Wet-process silicon wafer basket convenient to dry

Abstract

The utility model relates to the technical field of silicon wafer flower baskets, in particular to a wet-process silicon wafer flower basket convenient to dry. The utility model provides a wet-process silicon wafer flower basket convenient for drying, which comprises end plates and a plurality of toothed bars, the two end plates are oppositely arranged, and two ends of each toothed bar are respectively fixed on the side walls of the two end plates; every two toothed bars form a group, and the oppositely arranged toothed bars are suitable for limiting silicon wafers; a plurality of air holes are formed in one end plate, the two ends of each air hole are each provided with a conical slope, and the conical slopes are suitable for guiding liquid in the air holes to flow outwards. Through the drainage grooves, liquid on the end plates can flow away easily, liquid carrying is prevented, and the drying time of the flower basket in the later period is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer flower basket, specifically to a wet method silicon wafer flower basket convenient to dry. BACKGROUND

[0002] The flower basket is a kind of production tool widely used in the semiconductor manufacturing field such as solar cell, IC chip, LED chip, etc., and is mainly used for the storage, etching and carrying of wafer, and mainly includes square flower basket and circular flower basket, which is used in photovoltaic industry to carry solar silicon wafer.

[0003] After the flower basket carries silicon wafer, it is soaked in solution. In order to accelerate the drying efficiency of silicon wafer, ventilation holes are usually arranged on the end plates at both ends of the flower basket. When the flower basket is taken out of the solution, there will be liquid accumulation in the ventilation holes of the end plates. The liquid accumulation on the end plate will affect the drying time of the flower basket. Therefore, it is necessary to develop a wet method silicon wafer flower basket convenient to dry. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a wet method silicon wafer flower basket convenient to dry to solve the above problems.

[0005] In order to achieve the above purpose, the utility model embodiment provides a wet method silicon wafer flower basket convenient to dry, which comprises:

[0006] The end plates and a plurality of tooth rods are oppositely arranged, and the two ends of the tooth rod are fixed on the side walls of the two end plates;

[0007] Every two tooth rods form a group, and the oppositely arranged tooth rods are suitable for limiting silicon wafer;

[0008] A plurality of air holes are arranged on one end plate, and a conical slope is arranged at the two ends of each air hole, and the conical slope is suitable for guiding the liquid in the air hole to flow outward.

[0009] As a preferred, a plurality of drainage grooves are arranged on the inner wall of the end plate, and one drainage groove corresponds to one air hole;

[0010] The drainage groove is arranged below the air hole.

[0011] As a preferred, a plurality of fixing grooves are arranged on the inner wall of the end plate, and the tooth rod is suitable for being inserted into the fixing groove.

[0012] As a preferred, a glue injection hole is arranged on the outer wall of the end plate, the glue injection hole is communicated with the fixing groove, and after the tooth rod is inserted into the fixing groove, glue is suitable for being transported into the fixing groove through the glue injection hole.

[0013] As a preferred, a conical ring is fixed on the outer wall of the end of the tooth rod, and the outer diameter of the conical ring gradually increases from outside to inside.

[0014] Preferably, the inner wall of the fixing groove is fixed with a fixing ring, and the inner diameter of the fixing ring is not less than the outer diameter of the conical ring.

[0015] Preferably, the distance between the fixing ring and the side wall of the fixing groove is greater than the length of the conical ring, and a gap is arranged between the conical ring and the fixing ring after the conical ring is inserted into the fixing groove.

[0016] Compared with the prior art, the embodiment of the wet-process silicon wafer flower basket convenient to dry has the following beneficial effects: the drainage groove is arranged, liquid on the end plate is beneficial to flow away, liquid is prevented, and the drying time of the flower basket in the later period is shortened; and the cooperation of the fixing ring and the conical ring improves the stability of the fixing time of the tooth rod and the end plate.

[0017] Other features and advantages of the present application will be described in the following description, and some of them will become apparent from the description, or will be understood by those skilled in the art, or will be understood by those skilled in the art through implementation of the present application.

[0018] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0020] Figure 1 A perspective view of a wet-process silicon wafer flower basket convenient to dry of the present application is shown;

[0021] Figure 2 A perspective view of an end plate of the present application is shown;

[0022] Figure 3 A cross-sectional view of the insertion end of the tooth rod of the present application is shown.

[0023] In the drawings:

[0024] 1, tooth rod; 11, conical ring; 12, glue injection hole;

[0025] 2, end plate; 21, air hole; 22, conical slope; 23, drainage groove; 24, fixing groove; 25, fixing ring. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme of the utility model will be described clearly and completely in combination with the drawings below, obviously, the described embodiments are part of the embodiments of the utility model, instead of all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without making creative labor belong to the protection scope of the utility model.

[0027] As Figures 1 to 3 Indicated, the utility model provides a kind of wet-process silicon wafer basket for facilitating drying, comprising: end plate 2 and several rack bars 1, two the end plate 2 is oppositely arranged, and the two ends of the rack bar 1 are respectively fixed in two the end plate 2 side wall;Every two rack bars 1 is a group, and oppositely arranged rack bar 1 is suitable for limiting silicon wafer;Several air holes 21 are set on one end plate 2, and one tapered slope 22 is respectively arranged at the two ends of each air hole 21, and the tapered slope 22 is suitable for guiding the liquid in air hole 21 to flow outward.The inner wall of the end plate 2 is provided with several drainage grooves 23, and one drainage groove 23 corresponds to one air hole 21;The drainage groove 23 is arranged below the air hole 21.An air hole 21 is set on end plate 2, and it is convenient for drying airflow to flow from end plate 2 to the silicon wafer between rack bar 1;And the cooperation of tapered slope 22 and drainage groove 23 is conducive to the flow of liquid in air hole 21, prevents liquid, helps to shorten the drying time of basket in later period.

