XYZ three-axis type marble anti-deformation sliding table module

Abstract

The utility model relates to an X-axis, Y-axis and Z-axis marble anti-deformation sliding table module which is characterized in that the X-axis, Y-axis and Z-axis marble anti-deformation sliding table module comprises a base and sliding table modules arranged on an X axis, a Y axis and a Z axis respectively, the base is made of marble, the X-axis sliding table module is arranged on the base and comprises a first workbench and a first driving mechanism used for driving the first workbench to slide in the X-axis direction, and the X-axis sliding table module comprises a second workbench and a second driving mechanism used for driving the second workbench to slide in the X-axis direction. The Y-axis sliding table module is vertically arranged on the first working table and slides along with the first working table in the X-axis direction, and the Y-axis sliding table module comprises a base, a second working table arranged on the base in a sliding mode and a second driving mechanism used for driving the second working table to slide in the Y-axis direction; the Z-axis sliding table module is arranged on the base and comprises a third workbench and a third driving mechanism used for driving the third workbench to do lifting motion in the Z-axis direction. The device has the advantages of good deformation resistance, high positioning precision, high movement stability, reasonable structural design and the like.

Description

Technical Field

[0001] This utility model relates to the field of slide module technology, and in particular discloses an XYZ three-axis marble anti-deformation slide module. Background Technology

[0002] In existing technologies, slide table modules play a crucial role in industrial production, especially in machining scenarios requiring multi-axis motion. XYZ three-axis slide table modules can meet the motion requirements in different directions. However, traditional slide table modules often have some problems. For example, their base and worktable components are often made of ordinary metal materials, which are prone to deformation during long-term use, leading to a decrease in motion accuracy and affecting machining quality. Moreover, the design of existing slide table modules in terms of transmission, sensing, guidance, and buffering may be imperfect, affecting the stability and reliability of the equipment, increasing maintenance costs and downtime. Therefore, developing an XYZ three-axis slide table module with deformation resistance and stable performance is of significant practical importance. Utility Model Content

[0003] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide an XYZ three-axis marble anti-deformation slide module.

[0004] To achieve the above objectives, this utility model provides an XYZ three-axis marble anti-deformation slide module, characterized in that it includes a base, an X-axis slide module, a Y-axis slide module, and a Z-axis slide module. The base is made of marble. The X-axis and Z-axis slide modules are mounted on the base. The X-axis slide module includes a first worktable and a first drive mechanism for driving the first worktable to slide along the X-axis direction. The Y-axis slide module is vertically mounted on the first worktable and slides along the X-axis direction with the first worktable. The Y-axis slide module includes a base, a second worktable slidably mounted on the base, and a second drive mechanism for driving the second worktable to slide along the Y-axis direction. The Z-axis slide module includes a third worktable and a third drive mechanism for driving the third worktable to move up and down along the Z-axis direction. The Y-axis slide module is used to place external objects to be processed, and the Z-axis slide module is used to connect external processing equipment.

[0005] Furthermore, the first workbench has a main body and a first mounting platform protruding from both ends of the main body for mounting the Y-axis slide module. An L-shaped limiter is provided on the side of the first mounting platform away from the main body to limit the movement of the Y-axis slide along the X-axis direction.

[0006] Furthermore, the X-axis slide module / Y-axis slide module also includes a sensing mechanism and a grating measurement mechanism for detecting the position of the first worktable / second worktable. The sensing mechanism includes a sensing plate mounted on the first worktable / second worktable and a sensor movably mounted on the base / base. The number of the sensing plate and the sensor can be one or more. The grating measurement mechanism includes a grating mounting platform mounted on the base / base and a reading head mounted on the first worktable / second worktable. The grating mounting platform is used to mount a grating ruler and a reference zero-position magnetic exciter.

[0007] Furthermore, the X-axis slide module / Y-axis slide module also includes a stator, a mover, and a sliding guide mechanism. The sliding guide mechanism includes multiple slide rails and multiple sliders. The stator and slide rails are mounted on the base / base, and the mover and sliders are mounted on the side of the first worktable / second worktable facing the stator. The stator generates a magnetic field by being energized, which drives the mover to move along the slide rails. The mover drives the first worktable / second worktable to slide along the slide rails.

