Needle cleaning mechanism and atomic force microscope
By using a robotic arm and a blow-suction assembly in an atomic force microscope, rapid cleaning of the probe surface was achieved, solving the problems of low efficiency in removing probe contaminants and damage, and providing a comprehensive cleaning solution.
Patent Information
- Application Number
- CN202423073258.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-12
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2034-12-12
AI Technical Summary
Existing technologies have low efficiency in removing contaminants from probes, and repeated washing can easily damage the probes, making it particularly difficult to remove contaminants adhering to the top of the probe.
A robotic arm is used to transfer the probe into the blowing and suction chamber. The blowing and suction assembly blows air onto the probe to remove contaminants, and 360° rotation ensures thorough cleaning. Combined with a storage chamber and adhesive paper to absorb contaminants, secondary pollution is avoided.
It enables rapid and thorough removal of contaminants from the probe surface, avoiding probe damage, and is suitable for cleaning needs of scanning and repair probes.
Smart Images
Figure CN223875688U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of probe cleaning, in particular to a needle cleaning mechanism and an atomic force microscope. BACKGROUND
[0002] In atomic force microscope (AFM) technology, the role of the probe is to interact with the sample surface and obtain the corresponding surface information. When the probe is contaminated, the equipment will prompt frequency abnormalities, and even there is a risk of scratching the product surface. Therefore, the contaminated probe needs to be cleaned to remove the contaminants on the surface of the probe.
[0003] In the prior art, the probe is usually inserted into cleaning mud to remove the contaminants on the surface of the probe. However, this method needs to be repeated many times, which is low in efficiency, and the contaminants adhering to the top of the probe cannot be effectively removed. In addition, the probe is high in brittleness, and repeated insertion into the cleaning mud can easily cause the probe to break. CONTENT OF THE UTILITY MODEL
[0004] The present application aims at the deficiencies in the prior art, and provides a needle cleaning mechanism and an atomic force microscope, which can quickly remove the contaminants on the surface of the probe without damaging the probe.
[0005] To achieve the above-mentioned purpose, the technical solutions adopted by the embodiments of the present application are as follows:
[0006] In one aspect of the embodiments of the present application, a needle cleaning mechanism is provided, which comprises a mechanical arm and a blowing and sucking chamber. The mechanical arm is used to transfer the probe to be cleaned to a preset position in the blowing and sucking chamber. A blowing and sucking assembly is arranged in the blowing and sucking chamber. The blowing and sucking assembly is used to blow air to the probe to be cleaned to remove the contaminants on the probe to be cleaned.
[0007] Optionally, the blowing and sucking assembly is fixed in the blowing and sucking chamber, and the mechanical arm can drive the probe to be cleaned to rotate in the blowing and sucking chamber, so that the blowing and sucking assembly can clean the probe to be cleaned in the needle cleaning mechanism.
[0008] Optionally, the needle cleaning mechanism further comprises a storage chamber, which is in communication with the blowing and sucking assembly. The blowing and sucking assembly can also suck the contaminants in the blowing and sucking chamber out to the storage chamber.
[0009] Optionally, the inner wall of the storage chamber is provided with a sticky paper, which is used to adhere the contaminants entering the storage chamber.
[0010] Optionally, the cleaning mechanism further comprises a controller electrically connected with the blowing and sucking assembly, and the controller is configured to control the blowing and sucking assembly.
[0011] Optionally, the blowing and sucking assembly comprises a blowing pipe and a blowing pump, one end of the blowing pipe is located in the blowing and sucking chamber, and the other end of the blowing pipe is in communication with the blowing pump, and the blowing pump blows air into the blowing and sucking chamber through the blowing pipe.
[0012] Optionally, the blowing and sucking assembly comprises a sucking pipe and a sucking pump, one end of the sucking pipe is located in the blowing and sucking chamber, and the other end of the sucking pipe is in communication with the sucking pump, and the sucking pump sucks the contaminants in the blowing and sucking chamber through the sucking pipe.
[0013] Optionally, the preset position is located at the top of the blowing and sucking chamber, and the blowing port of the blowing pipe is located at the top of the blowing and sucking chamber.
[0014] Optionally, the sucking port of the sucking pipe is located at the bottom of the blowing and sucking chamber.
[0015] In another aspect of the embodiments of the present application, an atomic force microscope is provided, comprising a chamber and a cleaning mechanism as any one of the above provided in the chamber.
