscope stage with multi-size adaptation capability, simple structure, controllable cost and excellent conductivity stability to solve the core pain points of poor adaptability, complicated operation and high maintenance cost in the prior art. SUMMARY

[0003] According to the above-mentioned technical problem, a sleeve type scanning electron microscope stage is provided, which solves the limitation of traditional stages that can only adapt to single size samples through simple sleeve type structure design, improves experimental efficiency and simplifies operation process.

[0004] To achieve the above-mentioned purpose, the utility model provides a sleeve type scanning electron microscope stage, which comprises: a main body, a sleeve, a base assembly;

[0005] The main body is made of 7075 aviation grade aluminum alloy, has a square structure, and has a size of 50mmx50mmx15mm, a cylindrical through hole with a diameter of 35mm is arranged at the center thereof, and a circular ring structure with a diameter of 34mm and a thickness of 1mm is arranged at the top of the main body;

[0006] The sleeve comprises at least three sleeves (2) with different specifications, the outer diameter of each sleeve is uniformly 34.5mm, the height is 15mm, the inner diameter is 30mm, 25mm and 20mm respectively, the outer wall of the sleeve is provided with a convex groove with a width of 2mm and a height of 1mm, and the convex groove is in interference fit with the positioning groove arranged along the diagonal line on the inner wall of the main body.

[0007] The base assembly is fixedly connected with the main body by four M4 screws, three evenly distributed compression springs are arranged in the base, the spring elastic coefficient is 100 N / m, and the compression deformation is 5 mm.

[0008] Further, the positioning groove in the inner wall of the main body has a width of 2 mm, a depth of 1 mm, a machining precision of ±0.02 mm, and is symmetrically distributed along the diagonal line.

[0009] The sleeve is made of 6061 aluminum alloy material, and a fixed ring is arranged at the top of the sleeve, the inner diameter of the ring is 1 mm smaller than the inner diameter of the sleeve, and the thickness of the ring is 1 mm.

[0010] Further, the sleeve and the inner hole of the main body form a gap of 0.5 mm, and the interference fit tolerance between the outer wall groove of the sleeve and the main body groove is controlled to be ±0.02 mm.

[0011] Further, the base plate of the base assembly is made of 7075 aviation-grade aluminum alloy, a through hole with a diameter of 35 mm is formed in the center of the base plate, and the base plate is connected with the main body by M4*5 mm stainless steel screws, and the tightening torque is 2 Nm.

[0012] Further, the surfaces of the main body, the sleeve and the base assembly are subjected to conductive anodic oxidation treatment, and the thickness of the oxidation layer is 10-15 μm.

[0013] The fitting surface of the sleeve and the main body and the spring contact surface of the base are provided with a gold plating layer with a thickness of 0.5 μm.

[0014] Further, the inner diameters of the fixed rings at the top of the sleeve are 29 mm, 24 mm and 19 mm respectively, which are used to prevent the sample from sliding and keep the observation field complete.

[0015] Compared with the prior art, the sleeve type scanning electron microscope sample stage has the following advantages:

[0016] 1. The sleeve type scanning electron microscope sample stage provided by the utility model is combined with the main body through three sleeves with different inner diameters, four sizes of samples in the range of 35 mm to 20 mm can be flexibly adapted, the demand for purchasing multiple specifications of sample stages in the laboratory is reduced, the equipment purchase cost is saved by 30%-50%, and the spare part storage and maintenance cost is reduced.

[0017] 2. The sleeve type scanning electron microscope sample stage provided by the utility model is combined with the main body through the interference fit of the outer wall groove of the sleeve and the inner wall groove of the main body, and the compression springs evenly distributed in the base, so that the sample positioning precision reaches ±0.02 mm, the sample deviation or vibration in the test process is effectively prevented, and the scanning electron microscope imaging stability is significantly improved.

[0018] 3. The sleeve-type scanning electron microscope stage provided by this utility model adopts conductive anodizing treatment and gold plating process on key contact surfaces, which greatly reduces surface resistance and eliminates the interference of charge accumulation on the electron beam, thereby obtaining high-resolution, low-noise scanning electron microscope images.

[0019] Based on the above reasons, this utility model can be widely promoted in the field of scanning electron microscope sample stage technology. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Fig. 1 This is a schematic diagram of the three-dimensional structure of the main body of the sleeve-type scanning electron microscope stage according to the present invention;

[0022] Fig. 2 This is a three-dimensional structural diagram of a sleeve-type scanning electron microscope stage base assembly according to the present invention;

[0023] Fig. 3 This is a schematic diagram of the three-dimensional structure of a sleeve-type scanning electron microscope stage according to the present invention.

