Rail transportation device and die bonder

Abstract

The utility model is applicable to the technical field of semiconductor production, and provides a rail transportation device and a die bonder, the rail transportation device comprises a base assembly, a product transportation slideway, a first driving structure and a pushing assembly, and the die bonder comprises a rack, a feeding mechanism, a receiving mechanism, a dispensing mechanism, a chip feeding device and a welding head mechanism. The utility model further comprises the rail transportation device. The lifting supporting plate further has the freedom degree of moving in the third direction, a first driving structure is further arranged on the base assembly, the driving end of the first driving structure is connected with the lifting supporting plate, and when the thickness size of a product changes, the lifting supporting plate can be driven by the first driving structure to move in the third direction; therefore, the product transportation slide way can adapt to the thickness size of the product, the rail transportation device can be correspondingly adjusted according to the size of the product so as to transport products of various specifications, and the overall applicability of the die bonder is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of semiconductor technology especially relates to a track transport device and die bonder. BACKGROUND

[0002] The die bonder is a kind of equipment that fixes integrated circuit chip on packaging support or substrate, is widely used in the field of semiconductor packaging.The working principle is that chip is separated from blue film by chip supply device, and track transport device transports packaging support or substrate and so on, so that product passes through glue dispensing mechanism and welding head mechanism, product is glued by glue dispensing mechanism, and chip is installed on product by welding head mechanism.But the die bonder in the prior art can only process single specification product and cannot be adjusted according to product size, so that the die bonder has poor adaptability when being used. UTILITY MODEL CONTENTS

[0003] The utility model aims at providing a track transport device and die bonder, to solve the technical problem of poor adaptability of die bonder in prior art.

[0004] The utility model is realized as follows, first, a track transport device is provided, comprising:

[0005] Base assembly;

[0006] Product transport slide way is set up on the base assembly, and it comprises first limit piece, second limit piece and lifting support plate, the first limit piece and the second limit piece are set up on the base assembly along the first direction, the first limit piece and the second limit piece are spaced apart along the second direction, the second direction and the first direction are arranged at an angle, the lifting support plate is located in the region between the first limit piece and the second limit piece, and the lifting support plate also has the freedom of movement along the third direction, the third direction and the first direction and the second direction are arranged at an angle;

[0007] First drive structure is set up on the base assembly, and the driving end of the first drive structure is connected with the lifting support plate, for driving the lifting support plate to move along the third direction;And

[0008] Pushing assembly is set up on the base assembly and located in the side area of the product transport slide way, for driving the product in the product transport slide way to move along the first direction.

[0009] In an optional embodiment, the number of the first drive structure is multiple, and multiple first drive structures are sequentially spaced apart along the first direction.

[0010] In an optional embodiment, the first driving structure comprises a first screw rod and a first motor, the first screw rod is rotationally arranged on the base assembly along the third direction, one end of the first screw rod is threadedly connected with the lifting support plate, and the other end is rigidly connected with the first motor, and the first motor is configured to drive the first screw rod to rotate about its axis.

[0011] In an optional embodiment, the pushing assembly comprises a pushing slide rail, a pushing slide block, a product clamping structure, and a slide block driving unit, the pushing slide rail is arranged on the base assembly and is arranged along the first direction, the pushing slide block is slidingly arranged on the pushing slide rail, the slide block driving unit is configured to drive the pushing slide block to slide along the length direction of the pushing slide rail, and the product clamping structure is arranged on the pushing slide block and is configured to clamp the product so as to drive the product to move together when the pushing slide block moves.

[0012] In an optional embodiment, the product clamping structure comprises a clamping driving unit and two clamping members, the clamping driving unit is located on the side of the second limiting member away from the first limiting member, and the two clamping members are respectively located on the two sides of the second limiting member along the second direction, one end of the clamping member is connected with the clamping driving unit, and the other end extends between the first limiting member and the second limiting member, and the clamping driving unit is configured to drive the two clamping members to move towards or away from each other along the first direction, so as to clamp or release the product.