[0008] Furthermore, the X-axis slide module and the Y-axis slide module also include anti-collision mechanisms. The number of anti-collision mechanisms is one or two pairs, located at both ends of the first worktable / second worktable, and installed on the base / base. The anti-collision mechanism of the X-axis slide module is an anti-collision telescopic component, and the anti-collision mechanism of the Y-axis slide module is an anti-collision rubber.

[0009] Furthermore, the second worktable has a loading platform protruding from one side facing the Z-axis slide module, and a dust collection trough is provided below the loading platform. The dust collection trough has a main body and protrusions protruding from three sides of the main body. The dust collection trough is mounted on the base plate through one side protrusion. The loading platform is made of marble.

[0010] Furthermore, the Z-axis slide module has a column, a connecting plate, and a slide mounting plate; the column is vertically mounted on the base, and the slide mounting plate is connected to the column via the connecting plate or directly; the bottom of the slide mounting plate is provided with an air pipe connector, and the column is made of marble.

[0011] Furthermore, the third workbench has a main body, an outer cover, a base plate, and two pairs of adjustment structures. The main body is mounted on the base plate, and the base plate is slidably mounted on the slide mounting plate. The two pairs of adjustment structures are respectively mounted on the upper and lower ends of the main body. Each adjustment structure includes two adjustment handles, a clamping plate, an adjustment shaft, and a rubber coating. The two adjustment handles are mounted parallel to each other on the left and right ends of the third workbench, and are connected in the middle by the adjustment shaft. The adjustment shaft is surrounded by a rubber coating. The clamping plate is mounted on the two adjustment handles at both ends, and a spring is provided between the clamping plate and the outer cover. The main body has protruding third mounting platforms for connecting external devices on both sides. The outer cover has through holes that are adapted to the shape of the third mounting platforms. When the outer cover covers the main body, the third mounting platforms protrude through the through holes, and the external devices are installed outside the outer cover.

[0012] Furthermore, the Y-axis slide module also includes a lead screw, a nut, and a sliding guide mechanism. The nut and the slider are both mounted on the base plate. The third drive mechanism drives the lead screw to rotate, causing the nut to move along the lead screw. The nut drives the third worktable to move along the slide rail. Support seats and free ends are respectively provided at both ends of the lead screw. Buffer devices are provided between the support seats and the base plate, and between the free end and the nut. The Z-axis slide module also includes a sensing mechanism. The sensing mechanism includes a sensing plate mounted on the third worktable and a sensor and magnetic strips fixedly mounted on the slide mounting plate. The number of magnetic strips is one or more. The magnetic strips work in conjunction with the sensing plate and the sensor to detect the position of the third worktable.

[0013] Furthermore, support plates are provided at both ends of the base / base, and the two support plates are used to fix the dustproof plate. 10. The dustproof plate is located above the first workbench / second workbench, and the first workbench / second workbench slides below the dustproof plate. The beneficial effects of this utility model are:

[0014] (1) Good deformation resistance: The base and worktable are made of marble or similar deformation-resistant materials, which can effectively resist deformation during long-term use, ensure the motion accuracy and stability of the slide module, and thus improve the processing quality.

[0015] (2) High-precision positioning: Each axis slide module is equipped with a sensing mechanism, such as a sensor, sensing plate, magnetic strip, grating ruler, etc., which can accurately detect the position of the mover and realize high-precision displacement measurement and positioning control.

[0016] (3) High motion stability: A sliding guide mechanism and an anti-collision mechanism are provided. The sliding guide mechanism ensures that the worktable can move smoothly along the slide rail, while the anti-collision mechanism can protect the moving part, reduce the impact and vibration during the movement, and improve the service life of the equipment.

