Full-automatic sample taking and sending mechanism and scanning electron microscope system

Abstract

The invention relates to the technical field of material receiving and feeding of scanning electron microscopes, in particular to a full-automatic sample taking and feeding mechanism and a scanning electron microscope system.The full-automatic sample taking and feeding mechanism comprises a sampling assembly, a pre-pumping chamber assembly and a sample feeding assembly; the sampling assembly comprises a moving module and a clamping module, the moving module is connected with the clamping module and is used for driving the clamping module to move along a set path, and the clamping module is used for clamping a sample; the pre-extraction chamber assembly comprises a pre-extraction chamber body, the pre-extraction chamber body comprises a sample inlet and a sample feeding port, and a sample clamped by the clamping module enters the pre-extraction chamber body through the sample inlet; the sample feeding assembly comprises a telescopic module, and the telescopic module is arranged in the pre-extraction chamber body and used for pushing the sample from the sample feeding opening to the main cavity or pulling the sample back into the pre-extraction chamber body from the sample feeding opening. The sample taking and sending operation is fully automatically completed, the detection efficiency of the sample can be improved, the time cost is reduced, the sample operation is stable and reliable, and the interference to the operation of the electron microscope can be reduced.

Description

Technical Field

[0001] This application relates to the field of scanning electron microscope (SEM) material feeding technology, and in particular to a fully automatic sample feeding mechanism and SEM system. Background Technology

[0002] A microscope is an optical instrument that uses lenses or electron beams to magnify tiny objects, making microscopic structures (such as cells, bacteria, and nanomaterials) invisible to the naked eye clearly visible. Among them, scanning electron microscopy (SEM) has a wide range of applications, possessing nanoscale characterization capabilities and is commonly used in life sciences, semiconductors, and materials science.

[0003] When using a scanning electron microscope, the sample needs to be placed in the detection position and then removed after the detection is completed. Currently, sample handling is mostly done manually or semi-automatically, which has drawbacks such as high human intervention, low efficiency, inconvenience, and limited sample capacity. Summary of the Invention

[0004] To address at least the above-mentioned technical problems in the prior art, this application provides a fully automated sample delivery mechanism and a scanning electron microscope system.

[0005] This application provides a fully automatic sample collection and delivery mechanism, including a sampling component, a pre-extraction chamber component, and a delivery component. The sampling component includes a moving module and a clamping module. The moving module is connected to the clamping module and is used to drive the clamping module to move along a set path. The clamping module is used to clamp a sample. The pre-extraction chamber component includes a pre-extraction chamber body, which includes an inlet and a delivery port. The sample clamped by the clamping module enters the pre-extraction chamber body through the inlet. The delivery component includes a telescopic module, which is disposed within the pre-extraction chamber body and is used to push the sample from the delivery port into the main chamber, or to pull the sample from the delivery port back into the pre-extraction chamber body.

[0006] In some embodiments, the top of the pre-extraction chamber body includes an operation panel, and the sample inlet is located on the operation panel; the top surface of the operation panel also includes a sample placement position for storing samples.

[0007] In some embodiments, the injection port and the sample placement position are spaced apart along the length of the pre-extraction chamber body; the moving module includes a lateral moving structure and a vertical moving structure, the vertical moving structure is connected to the lateral moving structure, and the clamping module is connected to the vertical moving structure; the lateral moving structure is located on one side of the operation panel and is used to drive the vertical moving structure and the clamping module to move and switch between the injection port and the sample placement position, and the vertical moving structure is used to drive the clamping module to reciprocate along a direction perpendicular to the operation panel.

[0008] In some embodiments, a sample base is further included for carrying the sample; the clamping module is used to clamp the sample base to enable movement of the sample.