[0016] The beneficial effects of the present application include:
[0017] The present application provides a cleaning mechanism, comprising: a mechanical arm and a blowing and sucking chamber, the mechanical arm is configured to transfer a probe to be cleaned to a preset position in the blowing and sucking chamber, and the blowing and sucking chamber is provided with a blowing and sucking assembly, and the blowing and sucking assembly is configured to blow air to the probe to be cleaned to remove contaminants on the probe to be cleaned. In the cleaning mechanism, the probe to be cleaned is transferred to the blowing and sucking chamber by the mechanical arm, and then the blowing and sucking assembly blows air to the probe to be cleaned to blow off the contaminants adhered to the probe to be cleaned. During cleaning, the probe is completely located in the air flow blown by the blowing and sucking assembly, so that the cleaning mechanism can quickly remove the contaminants on the surface of the probe and will not cause damage to the probe. The cleaning mechanism can be used for cleaning both scanning probes and repaired probes, and can remove stubborn contaminants on the surface of the probe and contaminants on the top of the probe. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.
[0019] Figure 1 The structure schematic diagram of the atomic force microscope provided by the embodiments of the present application is shown.
[0020] Icon: 100 - needle cleaning mechanism; 110 - mechanical arm; 120 - blow-suction chamber; 130 - blow-suction assembly; 131 - blow pipe; 132 - blow pump; 133 - suction pipe; 134 - suction pump; 140 - storage chamber; 141 - sticky paper; 150 - controller; 200 - atomic force microscope; 210 - chamber; 300 - probe to be cleaned; 400 - contaminant. DETAILED DESCRIPTION
[0021] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings for the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.
[0022] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. It should be noted that the various features in the embodiments of the present application can be combined with each other without conflict, and the combined embodiments are still within the protection scope of the present application.
[0023] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0024] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.
[0025] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0026] In the description of the present application, it also needs to be explained that, unless explicitly specified and limited, the terms "set", "install", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0027] In one aspect of the embodiments of the present application, with reference to Figure 1 , a needle cleaning mechanism 100 is provided, comprising: a mechanical arm 110 and a blowing and sucking chamber 120, the mechanical arm 110 is used to transfer the probe to be cleaned 300 to a preset position in the blowing and sucking chamber 120, and the blowing and sucking chamber 120 is provided with a blowing and sucking assembly 130, and the blowing and sucking assembly 130 is used to blow air to the probe to be cleaned 300 to remove the contaminants 400 on the probe to be cleaned 300.
[0028] The needle cleaning mechanism 100 comprises a mechanical arm 110, a blowing and sucking chamber 120 and a blowing and sucking assembly 130. The mechanical arm 110 is used to fix the probe to be cleaned 300 and transfer the probe to be cleaned 300 to a preset position in the blowing and sucking chamber 120. The preset position is a position reserved for the probe to be cleaned 300 in the blowing and sucking chamber 120, and the probe to be cleaned 300 can be blown by the air outlet of the blowing and sucking assembly 130 at the preset position. After the mechanical arm 110 transfers the probe to be cleaned 300 to the preset position, it can continue to fix the probe to be cleaned 300, and after the probe to be cleaned 300 is cleaned, the clean probe is transferred to other positions.
[0029] The blowing and sucking assembly 130 is arranged in the blowing and sucking chamber 120. It can be understood that the blowing and sucking assembly 130 does not necessarily have all the structures arranged in the blowing and sucking chamber 120, but the blowing and sucking assembly 130 should at least ensure that the air outlet is located in the blowing and sucking chamber 120, and the air outlet direction is towards the probe to be cleaned 300 at the preset position.
[0030] In the above-mentioned needle cleaning mechanism 100, the mechanical arm 110 is used to transfer the probe to be cleaned 300 to the blowing and sucking chamber 120, and then the blowing and sucking assembly 130 is used to blow air to the probe to be cleaned 300 to blow off the contaminants 400 adhered to the probe to be cleaned 300. During cleaning, the probe is completely located in the air flow blown by the blowing and sucking assembly 130, so that the needle cleaning mechanism 100 can quickly remove the contaminants 400 on the surface of the probe, and will not cause damage to the probe. It can be used for cleaning operation of scanning probe and repairing probe, and can remove stubborn contaminants 400 on the surface of the probe and contaminants 400 on the top.
[0031] Optionally, the blowing and sucking assembly 130 is fixed in the blowing and sucking chamber 120, and the mechanical arm 110 can drive the probe 300 to rotate in the blowing and sucking chamber 120, so that the blowing and sucking assembly 130 can blow the probe 300 360°.