[0017] (4) Reasonable structural design: The structural design of each axis slide module is compact and the layout is reasonable, which can make full use of space and facilitate installation and maintenance. For example, the design of the column, connecting plate and slide mounting plate of the Z-axis slide module, as well as the dustproof plate design of the X-axis and Y-axis slide modules, all reflect good structural rationality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of an XYZ three-axis marble anti-deformation slide module according to the present invention.

[0019] Figure 2 This is a schematic diagram of the X-axis slide module of this utility model.

[0020] Figure 3 This is a schematic diagram of the first workbench structure of this utility model;

[0021] Figure 4This is a schematic diagram of the Y-axis slide module of this utility model.

[0022] Figure 5 This is a schematic diagram of the second workbench structure of this utility model;

[0023] Figure 6 This is a schematic diagram of the grating mounting stage structure of this utility model;

[0024] Figure 7 This is a schematic diagram of the Z-axis slide module of this utility model.

[0025] Figure 8 This is a schematic diagram of the third workbench of this utility model;

[0026] Figure 9 This is a schematic diagram of the base plate structure of this utility model.

[0027] The reference numerals in the attached drawings include: 1. Base; 2. X-axis slide module; 21. First worktable; 211. First mounting platform; 212. Limiter; 22. First drive mechanism; 3. Y-axis slide module; 31. Base; 311. Dust collection trough; 32. Second worktable; 321. Carrying stage; 33. Second drive mechanism; 4. Z-axis slide module; 41. Third worktable; 411. Main body; 4111. Third mounting platform; 412. Outer cover; 413. Base plate; 414. Adjustment structure; 4141. Adjustment hand; 4142. Pressure plate; 41 43. Adjusting shaft; 4144. Rubber coating; 4145. Spring; 42. Third drive mechanism; 43. Lead screw; 44. Nut; 45. Support base; 46. Free end; 47. Magnetic strip; 48. Column; 481. Connecting plate; 49. Slide table mounting plate; 491. Air pipe connector; 5. Grating mounting platform; 51. Induction sheet; 52. Sensor; 53. Reading head; 54. Grating ruler; 55. Reference zero-position magnetic exciter; 61. Stator; 62. Mover; 71. Slide rail; 72. Slider; 8. Anti-collision mechanism; 9. Support plate; 91. Dustproof plate. Detailed Implementation

[0028] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0029] Please see Figures 1 to 9As shown, this utility model discloses an XYZ three-axis marble anti-deformation slide module, characterized in that it includes a base 1, an X-axis slide module 2, a Y-axis slide module 3, and a Z-axis slide module 4. The base 1 is made of marble. The X-axis slide module 2 and the Z-axis slide module 4 are mounted on the base 1. The X-axis slide module 2 includes a first worktable 21 and a first drive mechanism 22 for driving the first worktable 21 to slide along the X-axis direction. The Y-axis slide module 3 is vertically mounted on the first worktable 21. The first worktable 21 slides along the X-axis direction; the Y-axis slide module 3 includes a base 31, a second worktable 32 slidably disposed on the base 31, and a second drive mechanism 33 for driving the second worktable 32 to slide along the Y-axis direction; the Z-axis slide module 4 includes a third worktable 41, and a third drive mechanism 42 for driving the third worktable 41 to move up and down along the Z-axis direction; the Y-axis slide module 3 is used to place external objects to be processed, and the Z-axis slide module 4 is used to connect external processing equipment.

[0030] In actual use, the base 1 is made of high-quality marble, which has excellent deformation resistance and can provide a stable and reliable foundation support for the entire slide module. The X-axis slide module and the Z-axis slide module are firmly installed on the base 1. In the X-axis slide module, the first worktable 21 is responsible for supporting the subsequent structure and realizing movement in the X-axis direction. The Y-axis slide module is vertically installed on the first worktable 21, and its base 31 is tightly connected to the first worktable 21 by multiple high-strength bolts to ensure the stability of the connection. The second worktable 32 slides smoothly in the Y-axis direction on the base 31 through linear guide rails. The third worktable 41 of the Z-axis slide module is used to connect the processing equipment.