[0013] In an optional embodiment, the first limiting member is provided with a camera assembly and a reflecting member, the camera assembly is configured to acquire an image of a chip mounted on the product along a first light path, and the reflecting member is located on the path of the first light path and is configured to reflect the first light path to form a second light path arranged at an angle with the first light path.

[0014] In an optional embodiment, the base assembly comprises a fixed support, a sliding seat, and a second driving structure, the sliding seat is slidingly arranged on the fixed support, the second driving structure is arranged on the fixed support and is configured to drive the sliding seat to move along the second direction, the first limiting member is arranged on the fixed support, and the second limiting member and the pushing assembly are arranged on the sliding seat and can move along the second direction together with the sliding seat.

[0015] In an optional embodiment, the second driving structure comprises a second screw rod and a second motor, the second screw rod is rotationally arranged on the fixed support, and the second screw rod is threadedly connected with the sliding seat, and the second motor is configured to drive the second screw rod to rotate.

[0016] In a second aspect, a die bonder is provided, comprising a rack, a feeding mechanism, a receiving mechanism, a dispensing mechanism, a chip supply device and a welding head mechanism, further comprising the track transport device as described in any one of the above aspects, the track transport device is arranged on the rack, the feeding mechanism and the receiving mechanism are respectively located at the two end regions of the track transport device, the dispensing mechanism, the chip supply device and the welding head mechanism are located on the rack and are respectively arranged in the regions on both sides of the track transport device.

[0017] In an optional embodiment, the dispensing device comprises a dispensing base, a first sliding part, a second sliding part and a dispensing head, the first sliding part is slidingly arranged on the dispensing base, a first driving unit for driving the first sliding part to move in a first direction is arranged between the dispensing base and the first sliding part, the second sliding part is slidingly arranged on the first sliding part, a second driving unit for driving the second sliding part to move in a second direction is arranged on the first sliding part, the dispensing head is slidingly arranged on the second sliding part, a third driving unit for driving the dispensing head to move in a third direction is arranged on the second sliding part, and the first driving unit, the second driving unit and the third driving unit are all linear motors.

[0018] The first aspect of the utility model discloses the technical effect is: through setting up product transport slide and push assembly on the first direction, can push product along the first direction through push assembly, thereby realizing the transportation of product. Meanwhile product transport slide includes first limit piece, second limit piece and lifting support plate, and first limit piece and second limit piece are arranged on base assembly along the first direction, and first limit piece and second limit piece are spaced apart in the second direction, and lifting support plate is located in the region between first limit piece and second limit piece. When transporting the product, the product can be placed on the lifting support plate and located in the region between the first limit piece and the second limit piece. Compared with the track transport device in the prior art, the lifting support plate also has the freedom of movement along the third direction, and the first driving structure is also arranged on the base assembly, the driving end of the first driving structure is connected with the lifting support plate, when the thickness size of the product changes, the lifting support plate can be driven along the third direction by the first driving structure, so that the product transport slide can adapt to the thickness size of the product, and the track transport device can be adjusted according to the size of the product to transport products of various specifications, thereby improving the overall applicability of the die bonder.

[0019] It can be understood that the beneficial effects of the above-mentioned second aspect can be referred to the related description in the above-mentioned first aspect, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application or the prior art description. Obviously, the drawings described below are only some of the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0021] Figure 1 It is a structural schematic diagram of the track transportation device provided by the embodiments of the present application.

[0022] Figure 2 It is Figure 1 It is an enlarged structural schematic diagram of position A in the above figure.

[0023] Figure 3 It is a sectional structural schematic diagram of the track transportation device provided by the embodiments of the present application.

[0024] Figure 4 It is Figure 3 It is an enlarged structural schematic diagram of position B in the above figure.

[0025] Figure 5 It is a structural schematic diagram of the base assembly adopted by the embodiments of the present application.

[0026] Figure 6 It is a structural schematic diagram of the camera assembly adopted by the embodiments of the present application.

[0027] Figure 7 It is Figure 6 It is an enlarged structural schematic diagram of position C in the above figure.