[0009] In some embodiments, the pre-extraction chamber body is provided with a support platform for supporting the sample base; the telescopic module includes a push rod and a linear drive structure, the push rod is connected to the linear drive structure and is located above the support platform; the sample delivery port is provided on the side wall of the pre-extraction chamber body and is located on the moving path of the push rod, the linear drive structure drives the push rod to reciprocate, for pushing the sample base and sample from the sample delivery port to outside the pre-extraction chamber body, or for pulling the sample base and sample from the sample delivery port back into the pre-extraction chamber body.

[0010] In some embodiments, the side of the sample base facing the push rod is the connecting side, and the end of the push rod is detachably connected to the connecting side; when the push rod pushes or pulls back the sample base, the push rod is connected to the connecting side, and when the sample base moves to a set position, the push rod is separated from the connecting side.

[0011] In some embodiments, the connecting side is provided with a connecting hole and at least two movable clamping blocks, and a plurality of the movable clamping blocks are arranged radially around the connecting hole. Each movable clamping block includes an extension extending toward the center of the connecting hole, and the side of the extension away from the connecting side includes a first engaging surface. The end of the push rod is provided with a sampling rod arranged along the length direction of the push rod, and the end of the sampling rod is provided with a sampling head extending radially along the sampling rod. The side of the sampling head away from the end face of the sampling head includes a second engaging surface. When the push rod is connected to the connecting side, the sampling head is located in the connecting hole, and the first engaging surface is used to fit and limit the second engaging surface.

[0012] In some embodiments, the movable clamping block is connected to a driving member, and the driving member applies a force to the movable clamping block to keep the movable block moving towards the center of the connecting hole; the extension includes a first guide slope on the side of the same side as the connecting side, and the end face of the sampling head includes a second guide slope, the first guide slope and the second guide slope have the same inclination direction; a sample removal block is also sleeved on the sampling rod, the sample removal block is located between the sampling head and the end of the push rod and is movably connected to the sampling rod, the sample removal block has a contact surface on the side facing the sampling head and a sample removal slope on the side away from the sampling head; the push rod and the When the connecting side switches from a separated state to a connected state, the second guide slope fits against the first guide slope and drives the movable clamping block to move away from the connecting hole until the sampling head slides into the connecting hole; when the push rod switches from a connected state to a separated state from the connecting side, the push rod continues to move towards the connecting hole, causing the sample removal block to slide into the connecting hole. Subsequently, the push rod moves in the opposite direction, the second snap-fit ​​surface fits against the fitting surface, and the sample removal block drives the movable clamping block to move away from the connecting hole through the sample removal slope until the sample removal block and the sampling head slide outside the connecting hole.

[0013] In some embodiments, the sample placement position includes a limiting groove; the limiting groove has a set length and the width of the limiting groove is the same as the bottom width of the sample base, and the sample base is placed in the limiting groove.

[0014] This application also provides a scanning electron microscope system, including the aforementioned fully automated sample delivery mechanism.

[0015] This application provides a fully automated sample loading and unloading mechanism and scanning electron microscope system. In use, a moving module drives a clamping module to move, clamping the sample from the loading position to the sample inlet and into the pre-evacuation chamber. A pre-vacuum operation is performed in the pre-evacuation chamber. Once the vacuum value reaches the required level, a telescopic module pushes the sample from the sample inlet to the main chamber. After the operation is completed in the main chamber, the telescopic module extends into the main chamber and pulls the sample back from the sample inlet into the pre-evacuation chamber. Finally, the moving module and clamping module perform the unloading operation. This technical solution automates the sample loading and unloading process, improving sample detection efficiency, reducing time costs, ensuring stable and reliable sample operation, and minimizing interference with electron microscope operation. Attached Figure Description