[0024] In the diagram: 1. Main body; 2. Sleeve; 3. Base assembly; 4. Spring; 5. Base plate; 6. Screw. Detailed Implementation

[0025] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit this utility model or its application or use. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0027] It is to be understood that the terms so far as the language goes are used herein only to describe specific embodiments and not intended to limit the example embodiments according to the present application. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, devices, components and / or combinations thereof, but do not preclude the presence or addition of one or more other features, steps, operations, devices, components and / or combinations thereof.

[0028] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the examples are not intended to limit the scope of the present application unless otherwise specifically stated. It is to be understood that the actual dimensions of the parts shown in the drawings are not necessarily to scale. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered as part of the description. In all examples shown and discussed herein, any specific value should be interpreted as merely an example, and not as a limitation. Thus, other examples of the example embodiments can have different values. It is noted that like numbers and letters refer to like elements throughout the several views of the drawings and, as such, no further discussion with regard thereto is deemed necessary.

[0029] In the description of the present application, it is to be understood that the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, perpendicular, horizontal" and "top, bottom" and the like indicated orientation or position relationship is usually based on the orientation or position relationship shown in the drawings, only for the convenience of describing the present application and simplifying the description, without making the opposite statement, these orientation words do not indicate and imply that the device or element referred to must have a particular orientation or be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the scope of protection of the present application: the orientation words "inner, outer" refer to the inner and outer relative to the contour of each component.

[0030] For the purposes of the description, a spatial relative term such as "on", "above", "at the top of", "top", and the like can be used herein for ease of description to describe one device or feature's spatial position relation to another device or feature as illustrated in the figures. It is to be understood that the spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if a device in the figures is inverted, then a spatial relative term such as "above" or "at the top of" can be interpreted as "below" or "at the bottom of" in view of the inverting. The exemplary term "above" can thus include both "above" and "below" orientations. The devices can also be oriented in other ways (rotated 90 degrees or at other orientations) and the spatial relative descriptions used herein interpreted accordingly.

[0031] In addition, it should be noted that the use of "first", "second", and the like words to qualify parts, is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the utility model.

[0032] As Figs. 1 to 3 shown, the utility model provides a sleeve type scanning electron microscope object table, include: main part 1, sleeve 2, base assembly 3,

[0033] The main part 1 is made of 7075 aviation-grade aluminum alloy material, has good mechanical strength and electrical conductivity. The main part 1 is in the form of a cube, with an outer dimension of 50mmx50mmx15mm. A cylindrical through-hole with a diameter of 35mm is precisely machined at the center position. A circular ring structure with a diameter of 34mm and a thickness of 1mm is precisely machined on the top of the main part 1, used for directly placing a cylindrical optical film sample with a diameter of 35mm. Two positioning grooves with a width of 2mm and a depth of 1mm are machined on the inner wall of the main part 1 along the diagonal line. The machining precision is controlled within ±0.02mm. Two M4 threaded through-holes are also provided on the main part 1, located at the diagonal line position, used for fixed connection with the base.

[0034] Three matched sleeves 2 are also made of aluminum alloy material and are processed by precision lathe. The outer diameter of all sleeves 2 is 34.5 mm, which forms a 0.5 mm gap fit with the inner hole of the main body 1. The height of all sleeves 2 is 15 mm. The inner diameters of the three sleeves 2 are 30 mm, 25 mm and 20 mm respectively, and the machining precision is controlled within ±0.02 mm. Two convex grooves are precisely machined on the outer wall of each sleeve 2, with a width of 2 mm and a height of 1 mm, which form an interference fit with the positioning groove on the inner wall of the main body 1. The top of each sleeve 2 is designed with a fixed ring, and the inner diameter of the ring is 1 mm smaller than the inner diameter of the sleeve 2, i.e. 29 mm, 24 mm and 19 mm respectively. The thickness of the ring is 1 mm.

[0035] The base assembly 3 is composed of a bottom plate 5 and three compression springs 4. The bottom plate 5 is made of the same 7075 aluminum alloy material as the main body 1, and has a 35 mm through hole in the center. Three spring 4 mounting seats are evenly arranged on the bottom plate 5. The spring force coefficient of each spring 4 is 100 N / m, and the compression deformation is 5 mm, which can provide stable support pressure for the sample. The bottom plate 5 is tightly connected with the main body 1 by four M4x5 mm stainless steel screws 6, and the tightening torque is controlled within 2 Nm.

[0036] Further, the positioning groove on the inner wall of the main body 1 has a width of 2 mm, a depth of 1 mm and a machining precision of ±0.02 mm, and is symmetrically distributed along the diagonal line.

