Formic acid injection system and vacuum sintering furnace
By designing a formic acid injection system and related components for a heated bath, the problem of unadjustable formic acid nitrogen temperature was solved, achieving precise temperature control and uniform heating, thus ensuring the stability and effectiveness of formic acid.
Patent Information
- Application Number
- CN202520097947.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-01-16
AI Technical Summary
The existing formic acid injection system cannot regulate the temperature of the formic acid nitrogen gas, resulting in temperature instability and affecting the properties and effectiveness of formic acid.
A formic acid injection system was designed, including components such as a warm bath system, heating tube, temperature sensor, stirring mechanism and liquid level sensor. The system precisely controls the temperature of formic acid and nitrogen by adjusting the temperature of the water, ensuring uniform heating and a stable environment.
It achieves precise control of the temperature of formic acid nitrogen gas, avoiding excessively high or low local temperatures, ensuring the stability and uniform distribution of formic acid, and providing a stable operating environment.
Smart Images
Figure CN223869028U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to vacuum sintering technical field especially relates to a formic acid injection system and vacuum sintering furnace. BACKGROUND
[0002] Formic acid, commonly known as ant acid, is a colorless liquid with irritating odor, volatile, weak electrolyte, melting point 8.6 DEG C, boiling point 100.8 DEG C, strong acidity, corrosive, can stimulate the skin to bubble, is organic chemical raw material.Formic acid is strong reducing agent, formic acid gas itself can consume oxygen by chemical reaction under high temperature and form no oxygen welding, can also reduce the surface of the metal oxidized by reduction reaction and form clean metal surface.Therefore, in the field of semiconductors and other welding packaging fields, as cleaning agent or reducing agent, the equipment using formic acid process is more and more.The existing formic acid injection system cannot adjust the temperature of formic acid nitrogen gas. SUMMARY
[0003] The utility model provides a formic acid injection system to solve the problem of prior art that cannot adjust the temperature of formic acid nitrogen gas.
[0004] The utility model provides a formic acid injection system, including first formic acid bucket body, warm bath system, gas injection subassembly and mixed gas export pipe, the lower part of first formic acid bucket body is arranged in the inside of the warm bath tank of warm bath system, the upper part of first formic acid bucket body sets up mixed gas export pipe, the upper part of first formic acid bucket body sets up gas injection subassembly.
[0005] According to the formic acid injection system of the utility model, still including formic acid pump and second formic acid bucket body, the import end of formic acid pump is arranged in the upper part of second formic acid bucket body, the formic acid outlet pipe of formic acid pump is arranged in the bottom of first formic acid bucket body, the lower part of second formic acid bucket body is arranged in the inside of the warm bath tank of warm bath system.
[0006] According to the formic acid injection system of the utility model, the warm bath system still includes at least one heating pipe, at least one temperature sensor, at least one observation window, stirring mechanism and water injection port, the heating pipe is symmetrically arranged in both ends of the warm bath tank, the stirring mechanism is arranged in the middle part of the warm bath tank, the side of the warm bath tank is provided with the observation window, the temperature sensor is arranged in the inside of the warm bath tank, and the side of the warm bath tank is provided with the water injection port.
[0007] According to the formic acid injection system of the utility model, still including second low liquid level sensor and formic acid injection port, the second low liquid level sensor is arranged in the bottom of second formic acid bucket body, and the formic acid injection port is arranged in the top of second formic acid bucket body.
[0008] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body.
[0009] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body.
[0010] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body.
[0011] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body.
[0012] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body.
[0013] The formic acid injection system also comprises a first low liquid level sensor and a high liquid level sensor, the first low liquid level sensor is arranged at the bottom of the side of the first formic acid barrel body, and the high liquid level sensor is arranged at the middle of the first formic acid barrel body. BRIEF DESCRIPTION OF DRAWINGS
[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.
[0015] Figure 1 It is a front view structural schematic diagram of the formic acid injection system.
