Conveying mechanism and semiconductor packaging equipment

Abstract

The utility model provides a conveying mechanism and a semiconductor packaging device, and relates to the technical field of semiconductor packaging, a belt-shaped object is grabbed through a grabbing component, and the grabbing component is driven to move through a moving driving component, so that the belt-shaped object stably moves on a conveying platform, the condition of aging of the grabbing component is avoided, and the conveying efficiency is improved. The movable side plates are installed on the two sides of the conveying platform, the folding driving component drives the two movable side plates to get close to each other or get away from each other, a strip-shaped object can be folded and centered on the conveying platform when the two movable side plates get close to each other, the center position of a strip is adjusted and calibrated, and the problems that in the prior art, a conveying mechanism is prone to aging, the mechanism is complex, and the conveying efficiency is high are solved. And it cannot be guaranteed that the strip is located at the center position.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and in particular to a conveying mechanism and semiconductor packaging equipment. Background Technology

[0002] With the continuous advancement of semiconductor technology, quality control in semiconductor packaging has become paramount. The smoothness and precision of the strip during transport directly impact the quality and reliability of the packaged products. Existing strip transport mechanisms are mainly divided into two categories: one uses a circular belt conveyor, and the other adds a pushing mechanism to the circular belt conveyor system.

[0003] Firstly, for conveyor systems using circular belts, the commonly used circular belts are mostly made of rubber. This material is prone to aging after prolonged use, leading to reduced elasticity, surface wear, and other problems, which in turn affect the conveying accuracy of the belt. To ensure effective conveying, the circular belts typically need to be replaced periodically to maintain their performance.

[0004] Secondly, while adding a pushing mechanism to the circular belt conveyor can improve conveying efficiency to some extent, this mechanism is relatively complex and difficult to install and maintain. Furthermore, the pushing mechanism also faces the problem of rubber component aging. More importantly, during the pushing process, the belt edges are easily scratched, which may not only alter the belt shape but also damage it, further affecting conveying accuracy. To reduce friction between the belt and the inner wall of the channel, existing designs tend to leave a larger channel gap, but this causes instability in the belt's center position when it reaches the end, resulting in some deviation and increasing safety risks in subsequent processes. Utility Model Content

[0005] The purpose of this invention is to provide a conveying mechanism and semiconductor packaging equipment to alleviate the technical problems of the existing conveying mechanism being prone to aging, having a relatively complex mechanism, and being unable to guarantee that the strip is in the center position.

[0006] In a first aspect, the conveying mechanism provided by this utility model includes: a conveying platform, a gripping component, a moving drive component, a movable side plate, and a retracting drive component;

[0007] The conveyor platform is used to support the strip-shaped material;

[0008] The gripping component is used to grip strip-shaped objects;

[0009] The moving drive component is connected to the gripping component in a transmission manner, and the moving drive component is configured to drive the gripping component to move so that the strip can move on the conveying platform;

[0010] The conveying platform is provided with movable side plates on both sides, and the two opposing movable side plates are configured to move relative to the conveying platform.

[0011] The retraction drive component is connected to the movable side plate via a transmission connection, and the retraction drive component is configured to drive the two movable side plates to move closer to each other or further apart.

[0012] In an optional implementation,

[0013] The gripping component includes a strip gripper and a parallel pneumatic gripper;

[0014] The parallel pneumatic gripper is connected to the strip gripper, and the strip gripper is capable of gripping strip-shaped objects;

[0015] The parallel gripper is connected to the moving drive component, and the driving force generated by the moving drive component drives the parallel gripper to move, so that the strip gripper can grasp the strip and move it on the conveyor platform.

[0016] In an optional implementation,

[0017] The conveying platform is provided with an elongated hole, and the end of the strip claw away from the parallel pneumatic gripper passes through the elongated hole to grip the strip, so that when the strip claw moves, it drives the strip to move on the conveying platform.

[0018] In an optional implementation,

[0019] The retraction drive component includes a retraction drive body and a drive rod;

[0020] The retraction drive body is fixed to the conveying platform;

[0021] The retractable drive body is connected to the drive rod, and the retractable drive body is configured to drive the drive rod to extend and retract.