[0032] The blowing port of the blowing and sucking assembly 130 is fixed, and the direction of the blown air flow remains unchanged. The mechanical arm 110 can not only fix the probe 300, but also drive the probe 300 to rotate 360°. During the rotation, each area of the surface of the probe 300 passes through the blowing port in turn, so that the blowing and sucking assembly 130 can blow the probe 300 360°, thereby removing the contaminants 400 on the surface of the probe 300 comprehensively, and avoiding that some areas of the surface of the probe 300 are not cleaned due to uneven blowing.
[0033] Optionally, the blowing and sucking assembly 130 includes a blowing pipe 131 and a blowing pump 132, one end of the blowing pipe 131 is located in the blowing and sucking chamber 120, and the other end of the blowing pipe 131 is in communication with the blowing pump 132. The blowing pump 132 blows air into the blowing and sucking chamber 120 through the blowing pipe 131.
[0034] It should be noted that the other end of the blowing pipe 131 is not necessarily directly connected with the blowing pump 132, but can be connected with the blowing pump 132 through other structures, as long as the gas blown by the blowing pump 132 can enter the inside of the blowing and sucking chamber 120 through the blowing pipe 131.
[0035] Optionally, the preset position is located at the top of the blowing and sucking chamber 120, and the blowing port of the blowing pipe 131 is located at the top of the blowing and sucking chamber 120.
[0036] The mechanical arm 110 moves the probe 300 to the top of the blowing and sucking chamber 120, and the blowing pipe 131 blows air to the probe 300 from the top. The blown contaminants 400 can fall along the air flow to the bottom of the blowing and sucking chamber 120, thereby avoiding that the blown contaminants 400 reattach to the probe.
[0037] Optionally, the needle cleaning mechanism 100 further includes a storage chamber 140, the storage chamber 140 is in communication with the blowing and sucking assembly 130, and the blowing and sucking assembly 130 can also suck the contaminants 400 in the blowing and sucking chamber 120 out to the storage chamber 140. In this way, the blowing and sucking chamber 120 can be prevented from being contaminated.
[0038] Optionally, the inner wall of the storage chamber 140 is provided with a sticky paper 141, and the sticky paper 141 is used to adhere the contaminants 400 entering the storage chamber 140.
[0039] The surface of the sticky paper 141 is sticky, and the contaminants 400 sucked out of the blowing and sucking chamber 120 will be adhered by the sticky paper 141 after entering the storage chamber 140. Regularly replacing the sticky paper 141 can ensure that the blowing and sucking chamber 120 and the storage chamber 140 are not contaminated.
[0040] Optionally, the blowing and sucking assembly 130 comprises an air suction pipe 133 and an air suction pump 134. One end of the air suction pipe 133 is located in the blowing and sucking chamber 120, and the other end is in communication with the air suction pump 134. The air suction pump 134 sucks the contaminants 400 in the blowing and sucking chamber 120 through the air suction pipe 133.
[0041] It should be noted that the other end of the air suction pipe 133 does not necessarily directly connect with the air suction pump 134, but can also be connected with the air suction pump 134 through other structures, as long as the air suction pump 134 can suck the contaminants 400 in the blowing and sucking chamber 120 through the air suction pipe 133.
[0042] For example, the air suction pipe 133 is connected with and in communication with the air suction pump 134 through the storage chamber 140. The air suction pump 134 performs air suction on the storage chamber 140 to form a negative pressure in the storage chamber 140, so that the contaminants 400 in the blowing and sucking chamber 120 enter the storage chamber 140 through the air suction pipe 133.
[0043] Optionally, the air suction port of the air suction pipe 133 is located at the bottom of the blowing and sucking chamber 120. In this way, the contaminants 400 in the blowing and sucking chamber 120 can be sucked out as much as possible.
[0044] Optionally, the needle cleaning mechanism 100 further comprises a controller 150, and the controller 150 is electrically connected with the blowing and sucking assembly 130. The controller 150 is used to control the blowing and sucking of the blowing and sucking assembly 130.
[0045] For example, the air suction pump 134 and the air blowing pump 132 are the same air pump, which has both air suction and air blowing functions. The air pump is connected with the air blowing pipe 131 and the air suction pipe 133, respectively. The air blowing pipe 131 and the air suction pipe 133 are respectively provided with on-off valves, and the air pump and the two on-off valves are electrically connected with the controller 150. When the controller 150 controls the air pump to perform air suction, the controller 150 controls the on-off valve on the air blowing pipe 131 to close and the on-off valve on the air suction pipe 133 to open, and the blowing and sucking assembly 130 sucks the contaminants 400 in the blowing and sucking chamber 120. When the controller 150 controls the air pump to perform air blowing, the controller 150 controls the on-off valve on the air blowing pipe 131 to open and the on-off valve on the air suction pipe 133 to close, and the blowing and sucking assembly 130 blows air into the blowing and sucking chamber 120.