[0028] Reference is made to the drawings Figure 2 And Figure 3 The inner wall of the end plate 2 is provided with several fixed grooves 24, and the rack bar 1 is suitable for being inserted into the fixed groove 24.The inner diameter of the fixed groove 24 is greater than the outer diameter of the rack bar 1;The outer wall of the end plate 2 is provided with a glue injection hole 12, and the glue injection hole 12 is communicated with the fixed groove 24, and after the rack bar 1 is inserted into the fixed groove 24, glue is suitable for being transported into the fixed groove 24 through the glue injection hole 12.After the rack bar 1 is inserted into the fixed groove 24, glue is transported into the fixed groove 24 through the glue injection hole 12, and the solidified glue is suitable for fixing the rack bar 1 in the fixed groove 24.

[0029] Reference is made to the drawings Figure 3In order to improve the stability of the toothed rod 1 and the end plate 2, the outer wall of the end of the toothed rod 1 is fixed with a tapered ring 11, the outer diameter of the tapered ring 11 gradually increases from outside to inside. The tapered ring 11 extends from the end of the toothed rod 1 to the middle, and the end of the tapered ring 11 abuts against the side wall of the fixed groove 24, and the tapered ring 11 will not block the glue injection hole 12. The inner wall of the fixed groove 24 is fixed with a fixed ring 25, and the inner diameter of the fixed ring 25 is not less than the outer diameter of the tapered ring 11. The fixed ring 25 is arranged at one end of the fixed groove 24 close to the inner wall of the end; the spacing between the fixed ring 25 and the side wall of the fixed groove 24 is greater than the length of the tapered ring 11, and after the tapered ring 11 is inserted into the fixed groove 24, a gap is formed between the tapered ring 11 and the fixed ring 25. After the tapered ring 11 is inserted into the fixed groove 24, a stepped gap is formed between the tapered ring 11 and the fixed ring 25, and the glue in the fixed groove 24 enters through the glue injection hole 12, and the hardened glue forms a stepped shape between the outer wall of the tapered ring 11 and the fixed ring 25, which can improve the stability of the fixing between the toothed rod 1 and the end plate 2.

[0030] Each device (parts without specific structure) selected in the present application is a general standard part or a part known to those skilled in the art, and its structure and principle can be known by technical personnel through a technical manual or through a conventional experimental method. Moreover, the software programs involved in the present application are prior art, and the present application does not involve any improvement on the software programs.

[0031] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, and can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] In the description of the present application, it should be explained that the directions or position relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" are based on the directions or position relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the present application. The devices or elements indicated or implied must have a specific orientation, a specific orientation and operation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0033] In several embodiments provided in the present application, it should be understood that the disclosed system, device and method can be implemented in other manners. The described device embodiments are merely schematic, for example, the division of the units is only a logical function division, and there can be another division manner in actual implementation, for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some communication interfaces, devices or units, and can be electrical, mechanical or other forms.

[0034] The units described as separated components can or can not be physically separated, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purposes of the embodiments of the present application.

[0035] In addition, each functional unit in the various embodiments of the present application can be integrated into one processing unit, or each unit can exist physically, or two or more units can be integrated into one unit.

[0036] With the above ideal embodiments according to the present application as the inspiration, through the above description, relevant personnel can make various changes and modifications without deviating from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents in the specification, and must be determined according to the scope of the claims.

Claims

1. A wet process silicon wafer basket for facilitating drying, characterized by, The utility model relates to a kind of wet-process silicon wafer flower baskets facilitating drying, including: End plate (2) and several tooth bars (1), two the end plate (2) oppositely, the two ends of the tooth bar (1) are fixed in two the end plate (2) side wall respectively; Every two tooth bars (1) are a group, and oppositely arranged tooth bar (1) is suitable for limiting silicon wafer; A plurality of air holes (21) are set on one end plate (2), and a tapered slope (22) is arranged at the two ends of each air hole (21), and the tapered slope (22) is suitable for guiding the liquid in the air hole (21) to flow outward.

2. The wet-process silicon wafer flower basket facilitating drying according to claim 1, characterized in that: A plurality of drainage grooves (23) are formed on the inner wall of the end plate (2), and one drainage groove (23) corresponds to one air hole (21); The drainage groove (23) is arranged below the air hole (21).

3. The wet-process silicon wafer flower basket facilitating drying according to claim 2, characterized in that: A plurality of fixing grooves (24) are formed on the inner wall of the end plate (2), and the tooth bar (1) is suitable for being inserted into the fixing groove (24).

4. The wet-process silicon wafer flower basket facilitating drying according to claim 3, characterized in that: An adhesive injection hole (12) is formed on the outer wall of the end plate (2), the adhesive injection hole (12) is in communication with the fixing groove (24), and after the tooth bar (1) is inserted into the fixing groove (24), the adhesive injection hole (12) is suitable for conveying adhesive into the fixing groove (24).

5. The wet-process silicon wafer flower basket facilitating drying according to claim 4, characterized in that: A tapered ring (11) is fixed on the outer wall of the end of the tooth bar (1), and the outer diameter of the tapered ring (11) gradually increases from outside to inside.

6. The wet-process silicon wafer flower basket facilitating drying according to claim 5, characterized in that: A fixing ring (25) is fixed on the inner wall of the fixing groove (24), and the inner diameter of the fixing ring (25) is not less than the outer diameter of the tapered ring (11).

7. The wet-process silicon wafer flower basket facilitating drying according to claim 6, characterized in that: The distance between the fixing ring (25) and the side wall of the fixing groove (24) is greater than the length of the tapered ring (11), and after the tapered ring (11) is inserted into the fixing groove (24), a gap is provided between the tapered ring (11) and the fixing ring (25).

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