[0028] Figure 8 It is a structural schematic diagram of the die bonder provided by the embodiments of the present application.

[0029] Figure 9 It is a structural schematic diagram of the dispensing mechanism adopted by the embodiments of the present application.

[0030] Mark explanation:

[0031] 100, track transportation device; 200, dispensing mechanism; 300, feeding mechanism; 400, material collecting mechanism; 500, welding head mechanism; 600, rack; 700, die ring mechanism; 800, film expanding and die picking mechanism;

[0032] 11, base assembly; 111, fixed support; 112, sliding seat; 113, second driving structure; 1131, second screw rod; 1132, second motor; 12, product conveying slide; 121, first limiting piece; 122, second limiting piece; 123, lifting support plate; 13, pushing assembly; 131, pushing slide rail; 132, pushing sliding block; 133, product clamping structure; 1331, clamping piece; 1332, clamping driving unit; 134, sliding block driving unit; 14, first driving structure; 141, first screw rod; 142, first motor; 15, camera assembly; 16, reflecting component; 161, reflecting surface; 17, first light path; 18, second light path;

[0033] 21, dispensing base; 22, first sliding part; 23, second sliding part; 24, dispensing head; 25, first driving unit; 26, second driving unit; 27, third driving unit. DETAILED DESCRIPTION

[0034] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0035] In the description of the present application, it is understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0036] In the present embodiment, according to the XYZ rectangular coordinate system defined in Figure 1 the front is defined as the front, the rear is defined as the rear, the left is defined as the left, the right is defined as the right, the upper is defined as the upper, and the lower is defined as the lower.

[0037] In addition, the terms "first", "second", "third", "fourth", "fifth", "sixth", "seventh" and "eighth" are only used for descriptive purpose and cannot be understood as indicating or implying relative importance or implying the number of the technical features indicated. Therefore, the features defined with "first", "second", "third", "fourth", "fifth", "sixth", "seventh" and "eighth" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more than two, unless otherwise specifically limited.

[0038] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and examples.

[0040] Please refer to Figures 1 to 5 In the embodiment of the present application, a track transportation device is provided, which comprises a base assembly 11, a product transportation slide 12, a first driving structure 14 and a pushing assembly 13. The product transportation slide 12 is arranged on the base assembly 11, and the product transportation slide 12 comprises a first limiting piece 121, a second limiting piece 122 and a lifting support plate 123. The first limiting piece 121 and the second limiting piece 122 are arranged on the base assembly 11 along the first direction, and the first limiting piece 121 and the second limiting piece 122 are arranged at intervals along the second direction. The second direction is arranged at an angle with the first direction. The lifting support plate 123 is located in the region between the first limiting piece 121 and the second limiting piece 122, and the lifting support plate 123 also has a degree of freedom of movement along the third direction. The third direction is arranged at an angle with the first direction and the second direction. The first driving structure 14 is arranged on the base assembly 11, and the driving end of the first driving structure 14 is connected with the lifting support plate 123, which is used to drive the lifting support plate 123 to move along the third direction. The pushing assembly 13 is arranged on the base assembly 11 and located in the side region of the product transportation slide 12, which is used to drive the product in the product transportation slide 12 to move along the first direction.

[0041] Specifically, the base assembly 11 refers to a certain height of a finished part, and the base assembly 11 can be block-shaped, plate-shaped or a combination of various shapes. The product conveying slide 12 refers to a slide structure with a certain length, which can also limit the movement path of the object during the conveying process. The product conveying slide 12 limits the product in the horizontal direction through the first limiting piece 121 and the second limiting piece 122 arranged at intervals, and supports the product in the vertical direction through the lifting support plate 123. Among them, the first limiting piece 121 and the second limiting piece 122 both refer to a component with a certain length, and the first limiting piece 121 and the second limiting piece 122 can be strip-shaped, column-shaped or block-shaped. The first limiting piece 121 and the second limiting piece 122 can also be a combination of various shapes. The lifting support plate 123 refers to a plate structure with a certain thickness, and the length direction of the lifting support plate 123 can be arranged in parallel with the first limiting piece 121 and the second limiting piece 122, supporting the product below the product.