[0016] The above and other objects, features, and advantages of exemplary embodiments of this application will become readily apparent from the following detailed description taken in conjunction with the accompanying drawings. Several embodiments of this application are illustrated in the drawings by way of example and not limitation, in which: In the accompanying drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0017] Figure 1 This is a schematic diagram of the structure of the fully automated sampling mechanism provided in the embodiments of this application; Figure 2 This is a schematic diagram of the sampling component in the fully automated sampling mechanism provided in the embodiments of this application; Figure 3 This is a schematic diagram of the pre-extraction chamber component in the fully automated sampling and delivery mechanism provided in the embodiments of this application; Figure 4 This is a schematic diagram of the sample delivery component in the fully automated sample delivery mechanism provided in the embodiments of this application; Figure 5 This is a cross-sectional view of the sampling rod in the fully automatic sampling and delivery mechanism provided in the embodiments of this application; Figure 6 This is a cross-sectional view of the connecting side of the fully automated sampling mechanism provided in the embodiments of this application; Figure 7 A schematic diagram of the fully automatic sampling mechanism provided in this application embodiment, showing the push rod connected to the connecting side; Figure 8 This is a schematic diagram of the fully automatic sampling mechanism provided in this application embodiment, in which the push rod is separated from the connecting side.

[0018] In the picture: 10: Sampling assembly; 20: Pre-extraction chamber assembly; 30: Sample delivery assembly; 40: Sample base; 11: Moving module; 111: Lateral moving structure; 112: Vertical moving structure; 12: Clamping module; 21: Pre-extraction chamber body; 22: Sample inlet; 23: Sample delivery port; 24: Operation panel; 25: Sample placement position; 26: Support platform; 27: Limiting slide groove; 31: Telescopic module; 311: Push rod; 312: Linear drive structure; 32: Sampling rod; 321: Sampling head; 322: Second snap-fit ​​surface; 323: Second guide slope; 33: Sample release block; 331: Fitting surface; 332: Sample release slope; 41: Connecting side; 42: Connecting hole; 43: Movable clamping block; 44: Extension; 441: First snap-fit ​​surface; 442: First guide slope. Detailed Implementation

[0019] To make the objectives, features, and advantages of this application more apparent and understandable, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] This application provides a fully automatic sample taking and delivering mechanism, including a sampling component, a pre-vacuum chamber component, and a delivery component. The sampling component adopts automated movement to complete the sample taking operation and places the sample in the pre-vacuum chamber component. After the sample completes the pre-vacuum operation in the pre-vacuum chamber component, the delivery component completes the sample delivery operation. The entire operation process is completed automatically without manual intervention.

[0021] The following description, in conjunction with the accompanying drawings, details the components, positional relationships, and connection relationships of the fully automated sampling mechanism provided in the embodiments of this application.

[0022] like Figure 1 As shown in the embodiment of this application, the sampling component 10 is located above or to one side of the pre-vacuum chamber component 20. The sampling operation is completed above the pre-vacuum chamber component 20. The sample delivery component 30 is located inside the pre-vacuum chamber component 20. After the sample has completed the pre-vacuum operation in the pre-vacuum chamber component 20, the sample is delivered to the pre-vacuum chamber component 20 through the sample delivery component 30.

[0023] like Figure 1 and Figure 2 As shown in the embodiment of this application, the sampling component 10 includes a moving module 11 and a clamping module 12. The moving module 11 is connected to the clamping module 12 and is used to drive the clamping module 12 to move along a set path. The clamping module 12 is used to clamp the sample.

[0024] For example, the moving module 11 is a multi-dimensional linear moving module or a multi-axis robotic arm, which can drive the clamping module 12 to move along a set path. The set path can be understood as the clamping module 12 moving along the set path, which can complete the sample from the picking position to the pre-extraction chamber assembly 20.

[0025] For example, the moving module 11 includes a horizontal moving structure 111 and a vertical moving structure 112, the vertical moving structure 112 is connected to the horizontal moving structure 111, and the clamping module 12 is connected to the vertical moving structure; the horizontal moving structure 111 and the vertical moving structure 112 are linear lead screw structures.

[0026] For example, the clamping module 12 includes two opposing grippers, at least one of which is connected to a telescopic structure, such as a telescopic cylinder. Under the action of the telescopic structure, the two grippers can move towards each other or in opposite directions, thereby completing the clamping or releasing action.

