Perovskite solar cell manufacturing thermal evaporation device with improved crystal oscillator and evaporation source

Abstract

According to the perovskite solar cell manufacturing thermal evaporation device with the improved crystal oscillator and the improved evaporation source, an evaporation support (3), a crystal oscillator piece (8) and a substrate (13) are arranged in a vacuum cavity (1), an isolation sleeve (11) is arranged on the local upper side of the evaporation support (3), and a protection sleeve (9) is arranged outside the crystal oscillator piece (8). By prolonging the service life of the crystal oscillation sheet and weakening the mutual influence of multiple evaporation sources, the process efficiency of the thermal evaporation device for manufacturing the perovskite solar cell can be improved. And by arranging the multi-evaporation-source isolation sleeve, the mutual influence among the multiple evaporation sources is effectively weakened. By improving and strengthening crystal oscillation sheet protection and enhancing local isolation of multiple evaporation sources, the stability of the vibration frequency of the crystal oscillation sheet in long-term work is effectively maintained and improved, so that the quality of an evaporation film is improved, the maintenance cost and the production downtime are remarkably reduced, and the reliability of a system is improved; and the influence of frequency deviation on the performance of the electronic equipment is avoided. And the stability of the thermal evaporation process is improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of IPC classification H01L51 / 48, which is specifically applicable to the manufacture or processing of photoelectric conversion devices, and particularly relates to an improvement applicable to the thermal evaporation deposition preparation of perovskite photovoltaic products. Background Technology

[0002] Currently, perovskites are widely used in solar cells, detection, lasers, lighting, and display fields due to their wide color gamut, high color purity, narrow half-width, and high fluorescence quantum yield. The preparation of flexible solar thin-film batteries using perovskite materials involves research on thermal evaporation processes.

[0003] Thermal evaporation, also known as vacuum evaporation or vacuum evaporation coating, is a method of forming a thin film by heating the raw material to be formed in an evaporation container in a vacuum chamber. This causes atoms or molecules to differentiate and overflow from the surface, forming a vapor stream, which is then incident on the surface of a substrate and condenses to form a solid thin film. This technology mainly produces thin films by heating and evaporating the material. During the evaporation process, the vaporized atoms or molecules are transported between the evaporation source and the surface of the solar cell. Since the surface temperature of the cell is much lower than the temperature of the evaporation source, the deposited molecules undergo a direct transformation from the gas phase to the solid phase on the cell surface. The vapor condenses, nucleates, and grows on the surface of the cell, eventually forming a continuous thin film. A crystal oscillator is needed in this process to provide feedback on the film thickness.

[0004] In the fabrication of perovskite solar cells, the perovskite evaporation source is heated and evaporated in a vacuum chamber, causing its atoms or molecules to separate and overflow from the surface, forming a vapor stream, which is then incident on the substrate surface to form a perovskite solar cell thin film.

[0005] Patent application 202110003313.2 belongs to the field of perovskite LED device light-emitting technology. It discloses a perovskite nanocrystal light-emitting device with a dual interface modification layer and its preparation method. In the perovskite nanocrystal light-emitting device with a dual interface modification layer, a hole injection transport layer, a first interface modification layer, a hole transport layer, a second interface modification layer, and a light-emitting layer are sequentially spin-coated on the anode. The interface modification layer is embedded in the hole transport layer.

[0006] Patent application 201921829937.4 discloses a gas equalization device in a vacuum thermal evaporation equipment for perovskite solar cells, which can significantly improve the uniformity of the perovskite thin film. It has a strip-shaped main body, which includes a semi-circular quartz evaporation boat, a heater, an insulating ring and a heat shield arranged concentrically, and are tightly connected from the inside to the outside. The semi-circular quartz evaporation boat has an open mouth for placing reagents, and a perforated correction mesh is provided above the opening of the open mouth. The heater is a semi-circular tantalum heater.