[0016] Figure 2 It is a front view structural schematic diagram of the formic acid injection system. Figure 1
[0017] Figure 3 It is a front view structural schematic diagram of the formic acid injection system. Figure 2
[0018] Figure 4 It is a front view structural schematic diagram of the formic acid injection system.
[0019] Figure 5 Front view structural schematic diagram of formic acid injection system;
[0020] Figure 6 Front view structural schematic diagram of formic acid injection system;
[0021] Figure 7 Front view structural schematic diagram of gas injection assembly;
[0022] Fig. 1 is a bath system; 2 is a first formic acid barrel; 3 is a second formic acid barrel; 4 is a formic acid pump; 5 is a second one-way valve; 6 is a formic acid outlet pipe; 11 is a bath tank; 12 is a heating pipe; 13 is a temperature sensor; 14 is an observation window; 15 is a stirring mechanism; 16 is a water injection port; 21 is a first formic acid barrel body; 22 is a first low liquid level sensor; 23 is a high liquid level sensor; 24 is a pressure sensor; 25 is a safety pressure relief valve; 26 is a mixed gas outlet pipe; 27 is a gas injection assembly; 31 is a second formic acid barrel body; 32 is a second low liquid level sensor; 33 is a formic acid injection port; 271 is a first one-way valve; 272 is a connecting pipe; 273 is a circular pipe; 274 is a first mini ball valve. DETAILED DESCRIPTION
[0023] The embodiments of the present application will be further described below in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but cannot be used to limit the scope of the present application.
[0024] In the description of the embodiments of the present application, it should be explained that the orientation or position relationship indicated by the terms “center”, “longitudinal”, “transverse”, “upper”, “lower”, “front”, “rear”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer” and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms “first”, “second”, “third” are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0025] In the description of the embodiments of the present application, it should be explained that unless otherwise explicitly specified and limited, the terms “connected” and “connected” should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.
[0026] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium.
[0027] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.
[0028] The following will be described in detail Figures 1-7 A formic acid injection system is described, comprising a first formic acid barrel body 21, a warm bath system 1, a gas injection assembly 27 and a mixed gas outlet pipe 26; the lower part of the first formic acid barrel body 21 is arranged inside the warm bath tank 11 of the warm bath system 1, the upper part of the first formic acid barrel body 21 is arranged with the mixed gas outlet pipe 26, and the upper part of the first formic acid barrel body 21 is arranged with the gas injection assembly 27.
[0029] In some embodiments, it further comprises a formic acid pump 4 and a second formic acid barrel body 31; the inlet end of the formic acid pump 4 is arranged at the upper part of the second formic acid barrel body 31, the formic acid outlet pipe 6 of the formic acid pump 4 is arranged at the bottom of the first formic acid barrel body 21, and the lower part of the second formic acid barrel body 31 is arranged inside the warm bath tank 11 of the warm bath system 1. The formic acid outlet pipe 6 is provided with a second one-way valve 5.
[0030] In some embodiments, the lower part of the nitrogen tank is arranged inside the warm bath system 1, the inlet end of the nitrogen tank is provided with a pressure increasing valve, the pressure in the nitrogen tank is less than the pressure threshold value, the pressure increasing valve is opened, nitrogen is filled in the nitrogen tank, and the pressure in the nitrogen tank is constant at the pressure threshold value. The outlet end of the nitrogen tank is connected to the gas injection assembly 27. A flow meter is arranged at the outlet end of the nitrogen tank.
[0031] In some embodiments, the bath system 1 further comprises at least one heating pipe 12, at least one temperature sensor 13, at least one observation window 14, a stirring mechanism 15 and a water inlet 16; the observation window 14 is provided with a scale to measure the height of water. The heating pipe 12 is symmetrically arranged at both ends of the bath tank 11, the stirring mechanism 15 is arranged in the middle of the bath tank 11, the observation window 14 is arranged at the side of the bath tank 11, the temperature sensor 13 is arranged inside the bath tank 11, and the water inlet 16 is arranged at the side of the bath tank 11. The stirring mechanism 15 is preferably a fan blade stirring mechanism 15.
