CVD (chemical vapor deposition) equipment by-product collecting device

Abstract

The utility model discloses a CVD (chemical vapor deposition) equipment by-product collecting device which comprises a gas inlet pipeline, an oil liquid filtering device, a filtering tank and a gas outlet pipeline which are sequentially connected, a spoiler is arranged in the gas inlet pipeline, and the spoiler is used for disturbing gas particles to enlarge the gas particles. According to the device, firstly, tail gas is collected and filtered through the oil liquid filtering device, the capturing effect of oil liquid on by-product particles is good, by-products are collected in the oil liquid, water vapor in air is isolated, and the safety of collection of the by-products is improved. The spoiler is arranged in the air inlet pipeline to disturb by-product particles, so that the by-product particles are enlarged, collection of by-products by oil is facilitated, and the oil filtering efficiency is improved. After the oil liquid is filtered, the content of by-products in the tail gas is greatly reduced, when the tail gas enters the filtering tank to be filtered, the by-products can be prevented from being deposited in the filtering tank, and the filtering effect of the filtering tank is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon carbide crystal growing equipment technical field especially relates to a CVD equipment byproduct collection device. BACKGROUND

[0002] Generally, when the silicon carbide CVD equipment works, with the process, its byproduct gradually deposits along with the tail gas pipeline, and the byproduct is mainly the compound containing chlorine / containing chlorine and silicon, part of the byproduct deposits along with the tail gas pipeline and then contacts the air to generate toxic gas and is flammable and explosive. To avoid danger, a filter tank is usually connected to the tail gas pipeline, and the byproduct is filtered and collected through the filter element installed in the filter tank, since the byproduct is easy to accumulate in the filter tank, and the filter element of the filter tank is disassembled and replaced, and the moisture in the air is contacted to generate monochlorodichloro byproduct and silicon oxide, therefore, the tail gas byproduct collection device still has serious safety hazards. And the accumulation of the byproduct in the filter tank also affects the effect of the filter tank, resulting in low byproduct filtering efficiency. Therefore, a treatment device capable of filtering and collecting the byproduct more safely and efficiently is urgently needed. SUMMARY

[0003] The utility model discloses a CVD equipment byproduct collection device.

[0004] Technical scheme: in order to solve the above-mentioned problem, the utility model discloses a CVD equipment byproduct collection device, including the gas pipeline, oil liquid filtering device, filter tank, gas pipeline that connect gradually, the inside of gas pipeline is equipped with spoiler, the spoiler is used to disturb gas particle, makes gas particle big.

[0005] Further, the spoiler is a flat plate, and the upper and lower end faces of the spoiler form a preset angle with the gas inlet direction.

[0006] Further, the oil liquid filtering device includes an oil tank for containing oil, and an oil tank inlet and an oil tank outlet are arranged on the oil tank, the oil tank inlet is connected with the gas pipeline, and the oil tank outlet is connected with the filter tank.

[0007] Further, the gas pipeline is also connected with the filter tank through a connecting pipeline, and a vacuum valve is arranged on the connecting pipeline.

[0008] Further, the oil tank outlet is connected with the connecting pipeline, and a proportional butterfly valve is arranged between the oil tank outlet and the filter tank.

[0009] Furthermore, the filter canister includes a filter canister shell and a filter element fixing bracket, a filter element, and a powder receiving tray installed inside the filter canister shell. The filter element is installed on the filter element fixing bracket. The powder receiving tray is annular and is installed at the bottom inside the filter canister shell and surrounds the outside of the filter element.

[0010] Furthermore, the filter element is a polyurethane filter element.

[0011] Beneficial effects: Compared with the prior art, the significant advantages of this utility model are (1) by collecting and filtering by-products through a two-stage filtration device, which effectively improves the by-product filtration effect; (2) by collecting and filtering the exhaust gas through an oil filtration device, the oil has a good capture effect on by-product particles, and the by-products are collected in the oil, isolating the water vapor in the air, which improves the safety of by-product collection; (3) by setting a baffle in the air intake pipe to disturb the by-product particles, making the by-product particles larger, which is more conducive to the oil collecting by-products and improving the efficiency of oil filtration; (4) after oil filtration, the content of by-products in the exhaust gas has been greatly reduced, and when it enters the filter tank for filtration, the by-products can be avoided from depositing in the filter tank, which improves the filtration effect of the filter tank. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of the CVD equipment by-product collection device of this utility model;

[0013] Figure 2 This is a schematic diagram of the spoiler structure of this utility model;

[0014] Figure 3 This is a schematic diagram of the airflow state before and after the gas passes through the spoiler. Detailed Implementation

[0015] like Figure 1 As shown, a CVD equipment byproduct collection device in this embodiment includes an air inlet pipe, an oil filtration device, a filter tank, and an air outlet pipe. The oil filtration device and the filter tank are respectively mounted on bracket 7 and bracket 13. The air inlet pipe is composed of multiple pipes spliced ​​together, including an exhaust gas pipe 1, a first corrugated pipe 2, a first tee pipe 3, and an oil tank air inlet pipe 4 connected in sequence. The exhaust gas pipe 1 is connected to the process equipment. Figure 2 As shown, a baffle 41 is provided inside the oil tank air inlet pipe 4. The baffle is flat, and the upper and lower end faces of the baffle form a preset angle with the air inlet direction. In this embodiment, the two form a 45° angle. Figure 3 As shown, the flow resistance in the intake direction is a relatively stable state close to laminar flow. After passing through the spoiler, it is transformed into a vortex. Byproducts will collide and grow in the vortex, and the grown particles are more easily captured by the oil.