[0042] The first driving structure 14 refers to a component or assembly that can drive the object to move along a straight line. The first driving structure 14 can be a gas cylinder, a hydraulic cylinder or an electric push rod, etc. The first driving structure 14 can also be a lead screw and block structure or a crank and block structure, etc., and a motor is used as power to drive other components to move in a straight line. The pushing assembly 13 refers to an assembly or component that can push the object to move along the product conveying slide 12. The product conveying slide 12 can adopt a belt conveying mechanism, a mechanical conveying arm or a robot structure. When the length of the product conveying slide 12 is relatively long, the pushing assembly 13 can be provided with multiple groups in the length direction of the product conveying slide 12, i.e. the first direction, and the multiple groups work alternately to push the product.

[0043] And during the operation of the equipment, the first direction and the second direction are generally directions in the horizontal plane, and the angle between the first direction and the second direction can be a right angle, and the angles between the third direction and the first direction and the second direction can both be right angles, and the third direction is a vertical direction.

[0044] The track transportation device provided by the embodiment of the utility model, through setting product transportation slide 12 and pushing assembly 13 on the top, product can be pushed to slide along the first direction through pushing assembly 13, thereby realizing the transportation of product. Meanwhile, product transportation slide 12 includes first limiting piece 121, second limiting piece 122 and lifting support plate 123, first limiting piece 121 and second limiting piece 122 are both set on base assembly 11 along the first direction, first limiting piece 121 and second limiting piece 122 are set apart along the second direction, and lifting support plate 123 is located between first limiting piece 121 and second limiting piece 122. When transporting product, product can be laid flat on lifting support plate 123 and located between first limiting piece 121 and second limiting piece 122. Compared with the track transportation device in the prior art, lifting support plate 123 also has the freedom of moving along the third direction, and first driving structure 14 is also set on base assembly 11, the driving end of first driving structure 14 is connected with lifting support plate 123, when the thickness size of product changes, lifting support plate 123 can be driven to move along the third direction through first driving structure 14, so that product transportation slide 12 can be adapted to the thickness size of product, and the track transportation device can be adjusted according to the size of product to transport products of various specifications, thereby improving the overall applicability of die bonder.

[0045] In one embodiment, referring to Figure 1 With Figure 5 The number of first driving structures 14 is multiple, and the multiple first driving structures 14 are sequentially and spaced apart along the first direction. In the embodiment, by sequentially and spaced apartly setting multiple first driving structures 14 along the first direction, and connecting the driving end of each first driving structure 14 with the bottom of lifting support plate 123, the adjustment of the height of lifting support plate 123 can be realized through the synchronous movement of multiple first driving structures 14, and the movement of lifting support plate 123 is more stable and reliable, thereby improving the transportation precision.

[0046] In one embodiment, referring to Figure 3, the first driving structure 14 comprises a first screw rod 141 and a first motor 142, the first screw rod 141 is arranged on the base assembly 11 in the third direction, one end of the first screw rod 141 is threadedly connected with the lifting support plate 123, and the other end is rigidly connected with the first motor 142, and the first motor 142 is used for driving the first screw rod 141 to rotate around its axis. Specifically, the first screw rod 141 refers to a rod-shaped component with a certain length, and the outer wall of the first screw rod 141 is provided with threads. The first motor 142 refers to a component or assembly that can convert electrical energy into mechanical energy and output rotating torque. In this embodiment, by arranging the first screw rod 141 on the base assembly 11 in the third direction, and threadedly connecting one end of the first screw rod 141 with the lifting support plate 123 and rigidly connecting the other end with the first motor 142, the first screw rod 141 can be driven to rotate around its axis by the first motor 142. When the first screw rod 141 rotates, the lifting support plate 123 can be driven to move along the axial direction of the first screw rod 141 by the action of the threads, and the movement distance of the lifting support plate 123 can be controlled by controlling the number of rotation of the first screw rod 141, so that the movement of the lifting support plate 123 is more accurate and convenient.