[0022] In an optional implementation,

[0023] A connecting plate is fixedly provided on the outer side of the movable side plate, and a rolling part is provided on the connecting plate;

[0024] The drive rod is provided with a tapered slope. When the drive rod extends and moves away from the retracting drive body, the tapered slope can push the rolling part to move outward, so that the movable side plate moves outward.

[0025] In an optional implementation,

[0026] The retraction drive component also includes a fixing block;

[0027] The fixed block is fixedly connected to the conveying platform, and the drive rod passes through the fixed block.

[0028] In an optional implementation,

[0029] The retraction drive component also includes a reset elastic element;

[0030] The drive rod extends outward to form a contact platform. One end of the reset elastic member is connected to the contact platform, and the other end of the reset elastic member is connected to the fixed block. The reset elastic member is configured to enable the drive rod to have a tendency to move in the direction of retraction into the retracting drive body.

[0031] In an optional implementation,

[0032] The conveying mechanism also includes a guide component;

[0033] Each of the two movable side plates is provided with a corresponding guide member, and the guide member is connected to the movable side plate. The guide member is configured to restrict the movement direction of the movable side plate so that both movable side plates move along a direction perpendicular to the transport direction of the strip.

[0034] In an optional implementation,

[0035] The guide component includes a linear bearing and a sliding shaft;

[0036] The linear bearing is mounted on the outside of the movable side plate, and the sliding shaft passes through the linear bearing and the movable side plate to allow the movable side plate to move along the sliding shaft;

[0037] A retractable elastic element is sleeved on the sliding shaft. The end of the sliding shaft away from the linear bearing extends outward to form a connecting platform. One end of the retractable elastic element is connected to the connecting platform, and the other end of the retractable elastic element is connected to the linear bearing. The retractable elastic element is configured to enable the movable side plate to have an inward movement tendency.

[0038] Secondly, the semiconductor packaging equipment provided by this utility model includes the aforementioned conveying mechanism.

[0039] The conveying mechanism provided by this utility model grips the strip material with a gripping component and moves the gripping component with a moving drive component, thereby making the strip material move stably on the conveying platform. The gripping component will not age. By installing movable side plates on both sides of the conveying platform, the retracting drive component moves the two movable side plates closer to each other or further apart. When they move closer together, the strip material can be gathered and centered on the conveying platform, adjusting and calibrating the center position of the strip. This alleviates the technical problems of existing conveying mechanisms that are prone to aging, have a relatively complex mechanism, and cannot guarantee that the strip material is in the center position. Attached Figure Description

[0040] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0041] Figure 1 This is a schematic diagram of the overall structure of the conveying mechanism provided in an embodiment of the present utility model;

[0042] Figure 2 A schematic diagram of the installation structure of the guide component in the conveying mechanism provided in this embodiment of the utility model;

[0043] Figure 3 This is a structural schematic diagram of the conveying mechanism provided in an embodiment of the present utility model from another perspective.

[0044] Icons: 10-Strip; 100-Conveying platform; 110-Elongated hole; 200-Gripping component; 210-Strip pull claw; 220-Parallel pneumatic gripper; 300-Moving drive component; 400-Moving side plate; 410-Connecting plate; 420-Rolling part; 500-Collapsing drive component; 510-Collapsing drive body; 520-Drive rod; 521-Tapered slope; 530-Fixing block; 540-Reset elastic element; 600-Guide component; 610-Linear bearing; 620-Sliding shaft; 630-Collapsing elastic element. Detailed Implementation

[0045] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0046] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0047] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0048] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0049] like Figure 1 , Figure 3 As shown, the conveying mechanism provided in this embodiment includes: a conveying platform 100, a gripping component 200, a moving drive component 300, a movable side plate 400, and a retracting drive component 500.

[0050] The conveying platform 100 is used to support the strip 10. The conveying platform 100 specifically includes a support plate, and fixed plates are fixedly connected to both sides of the support plate. The fixed plates on both sides and the support plate form a groove-shaped structure. The groove-shaped structure facilitates the movement of the strip 10 on the support plate. The strip 10 is specifically a strip.