[0016] The oil liquid filtering device comprises an oil tank 5 for containing oil liquid, an oil tank air inlet and an oil tank air outlet 12 are arranged on the oil tank 5, and the oil tank air inlet is connected with an oil tank air inlet pipe 4. The oil tank air outlet 12 is connected with a filtering tank through a second three-way pipe 9, and the other pipe opening of the second three-way pipe 9 is connected with the first three-way pipe 3. A vacuum valve 8 is arranged between the second three-way pipe 9 and the first three-way pipe 3, and a proportional butterfly valve 10 and a second corrugated pipe 11 are further arranged between the second three-way pipe 9 and the filtering tank. The soft connection between the pipes is realized through the corrugated pipe, so that the connection between the pipes caused by the size error of the pipes can be avoided. The vacuum valve 8 and the proportional butterfly valve 10 are used for cutting off and opening the tail gas passage.

[0017] The filtering tank comprises a filtering tank shell 23, a filter core fixing support 18, a polyurethane filter core 17 and a powder receiving disc 16 which are arranged in the filtering tank shell 23, and the filter core 17 is arranged on the filter core fixing support 18 through a filter core fixing screw 19. The powder receiving disc 16 is annular, is arranged at the bottom of the filtering tank shell 23 and surrounds the outer side of the filter core 17. A top cover 21 is arranged at the top of the filtering tank, the top cover 21 is connected with the filtering tank shell 23 through locking screws 21, and a lifting ring screw 22 is arranged on the upper end surface of the top cover 21. The filtering tank shell 23 is fixed on a base 24 through locking screws 15. An air inlet of the filtering tank is arranged on one side of the base 24 and is communicated with the bottom of the filter core 17, and an air outlet is arranged on the other side of the base 24 and is connected with an air outlet pipe 14.

[0018] The working principle of the utility model is as follows: the oil liquid 6 is contained in the oil tank 5, and the tail end of the oil tank air inlet pipe 4 is inserted into the oil liquid 6. When the tail gas is filtered, the vacuum valve 8 is closed, and the proportional butterfly valve 10 is opened, the tail gas enters the oil tank 5 from the air inlet pipe, is filtered for the first time through the oil liquid 6, is filtered for the second time in the filtering tank, and is finally discharged from the air outlet pipe. The by-product is collected and filtered through the two-stage filtering device, and the filtering effect of the by-product is effectively improved. The by-product particles are disturbed by the spoiler arranged in the air inlet pipe, so that the by-product particles are larger, and the collection of the by-product by the oil liquid is more favorable, and the safety of the by-product collection is improved. After the oil liquid filtering, the content of the by-product in the tail gas is greatly reduced, and when the tail gas enters the filtering tank for filtering, the deposition of the by-product in the filtering tank is avoided, and the filtering effect of the filtering tank is improved.

Claims

1. A CVD apparatus by-product collection device, characterized by, The air inlet pipeline, the oil filtering device, the filter tank and the air outlet pipeline are sequentially connected, the air inlet pipeline is internally provided with a spoiler, and the spoiler is used for disturbing the gas particles to make the gas particles larger.

2. The CVD apparatus by-product collection device of claim 1, wherein, The spoiler is a flat plate, and the upper and lower end faces of the spoiler form a preset angle with the air inlet direction.

3. The CVD apparatus by-product collection device of claim 1, wherein, The oil filtering device comprises an oil groove for containing oil, and the oil groove is provided with an oil groove air inlet and an oil groove air outlet.

4. The CVD apparatus by-product collection device of claim 3, wherein, The air inlet pipeline is further connected with the filter tank through a connecting pipeline, and the connecting pipeline is provided with a vacuum valve.

5. The CVD apparatus by-product collection device of claim 4, wherein, The oil groove air outlet is connected with the connecting pipeline, and a proportional butterfly valve is arranged between the oil groove air outlet and the filter tank.

6. The CVD apparatus by-product collection device of claim 1, wherein, The filter tank comprises a filter tank shell, a filter core fixing support, a filter core and a powder receiving disc, the filter core is installed on the filter core fixing support, the powder receiving disc is annular, and the powder receiving disc is installed at the bottom of the filter tank shell and surrounds the outside of the filter core.

7. The CVD apparatus by-product collection device of claim 6, wherein, The filter core is a polyurethane filter core.

Images