Wet flower basket for improving flower basket mark for monocrystalline silicon wafer

Abstract

According to the wet-process flower basket for improving the flower basket mark for the monocrystalline silicon wafer, one end of each flower basket tooth is fixedly connected with a flower basket column, supporting contacts are symmetrically arranged on the upper face and the lower face of the other end of each flower basket tooth, a silicon wafer is arranged between the upper flower basket tooth and the lower flower basket tooth which are adjacent to each other, and the supporting contacts are semicircular. A silicon wafer is supported between the supporting contacts between every two vertically adjacent basket teeth, the outer edges of the upper surface and the lower surface of each silicon wafer are arranged between the upper supporting contacts and the lower supporting contacts in a clamped mode, and water passing gaps are formed between the outer edge surfaces of the silicon wafers and the surfaces of the basket teeth, so that it is guaranteed that the silicon wafers are located in the clamping grooves in the horizontal direction, and meanwhile the water passing gaps are formed. The silicon wafer can directly react with the solution through the gap, so that the condition that the clamping groove hinders the reaction between the solution and the silicon wafer in a local small range is reduced, the contact probability of the silicon wafer and the wet-method prepared reaction solution is increased, and flower basket marks on the surface of the silicon wafer are directly avoided.

Description

Technical Field

[0001] This article belongs to the technical field of wet-process fabrication of basket patterns on monocrystalline silicon wafers, specifically relating to a wet-process basket pattern for monocrystalline silicon wafers that improves basket pattern printing. Background Technology

[0002] In the wet process of monocrystalline silicon wafer fabrication, to ensure sufficient contact between the silicon wafer and the solution for mass production, multiple silicon wafers are typically stacked in a carrier basket and placed in the solution, allowing the monocrystalline silicon wafers to react fully in the solution. Additionally, carrier baskets are commonly used to transfer silicon wafers between different processes. The side and bottom rods of the carrier basket have several basket teeth, and adjacent basket teeth form a slot, in which the two sides of the silicon wafer are inserted and fixed.

[0003] However, the flower baskets used in existing technologies all have rhomboid or trapezoidal-like tooth designs, such as... Figure 4 , Figure 5 As shown, when the silicon wafer is inserted into the slot, the slot comes into contact with the silicon wafer surface, hindering the reaction between the solution and the silicon wafer, resulting in uneven reaction around the silicon wafer surface, which easily forms a basket pattern. Utility Model Content

[0004] To address the aforementioned issues, this paper proposes an improved wet basket pattern for monocrystalline silicon wafers. The wet basket pattern comprises a basket substrate, basket pillars, and basket teeth. The inner side of the basket pillars has several basket teeth arranged vertically at equal intervals. Each basket tooth is a rectangular strip and is horizontally connected to the outer surface of the basket pillar. One end of each basket tooth is fixedly connected to the basket pillar, and the other end of each basket tooth has symmetrical support contacts on its upper and lower sides. A silicon wafer is placed between adjacent basket teeth. The support contacts are semi-circular in shape. A silicon wafer is supported between the support contacts. The outer edges of the upper and lower surfaces of the silicon wafer are snapped together between the upper and lower support contacts. A water-passing gap is provided between the outer edge surface of the silicon wafer and the surface of the basket teeth. Since the original surface contact between the basket teeth and the silicon wafer is changed to a point contact structure, while ensuring that the silicon wafer is positioned horizontally in the slot, the silicon wafer can react directly with the solution through the gap. This reduces the situation where the slot in a small local area hinders the reaction between the solution and the silicon wafer, increases the probability of the silicon wafer contacting the wet preparation reaction solution, and directly eliminates the generation of basket marks on the surface of the silicon wafer.

[0005] The wet-laid flower basket is a vertically connected interlocking flower basket. Several flower basket columns are vertically connected in the middle of the basket. A flower basket base plate is fixedly attached to both the top and bottom ends of each column. The base plate is rectangular and connects the columns integrally. Through the vertically connected interlocking flower baskets, the overall structure is shifted and reinforced via the base plate. The integrated structure provides strength and corrosion resistance that meet process requirements and can withstand temperatures from -40℃ to 120℃.