[0032] In some embodiments, the second formic acid barrel 3 further comprises a second low liquid level sensor 32 and a formic acid injection inlet 33; the second low liquid level sensor 32 is arranged at the bottom of the second formic acid barrel body 31, and the formic acid injection inlet 33 is arranged at the top of the second formic acid barrel body 31. The second low liquid level sensor 32 is a sealed sensor or a waterproof sensor.
[0033] In some embodiments, the first formic acid barrel 2 further comprises a first low liquid level sensor 22 and a high liquid level sensor 23; the first low liquid level sensor 22 is arranged at the bottom of the side of the first formic acid barrel body 21, and the high liquid level sensor 23 is arranged in the middle of the first formic acid barrel body 21. The first low liquid level sensor 22 and the high liquid level sensor 23 are sealed sensors or waterproof sensors.
[0034] In some embodiments, the gas injection assembly 27 comprises a first one-way valve 271, a first mini ball valve 274, a connecting pipe 272 and a circular pipe 273; the first one-way valve 271 is connected to the first mini ball valve 274, the connecting pipe 272 and the circular pipe 273 in sequence, and the circular pipe 273 is arranged inside the bottom of the first formic acid barrel body 21.
[0035] In some embodiments, a pressure sensor 24 is further included, and the pressure sensor 24 is arranged at the top of the first formic acid barrel body 21.
[0036] In some embodiments, a safety pressure relief valve 25 is further included, and the safety pressure relief valve 25 is arranged at the top of the first formic acid barrel body 21.
[0037] A vacuum sintering furnace comprising the formic acid injection system described above.
[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims
1. A formic acid injection system, characterized in that, It includes a first formic acid tank body, a warm bath system, a gas injection component, and a mixed gas outlet pipe; the lower part of the first formic acid tank body is disposed inside the warm bath tank of the warm bath system, the mixed gas outlet pipe is disposed at the upper part of the first formic acid tank body, and the gas injection component is disposed at the upper part of the first formic acid tank body.
2. The formic acid injection system according to claim 1, characterized in that, It also includes a formic acid pump and a second formic acid tank body; the inlet end of the formic acid pump is located at the upper part of the second formic acid tank body, the formic acid outlet pipe of the formic acid pump is located at the bottom of the first formic acid tank body, and the lower part of the second formic acid tank body is located inside the warm bath tank of the warm bath system.
3. The formic acid injection system according to claim 1, characterized in that, The hot water bath system also includes at least one heating tube, at least one temperature sensor, at least one observation window, a stirring mechanism, and a water inlet; the heating tubes are symmetrically arranged at both ends of the hot water bath, the stirring mechanism is arranged in the middle of the hot water bath, the observation window is arranged on the side of the hot water bath, the temperature sensor is arranged inside the hot water bath, and the water inlet is arranged on the side of the hot water bath.
4. The formic acid injection system according to claim 2, characterized in that, It also includes a second low liquid level sensor and a formic acid injection port; the second low liquid level sensor is provided at the bottom of the second formic acid tank body, and the formic acid injection port is provided at the top of the second formic acid tank body.
5. The formic acid injection system according to claim 1, characterized in that, It also includes a first low liquid level sensor and a high liquid level sensor. The first low liquid level sensor is provided at the bottom side of the first formic acid tank body, and the high liquid level sensor is provided in the middle of the first formic acid tank body.
6. The formic acid injection system according to claim 1, characterized in that, The gas injection assembly includes a first one-way valve, a first mini ball valve, a connecting pipe, and a circular pipe; the first one-way valve is sequentially connected to the first mini ball valve, the connecting pipe, and the circular pipe, and the circular pipe is located at the bottom inside the first formic acid tank body.
7. The formic acid injection system according to claim 1, characterized in that, It also includes a pressure sensor, which is installed on the top of the first formic acid tank body.
8. The formic acid injection system according to claim 1, characterized in that, It also includes a safety relief valve, which is installed on the top of the first formic acid tank body.
9. A vacuum sintering furnace, characterized in that, Includes the formic acid injection system according to any one of claims 1-8.