[0007] In the existing process described above, during the thin-film deposition of perovskite solar cells, a crystal thickness gauge is required to simultaneously detect the film deposition quality. The crystal oscillator is the core component used in the crystal thickness gauge. The crystal oscillator is made of quartz, which has high thermal stability, maintaining its dimensional stability during thermal evaporation and preventing deformation due to temperature changes, thus ensuring the uniformity and repeatability of the deposition. The quartz crystal oscillator exhibits piezoelectricity, oscillating under an applied electric field. During thermal evaporation, the deposition rate of the evaporated material can be adjusted by controlling the electric field on the crystal oscillator, thereby controlling the film thickness.

[0008] In existing thermal evaporation processes, the crystal oscillator, as a key component providing a stable vibration platform, has a lifespan and vibration stability that are crucial to the entire evaporation process. However, prolonged exposure of the crystal oscillator to the open can lead to electrode performance degradation due to factors such as high temperatures and metal oxidation during thermal evaporation. Moreover, in multi-evaporation-source thermal evaporation systems, the mutual influence between the various evaporation sources can cause unstable vibration of the crystal oscillator, thereby affecting the quality of the evaporated film. Utility Model Content

[0009] This invention proposes an improved thermal evaporation deposition apparatus for manufacturing perovskite solar cells, which aims to enhance the process efficiency of the thermal evaporation deposition apparatus by extending the service life of the crystal oscillator and reducing the mutual influence of multiple evaporation sources.

[0010] Therefore, this utility model includes: a vacuum chamber, an evaporation support, a crystal oscillator, a protective sleeve, and an isolation sleeve 11. The evaporation support, the crystal oscillator, and the substrate are arranged in the vacuum chamber, wherein an isolation sleeve is provided on the upper part of a portion of the evaporation support, and a protective sleeve is provided on the outside of the crystal oscillator.

[0011] The evaporation support is housed in the evaporation boat.

[0012] The crystal oscillator is installed in the crystal film thickness gauge.

[0013] The surface of the crystal oscillator is plated with gold.

[0014] A baffle is provided on the upper side of the evaporation bracket, and the baffle is installed on the shutter.

[0015] Furthermore, to achieve the above objectives, this utility model is configured as follows:

[0016] In particular, the protective sleeve has a box-shaped structure and is fitted onto the outer edge of the crystal oscillator.

[0017] In particular, the protective sleeve is a soft, bag-like structure that fits around the outer edge of the crystal oscillator.

[0018] In particular, the protective case features a butterfly clip structure with a soft lining on the inside.

[0019] In particular, the isolation sleeve is a trapezoidal or fan-shaped box lid structure.

[0020] In particular, the isolation sleeve consists of U-shaped shielding blades bent at both ends.

[0021] Compared with the prior art, the beneficial effects of this utility model are:

[0022] By encasing the crystal oscillator in a protective sleeve, it is protected from the effects of temperature, humidity, and the working environment, thereby slowing down the aging process, extending its lifespan, and reducing the frequency of equipment maintenance and replacement. Simultaneously, by installing isolation sleeves for multiple evaporation sources, the mutual interference between these sources is effectively reduced. Through improved and enhanced crystal oscillator protection and strengthened local isolation of multiple evaporation sources, the stability of the crystal oscillator's vibration frequency is effectively maintained and improved during long-term operation, thereby improving the quality of the vapor-deposited film, significantly reducing maintenance costs and production downtime, and enhancing system reliability; it also prevents frequency deviations from affecting the performance of electronic equipment. Furthermore, it improves the stability of the thermal vapor deposition process. Attached Figure Description

[0023] The following figures are illustrative and should not be construed as limiting the scope of this invention. Referring to the figures helps the reader understand the embodiments of this invention and further appreciate its advantages and technical features.

[0024] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of this utility model.

[0025] Figure 2 This is one of the schematic diagrams of the evaporator support installation isolation sleeve structure in Embodiment 1 of this utility model.

[0026] Figure 3 This is the second schematic diagram of the evaporator support installation isolation sleeve structure in Embodiment 1 of this utility model.

[0027] Figure 4 This is a schematic diagram of the crystal oscillator chip installation protective sleeve in Embodiment 1 of this utility model.