[0046] The operation process of the cleaning mechanism 100 is as follows: the mechanical arm 110 moves the probe 300 to be cleaned into the blowing and sucking chamber 120, the controller 150 starts the blowing function of the blowing and sucking assembly 130, blows the probe 300 to be cleaned in the blowing and sucking chamber 120, and removes the contaminants 400 on the probe 300 to be cleaned. During this period, the mechanical arm 110 can rotate with the probe 300 to be cleaned, so that the blowing assembly blows away the probe 300 to be cleaned for 360°. After blowing, the mechanical arm 110 can move the clean probe out of the blowing and sucking chamber 120, and then the controller 150 starts the sucking function of the blowing and sucking assembly 130, cleans the blowing and sucking chamber 120, and sucks the contaminants 400 in the blowing and sucking chamber 120 into the storage chamber 140. The adhesive paper 141 on the inner wall of the storage chamber 140 can adhere the contaminants 400 sucked out of the blowing and sucking chamber 120, and then the adhesive paper 141 is replaced regularly to prevent the blowing and sucking chamber 120 from being contaminated.
[0047] The embodiment also provides an atomic force microscope 200, comprising a chamber 210 and a cleaning mechanism 100 as any one of the above in the chamber 210.
[0048] The atomic force microscope 200 comprises the same structure and advantages as the cleaning mechanism 100 in the foregoing embodiments. The structure and advantages of the cleaning mechanism 100 have been described in detail in the foregoing embodiments, which will not be described here.
[0049] The above only describes the preferred embodiments of the present application and is not used to limit the present application. The present application can have various modifications and changes for those skilled in the art. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A needle cleaning mechanism, characterized by, The utility model relates to a needle cleaning mechanism, comprising: a mechanical arm for transferring a probe to be cleaned to a preset position in a blowing and sucking chamber, wherein a blowing and sucking assembly is arranged in the blowing and sucking chamber, and the blowing and sucking assembly is used for blowing air to the probe to be cleaned to remove contaminants on the probe to be cleaned; the blowing and sucking assembly is fixed in the blowing and sucking chamber, and the mechanical arm can rotate the probe to be cleaned in the blowing and sucking chamber, so that the blowing and sucking assembly can blow air to the probe to be cleaned for 360 degrees; a controller is further arranged, which is electrically connected with the blowing and sucking assembly, and is used for controlling the blowing and sucking assembly to blow air.
2. The needle clearing mechanism of claim 1, wherein, a storage chamber is further arranged, which is communicated with the blowing and sucking assembly, and the blowing and sucking assembly can further suck the contaminants in the blowing and sucking chamber to the storage chamber.
3. The needle clearing mechanism of claim 2, wherein, an inner wall of the storage chamber is provided with a sticky paper, which is used for adhering the contaminants entering the storage chamber.
4. The needle clearing mechanism of claim 2, wherein, the controller is further used for controlling the blowing and sucking assembly to suck air.
5. The needle clearing mechanism of claim 1, wherein, the blowing and sucking assembly comprises a blowing pipe and a blowing pump, one end of the blowing pipe is located in the blowing and sucking chamber, and the other end is communicated with the blowing pump, and the blowing pump blows air into the blowing and sucking chamber through the blowing pipe.
6. The needle clearing mechanism of claim 2, wherein, the blowing and sucking assembly comprises a sucking pipe and a sucking pump, one end of the sucking pipe is located in the blowing and sucking chamber, and the other end is communicated with the sucking pump, and the sucking pump sucks the contaminants in the blowing and sucking chamber through the sucking pipe.
7. The needle clearing mechanism of claim 5, wherein, the preset position is located at the top of the blowing and sucking chamber, and the blowing port of the blowing pipe is located at the top of the blowing and sucking chamber.
8. The needle clearing mechanism of claim 6, wherein, the sucking port of the sucking pipe is located at the bottom of the blowing and sucking chamber.
9. An atomic force microscope, characterized by the utility model further relates to a needle cleaning mechanism, comprising a chamber and a needle cleaning mechanism as claimed in any one of claims 1 to 8 arranged in the chamber.