[0047] In an optional embodiment, referring to Figure 3 , the lifting support plate 123 comprises a main plate body and a connecting block, the connecting block can be arranged at the bottom of the main plate body by welding or fastener connection, etc., a receiving hole for accommodating the end of the first screw rod 141 is arranged on the connecting block, and threads for engaging with the first screw rod 141 are arranged on the inner wall of the receiving hole, so that the thread connection between the first screw rod 141 and the lifting support plate 123 is more convenient.

[0048] In an embodiment, referring to Figure 2 and Figure 3 , the pushing assembly 13 comprises a pushing slide rail 131, a pushing slide block 132, a product clamping structure 133 and a slide block driving unit 134, the pushing slide rail 131 is arranged on the base assembly 11, and the pushing slide rail 131 is arranged in the first direction, the pushing slide block 132 is slidingly arranged on the pushing slide rail 131, the slide block driving unit 134 is used for driving the pushing slide block 132 to slide along the length direction of the pushing slide rail 131, and the product clamping structure 133 is arranged on the pushing slide block 132. The product clamping structure 133 is used for clamping the product to drive the product to move together when the pushing slide block 132 moves.

[0049] Specifically, the pushing slide rail 131 refers to a slide rail component with a certain length. The pushing slide block 132 refers to a component with a certain volume. The pushing slide block 132 can be block-shaped or plate-shaped. An accommodating clamping groove matching the cross section of the pushing slide rail 131 can be arranged on the pushing slide block 132. At least part of the pushing slide rail 131 can be clamped in the accommodating clamping groove, so that the pushing slide block 132 slides along the pushing slide rail 131 more conveniently. The product clamping structure 133 refers to a component or assembly that can clamp a product. The product clamping structure 133 can be a clamping cylinder and the like. The slide block driving unit 134 refers to a component or assembly that drives a body to move linearly. The slide block driving unit 134 can be a cylinder, a hydraulic cylinder, or an electric push rod, and can also be a linear motor. In this embodiment, when the product needs to be transported, the product can be clamped by the product clamping structure 133, and then the pushing slide block 132 and the product clamping structure 133 can be driven by the slide block driving unit 134 to slide along the pushing slide rail 131. At this time, the product also moves together with the pushing slide block 132 and the product clamping structure 133, so that the product can be pushed to move along the product transportation slide 12, and the pushing of the product is more convenient.

[0050] In one embodiment, referring to Figure 2 The product clamping structure 133 includes a clamping driving unit 1332 and two clamping pieces 1331. The clamping driving unit 1332 is located on the side of the second limiting piece 122 away from the first limiting piece 121. The two clamping pieces 1331 are respectively located on the two sides of the second limiting piece 122 along the second direction. One end of the clamping piece 1331 is connected with the clamping driving unit 1332, and the other end extends between the first limiting piece 121 and the second limiting piece 122. The clamping driving unit 1332 is used to drive the two clamping pieces 1331 to move towards or away from each other along the first direction, so as to clamp or release the product. Specifically, the clamping piece 1331 refers to a component with a certain length, which can be block-shaped, plate-shaped, or column-shaped. The clamping driving unit 1332 refers to a component that can drive two objects to move towards or away from each other. The clamping driving unit 1332 can be a clamping cylinder and the like. By arranging the two clamping pieces 1331 on the two sides of the second limiting piece 122 along the second direction, and connecting one end of the clamping piece 1331 with the clamping driving unit 1332 and extending the other end between the first limiting piece 121 and the second limiting piece 122, the clamping piece 1331 can extend between the first limiting piece 121 and the second limiting piece 122 and clamp the product under the action of the clamping driving unit 1332, so that the product clamping structure 133 is more convenient to use.

[0051] In addition, it should be noted that the second limiting member 122 and the lifting support plate 123 are also provided with a clearance, which is used to avoid the clamping member 1331, and the clearance can be provided along the first direction.