[0031] Specifically, the first worktable 21 has a main body and a first mounting platform 211 protruding from both ends of the main body for mounting the Y-axis slide module 3. The side of the first mounting platform 211 away from the main body is provided with an L-shaped limiter 212 for restricting the movement of the Y-axis slide along the X-axis direction.

[0032] In actual use, the first worktable 21 has symmetrically protruding first mounting platforms 211 at both ends of the main body. The first mounting platforms 211 are used to mount the Y-axis slide module. An L-shaped limiter 212 is installed on the side of the first mounting platform 211 away from the main body. The L-shaped limiter 212 is fixed to the first mounting platform 211 by welding or screwing. Its horizontal portion effectively prevents the Y-axis slide module from shifting during sliding along the X-axis, while the vertical portion further enhances the limiting effect, ensuring the stability of the Y-axis slide module's movement in the X-axis direction and preventing positioning deviations caused by shifting.

[0033] Specifically, the X-axis slide module 2 / Y-axis slide module 3 further includes a sensing mechanism and a grating measurement mechanism for detecting the position of the first worktable 21 / second worktable 32. The sensing mechanism includes a sensing plate 51 mounted on the first worktable 21 / second worktable 32 and a sensor 52 movably mounted on the base 1 / base 31. The number of the sensing plate 51 and the sensor 52 is one or more. The grating measurement mechanism includes a grating mounting platform 5 mounted on the base 1 / base 31 and a reading head 53 mounted on the first worktable 21 / second worktable 32. The grating mounting platform 5 is used to mount a grating ruler 54 and a reference zero-position magnetic exciter 55.

[0034] In actual use, in the X-axis slide module, the sensing element 51 of the sensing mechanism is installed on the edge of the first worktable 21 facing the base 1. The sensor 52 is a high-precision Hall sensor, movably mounted on the base 1 via a mounting bracket. The position of the sensor 52 can be adjusted according to actual needs to accurately sense the position signal of the sensing element 51. There are two sensing elements 51, located at opposite ends of the first worktable 21, used to detect the start and end positions of the first worktable 21 to ensure safe operation. There are three sensors 52. The base 1 / base 31 has a track, and the sensors 52 are slidably mounted on the track via sliders 72. The position of the sensors 52 on the base 1 / base 31 can be adjusted according to actual needs. The grating mounting platform 5 is fixed to the base 1 with bolts. The grating ruler 54 is a high-precision grating ruler with a resolution of 0.001mm, mounted on the grating mounting platform 5. The reading head 53 is mounted on the first worktable 21 and closely cooperates with the grating ruler 54, enabling real-time and accurate measurement of the displacement of the first worktable 21 in the X-axis direction. The reference zero-position magnetic exciter 55 is mounted on the grating mounting platform 5 near the starting position, providing an accurate zero-position reference for the entire measurement system and ensuring the accuracy and repeatability of displacement measurement. The sensing mechanism and grating measurement mechanism of the Y-axis slide module are set up in a similar manner to those of the X-axis slide module, except that their mounting positions are changed to the second worktable 32 and the base 31.

[0035] Specifically, the X-axis slide module 2 / Y-axis slide module 3 further includes a stator 61, a mover 62, and a sliding guide mechanism. The sliding guide mechanism includes multiple slide rails 71 and multiple sliders 72. The stator 61 and slide rails 71 are mounted on the base 1 / base 31. The mover 62 and sliders 72 are mounted on the side of the first worktable 21 / second worktable 32 facing the stator 61. The stator 61 generates a magnetic field by being energized, which drives the mover 62 to move along the slide rails 71. The mover 62 drives the first worktable 21 / second worktable 32 to slide along the slide rails 71.