[0051] The gripping member 200 is used to grip the strip 10. The moving drive member 300 is connected to the gripping member 200 in a transmission manner. The moving drive member 300 is configured to drive the gripping member 200 to move so that the strip 10 moves on the conveyor platform 100.

[0052] Specifically, the gripping component 200 includes a strip claw 210 and a parallel pneumatic gripper 220. The strip claw 210 can grip the strip 10. The structure of the strip claw 210 can be configured such that the top of the strip claw 210 has a locking groove. After the strip 10 extends into the locking groove, it is driven to move by friction. Alternatively, the structure of the strip claw 210 can be configured as two claws. The two claws can be far apart or close to each other. When the two claws are close to each other, the strip 10 can be clamped by the two claws. The specific structure of the strip claw 210 can also be selected according to the specific size and shape of the strip 10.

[0053] The parallel gripper 220 is connected to the strip gripper 210 and is connected to the moving drive component 300. The driving force generated by the moving drive component 300 drives the parallel gripper 220 to move, thereby gripping the strip 10 and moving it on the conveyor platform 100 through the strip gripper 210.

[0054] Movable side plates 400 are provided on both sides of the conveying platform 100, and the two opposing movable side plates 400 are configured to move relative to the conveying platform 100. The retraction drive component 500 is connected to the movable side plates 400 in a transmission manner. The retraction drive component 500 is configured to drive the two movable side plates 400 to move closer to each other or further away from each other. When the two movable side plates 400 move towards each other, the strip 10 on the conveying platform 100 can be centered.

[0055] The conveying mechanism provided in this embodiment grips the strip 10 with the gripping component 200 and moves the gripping component 200 with the moving drive component 300, thereby making the strip 10 move stably on the conveying platform 100. The gripping component 200 will not age. By installing movable side plates 400 on both sides of the conveying platform 100, the retraction drive component 500 moves the two movable side plates 400 closer or further apart. When they move closer together, the strip 10 can be gathered and centered on the conveying platform 100, adjusting and calibrating the center position of the strip. This alleviates the technical problems of easy aging of the conveying mechanism, the complexity of the mechanism, and the inability to guarantee that the strip is in the center position in the prior art.

[0056] Based on the above embodiments, in an optional embodiment, the conveying platform 100 in the conveying mechanism provided in this embodiment is provided with an elongated hole 110, the parallel pneumatic gripper 220 is located below the conveying platform 100, the connection position between the parallel pneumatic gripper 220 and the strip puller 210 is located below the conveying platform 100, the end of the strip puller 210 away from the parallel pneumatic gripper 220 passes through the elongated hole 110 to grab the strip 10, and under the drive of the moving drive component 300, the strip puller 210 moves along the elongated hole 110, thereby driving the strip 10 to move on the conveying platform 100 through the strip puller 210.

[0057] Regarding the structure and shape of the retractable drive component 500, specifically:

[0058] The retraction drive component 500 includes a retraction drive body 510 and a drive rod 520. The retraction drive body 510 is specifically configured as a drive cylinder, or it can be configured as a drive hydraulic cylinder. The retraction drive body 510 is fixed on the conveying platform 100. The retraction drive body 510 is connected to the drive rod 520 in a transmission manner. The retraction drive body 510 is configured to drive the drive rod 520 to move telescopically.

[0059] A connecting plate 410 is fixedly installed on the outer side of the movable side plate 400. A rolling part 420 is provided on the connecting plate 410. The rolling part 420 is specifically configured as a roller. The roller is connected to the connecting plate 410 through a rotating shaft. The roller is located on the side of the drive rod 520 away from the conveying platform 100. A tapered inclined surface 521 is provided on the drive rod 520. When the drive rod 520 extends and moves away from the retracting drive body 510, since the roller is located on the outer side of the drive rod 520, the tapered inclined surface 521 can push the rolling part 420 to move outward, so that the movable side plate 400 moves outward, thereby adjusting the distance between the two movable side plates 400.

