Silicon wafer basket convenient to limit

Abstract

The utility model relates to the technical field of silicon wafer flower baskets, in particular to a silicon wafer flower basket convenient to limit. The utility model provides a silicon wafer flower basket convenient to limit, which comprises two end covers and a plurality of toothed bars, the two end covers are oppositely arranged, and a plurality of fixing grooves matched with the toothed bars are formed in the end covers; the two ends of the toothed bar are suitable for being inserted into the fixing grooves. A positioning block is fixed in each fixing groove, and the positioning blocks are suitable for limiting the toothed bars; through cooperation of the positioning block and the positioning groove, the limiting and fixing effect on the toothed bar is achieved, and after the toothed bar is inserted into the fixing groove, a rack on the side wall of the toothed bar can face the correct direction. Meanwhile, due to the stepped staggered arrangement of the annular grooves and the flow guide grooves, the fixing effect of the toothed bar and the end cover is improved after glue injection welding.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer flower basket, specifically to a silicon wafer flower basket convenient to limit. BACKGROUND

[0002] The silicon wafer flower basket is a production tool widely used in the semiconductor manufacturing field of solar cells, IC chips, LED chips and the like, and is mainly used for wafer storage, etching and handling.

[0003] The existing wet or dry method flower basket end plate and rack rod are connected, the direction of the toothed end of the rack rod cannot be accurately determined, a measuring tool needs to be matched, and if misassembled, rework in the later period will be caused, and efficiency is affected. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a silicon wafer flower basket convenient to limit to solve the above problems.

[0005] In order to realize the above-mentioned purpose, the utility model embodiment provides a silicon wafer flower basket convenient to limit, which comprises:

[0006] Two end covers and a plurality of rack rods, the two end covers are oppositely arranged, a plurality of fixing grooves matched with the rack rods are formed in the end covers;

[0007] Both ends of the rack rod are adapted to be inserted into the fixing groove;

[0008] A positioning block is fixed in each fixing groove, and the positioning block is adapted to limit the rack rod.

[0009] As a preferred, the positioning block is rectangular, and the positioning block protrudes from the inner wall of the fixing groove.

[0010] As a preferred, a flow guide groove is formed in the circumferential wall of the fixing groove, and the diameter of the flow guide groove is greater than the diameter of the fixing groove.

[0011] As a preferred, a positioning groove matched with the positioning block is formed in the end of the rack rod, and the positioning block is adapted to be inserted into the positioning groove.

[0012] As a preferred, a ring groove is formed in the circumferential wall of the end of the rack rod, and the glue is adapted to be injected into the ring groove.

[0013] As a preferred, a glue injection hole is formed in the end of the end cover away from the rack rod, and the glue injection hole is in communication with the flow guide groove.

[0014] As a preferred, after the rack rod is inserted into the fixing groove, the ring groove and the flow guide groove are staggered with each other.

[0015] With respect to the prior art, the embodiment of the silicon wafer basket convenient to limit has the following beneficial effects: through the cooperation of the positioning block and the positioning groove, the limiting and fixing effect of the tooth rod is realized, after the tooth rod is inserted into the fixing groove, the rack of the tooth rod side wall can be towards the correct direction. Meanwhile, the stepped staggered arrangement of the ring groove and the flow guide groove improves the fixing effect of the tooth rod and the end cover after glue injection welding.

[0016] Other features and advantages of the present application will be described in the following description, and some of them will become apparent from the description, or will be understood from the practice of the present application.

[0017] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 A perspective view of a silicon wafer basket convenient to limit of the present application is shown;

[0020] Figure 2 A perspective view of the positioning block in the fixing groove of the present application is shown;

[0021] Figure 3 A perspective view of the fixing groove and the glue injection hole of the present application is shown;

[0022] Figure 4 A partial perspective view of the end part of the tooth rod of the present application is shown;

[0023] Figure 5 A longitudinal sectional view of the fixing groove of the present application is shown.

[0024] In the drawings:

[0025] 1, end cover; 10, fixing groove; 11, positioning block; 12, flow guide groove; 13, glue injection hole;

[0026] 2, tooth rod; 20, positioning groove; 21, ring groove. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme of the utility model will be described clearly and completely in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the scope of protection of the utility model.

[0028] As Figures 1 to 5 The utility model provides a kind of silicon wafer basket of easy to limit, comprising: two end caps 1 and several tooth bars 2, two the end cap 1 is oppositely arranged, the end cap 1 is equipped with several fixed groove 10 compatible with the tooth bar 2;The both ends of the tooth bar 2 are suitable for inserting into the fixed groove 10;Every fixed groove 10 is fixed with a locating block 11, and the locating block 11 is suitable for limiting the tooth bar 2.The locating block 11 is rectangular, and the locating block 11 protrudes the inner wall of the fixed groove 10.The locating groove 20 and the rack of the side wall of tooth bar 2 are 180 degrees.After tooth bar 2 is inserted into fixed groove 10, locating block 11 is suitable for inserting into locating groove 20, to play the effect of limiting tooth bar 2, prevent tooth bar 2 from rotating circumferentially, so that the rack of the side wall of tooth bar 2 can be oriented to correct direction.Herein, correct direction refers to the rack of the side wall of tooth bar 2 is oriented to the other tooth bar 2 oppositely arranged.