[0027] like Figure 1 and Figure 3 As shown in the embodiment of this application, the pre-vacuum chamber assembly 20 includes a pre-vacuum chamber body 21, which includes a sample inlet 22 and a sample delivery port 23. The sample held by the clamping module 12 enters the pre-vacuum chamber body 21 through the sample inlet 22. Subsequently, the sample undergoes pre-vacuum treatment in the sample inlet 22 to complete the preliminary degassing and pressure transition steps. The pre-vacuum chamber body 21 is also equipped with a vacuum generating device and a gas path connection with the vacuum generating device.

[0028] For example, the top of the pre-extraction chamber body 21 includes an operation panel 24, and the sample inlet 22 is located on the operation panel 24; the top surface of the operation panel 24 also includes a sample placement position 25, which is used to store samples.

[0029] A sample is placed in the sample placement position 25, and the sampling component 10 is used above the operation panel 24 to pick up and move the sample stored in the sample placement position 25 to the sample inlet 22. For example, multiple samples are placed side by side in the sample placement position 25, and the sampling component 10 can be used to perform continuous sampling operations.

[0030] For example, in this embodiment of the application, the sample is configured with a sample base 40 to support the sample; when the sampling component 10 and the sample delivery component 30 move the sample, the sample base 40 needs to be moved, and the sample base 40 is used to drive the sample to move synchronously.

[0031] For example, a limiting groove 27 is provided on the operation panel 24; the limiting groove 27 has a set length, and the width of the limiting groove 27 is the same as the bottom width of the sample base 40, and the sample base 40 is placed in the limiting groove 27. Multiple sample bases 40 can be arranged side by side in the limiting groove 27. The position of the limiting groove 27 is the sample placement position 25, and the limiting groove 27 is used to limit the sample base 40.

[0032] For example, clamping points are set on both sides of the sample base 40, and the clamping module 12 is used to clamp the sample base 40 to realize the movement of the sample. The gripper is provided with a clamping end face that mates with the clamping point. The clamping end face and the clamping point cooperate to complete the stable connection between the gripper and the sample base 40.

[0033] In this embodiment, the inlet 22 and the sample placement position 25 are spaced apart along the length of the pre-extraction chamber body 21; the lateral moving structure 111 is located on one side of the operation panel 24 and is used to drive the vertical moving structure 112 and the clamping module 12 to move and switch between the inlet 22 and the sample placement position 25. The vertical moving structure 112 is used to drive the clamping module 12 to reciprocate along the direction perpendicular to the operation panel 24.

[0034] The injection port 22 and the sample placement position 25 are on the same straight line. When switching between the two positions, a lateral moving structure 111 can be used for movement. When reaching the injection port 22 or the sample placement position 25, the vertical moving structure 112 is used to move along the direction perpendicular to the injection port 22 or the sample placement position 25.

[0035] In this embodiment, valve structures are respectively configured on the sample inlet 22 and the sample delivery port 23. When the valve structures close the sample inlet 22 and the sample delivery port 23, the interior of the pre-vacuum chamber body 21 is in a closed state, and a pre-vacuum operation is performed in the closed state. When the valve structures are open, sample injection or sample delivery operations can be performed.

[0036] like Figure 1 and Figure 4 As shown in the embodiment of this application, the sample delivery component 30 includes a telescopic module 31, which is disposed in the pre-extraction chamber body 21 and is used to push the sample from the sample delivery port 23 to the main chamber, or to pull the sample from the sample delivery port 23 back into the pre-extraction chamber body 21.