[0036] In actual use, the stator 61 uses a high-performance permanent magnet and is securely mounted on the base 1 using a dedicated mounting fixture. Two high-precision linear guides 71 are used, installed parallel to each other on the base 1, located on both sides of the stator 61 and aligned with the X-axis. The mover 62 is an electromagnetic coil structure, mounted on the side of the first worktable 21 facing the stator 61, and connected to the first worktable 21 via an insulating mounting base. Four high-precision sliders 72, matching the linear guides, are evenly distributed and installed on the bottom of the first worktable 21 corresponding to the positions of the slide rails 71. When the stator 61 is energized, it generates a stable magnetic field. The electromagnetic coil in the mover 62 generates electromagnetic force under the influence of this magnetic field, driving the mover 62 to move along the slide rails 71, which in turn drives the first worktable 21 to slide along the slide rails 71 in the X-axis direction, resulting in smooth and highly precise movement. The stator 61, mover 62, and sliding guide mechanism of the Y-axis slide module are configured the same as those of the X-axis slide module, except that they are installed on the base 31 and the second worktable 32 to achieve stable sliding of the second worktable 32 in the Y-axis direction.

[0037] Specifically, the X-axis slide module 2 and the Y-axis slide module 3 also include anti-collision mechanisms 8. The number of anti-collision mechanisms 8 is one or two pairs, located at both ends of the first worktable 21 / second worktable 32, and installed on the base 1 / base 31. The anti-collision mechanism 8 of the X-axis slide module 2 is an anti-collision telescopic component, and the anti-collision mechanism 8 of the Y-axis slide module 3 is an anti-collision rubber.

[0038] In actual use, the anti-collision mechanism 8 of the X-axis slide module adopts anti-collision telescopic components, specifically spring-type 4145 anti-collision telescopic columns, in pairs, installed at the front positions of both ends of the first worktable 21 on the base 1. The fixed ends of the anti-collision telescopic columns are connected to the base 1 by bolts. When impacted, the telescopic ends can compress the spring 4145, providing a buffering effect and preventing the first worktable 21 from being damaged by rigid collisions with other components. The anti-collision mechanism 8 of the Y-axis slide module uses anti-collision rubber pads, in pairs, installed at both ends of the second worktable 32 on the base 31. When the second worktable 32 slides to its limit position in the Y-axis direction, the anti-collision rubber pads can effectively absorb the collision energy, protecting the second worktable 32 and other components.

[0039] Specifically, the second worktable 32 has a platform 321 protruding from one side of the Z-axis slide module 4. A dust collection trough 311 is provided below the platform 321. The dust collection trough 311 has a main body and protrusions protruding from three sides of the main body. The dust collection trough 311 is mounted on the base plate 413 by one side protrusion. The platform 321 is made of marble.

[0040] In actual use, the second worktable 32 has a platform 321 protruding from the side facing the Z-axis slide module. The platform 321 is made of marble and has been ground to provide a stable and high-precision placement platform for the workpiece. Below the platform 321, a dust collection trough 311 is provided. The dust collection trough 311 has good strength and corrosion resistance, with protrusions on three sides of its body. One of the protrusions is bolted to the base plate 413 of the second worktable 32. The dust collection trough 311 is used to collect debris and dust generated during processing, preventing them from scattering and affecting the normal operation of the slide module.

[0041] Specifically, the Z-axis slide module 4 has a column 48, a connecting plate 481, and a slide mounting plate 49; the column 48 is vertically mounted on the base 1, and the slide mounting plate 49 is connected to the column 48 through the connecting plate 481 or directly; the bottom of the slide mounting plate 49 is provided with an air pipe connector 491, and the column 48 is made of marble.

[0042] In actual use, the Z-axis slide module has a column 48, a connecting plate 481, and a slide mounting plate 49. The column 48 is made of high-strength aluminum alloy and is vertically mounted on the base 1 using anchor bolts to ensure a secure installation. The slide mounting plate 49 is connected to the column 48 via the connecting plate 481, and the connecting plate 481 is bolted to both the column 48 and the slide mounting plate 49. The height of the slide mounting plate 49 can be adjusted according to actual needs. At the bottom of the slide mounting plate 49, there is an air pipe connector 491 for connecting to an external air source, providing air support for processing equipment or auxiliary devices that may require an air source.