[0052] In one embodiment, referring to Figure 1 、 Figure 6 and Figure 7 , the first limiting member 121 is provided with a camera assembly 15 and a reflecting member 16, the camera assembly 15 is used to obtain the image of the chip mounted on the product along the first light path 17, and the reflecting member 16 is located on the path of the first light path 17, and the reflecting member 16 is used to reflect the first light path 17 to form the second light path 18 which is arranged at an angle with the first light path 17. Specifically, the reflecting member 16 refers to a component with a certain volume, and the reflecting surface 161 which can reflect light is usually arranged on the reflecting member 16, and the reflecting surface 161 is arranged at an angle with the first light path 17, so as to reflect the first light path 17 to form the second light path 18 which is arranged at an angle with the first light path 17. The camera assembly 15 refers to a component or assembly which can obtain the image of a specified area, and the light reflected by the object can enter the camera assembly 15 along a certain light path, and the camera assembly 15 can be a CCD (Charge-coupled Device, Charge-coupled Device) vision detection device, etc. In the embodiment, by arranging the camera assembly 15, the chip can be photographed when the welding head mechanism 500 installs the chip on the product, and then the photographed signal is sent to the controller, the controller can analyze the angle and position of the chip, and when the position or angle of the chip deviates, the welding head mechanism 500 can be controlled to adjust, so as to improve the precision of the chip installation.

[0053] In addition, the camera assembly 15 usually has a large length dimension along its own shooting direction, and the camera assembly 15 can be arranged along the first direction as a whole, so that the camera assembly 15 can obtain the image along the first light path 17, and at this time the reflecting member 16 is arranged on the path of the first light path 17, and the first light path 17 can be reflected to form the second light path 18 which is arranged at an angle with the first light path 17, so that the camera assembly 15 can obtain the image in the direction which is at an angle with its own shooting direction. Through the arrangement of the reflecting member 16, the space for installing the camera assembly 15 can be saved.

[0054] In one embodiment, referring to Figure 1 、 Figure 3 and Figure 5The base assembly 11 comprises a fixed support 111, a sliding seat 112 and a second driving structure 113. The sliding seat 112 is slidingly arranged on the fixed support 111. The second driving structure 113 is arranged on the fixed support 111 and is used to drive the sliding seat 112 to move in the second direction. A first limiting piece 121 is arranged on the fixed support 111. A second limiting piece 122 and a pushing assembly 13 are arranged on the sliding seat 112 and can move in the second direction along with the sliding seat 112.

[0055] Specifically, the fixed support 111 refers to a support component with a certain height. The fixed support 111 can be block-shaped, plate-shaped or combined in multiple shapes. The sliding seat 112 refers to a component with a certain volume. The sliding seat 112 can be block-shaped or plate-shaped. The sliding seat 112 can be slidingly arranged on the fixed support 111 through a sliding rail and sliding block structure. The second driving structure 113 refers to a component that can drive a body to move in a straight line direction. The second driving structure 113 can be a gas cylinder, a hydraulic cylinder or an electric push rod. The second driving structure 113 can also be a lead screw and sliding block structure or a crank and sliding block structure, etc. and can realize the function of driving other components to move in a straight line direction through a motor as a power source.

[0056] In this embodiment, by dividing the base assembly 11 into the fixed support 111 and the sliding seat 112, the sliding seat 112 can slide in the second direction under the action of the second driving structure 113. At this time, the first limiting piece 121 is arranged on the fixed support 111. The second limiting piece 122 and the pushing assembly 13 are arranged on the sliding seat 112, so that the second limiting piece 122 can move in the second direction along with the sliding seat 112. Thus, the gap size between the first limiting piece 121 and the second limiting piece 122 can be adjusted. When the width dimension of the product in the second direction changes, the distance between the first limiting piece 121 and the second limiting piece 122 can be adjusted through the second driving structure 113. Thus, the applicability of the track transportation device is further improved.