[0037] For example, the telescopic module 31 includes a push rod 311 and a linear drive structure 312. The linear drive structure 312 is a linear drive screw, one end of which is connected to a drive motor. A slider is mounted on the screw, and as the drive motor operates, the slider can reciprocate. The push rod 311 is connected to the slider, thus enabling reciprocating movement. The push rod 311 is located above the support platform 26. The sample delivery port 23 is located on the side wall of the pre-extraction chamber body 21 and along the movement path of the push rod 311. The linear drive structure 312 drives the push rod 311 to reciprocate, used to push the sample base 40 and the sample from the sample delivery port 23 to outside the pre-extraction chamber body 21, or to pull the sample base 40 and the sample back into the pre-extraction chamber body 21 from the sample delivery port 23.

[0038] Continue to refer to Figure 4As shown, push rod 311 is located above the lead screw, and the two are arranged parallel to each other. A slide rail structure can be installed at the bottom of the slider to ensure stable operation of the slider. A support platform 26 is provided inside the pre-extraction chamber body 21, which supports the sample base 40. As shown in the figure, the support platform 26 is located above the drive motor. After the sample base 40 is placed on the support platform 26, the end of push rod 311 is positioned opposite to the sample base 40. The movement of push rod 311 forms a travel distance that meets the sample loading and unloading requirements of the sample base 40 (and the sample on it).

[0039] In this embodiment, the push rod 311 needs to perform a pick-up and drop-off operation on the sample base 40. That is, after the sample base 40 is sent into the main cavity, it needs to be separated from the push rod 311. When the sample base 40 needs to be pulled back into the pre-extraction chamber body 21, it needs to be connected to the push rod 311. The specific implementation structure is as follows: like Figures 5 to 8 As shown in this embodiment, the side of the sample base 40 facing the push rod 311 is the connecting side 41, and the end of the push rod 311 is detachably connected to the connecting side 41. When the push rod 311 pushes or pulls back the sample base 40, the push rod 311 is connected to the connecting side 41. When the sample base 40 moves to the set position, the push rod 311 is separated from the connecting side 41.

[0040] For example, the connecting side 41 is provided with a connecting hole 42 and at least two movable clamping blocks 43. The multiple movable clamping blocks 43 are arranged radially around the connecting hole 42. The movable clamping block 43 includes an extension 44 extending toward the center of the connecting hole 42. The side of the extension 44 away from the connecting side 41 includes a first snap-fit ​​surface 441. The end of the push rod 311 is provided with a sampling rod 32 arranged along the length direction of the push rod 311. The end of the sampling rod 32 is provided with a sampling head 321 extending radially along the sampling rod 32. The side of the sampling head 321 away from the end face of the sampling head 321 includes a second snap-fit ​​surface 322. When the movable clamping block 43 separates, the sampling head 321 enters the connecting hole 42. Then, the movable clamping block 43 resets, limiting the sampling head 321. At this time, when the push rod 311 is connected to the connecting side 41, the sampling head 321 is located inside the connecting hole 42, and the first locking surface 441 is used to fit and limit the sampling head 321 with the second locking surface 322. Conversely, when the movable clamping block 43 separates, the sampling head 321 exits the connecting hole 42. The movable clamping block 43 can be electrically driven or passively moved. The passive movement method is as follows: Continue to refer to Figures 5 to 8As shown in the embodiment of this application, the movable clamping block 43 is connected to the driving member, and the driving member applies a force to the movable clamping block 43 to keep the movable block moving towards the center of the connecting hole 42; the side of the extension 44 that is on the same side as the connecting side 41 includes a first guide slope 442, and the end face of the sampling head 321 includes a second guide slope 323. The first guide slope 442 and the second guide slope 323 have the same inclination direction; a sample removal block 33 is also sleeved on the sampling rod 32. The sample removal block 33 is located between the end of the sampling head 321 and the push rod 311 and is movably connected to the sampling rod 32. The side of the sample removal block 33 facing the sampling head 321 has a contact surface 331, and the side away from the sampling head 321 has a sample removal slope 332.