[0043] Specifically, the third workbench 41 has a main body 411, an outer cover 412, a base plate 413, and two pairs of adjustment structures 414; the main body 411 is mounted on the base plate 413, the base plate 413 is slidably mounted on the slide mounting plate 49, and the two pairs of adjustment structures 414 are respectively mounted on the upper and lower ends of the main body 411; the adjustment structure 414 includes two adjustment handles 4141, a clamping plate 4142, an adjustment shaft 4143, and a rubber coating 4144; the two adjustment handles 4141 are installed in parallel on the left and right ends of the third workbench 41, and the two adjustment handles 4141 are installed in parallel on the left and right ends of the third workbench 41. 41 is connected in the middle by an adjusting shaft 4143. The adjusting shaft 4143 is surrounded by a rubber coating 4144. The two ends of the clamping plate 4142 are respectively installed on two adjusting handles 4141. A spring 4145 is provided between the clamping plate 4142 and the outer cover 412. The main body 411 has a third mounting platform 4111 for connecting external equipment protruding on both sides. The outer cover 412 has a through hole that matches the shape of the third mounting platform 4111. When the outer cover 412 covers the main body 411, the third mounting platform 4111 protrudes from the through hole and the external equipment is installed outside the outer cover 412.

[0044] In actual use, the main body 411 is mounted on the base plate 413 and fixed by bolts. The base plate 413 is slidably mounted on the slide mounting plate 49 via linear guide rails, ensuring smooth movement of the third worktable 41 in the Z-axis direction. Two pairs of adjustment structures 414 are respectively installed at the upper and lower ends of the main body 411. The two adjustment handles 4141 in the adjustment structure 414 are made of aluminum alloy with an oxidized surface, providing good anti-slip performance. The two adjustment handles 4141 are installed parallel to each other at the left and right ends of the third worktable 41 and connected together by an adjustment shaft 4143. The adjustment shaft 4143 is made of stainless steel and is wrapped with rubber 4144 to increase friction and operational comfort. The clamping plate 4142 is made of spring steel 4145 and is bolted to the two adjustment handles 4141 at both ends. A spring 4145 is provided between the clamping plate 4142 and the outer cover 412. The spring 4145 is a compression spring, which can provide appropriate elastic force. Third mounting platforms 4111 for external devices protrude from both sides of the main body 411. The outer cover 412 has through holes that fit the shape of the third mounting platforms 4111. When the outer cover 412 covers the main body 411, the third mounting platforms 4111 protrude through the through holes, allowing the external device to be easily installed outside the outer cover 412. Simultaneously, the adjustment structure 414 can adjust and fix the external device to a certain extent.

[0045] Specifically, the Z-axis slide module 4 also includes a lead screw 43, a nut 44, and a sliding guide mechanism. The nut 44 and the slider 72 are both mounted on the base plate 413. The third drive mechanism 42 drives the lead screw 43 to rotate, causing the nut 44 to move along the lead screw 43. The nut 44 drives the third worktable 41 to move along the slide rail 71. The two ends of the lead screw 43 are respectively provided with a support base 45 and a free end 46. Buffer devices are provided between the support base 45 and the base plate 413, and between the free end 46 and the nut 44. The Z-axis slide module 4 also includes a sensing mechanism. The sensing mechanism includes a sensing plate 51 mounted on the third worktable 41 and a sensor 52 and a magnetic strip 47 fixedly mounted on the slide mounting plate 49. The number of magnetic strips 47 is one or more. The magnetic strips 47 cooperate with the sensing plate 51 and the sensor to detect the position of the third worktable 41.