[0060] In an optional embodiment, the retraction drive component 500 further includes a fixing block 530; the fixing block 530 is fixedly connected to the conveying platform 100, and the drive rod 520 passes through the fixing block 530. Specifically, a through hole is provided on the fixing block 530, and a bearing is provided at the through hole. The drive rod 520 passes through the bearing and the through hole, restricting the drive rod 520 from moving along its own axis.

[0061] In an optional embodiment, the retracting drive component 500 further includes a reset elastic element 540, which is specifically configured as a compression spring. The drive rod 520 extends outward to form an abutment platform. One end of the reset elastic element 540 is connected to the abutment platform, and the other end is connected to the fixing block 530. The reset elastic element 540 is configured to enable the drive rod 520 to have a tendency to move in the direction of retraction into the retracting drive body 510. When the drive rod 520 moves in the direction of extending out of the retracting drive body 510, the reset elastic element 540 is in a compressed state, the retracting drive body 510 retracts, and the elastic force of the reset elastic element 540 causes the drive rod 520 to automatically reset and return to the initial position. The tapered inclined surface 521 does not contact the roller, and the movable side plate 400 automatically resets to the initial position and retracts inward to adjust and calibrate the center position of the strip 10.

[0062] like Figure 2As shown, in an optional embodiment, the conveying mechanism further includes a guide member 600; both movable side plates 400 are correspondingly provided with guide members 600, and the guide members 600 are connected to the movable side plates 400. The guide members 600 are configured to restrict the movement direction of the movable side plates 400 so that both movable side plates 400 move along a direction perpendicular to the transport direction of the strip 10.

[0063] Specifically, the guide member 600 includes a linear bearing 610 and a sliding shaft 620. The linear bearing 610 is mounted on the outside of the movable side plate 400, and the sliding shaft 620 passes through the linear bearing 610 and the movable side plate 400 to allow the movable side plate 400 to move along the sliding shaft 620. In order to give the movable side plate 400 an inward tendency to move, a retractable elastic member 630 is sleeved on the sliding shaft 620. The end of the sliding shaft 620 away from the linear bearing 610 extends outward to form a connecting platform. One end of the retractable elastic member 630 is connected to the connecting platform, and the other end of the retractable elastic member 630 is connected to the linear bearing 610. The retractable elastic member 630 is specifically configured as a compression spring, and the retractable elastic member 630 is configured to give the movable side plate 400 an inward tendency to move.

[0064] It should be noted that the movable side plates 400 located on both sides of the conveying platform 100 are equipped with guide members 600, so that both movable side plates 400 have a tendency to move inward. After the cylinder of the retraction drive body 510 retracts, the two movable side plates 400 automatically move inward.

[0065] In this embodiment, the conveying mechanism is operated by extending the retracting drive bodies 510 on both sides of the conveying platform 100, which pushes the drive rod 520 to move. The tapered inclined surface 521 on the drive rod 520 contacts the roller, causing the movable side plate 400 to open outward, leaving a sufficiently large gap. At this time, the parallel pneumatic gripper 220 controls the opening and closing of the strip puller 210, gently clamping the strip. Then, the moving drive component 300 drives the parallel pneumatic gripper 220 to smoothly drag the strip to the end working position. Finally, the retracting drive body 510 cylinder retracts, and the drive rod 520 automatically resets through the reset elastic element 540, returning to the initial position. The roller exits the tapered inclined surface 521, and the retracting elastic element 630 on the sliding shaft 620 automatically resets, causing the movable side plate 400 to slowly retract inward, adjusting and calibrating the center position of the strip.

[0066] The semiconductor packaging equipment provided in this embodiment includes the conveying mechanism described in the above embodiment.