[0028] Figure 5 This is the third schematic diagram of the evaporator support installation isolation sleeve structure in Embodiment 1 of this utility model.

[0029] The reference numerals in the figures include:

[0030] 1-Vacuum chamber, 2-Evaporation boat, 3-Evaporation support, 4-Electron gun, 5-Shutter, 6-Baffle, 7-Crystal thickness gauge, 8-Crystal oscillator, 9-Protective sleeve, 10-Heater, 11-Isolation sleeve, 12-Evaporation source, 13-Substrate, 14-Substrate, 15-Vacuum pump. Detailed Implementation

[0031] It should be noted that:

[0032] The terms "comprising" and "having," and any variations thereof, are intended to cover other possible alternatives under the same logic not listed. For example, a process, method, system, product, or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus. The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product of this invention is in use. They are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance. In addition, the terms "horizontal," "vertical," "hanging," etc., do not indicate that the component is required to be absolutely horizontal or hanging, but may be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted. The terms "set up," "install," "connect," and "connect" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components.

[0033] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0034] Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of any conflict, the definitions in this specification shall prevail.

[0035] This utility model includes: a vacuum chamber 1, an evaporation support 3, a crystal oscillator 8, a protective sleeve 9, and an isolation sleeve 11. The evaporation support 3, the crystal oscillator 8, and the substrate 13 are arranged in the vacuum chamber 1, wherein the isolation sleeve 11 is provided on the upper part of the evaporation support 3, and the protective sleeve 9 is provided on the outside of the crystal oscillator 8.

[0036] Evaporation source 11 is a component in the thermal evaporation apparatus used to heat and evaporate the material. Its design and performance have a significant impact on the quality and uniformity of the evaporated film. During the thermal evaporation process, if multiple evaporation sources interfere with each other, it may lead to uneven metal layer deposition, resulting in uneven electrode surfaces and inconsistent thicknesses, thereby affecting the vibration characteristics and frequency stability of the crystal oscillator. By reducing the mutual interference between evaporation sources, uniform metal layer deposition can be ensured, improving the stability and consistency of the electrodes. When multiple evaporation sources deposit on the crystal oscillator, uneven deposition rates or temperature distributions may generate mechanical stress, leading to deformation of the crystal structure or changes in electrode stress. These stress changes affect the operating characteristics of the crystal oscillator, and may even cause frequency drift or shorten its lifespan. Reducing the mutual influence of evaporation sources can reduce the generation of these uneven stresses and improve the stability and durability of the crystal oscillator. Methods to improve the performance of evaporation sources include: using an evaporation source system composed of ultra-wide-width line sources and large-capacity high-temperature point source arrays to improve film uniformity and film thickness repeatability. The evaporation source should have good heating uniformity to ensure that the evaporation material can be vaporized uniformly and stably during the evaporation process. The evaporation source should be equipped with a high-precision temperature control system to accurately control the evaporation temperature, thereby achieving precise control over the evaporation rate and deposition thickness. Advanced sensors and feedback mechanisms should be introduced to monitor the operating status of the evaporation source in real time and adjust the heating power and evaporation rate accordingly. A continuous or pulsed feeding method should be adopted to precisely control the supply of evaporation material according to the needs of the vapor deposition process. The loading and replacement methods of evaporation material should be optimized to reduce downtime and material waste. High-quality materials and manufacturing processes should be selected to manufacture the evaporation source, improving its durability and reliability. Regular maintenance and upkeep of the evaporation source should be performed, and worn or aging components should be replaced promptly.

[0037] Crystal oscillators are primarily used in thermal evaporation equipment to monitor evaporation rates and deposition thickness; their accuracy and stability are crucial to the evaporation process. Different products and applications may require different types of crystal oscillators, such as passive or active crystal oscillators. Active crystal oscillators offer higher stability and accuracy, making them suitable for evaporation processes with high precision requirements. At a stable frequency, crystal oscillators provide higher precision and consistency. For equipment involving timing control and precise frequency adjustment, the stability and lifespan of the crystal oscillator directly affect the performance and efficiency of the entire equipment. Selecting an appropriate crystal oscillator frequency ensures accurate feedback signals during the evaporation process. Setting the frequency too high or too low may cause crystal oscillator resonance, affecting the operation of the entire circuit.