[0046] In actual use, the lead screw 43 of the Z-axis slide module is a high-precision ball screw 43, with support seats 45 and free ends 46 installed at both ends. The support seats 45 are fixed to the slide mounting plate 49 by bolts. A rubber buffer pad is set between the support seats 45 and the base plate 413 and fixed to the base plate 413 to buffer the vibration generated by the movement of the lead screw 43. Two rubber buffer pads are set between the free end 46 and the nut 44 and fixed to the free end 46 to further reduce the impact of movement. The nut 44 and the slider 72 are both installed on the base plate 413. The third drive mechanism 42 uses a servo motor with a reducer to drive the lead screw 43 to rotate, so that the nut 44 moves along the lead screw 43, thereby driving the third worktable 41 to move along the slide rail 71 in the Z-axis direction. As for the sensing mechanism, the sensing plate 51 is installed on the edge of the third worktable 41 near the slide mounting plate 49. The sensor 52 is a proximity sensor and is fixedly installed on the slide mounting plate 49. The magnetic strip 47 is a fully enclosed magnetic strip, and there are two of them. They are installed in parallel on the slide mounting plate 49. The magnetic strip 47, together with the sensing plate 51 and the sensor, can accurately detect the position of the third worktable 41 in the Z-axis direction, ensuring operational safety and positioning accuracy.

[0047] Specifically, the base 1 / base 31 is provided with support plates 9 at both ends. The two support plates 9 are used to fix the dustproof plate 10. The dustproof plate is located above the first worktable 21 / second worktable 32, and the first worktable 21 / second worktable 32 slides below the dustproof plate. In actual use, support plates 9 are installed at both ends of the base 1, and the support plates 9 are connected to the base 1 by bolts. The two support plates 9 are used to fix the dustproof plate, and the dustproof plate is connected to the support plates 9 by slots or screws. The dustproof plate is located above the first worktable 21 and the second worktable 32, and the first worktable 21 and the second worktable 32 slide below the dustproof plate. The dustproof plate can effectively prevent dust, debris and other impurities from entering the slide module, protect the moving parts, and extend the service life of the slide module.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. An XYZ three-axis marble anti-deformation slide module, characterized in that: The system includes a base (1), an X-axis slide module (2), a Y-axis slide module (3), and a Z-axis slide module (4). The base (1) is made of marble. The X-axis slide module (2) and the Z-axis slide module (4) are mounted on the base (1). The X-axis slide module (2) includes a first worktable (21) and a first drive mechanism (22) for driving the first worktable (21) to slide along the X-axis. The Y-axis slide module (3) is vertically mounted on the first worktable (21) and moves along the X-axis with the first worktable (21). The Y-axis slide module (3) includes a base (31), a second worktable (32) slidably disposed on the base (31), and a second drive mechanism (33) for driving the second worktable (32) to slide along the Y-axis direction; the Z-axis slide module (4) includes a third worktable (41), and a third drive mechanism (42) for driving the third worktable (41) to move up and down along the Z-axis direction; the Y-axis slide module (3) is used to place external objects to be processed, and the Z-axis slide module (4) is used to connect external processing equipment.

2. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The first worktable (21) has a main body and a first mounting platform (211) protruding from both ends of the main body for mounting the Y-axis slide module (3). The side of the first mounting platform (211) away from the main body is provided with an L-shaped limiter (212) for restricting the movement of the Y-axis slide along the X-axis direction.

3. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The X-axis slide module (2) / Y-axis slide module (3) further includes a sensing mechanism and a grating measurement mechanism for detecting the position of the first worktable (21) / second worktable (32). The sensing mechanism includes a sensing plate (51) installed on the first worktable (21) / second worktable (32) and a sensor (52) movably installed on the base (1) / base (31). The number of the sensing plate (51) and the sensor (52) is one or more. The grating measurement mechanism includes a grating mounting stage (5) installed on the base (1) / base (31) and a reading head (53) installed on the first worktable (21) / second worktable (32). The grating mounting stage (5) is used to install a grating ruler (54) and a reference zero-position magnetic exciter (55).

4. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The X-axis slide module (2) / Y-axis slide module (3) further includes a stator (61), a mover (62) and a sliding guide mechanism. The sliding guide mechanism includes multiple slide rails (71) and multiple sliders (72). The stator (61) and slide rails (71) are mounted on the base (1) / base (31). The mover (62) and sliders (72) are mounted on the first worktable (21) / second worktable (32) corresponding to the stator (61) and slide rails (71). The stator (61) generates a magnetic field by being energized, which drives the mover (62) to move along the slide rails (71). The mover (62) drives the first worktable (21) / second worktable (32) to slide along the slide rails (71).

5. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The X-axis slide module (2) and the Y-axis slide module (3) also include anti-collision mechanisms (8). The number of anti-collision mechanisms (8) is one or two pairs, located at both ends of the first worktable (21) / second worktable (32), and installed on the base (1) / base (31). The anti-collision mechanism (8) of the X-axis slide module (2) is an anti-collision telescopic component, and the anti-collision mechanism (8) of the Y-axis slide module (3) is an anti-collision rubber.

6. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The second worktable (32) has a platform (321) protruding on one side facing the Z-axis slide module (4). A dust collection trough (311) is provided below the platform (321). The dust collection trough (311) has a main body and protrusions protruding from three sides of the main body. The dust collection trough (311) is installed on the base plate (413) through one side protrusion. The platform (321) is made of marble.

7. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The Z-axis slide module (4) has a column (48), a connecting plate (481) and a slide mounting plate (49); the column (48) is vertically installed on the base (1), and the slide mounting plate (49) is connected to the column (48) through the connecting plate (481) or directly; the bottom of the slide mounting plate (49) is provided with an air pipe connector (491), and the column (48) is made of marble.

8. The XYZ triaxial marble anti-deformation slide module according to claim 7, characterized in that: The third workbench (41) has a main body (411), an outer cover (412), a base plate (413), and two pairs of adjustment structures (414); the main body (411) is mounted on the base plate (413), the base plate (413) is slidably mounted on the slide mounting plate (49), and the two pairs of adjustment structures (414) are respectively mounted on the upper and lower ends of the main body (411); the adjustment structure (414) includes two adjustment handles (4141), a clamping plate (4142), an adjustment shaft (4143), and a rubber coating (4144); the two adjustment handles (4141) are parallel to each other on the left and right ends of the third workbench (41), and the two adjustment handles (4141) are also parallel to each other on the left and right ends of the third workbench (41). 41) The middle is connected by an adjusting shaft (4143), the adjusting shaft (4143) is surrounded by a rubber coating (4144), the two ends of the clamping plate (4142) are respectively installed on two adjusting handles (4141), and a spring (4145) is provided between the clamping plate (4142) and the outer cover (412); the main body (411) is provided with a third mounting platform (4111) for external equipment on both sides, and the outer cover (412) is provided with a through hole that matches the shape of the third mounting platform (4111). When the outer cover (412) covers the main body (411), the third mounting platform (4111) passes through the through hole, and the external equipment is installed outside the outer cover (412).

9. The XYZ triaxial marble anti-deformation slide module according to claim 8, characterized in that: The Z-axis slide module (4) also includes a lead screw (43), a nut (44), and a sliding guide mechanism. The nut (44) and the slider (72) are both mounted on the base plate (413). The third drive mechanism (42) drives the lead screw (43) to rotate, causing the nut (44) to move along the lead screw (43). The nut (44) drives the third worktable (41) to move along the slide rail (71). The lead screw (43) has a support base (45) and a free end (46) at both ends. The support base (45) and the free end (46) are respectively provided at both ends. A buffer device is provided between the base plate (413) and between the free end (46) and the nut (44); the Z-axis slide module (4) also includes a sensing mechanism, which includes a sensing plate (51) installed on the third worktable (41) and a sensor (52) and a magnetic strip (47) fixedly installed on the slide mounting plate (49). The number of magnetic strips (47) is one or more. The magnetic strips (47) cooperate with the sensing plate (51) and the sensor to detect the position of the third worktable (41).

10. The XYZ triaxial marble anti-deformation slide module according to claim 1, characterized in that: The base (1) / base (31) is provided with support plates (9) at both ends. The two support plates (9) are used to fix the dustproof plate. The dustproof plate is located above the first workbench (21) / second workbench (32), and the first workbench (21) / second workbench (32) slides below the dustproof plate.

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