Target material sand blasting protection device

Abstract

The utility model discloses a target material sand blasting protection device which comprises an upper protection cover, a side protection ring and a lower protection plate, a sputtering target material can be arranged on the lower protection plate, the top surface of the lower protection plate can be tightly matched with the back plate surface of the target material, and the side protection ring is tightly matched with the flange surface of the target material, the side surface of the back plate and the edge of the lower protection plate. The side protective ring and the lower protective plate completely wrap the side face of the back plate, the upper protective cover is buckled on the sputtering target material, and the upper protective cover can be tightly matched with the sputtering face of the target material and the part, adjacent to the sputtering face of the target material, of the side face of the target material. According to the protective device disclosed by the utility model, other surfaces of the sputtering target material can be well shielded in the sand blasting process, and the phenomenon that the protective device and the surface of the sputtering target material are crushed or scratched can be prevented.

Description

Technical Field

[0001] This utility model relates to the field of target manufacturing technology, and more specifically, to a target sandblasting protection device. Background Technology

[0002] Sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memory, and electronic control devices. Common existing sputtering target structures include interconnected target bodies and backplates. (See reference...) Figure 1 and Figure 2 As shown, the sputtering target includes a target backplate surface 41, a target flange surface 42, a backplate side surface 43, a target sputtering surface 44, and a target side surface 45. During the manufacturing process of the sputtering target, a sandblasting process is required; for example, sandblasting is needed on parts of the target side surface 45 and the target flange surface 42. Other outer surfaces of the sputtering target must be adequately protected.

[0003] Existing protective fixtures for sputtering targets have many problems. For example, insufficient shielding capacity allows sand particles to enter other surfaces of the sputtering target during blasting, resulting in over-blasting damage. On the other hand, protective fixtures with better sealing performance often suffer from pressure marks and scratches on the contact surface between the fixture and the sputtering target, or the installation and disassembly steps of the fixture are complicated, affecting product quality and production efficiency.

[0004] Existing technology CN209256702U discloses a target sandblasting fixture, which mainly consists of four parts: an upper cover, a pressure ring, a base, and a hose clamp. These four parts work together, breaking away from the traditional fixed-size sandblasting method. The change in the upper cover structure means that it no longer simply clips onto the flat surface of the target, but can instead wrap around the side of the target. The hose clamp is installed on the side of the upper cover; by adjusting the hose clamp, the upper cover tightly wraps around the side of the target, ensuring that sand particles do not penetrate into the cover and scratch the target surface during sandblasting. The angle of the pressure ring is larger than traditional ones. This larger angle allows the spray gun to tilt more closely to a horizontal direction, thereby indirectly increasing the pressure of the spray gun on the target and thus increasing the roughness of the sandblasted surface.

[0005] The prior art CN209665134U discloses a target sandblasting auxiliary device, which relates to the field of sputtering target production. It includes a substrate, a placement groove for placing sputtering targets is formed on the upper surface of the substrate, a baffle for shielding the surface of the target is provided above the placement groove, an adsorption block for adsorbing the baffle is provided inside the substrate, and a clamping component for clamping and fixing the sputtering targets is also provided on the substrate.

[0006] None of the existing technologies mentioned above can solve the aforementioned technical problems.

[0007] In view of the above technical problems, this utility model is hereby introduced. Summary of the Invention

[0008] The main purpose of this utility model is to provide a target sandblasting protection device to solve the protection function of sputtered targets during the sandblasting process.

[0009] To achieve the above objectives, this utility model proposes a target sandblasting protection device, comprising an upper cover, side guard rings, and a lower guard plate. The sputtering target can be placed on the lower guard plate, and the top surface of the lower guard plate can be tightly fitted with the back plate surface of the target. The side guard rings are tightly fitted with the flange surface of the target, the side surface of the back plate, and the edge of the lower guard plate. The side guard rings and the lower guard plate completely cover the side surface of the back plate. The upper cover is fastened to the sputtering target, and the upper cover can be tightly fitted with the sputtering surface of the target and the part of the side surface of the target adjacent to the sputtering surface of the target.

[0010] Furthermore, the upper edge of the side guard ring and the lower edge of the upper cover both include an annular first sealing buffer portion. The upper edge of the side guard ring is tightly fitted with the flange surface of the target material through the first sealing buffer portion, and the lower edge of the upper cover is tightly fitted with the side of the target material through the first sealing buffer portion.

[0011] Furthermore, the upper edge of the side guard ring and the lower edge of the upper cover are both configured to have a tapered surface, and the outer side of the first sealing buffer portion forms a part of the tapered surface.

[0012] Furthermore, a first sealing ring groove is provided on the outer edge of the bottom surface of the upper cover near the first sealing buffer part, and the first sealing ring groove is used to accommodate the first sealing ring.

[0013] Furthermore, a second sealing ring groove is provided on the inner side of the side guard ring near the first sealing buffer portion, and the second sealing ring groove is used to accommodate the second sealing ring.

[0014] Furthermore, a second sealing buffer is provided on the bottom surface of the upper cover, the top surface of the lower cover, and the inner circumferential side of the side guard ring at the mating position with the outer surface of the sputtering target.

[0015] Furthermore, the first sealing buffer and / or the second sealing buffer are configured as silicone gaskets.

[0016] Furthermore, an air extraction hole is provided at the center of the upper cover and the lower cover.

[0017] Furthermore, the second sealing buffer portion on the upper cover and / or the lower cover is configured to be distributed in a plurality of strip-shaped radial patterns around the air extraction hole; or configured to be distributed in concentric rings around the air extraction hole, wherein the inner ring is provided with a notch.