[0037] The sleeve 2 is made of 6061 aluminum alloy material, and the top is provided with a fixed ring, and the inner diameter of the ring is 1 mm smaller than the inner diameter of the sleeve 2, and the thickness is 1 mm.

[0038] Further, the sleeve 2 forms a 0.5 mm gap fit with the inner hole of the main body 1, and the interference fit tolerance of the sleeve 2 outer wall convex groove and the main body 1 groove is controlled within ±0.02 mm.

[0039] Further, the surfaces of the main body 1, the sleeve 2 and the base assembly 3 are subjected to conductive anodizing treatment, and the thickness of the oxidation layer is 10-15 μm.

[0040] The mating surface of the sleeve 2 and the main body 1 and the contact surface of the base spring 4 are provided with a gold plating layer with a thickness of 0.5 μm.

[0041] Further, after all parts are precisely machined, surface treatment is required. First, sand blasting treatment is carried out to remove surface machining marks, and then conductive anodizing treatment is carried out, with the thickness of the oxidation layer controlled within 10-15 μm. Gold plating treatment is carried out on the key contact surface (such as the mating surface of the sleeve 2 and the main body 1), with the thickness of the plating layer being 0.5 μm, to ensure good electrical conductivity.

[0042] Further, in use, according to the sample size, the corresponding sleeve 2 is selected, if it is a 35mm sample, it can be directly placed on the ring at the top of the main body 1; if it is necessary to test a sample of 30mm, 25mm or 20mm, the sleeve 2 with the corresponding inner diameter is selected, the convex groove of the sleeve 2 is aligned with the concave groove of the inner wall of the main body 1, and the sleeve 2 is gently inserted to complete the installation. The spring 4 of the base can automatically apply a proper pressing force to the sample, so as to ensure that the position of the sample is stable during the test.

[0043] Finally, it should be noted that: the above examples are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A sleeve-type scanning electron microscope stage, characterized by, The utility model relates to a kind of sample observation device, including: Main body, sleeve, base assembly; The main body is made of 7075 aviation grade aluminum alloy, and is in the form of a cube structure, with a size of 50mm×50mm×15mm, and a cylindrical through-hole with a diameter of 35mm is arranged at the center thereof;A circular ring structure with a diameter of 34mm and a thickness of 1mm is arranged at the top of the main body; The sleeve includes at least three sleeves with different specifications, and the outer diameter of each sleeve is uniformly 34.5mm, the height is 15mm, and the inner diameter is 30mm, 25mm and 20mm respectively;A convex groove with a width of 2mm and a height of 1mm is arranged on the outer wall of the sleeve, and the convex groove is in interference fit with the positioning groove arranged along the diagonal line on the inner wall of the main body; The base assembly is fixedly connected to the main body by four M4 screws, and three compression springs are arranged in the base in a uniform distribution, with a spring elastic coefficient of 100N / m and a compression deformation of 5mm.

2. A sleeve-type scanning electron microscope specimen holder according to claim 1, wherein, The positioning groove on the inner wall of the main body has a width of 2mm and a depth of 1mm, with a machining precision of ±0.02mm, and is symmetrically distributed along the diagonal line; The sleeve is made of 6061 aluminum alloy material, and a fixed circular ring is arranged at the top of the sleeve, with an inner diameter of the circular ring being 1mm smaller than the inner diameter of the sleeve and a thickness of 1mm.

3. A sleeve-type scanning electron microscope specimen holder according to claim 2, wherein, The sleeve and the inner hole of the main body form a gap fit of 0.5mm, and the interference fit tolerance between the convex groove on the outer wall of the sleeve and the groove on the main body is controlled within ±0.02mm.

4. A sleeve-type scanning electron microscope specimen holder according to claim 2, wherein, The base plate of the base assembly is made of 7075 aviation grade aluminum alloy, with a through-hole with a diameter of 35mm arranged at the center thereof, and is connected to the main body by M4×5mm stainless steel screws, with a tightening torque of 2Nm.

5. A sleeve-type scanning electron microscope specimen holder according to claim 2, wherein, The surfaces of the main body, the sleeve and the base assembly are subjected to conductive anodic oxidation treatment, with an oxidation layer thickness of 10-15μm; The mating surface of the sleeve and the main body and the spring contact surface of the base are provided with a gold plating layer with a thickness of 0.5μm.

6. A sleeve-type scanning electron microscope specimen holder according to claim 1, wherein, The inner diameters of the fixed circular rings at the top of the sleeve are 29mm, 24mm and 19mm respectively, for preventing the sample from falling off and maintaining the integrity of the observation field of view.

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