[0038] The principle of this invention lies in improving the performance of the crystal oscillator and evaporation source, optimizing the evaporation process parameters, and enhancing the automation and intelligence level of the equipment. This significantly improves the performance and efficiency of the thermal evaporation device for manufacturing perovskite solar cells, providing strong support for the large-scale commercial production of perovskite solar cells. In the thermal evaporation device for manufacturing perovskite solar cells, the crystal oscillator and evaporation source are core components, significantly impacting the precise control of the evaporation process and the quality of the thin film. In a thermal evaporation device for manufacturing perovskite solar cells with multiple evaporation sources, shielding devices, including isolation sleeves 11, protective sleeves 9, or isolation chambers, are used to physically isolate the crystal oscillator 8 and evaporation sources 12. This reduces cross-interference between their evaporation airflow and deposited materials, ensuring a stable evaporation rate for each evaporation source 12 and effectively protecting the crystal oscillator 8 from the adhesion of multiple substances, thereby extending its service life and ensuring the accuracy of single-substance evaporation.

[0039] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0040] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

[0041] The following preferred embodiments and examples of this invention will provide a more readily apparent understanding of its contents. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of any conflict, the definitions in this specification shall prevail.

[0042] Example 1: Refer to Appendix Figure 1 As shown, an evaporation boat 2 is disposed at the bottom of a vacuum chamber 1, and a substrate 13 is disposed at the top of the vacuum chamber 1. A crystal thickness gauge 7 is mounted on the underside of the substrate 13. An evaporation support 3 is disposed in the evaporation boat 2. The evaporation support 3 has two or more independent spaces for evaporation sources 12. A crystal oscillator 8 is disposed in the crystal thickness gauge 7, and a substrate 14 is mounted on the substrate 13.

[0043] As described above, a heater 10 is mounted on the upper side of a substrate 13 disposed at the top of the vacuum chamber 1.

[0044] As described above, an electron gun 4 is disposed next to the evaporation boat 2 at the bottom of the vacuum chamber 1. During operation, the electron gun 4 acts on the vapor flow from the evaporation source 12 to the substrate 13.

[0045] As mentioned above, a shutter 5 is installed next to the evaporation boat 2 inside the vacuum chamber 1, and a baffle 6 is installed on the top of the shutter 5. The baffle 6 is positioned above the evaporation boat 2 and the evaporation support 3.

[0046] As mentioned above, a vacuum pump 15 is installed on the outer wall of the vacuum chamber 1.

[0047] As mentioned above, as attached Figure 2 , 3 As shown, an isolation sleeve 11 is installed at least partially on the evaporation support 3. The isolation sleeve 11 is placed on the evaporation source 12 that is not used during the evaporation process to reduce the mutual influence between multiple evaporation sources 12 and to prevent the evaporation material of one evaporation source 12 from contaminating the heating area of ​​other evaporation sources 12.

[0048] As mentioned above, the crystal oscillator 8 is made of high-stability quartz material and its surface is plated with gold, giving it good thermal stability and corrosion resistance.

[0049] Preferred options are listed below. Figure 4 As shown, the crystal oscillator 8 is covered with a protective sleeve 9.

[0050] Preferably, in this embodiment, the evaporator support 3 has a star-shaped impeller structure, and the shape of the isolation sleeve 11 is engaged with the inner wall of the independent area where the evaporator source 12 is placed on the evaporator support 3. Alternatively, the isolation sleeve 11 is a trapezoidal or fan-shaped box cover structure. Or, as shown in the attached... Figure 5 As shown, the isolation sleeve 11 is a U-shaped shielding blade that is slidably installed on the pipe opening. The inner end of the U-shaped shielding blade of the isolation sleeve 11 rests on the inner edge of the upper part of the middle of the evaporation bracket 3, and the outer end rests on the outer edge of the evaporation bracket 3. The blade that needs to be adjusted can be moved as needed to expose or close the independent area where the evaporation source 12 is placed.