[0006] The basket column is a cylindrical upright column. The basket teeth are made of PVC and carbon fiber with a nano-fluorine treatment. The top and bottom ends of the basket column are fixed to the basket base. The basket columns are symmetrically arranged at the two sharp corners on the front side of the basket base, and symmetrically arranged on the middle of the rear side of the basket base. The basket teeth are arranged horizontally on the inner side of the front basket column and vertically on the inner side of the rear basket column. The basket column, which is wider at the front and narrower at the back, allows for the insertion and installation of silicon wafers from the front, ensuring that the silicon wafers can be installed horizontally and stably. The outer surface of the basket column also ensures that the silicon wafers can be installed stably.

[0007] The support contact is shaped like a semi-circular protrusion. The support contact is integrally connected to the basket teeth, and its top end is connected to the silicon wafer surface via a point-contact structure. Through this circular support contact, the basket teeth formed by adjacent teeth establish a point-contact structure between the basket teeth and the silicon wafer.

[0008] The silicon wafer is rectangular in shape, and the outer contour of the silicon wafer is the same as the inner spacing of several basket handles. The outer edge of the silicon wafer is suspended between the basket handles by support contacts. The silicon wafer is snapped together to reduce basket marks on the surface of the silicon wafer, thereby improving the appearance quality of the silicon wafer and the performance of the subsequent battery.

[0009] Beneficial effects:

[0010] Because the basket pattern between the silicon wafer and the silicon wafer changes from a surface contact to a point contact structure, while ensuring that the silicon wafer is positioned horizontally in the slot, the silicon wafer can react directly with the solution through the gap. This reduces the situation where the slot hinders the reaction between the solution and the silicon wafer in a small local area, increases the probability of the silicon wafer contacting the wet preparation reaction solution, and directly eliminates the generation of basket patterns on the silicon wafer surface.

[0011] The vertically arranged interlocking flower baskets allow for overall displacement and reinforcement via the flower basket base plate. The integrated structure meets process requirements in terms of strength and corrosion resistance and can withstand temperatures from -40℃ to 120℃.

[0012] The basket-like design, wider at the front and narrower at the back, allows for front-mounted insertion and installation of silicon wafers, ensuring their horizontal and stable installation. The outer surface of the basket-like structure further guarantees the wafer's stability during installation.

[0013] By using a snap-fit ​​method, the silicon wafers have reduced basket marks on their surface, improving their appearance quality and the performance of subsequent batteries. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of a wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers;

[0015] Figure 2 This is a front view of a wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers;

[0016] Figure 3 This is a partially enlarged schematic diagram of a wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers.

[0017] Figure 4 This is a front view of an existing wet-process flower basket;

[0018] Figure 5 This is an enlarged schematic diagram of the teeth of an existing wet-process flower basket;

[0019] In the diagram: 1. Basket substrate, 2. Basket column, 3. Basket teeth, 4. Support contact, 5. Silicon wafer. Detailed Implementation

[0020] To enhance understanding of this utility model, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. These embodiments are only used to explain the present utility model and do not constitute a limitation on the scope of protection of the present utility model.

[0021] 1. Basket substrate; 2. Basket pillar; 3. Basket teeth; 4. Support contact; 5. Silicon wafer.

[0022] like Figure 1 , 2 As shown in Figure 3;