[0057] In one embodiment, please refer to Figure 5The second driving structure 113 comprises a second screw 1131 and a second motor 1132. The second screw 1131 is rotatably arranged on the fixed support 111 and is threadedly connected with the sliding seat 112. The second motor 1132 is used to drive the second screw 1131 to rotate. Specifically, the second screw 1131 refers to a rod-shaped component with a certain length, and a thread is arranged on the outer wall of the second screw 1131. The second motor 1132 refers to a component or assembly that can convert electrical energy into mechanical energy and output a rotating torque. In the embodiment, the second screw 1131 is rotatably arranged on the fixed support 111 and is threadedly connected with the sliding seat 112. When the position of the sliding seat 112 needs to be adjusted, the second motor 1132 is used to drive the second screw 1131 to rotate. When the second screw 1131 rotates, the sliding seat 112 can slide along the axial direction of the second screw 1131 through the thread, so that the movement of the sliding seat 112 is more convenient and fast, and the movement precision of the sliding seat 112 is improved.

[0058] In a second aspect, referring to Figure 8 , a die bonder is provided, comprising a rack 600, a feeding mechanism 300, a material collecting mechanism 400, a dispensing mechanism 200, a chip supply device and a welding head mechanism 500. The die bonder further comprises the track conveying device of any one of the above aspects, which is arranged on the rack 600. The feeding mechanism 300 and the material collecting mechanism 400 are respectively located at the two end regions of the track conveying device. The dispensing mechanism 200, the chip supply device and the welding head mechanism 500 are arranged on the rack 600 and are respectively arranged at the regions on the two sides of the track conveying device. The dispensing and chip mounting are performed when the product passes. It can be understood that the beneficial effects of the second aspect can be referred to the related description in the first aspect, which will not be repeated here.

[0059] In one embodiment, referring to 9, the dispensing device comprises a dispensing base 21, a first sliding part 22, a second sliding part 23 and a dispensing head 24, the first sliding part 22 is slidingly arranged on the dispensing base 21, a first driving unit 25 for driving the first sliding part 22 to move in a first direction is arranged between the dispensing base 21 and the first sliding part 22, the second sliding part 23 is slidingly arranged on the first sliding part 22, a second driving unit 26 for driving the second sliding part 23 to move in a second direction is arranged on the first sliding part 22, the dispensing head 24 is slidingly arranged on the second sliding part 23, a third driving unit 27 for driving the dispensing head 24 to move in a third direction is arranged on the second sliding part 23, and the first driving unit 25, the second driving unit 26 and the third driving unit 27 are all linear motors. In this embodiment, the dispensing head 24 is adjusted in the first direction, the second direction and the third direction by the linear motors, compared with the motor screw structure in the prior art, the accuracy of the adjustment of the dispensing head 24 is improved after long time running, the stability of the dispensing device is improved, and the stability of die bonding is improved.

[0060] In an optional embodiment, referring to Figure 8 , the chip feeding device comprises a chip lifting ring mechanism 700 and a film expanding and chip lifting mechanism 800. The chip lifting ring mechanism 700, the film expanding and chip lifting mechanism 800 and the welding head mechanism 500 all have the freedom of adjustment in the first direction, the second direction and the third direction, and linear motors are used as driving units when the above mechanisms are adjusted, so that the structures of the above mechanisms are simpler and more convenient to maintain, and the wear after long time running is reduced, so that the die bonding accuracy and stability of the device are improved.