[0041] When the push rod 311 switches from a separated state to a connected state with the connecting side 41, the second guide slope 323 fits into the first guide slope 442 and drives the movable clamping block 43 to move away from the connecting hole 42 until the sampling head 321 slides into the connecting hole 42; when the push rod 311 switches from a connected state to a separated state with the connecting side 41, the push rod 311 continues to move towards the connecting hole 42, causing the sample removal block 33 to slide into the connecting hole 42. Then the push rod 311 moves in the opposite direction, the second snapping surface 322 fits into the fitting surface 331, and the sample removal block 33 is driven to move the movable clamping block 43 away from the connecting hole 42 through the sample removal slope 332 until the sample removal block 33 and the sampling head 321 slide out of the connecting hole 42.

[0042] When the sample base 40 is placed inside the pre-extraction chamber body 21, the push rod 311 moves towards the connecting side 41. As the push rod 311 moves, the movable clamping block 43 gradually separates under the cooperation of the second guide slope 323 and the first guide slope 442, and the sampling head 321 slides into the connecting hole 42. At this time, the second guide slope 323 and the first guide slope 442 separate, and the movable clamping block 43 automatically resets. When it is necessary to send the sample base 40 and the sample into the main chamber, the push rod 311 continues to move towards the sample base 40, and the end of the sampling head 321 abuts against the inner wall of the connecting hole 42. As the push rod 311 continues to move, the sample base 40 and the sample are pushed a certain distance until they are inside the main chamber.

[0043] After the sample base 40 and the sample enter the main chamber, the push rod 311 needs to be removed. As the push rod 311 continues to move toward the sample base 40, the end of the push rod 311 will slide the sample removal block 33 into the connecting hole 42. When the sample removal block 33 slides into the connecting hole 42, the movable clamping block 43 will also separate and reset. Subsequently, the push rod 311 moves away from the sample base 40, and the second locking surface 322 is in contact with the mating surface 331. For example, a groove of a certain depth can be provided on the mating surface 331, and the second locking surface 322 can be locked into the groove. During the withdrawal process, the sample removal inclined surface 332 drives the movable clamping block 43 to move away from the connecting hole 42. After reaching the limit position, the movable clamping block 43 resets to the first guide inclined surface 442, and the push rod 311 continues to move until the push rod 311 moves into the pre-extraction chamber body 21. When it is necessary to retrieve the sample base 40 and sample from the main chamber, the push rod 311 moves into the main chamber, the sampling head 321 enters the connecting hole 42, and then the push rod 311 stops moving. At this time, the sample removal block 33 does not enter the connecting hole 42, the push rod 311 moves in the opposite direction, and the second locking surface 322 locks into the position of the first locking surface 441. As the push rod 311 continues to move, the sample base 40 and sample can be pulled back from the main chamber to the pre-extraction chamber body 21.

[0044] When separation is required within the pre-extraction chamber body 21, the push rod 311 continues to move into the connection hole 42 until the sample removal block 33 enters the connection hole 42. Then, the push rod 311 is moved in the opposite direction to separate the push rod 311 (sampling rod 32) from the connection hole 42.

[0045] In this embodiment, the travel distance of the push rod 311 can be preset to achieve precise control over the movement distance of the push rod 311. For example, by precisely controlling the movement distance, it can be ensured that the sampling head 321 enters the connection hole 42 while the sample removal block 33 does not enter the connection hole 42, or that both the sampling head 321 and the sample removal block 33 enter the connection hole 42.

[0046] This application provides a scanning electron microscope (SEM) system, including the aforementioned fully automated sample loading and unloading mechanism. The SEM system further includes a main chamber with an opening opposite to the sample loading port 23. The sample base 40 and sample delivered from the sample loading port 23 can enter or exit the main chamber through this opening.

[0047] Sampling procedure: 1. Use manual labor or a robotic arm to place multiple sample bases 40 and samples on the sample placement position 25; 2. When the sampling component 10 is running, the valve of the inlet 22 is opened, and the sample base 40 and the sample are placed in the pre-vacuum chamber body 21. Then the valve is closed, and the pre-vacuum treatment begins. 3. Once the vacuum value reaches the standard, the valve of the sample delivery port 23 is opened, and the sample delivery component 30 operates to send the sample base 40 into the main chamber, completing this sample delivery process; Inside the main chamber, a high-energy electron beam generated by a scanning electron microscope is used to scan the sample.