[0023] A wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers includes a basket substrate 1, basket pillars 2, and basket teeth 3. The inner side of each basket pillar 2 has several basket teeth 3 arranged vertically at equal intervals. Each basket tooth 3 is a rectangular strip and is horizontally connected to the outer surface of the basket pillar. One end of each basket tooth 3 is fixedly connected to the basket pillar 2. The other end of each basket tooth 3 has symmetrical support contacts 4 on its upper and lower sides. A silicon wafer 5 is positioned between adjacent basket teeth 3. The support contacts 4 are semi-circular in shape and support the silicon wafer 5 between the support contacts 4 of two adjacent basket teeth 3. The outer edges of the upper and lower surfaces of the silicon wafer 5 are snapped together between the upper and lower support contacts 4. A water-passing gap is provided between the outer edge of the silicon wafer 5 and the surface of the basket teeth 3. The wet-process basket is a vertically interlocking basket. Several basket pillars 2 are vertically arranged in the middle of the wet-process basket. A basket base plate 1 is fixed at both the top and bottom. The basket base plate 1 is rectangular. Several basket pillars 2 are integrally connected to the basket base plate 1. The basket pillars 2 are cylindrical pillars. The top and bottom ends of the basket pillars 2 are fixed to the basket base plate 1. The basket pillars 2 are symmetrically arranged at the left and right corners of the front side of the basket base plate 1. The basket pillars 2 are symmetrically arranged at the middle of the rear side of the basket base plate 1. The basket teeth 3 are arranged horizontally on the inner side of the front basket pillars 2 and vertically on the inner side of the rear basket pillars 2. The support contact 4 is a semi-circular protrusion. The support contact 4 is integrally connected to the basket teeth 3. The top end of the support contact 4 is connected to the surface of the silicon wafer 5. The silicon wafer 5 is rectangular. The outer contour dimension of the silicon wafer 5 is the same as the inner spacing of the basket pillars. The outer edge of the silicon wafer 5 is suspended between the basket teeth 3 through the support contact 4.

[0024] Implementation example;

[0025] In use, the silicon wafer 5 is directly inserted and installed through the support contacts 4 between the basket teeth 3. The circular support contacts 4 support and position the surface of the silicon wafer 5 stably. After the installation of the silicon wafer 5 is completed, the basket is placed into the solution to allow the solution and the silicon wafer 5 to react. At this time, there is a sufficient transition gap around the arc of the end point where the silicon wafer 5 contacts the support contacts 4, thereby significantly reducing the basket imprint on the surface of the silicon wafer 5.

[0026] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wet basket pattern for improving basket patterning on monocrystalline silicon wafers, the wet basket pattern comprising a basket substrate, basket pillars, and basket teeth, wherein the inner side of the basket pillars is provided with a plurality of basket teeth arranged vertically at equal intervals, characterized in that, The basket teeth are rectangular strips, horizontally connected to the outer surface of the basket rod. One end of the basket teeth is fixedly connected to the basket post, and the other end of the basket teeth has symmetrical support contacts on both the upper and lower sides. A silicon wafer is provided between adjacent basket teeth. The support contacts are semi-circular in shape, and a silicon wafer is supported between the support contacts of two adjacent basket teeth. The outer edges of the upper and lower surfaces of the silicon wafer are snapped between the upper and lower support contacts, and a water passage gap is provided between the outer edge surface of the silicon wafer and the surface of the basket teeth.

2. The wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers according to claim 1, characterized in that, The wet-process flower basket is a vertically connected flower basket. Several flower basket columns are vertically arranged in the middle of the wet-process flower basket. Both ends of the flower basket columns are fixedly provided with flower basket base plates. The flower basket base plates are rectangular plates, and the flower basket base plates are fixedly connected to the several flower basket columns as a whole.

3. The wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers according to claim 1, characterized in that, The basket column is cylindrical in shape, and the basket teeth are made of PVC and carbon fiber with nano-fluorine treatment. The upper and lower ends of the basket column are fixed to the basket base. The basket columns are symmetrically arranged at the two sharp corners on the front side of the basket base, and the basket columns are symmetrically arranged on the middle of the rear side of the basket base. The basket teeth are arranged horizontally on the inner side of the front basket column and vertically on the inner side of the rear basket column.

4. The wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers according to claim 1, characterized in that, The support contact is a semi-circular protrusion, and the support contact is integrally connected to the basket teeth. The top end of the support contact is connected to the silicon wafer surface in a contact manner.

5. The wet-process basket pattern for improving basket pattern printing on monocrystalline silicon wafers according to claim 1, characterized in that, The silicon wafer is rectangular in shape, and the outer contour of the silicon wafer is the same as the inner spacing of several basket rods. The outer edge of the silicon wafer is suspended between the basket teeth by support contacts.

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