[0061] The above is only a preferred embodiment of the present application, and only the technical principle of the present application is specifically described, and these descriptions are only for explaining the principle of the present application, and cannot be explained as the limitation of the protection scope of the present application in any way. Based on the explanation herein, any modification, equivalent replacement and improvement within the spirit and principle of the present application, and other specific embodiments of the present application which can be thought by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A rail transport device, characterized in that, The application relates to a product conveying device. The product conveying device comprises a base assembly, a product conveying slide arranged on the base assembly, a first limiting piece, a second limiting piece and a lifting support plate, the first limiting piece and the second limiting piece are arranged on the base assembly along a first direction, the first limiting piece and the second limiting piece are arranged at intervals along a second direction, the second direction forms an angle with the first direction, the lifting support plate is arranged in a region between the first limiting piece and the second limiting piece, the lifting support plate has a freedom of movement along a third direction, the third direction forms an angle with the first direction and the second direction, a first driving structure is arranged on the base assembly, a driving end of the first driving structure is connected with the lifting support plate, and the first driving structure is used for driving the lifting support plate to move along the third direction, and a pushing assembly is arranged on the base assembly and located in a side region of the product conveying slide, and is used for driving the product in the product conveying slide to move along the first direction. The number of the first driving structures is plural, and the plural first driving structures are arranged at intervals along the first direction. The first driving structure comprises a first screw rod and a first motor, the first screw rod is arranged on the base assembly and rotates along the third direction, one end of the first screw rod is threadedly connected with the lifting support plate, and the other end is rigidly connected with the first motor, and the first motor is used for driving the first screw rod to rotate around its axis. The pushing assembly comprises a pushing slide rail, a pushing slide block, a product clamping structure and a slide block driving unit, the pushing slide rail is arranged on the base assembly and arranged along the first direction, the pushing slide block is slidingly arranged on the pushing slide rail, the slide block driving unit is used for driving the pushing slide block to slide along the length direction of the pushing slide rail, and the product clamping structure is arranged on the pushing slide block and is used for clamping the product so as to drive the product to move when the pushing slide block moves. The product clamping structure comprises a clamping driving unit and two clamping pieces, the clamping driving unit is located on a side of the second limiting piece away from the first limiting piece, and the two clamping pieces are respectively located on two sides of the second limiting piece along the second direction, one end of the clamping piece is connected with the clamping driving unit, and the other end extends between the first limiting piece and the second limiting piece, and the clamping driving unit is used for driving the two clamping pieces to move close to or away from each other along the first direction, so as to clamp or release the product.

2. The rail transport of claim 1, wherein, A camera assembly and a reflecting part are arranged on the first limiting piece, the camera assembly is used for acquiring an image of a chip mounted on the product along a first light path, and the reflecting part is located on a path of the first light path and is used for reflecting the first light path to form a second light path arranged at an angle with the first light path.

3. The track conveyance of claim 2, wherein, ​ 4. The rail transport of claim 1, wherein, ​ 5. The track conveyance of claim 4, wherein, ​ 6. The rail transport of claim 1, wherein, ​ 7. A rail transport unit as claimed in any one of claims 1 to 6, characterized in that The base assembly comprises a fixed support, a sliding seat, and a second driving structure, the sliding seat is slidingly arranged on the fixed support, the second driving structure is arranged on the fixed support and is used for driving the sliding seat to move in a second direction, the first limiting piece is arranged on the fixed support, and the second limiting piece and the pushing assembly are arranged on the sliding seat and can move in the second direction together with the sliding seat.

8. The rail transport system of claim 7, wherein, The second driving structure comprises a second screw and a second motor, the second screw is rotationally arranged on the fixed support, and the second screw is in threaded connection with the sliding seat, and the second motor is used for driving the second screw to rotate.

9. A die bonder, characterized by comprising: The chip welding device comprises a rack, a feeding mechanism, a material collecting mechanism, a dispensing mechanism, a chip supply device, and a welding head mechanism, and further comprises the track conveying device according to any one of claims 1 to 8, the track conveying device is arranged on the rack, the feeding mechanism and the material collecting mechanism are respectively located at two end regions of the track conveying device, and the dispensing mechanism, the chip supply device, and the welding head mechanism are located on the rack and are respectively arranged in regions on two sides of the track conveying device.

10. The die bonder of claim 9, wherein the die bonder further comprises: The dispensing mechanism comprises a dispensing base, a first sliding part, a second sliding part, and a dispensing head, the first sliding part is slidingly arranged on the dispensing base, a first driving unit for driving the first sliding part to move in a first direction is arranged between the dispensing base and the first sliding part, the second sliding part is slidingly arranged on the first sliding part, a second driving unit for driving the second sliding part to move in a second direction is arranged on the first sliding part, the dispensing head is slidingly arranged on the second sliding part, a third driving unit for driving the dispensing head to move in a third direction is arranged on the second sliding part, and the first driving unit, the second driving unit, and the third driving unit are all linear motors.

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