[0051] Preferably, to accommodate the diversity of vapor deposition sources 12, it is recommended to select materials that do not react with the vapor deposition source 12 to design protective structures such as isolation sleeves 11, including materials such as tungsten and molybdenum.

[0052] In this embodiment, to further enhance the improvement effect, the present invention can also optimize the working environment of the crystal oscillator: the working temperature of the crystal oscillator has a significant impact on its performance. Crystal oscillators with suitable operating temperature ratings should be selected, such as industrial grade (-40℃ to 85℃), automotive grade (-40℃ to 125℃), or military grade (-40℃ to 150℃) to ensure stable operation under different environmental conditions. In addition, electromagnetic interference to the crystal oscillator can be reduced by using a metal shield to protect the crystal oscillator or purchasing differential crystal oscillators with stronger anti-interference capabilities. Alternatively, precise capacitor matching is crucial, as the performance of the crystal oscillator is closely related to the matching degree of its external capacitors. High-precision capacitors should be selected, and capacitors with the same capacitance values ​​should be used as much as possible to avoid frequency deviation. Capacitors with different capacitance values ​​should be selected according to the frequency of the crystal oscillator, ensuring that the capacitors have good stability within a certain temperature range. Furthermore, shortening the connection distance between the crystal oscillator and capacitors and reducing the length of the connecting wires can reduce circuit noise and instability.

[0053] In this embodiment, a substrate 14 is mounted on the substrate 13; isolation sleeves 11 are installed on the multiple independent evaporation sources 12 on the evaporation support 3; gold is plated on the surface of the crystal oscillator 8, and a protective sleeve 9 is installed on the crystal oscillator 8 to shield unused crystal oscillators 8 during evaporation. The evaporation boat 2, electron gun 4, crystal film thickness gauge 7, heater 10, and vacuum pump 15 operate, and the steam flow from the evaporation source 12 to the substrate 13 is opened or closed by rotating the baffle 6 through the shutter 5; during this period, the isolation sleeves 11 placed on the unused evaporation sources 12 during evaporation effectively reduce the mutual influence between multiple sets of evaporation sources 12. At the same time, the protective sleeves 9 on the crystal oscillator 8 shield unused crystal oscillators 8 during evaporation, ensuring that their service life is not affected.

[0054] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, this application will not describe the various possible combinations separately. Furthermore, various different embodiments of this application can also be arbitrarily combined, as long as they do not violate the spirit of this application, and they should also be regarded as the content disclosed by this invention.

Claims

1. An improved thermal evaporation apparatus for manufacturing perovskite solar cells, comprising a vacuum chamber (1), an evaporation support (3), a crystal oscillator (8), a protective sleeve (9), and an isolation sleeve (11); characterized in that, An evaporation support (3), a crystal oscillator (8) and a substrate (13) are provided in a vacuum chamber (1). An isolation sleeve (11) is provided on the upper part of the evaporation support (3), and a protective sleeve (9) is provided on the outside of the crystal oscillator (8).

2. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The evaporation support (3) is placed in the evaporation boat (2).

3. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The crystal oscillator (8) is installed in the crystal film thickness gauge (7).

4. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The surface of the crystal oscillator (8) is plated with gold.

5. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, A baffle (6) is provided on the upper side of the evaporation bracket (3), and the baffle (6) is installed on the shutter (5).

6. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The protective sleeve (9) has a box-shaped structure and is fitted onto the outer edge of the crystal oscillator (8).

7. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The protective sleeve (9) is a soft bag-like structure that is fitted onto the outer edge of the crystal oscillator (8).

8. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The protective case (9) is a butterfly clip structure with a soft lining on the inside.

9. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The isolation sleeve (11) is a trapezoidal or fan-shaped box cover structure.

10. The thermal evaporation apparatus for manufacturing perovskite solar cells with improved crystal oscillator and evaporation source according to claim 1, characterized in that, The isolation sleeve (11) is a U-shaped shielding blade with both ends bent.

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