[0048] Sample removal process: When the valve of the sample delivery port 23 is opened, the sample delivery component 30 runs and re-enters the main chamber, pulling the sample base 40 and sample in the main chamber back into the pre-extraction chamber body 21. Then, the valve of the sample inlet 22 is opened, and the sample base 40 and sample are delivered to the sample placement position 25 through the sampling component 10, thus completing the current sampling process and proceeding to the next sampling and delivery cycle.

[0049] This application provides a fully automated sample loading and unloading mechanism and scanning electron microscope (SEM) system. In use, the moving module 11 drives the clamping module 12 to move, clamping the sample from the loading position to the sample inlet 22, and then into the pre-vacuum chamber body 21. A pre-vacuuming operation is performed within the pre-vacuum chamber body 21. Once the vacuum value reaches the standard, the telescopic module 31 pushes the sample from the sample delivery port 23 into the main chamber. After the operation is completed in the main chamber, the telescopic module 31 extends into the main chamber and pulls the sample back from the sample delivery port 23 into the pre-vacuum chamber body 21. Finally, the moving module 11 and clamping module 12 are used for the unloading operation. This technical solution automates the sample loading and unloading operation, improving sample detection efficiency, reducing time costs, ensuring stable and reliable sample operation, and minimizing interference with SEM operation.

[0050] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of those different embodiments or examples.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0052] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A fully automatic sample taking and delivering mechanism, characterized in that, The sampling assembly (10), the pre-extraction chamber assembly (20) and the sample feeding assembly (30) are included. The sampling assembly (10) includes a moving module (11) and a clamping module (12), the moving module (11) is connected with the clamping module (12) and is used to drive the clamping module (12) to move along a set path, and the clamping module (12) is used to clamp a sample; The pre-extraction chamber assembly (20) includes a pre-extraction chamber body (21), the pre-extraction chamber body (21) includes a sample inlet (22) and a sample outlet (23), and the sample clamped by the clamping module (12) enters the pre-extraction chamber body (21) through the sample inlet (22); The sample feeding assembly (30) includes a telescopic module (31), the telescopic module (31) is arranged in the pre-extraction chamber body (21) and is used to push the sample from the sample outlet (23) to a main chamber or to pull the sample from the sample outlet (23) back to the pre-extraction chamber body (21).

2. The fully automatic sample handling mechanism according to claim 1, characterized in that The top of the pre-extraction chamber body (21) includes an operation panel (24), and the sample inlet (22) is located on the operation panel (24); The top surface of the operation panel (24) further includes a sample placement position (25), and the sample placement position (25) is used to store a sample.

3. The fully automatic sample handling mechanism according to claim 2, characterized in that The sample inlet (22) and the sample placement position (25) are arranged at intervals along the length direction of the pre-extraction chamber body (21); The moving module (11) includes a horizontal moving structure (111) and a vertical moving structure (112), the vertical moving structure (112) is connected with the horizontal moving structure (111), and the clamping module (12) is connected with the vertical moving structure (112); The horizontal moving structure (111) is arranged on one side of the operation panel (24) and is used to drive the vertical moving structure (112) and the clamping module (12) to move and switch between the sample inlet (22) and the sample placement position (25), and the vertical moving structure (112) is used to drive the clamping module (12) to reciprocate along a direction perpendicular to the operation panel (24).

4. The fully automatic sample handling mechanism according to claim 3, characterized in that A sample base (40) is further included and is used to carry a sample; The clamping module (12) is used to clamp the sample base (40) to realize the movement of the sample.