[0029] Reference is made to the drawings Figures 3 to 5 In order to improve the stability of the fixed tooth bar 2 and end cap 1, the side wall of the fixed groove 10 is circumferentially provided with a flow guide groove 12, and the diameter of the flow guide groove 12 is greater than the diameter of the fixed groove 10. The glue is suitable for flowing in the flow guide groove 12 and flowing into the ring groove 21 through the flow guide groove 12. The end of the tooth bar 2 is provided with a locating groove 20 compatible with the locating block 11, and the locating groove 20 is provided along the axial direction of the tooth bar 2. The locating block 11 is suitable for inserting into the locating groove 20 to prevent the tooth bar 2 from rotating circumferentially in the fixed groove 10. The outer wall of the end of the tooth bar 2 is circumferentially provided with a ring groove 21, and the glue is suitable for being injected into the ring groove 21. The end of the end cap 1 away from the tooth bar 2 is provided with a glue injection hole 13, and the glue injection hole 13 is in communication with the flow guide groove 12. After the tooth bar 2 is inserted into the fixed groove 10, the ring groove 21 and the flow guide groove 12 are staggered with each other. After the tooth bar 2 is inserted into the fixed groove 10, the ring groove 21 of the outer wall of the tooth bar 2 and the flow guide groove 12 of the inner wall of the fixed groove 10 are staggered in a stepped manner. The glue entering through the glue injection hole 13 flows into the flow guide groove 12 and the ring groove 21, and the glue is cooled and fixed to form a stepped protrusion, improving the stability of the fixed end cap 1 and tooth bar 2.

[0030] The various devices (parts whose specific structures are not described) selected in the present application are all general standard parts or parts known to those skilled in the art, the structures and principles of which can be known to the skilled person through technical manuals or through conventional experimental methods. Moreover, the software programs involved in the present application are all prior art, and the present application does not involve any improvement to the software programs.

[0031] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, can be fixedly connected, can also be detachably connected, or integrally connected; can be mechanically connected, can also be electrically connected; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0032] In the description of the present application, it should be explained that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the devices or elements indicated or implied to have a specific orientation, to be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0033] In several embodiments provided by the present application, it should be understood that the disclosed system, device and method can be implemented in other ways. The device embodiments described above are only schematic. For example, the division of the units is only a logical function division, and there can be another division manner in actual implementation. For example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the units shown or discussed can be indirect coupling or communication connection through some communication interfaces, devices or units, and can be electrical, mechanical or other forms.

[0034] The units described as separate components can or can not be physically separated, and the components shown as units can or can not be physical units, i.e. they can be located in one place or distributed on multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the present embodiment.

[0035] In addition, each functional unit in each of the embodiments of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit.

[0036] The above is the inspiration of the ideal embodiment according to the present application, and through the above description, relevant personnel can make various changes and modifications without deviating from the technical idea of the present application. The technical scope of the present application is not limited to the content in the specification, and the technical scope must be determined according to the scope of claims.

Claims

1. A silicon wafer basket facilitating position limiting, characterized in that, The utility model relates to a kind of silicon wafer flower baskets of convenient location, including: Two end covers (1) and several tooth bars (2), the two end covers (1) are oppositely arranged, and the end cover (1) is equipped with several fixed slots (10) compatible with the tooth bar (2) is opened; The both ends of the tooth bar (2) are suitable for inserting into the fixed slot (10); Each fixed slot (10) is fixed with a positioning block (11), and the positioning block (11) is suitable for limiting the tooth bar (2).

2. The silicon wafer flower basket of convenient location according to claim 1, wherein: The positioning block (11) is rectangular, and the positioning block (11) protrudes from the inner wall of the fixed slot (10).

3. The silicon wafer flower basket of convenient location according to claim 2, wherein: The sidewall of the fixed slot (10) is circumferentially provided with a flow guide groove (12), and the diameter of the flow guide groove (12) is greater than the diameter of the fixed slot (10).

4. The silicon wafer flower basket of convenient location according to claim 3, wherein: The end of the tooth bar (2) is provided with a positioning groove (20) compatible with the positioning block (11), and the positioning block (11) is suitable for inserting into the positioning groove (20).

5. The silicon wafer flower basket of convenient location according to claim 4, wherein: The outer wall of the end of the tooth bar (2) is circumferentially provided with a ring groove (21), and glue is suitable for being injected into the ring groove (21).

6. The silicon wafer flower basket of convenient location according to claim 5, wherein: The end of the end cover (1) away from the tooth bar (2) is provided with a glue injection hole (13), and the glue injection hole (13) is in communication with the flow guide groove (12).

7. The silicon wafer flower basket of convenient location according to claim 6, wherein: After the tooth bar (2) is inserted into the fixed slot (10), the ring groove (21) and the flow guide groove (12) are misaligned with each other.

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