[0067] Since the technical effects of the semiconductor packaging equipment provided in this embodiment are the same as those of the conveying mechanism provided in the above embodiments, they will not be described again here.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A conveying mechanism, characterized in that, include: The conveying platform (100), gripping component (200), moving drive component (300), movable side plate (400) and retraction drive component (500); The conveying platform (100) is used to support the strip (10); The gripping component (200) is used to grip the strip (10); The moving drive component (300) is connected to the gripping component (200) in a transmission manner. The moving drive component (300) is configured to drive the gripping component (200) to move so that the strip (10) moves on the conveying platform (100). The conveying platform (100) is provided with movable side plates (400) on both sides, and the two opposing movable side plates (400) are configured to be movable relative to the conveying platform (100). The retraction drive component (500) is connected to the movable side plate (400) in a transmission manner, and the retraction drive component (500) is configured to drive the two movable side plates (400) to move closer to each other or further apart.

2. The conveying mechanism according to claim 1, characterized in that, The gripping component (200) includes a strip gripper (210) and a parallel pneumatic gripper (220); The parallel pneumatic gripper (220) is connected to the strip gripper (210), and the strip gripper (210) is capable of gripping the strip (10); The parallel pneumatic gripper (220) is connected to the moving drive component (300) in a transmission connection. The driving force generated by the moving drive component (300) drives the parallel pneumatic gripper (220) to move, so that the strip gripper (210) can grasp the strip (10) and move it on the conveying platform (100).

3. The conveying mechanism according to claim 2, characterized in that, The conveying platform (100) is provided with an elongated hole (110). The end of the strip claw (210) away from the parallel pneumatic gripper (220) passes through the elongated hole (110) to grab the strip (10), so that when the strip claw (210) moves, it drives the strip (10) to move on the conveying platform (100).

4. The conveying mechanism according to claim 1, characterized in that, The retraction drive component (500) includes a retraction drive body (510) and a drive rod (520); The gathering drive body (510) is fixed on the conveying platform (100); The retractable drive body (510) is connected to the drive rod (520) in a transmission manner, and the retractable drive body (510) is configured to drive the drive rod (520) to extend and retract.

5. The conveying mechanism according to claim 4, characterized in that, A connecting plate (410) is fixedly provided on the outer side of the movable side plate (400), and a rolling part (420) is provided on the connecting plate (410); The drive rod (520) is provided with a tapered inclined surface (521). When the drive rod (520) extends and moves away from the retracting drive body (510), the tapered inclined surface (521) can push the rolling part (420) to move outward, so that the movable side plate (400) moves outward.

6. The conveying mechanism according to claim 5, characterized in that, The retraction drive component (500) also includes a fixing block (530); The fixed block (530) is fixedly connected to the conveying platform (100), and the drive rod (520) passes through the fixed block (530).

7. The conveying mechanism according to claim 6, characterized in that, The retraction drive component (500) also includes a reset elastic element (540); The drive rod (520) extends outward to form an abutment platform. One end of the reset elastic member (540) is connected to the abutment platform, and the other end of the reset elastic member (540) is connected to the fixing block (530). The reset elastic member (540) is configured to enable the drive rod (520) to have a tendency to move in the direction of retraction into the retracting drive body (510).

8. The conveying mechanism according to claim 1, characterized in that, The conveying mechanism also includes a guide component (600); Each of the two movable side plates (400) is provided with a corresponding guide member (600), and the guide member (600) is connected to the movable side plate (400). The guide member (600) is configured to restrict the movement direction of the movable side plate (400) so that both movable side plates (400) move along a direction perpendicular to the transport direction of the strip (10).

9. The conveying mechanism according to claim 8, characterized in that, The guide member (600) includes a linear bearing (610) and a sliding shaft (620); The linear bearing (610) is mounted on the outside of the movable side plate (400), and the sliding shaft (620) passes through the linear bearing (610) and the movable side plate (400) to allow the movable side plate (400) to move along the sliding shaft (620). A retractable elastic element (630) is sleeved on the sliding shaft (620). The end of the sliding shaft (620) away from the linear bearing (610) extends outward to form a connecting platform. One end of the retractable elastic element (630) is connected to the connecting platform, and the other end of the retractable elastic element (630) is connected to the linear bearing (610). The retractable elastic element (630) is configured to enable the movable side plate (400) to have an inward movement tendency.

10. A semiconductor packaging device, characterized in that, Includes the conveying mechanism as described in any one of claims 1-9.

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