5. The fully automated sample handling mechanism of claim 4, wherein, A support platform (26) is arranged in the pre-extraction chamber body (21), and the support platform (26) is used to carry the sample base (40); The telescopic module (31) includes a push rod (311) and a linear driving structure (312), the push rod (311) is connected with the linear driving structure (312), and the push rod (311) is located above the support platform (26). The sample port (23) is arranged on the side wall of the pre-extraction chamber body (21) and is located on the moving path of the push rod (311). The linear drive structure (312) drives the push rod (311) to reciprocally move, so as to push the sample base (40) and the sample out of the sample port (23) or pull the sample base (40) and the sample back into the sample port (23).

6. The fully automated sample handling mechanism of claim 5, wherein, The side of the sample base (40) facing the push rod (311) is a connecting side (41), and the end of the push rod (311) is detachably connected with the connecting side (41). When the push rod (311) pushes or pulls the sample base (40), the push rod (311) is in a connected state with the connecting side (41), and when the sample base (40) moves to a set position, the push rod (311) is in a separated state with the connecting side (41).

7. The fully automated sample handling mechanism of claim 6, wherein, The connecting side (41) is provided with a connecting hole (42) and at least two movable clamping blocks (43). The movable clamping blocks (43) are arranged around the connecting hole (42) in a diverging manner. The movable clamping blocks (43) include an extension part (44) extending towards the center of the connecting hole (42). The side of the extension part (44) away from the connecting side (41) includes a first clamping surface (441). The end of the push rod (311) is provided with a sampling rod (32) arranged along the length direction of the push rod (311). The end of the sampling rod (32) is provided with a sampling head (321) extending along the radial direction of the sampling rod (32). The side of the sampling head (321) away from the end face of the sampling head (321) includes a second clamping surface (322). When the push rod (311) is in a connected state with the connecting side (41), the sampling head (321) is located in the connecting hole (42), and the first clamping surface (441) is used to abut against the second clamping surface (322) to limit.

8. The fully automated sample handling mechanism of claim 7, wherein, The movable clamping blocks (43) are connected with driving members. The driving members apply a force to the movable clamping blocks (43), so that the movable clamping blocks move towards the center of the connecting hole (42). The side of the extension part (44) on the same side as the connecting side (41) includes a first guide inclined surface (442), and the end face of the sampling head (321) includes a second guide inclined surface (323). The inclination directions of the first guide inclined surface (442) and the second guide inclined surface (323) are the same. The sampling rod (32) is further sleeved with a sample removing block (33). The sample removing block (33) is located between the sampling head (321) and the end of the push rod (311) and is movably connected with the sampling rod (32). The side of the sample removing block (33) facing the sampling head (321) is provided with an abutting surface (331), and the side of the sample removing block (33) away from the sampling head (321) is provided with a sample removing inclined surface (332). When the push rod (311) and the connecting side (41) are switched from the separated state to the connected state, the second guide inclined surface (323) is in contact with the first guide inclined surface (442), and the movable clamp block (43) is driven to move away from the connecting hole (42) until the sampling head (321) slides into the connecting hole (42); when the push rod (311) and the connecting side (41) are switched from the connected state to the separated state, the push rod (311) continues to move towards the connecting hole (42), so that the sample removal block (33) slides into the connecting hole (42), and then the push rod (311) moves reversely, the second clamping surface (322) is in contact with the abutting surface (331), the sample removal block (33) drives the movable clamp block (43) to move away from the connecting hole (42) through the sample removal inclined surface (332) until the sample removal block (33) and the sampling head (321) slide out of the connecting hole (42).

9. The fully automated sample handling mechanism of claim 4, wherein, The sample placement site (25) comprises a limiting sliding groove (27); The limiting sliding groove (27) has a set length, and the width of the limiting sliding groove (27) is the same as the width of the bottom of the sample base (40), and the sample base (40) is placed in the limiting sliding groove (27).

10. A scanning electron microscope system, characterized by, The full-automatic sample taking and conveying mechanism comprises the full-automatic sample taking and conveying mechanism according to any one of claims 1 to 9.

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