[0018] Furthermore, a protective ring groove is provided on the outer circumferential edge of the top surface of the lower protective plate, and the lower edge of the side protective ring can cooperate with the protective ring groove. An air extraction hole is provided on the side protective ring.

[0019] By applying the technical solution of this utility model, at least the following beneficial effects are achieved:

[0020] 1. The protective device of this application is designed to fit tightly to the outer surface of the sputtering target by means of an upper cover, side guard rings and a lower guard plate. The cooperation between the side guard rings and the lower guard plate enables other surfaces of the sputtering target to be well shielded during the sandblasting process, and the assembly and disassembly of the protective device are very convenient.

[0021] 2. The protective device of this application, by designing the position and shape of the first sealing buffer part and further designing a sealing ring on the inner side of the first sealing buffer part, provides double protection so that sand particles will not enter the protective device of the sputtering target during the sandblasting process, thus solving the problem of over-spraying during sandblasting. The inclined design also facilitates the spatial arrangement of the sandblasting equipment.

[0022] 3. The protective device of this application, by designing the first and second sealing buffer parts with silicone gaskets, effectively achieves the functions of sealing and buffering, and can prevent the protective device from being crushed or scratched on the surface of the sputtering target, thus providing good protection for the surface of the sputtering target.

[0023] 4. The protective device of this application, through the design of the air extraction hole and the shape distribution of the second sealing buffer part on the upper cover and lower cover plate, allows the internal air to be extracted from the protective device by a vacuum device, thereby making the protective device fit tightly against the surface of the sputtering target. Attached Figure Description

[0024] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0025] Figure 1 A half-sectional schematic diagram of a target blasting protection device according to one embodiment is shown;

[0026] Figure 2 A cross-sectional view of a target blasting protection device according to one embodiment is shown;

[0027] Figure 3 A schematic diagram of a side guard ring according to one embodiment is shown;

[0028] Figure 4 A schematic diagram of the lower guard plate of Embodiment 1 is shown;

[0029] Figure 5A schematic diagram of the upper cover of Embodiment 1 is shown;

[0030] Figure 6 A schematic diagram of the lower guard plate of Embodiment 2 is shown;

[0031] Figure 7 A schematic diagram of the upper cover of Embodiment 2 is shown.

[0032] The above figures include the following reference numerals:

[0033] 1. Upper cover; 11, 21. First sealing buffer part; 12. First sealing ring groove; 13, 23, 31. Second sealing buffer part; 14, 32. Air extraction hole; 15, 33. Notch; 2. Side guard ring; 22. Second sealing ring groove; 3. Lower guard plate; 34. Guard ring groove; 4. Sputtering target; 41. Target back plate surface; 42. Target flange surface; 43. Back plate side; 44. Target sputtering surface; 45. Target side; 5. First sealing ring; 6. Second sealing ring. Detailed Implementation

[0034] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0035] The present invention will be further described in detail below with reference to specific embodiments. These embodiments should not be construed as limiting the scope of protection claimed by the present invention. The term "comprising" indicates the presence of a feature, but does not exclude the presence or addition of one or more other features. The terms "lateral," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the purpose of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In this description, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0037] Example 1:

[0038] This utility model proposes a target sandblasting protection device, combined with Figure 1 and Figure 2 As shown, the system includes an upper cover 1, side guard rings 2, and a lower guard plate 3. The sputtering target 4 can be placed on the lower guard plate 3, and the top surface of the lower guard plate 3 can be tightly fitted to the target back plate surface 41. The side guard ring 2 is tightly fitted to the target flange surface 42, the back plate side surface 43, and the edge of the lower guard plate 3, and the side guard ring 2 and the lower guard plate 3 completely cover the back plate side surface 43. The upper cover 1 is fastened to the sputtering target 4, and the upper cover 1 can be tightly fitted to the target sputtering surface 44 and the portion of the target side surface 45 adjacent to the target sputtering surface 44.

[0039] Combination Figure 1-5 As shown, the upper edge of the side guard ring 2 is provided with a first sealing buffer part in the shape of an annular shape, and the lower edge of the upper cover 1 is also provided with a first sealing buffer part in the shape of an annular shape. The upper edge of the side guard ring 2 is tightly fitted with the flange surface 42 of the target material through the first sealing buffer part, and the lower edge of the upper cover 1 is tightly fitted with the side surface 45 of the target material through the first sealing buffer part.

[0040] Furthermore, the upper edge of the side guard ring 2 and the lower edge of the upper cover 1 are both designed with inclined conical surfaces, and the outer side of the first sealing buffer portion forms part of the inclined conical surface. The inclined conical surface extends all the way to the surface of the sputtering target. This allows the width of the first sealing buffer portion to be as long as possible, so that other surfaces of the sputtering target can be well shielded during sandblasting. At the same time, the inclined surface design also facilitates the spatial arrangement of the sandblasting equipment.

[0041] Furthermore, a first sealing ring groove 12 is provided on the outer edge of the bottom surface of the upper cover 1 near the first sealing buffer section, for accommodating the first sealing ring 5. A second sealing ring groove 22 is also provided on the inner side of the side cover 2 near the first sealing buffer section, for accommodating the second sealing ring 6. This additional sealing ring design inside the first sealing buffer section provides double protection, preventing sand particles from entering the protective device of the sputtering target during sandblasting and solving the problem of over-blasting.

[0042] In addition, vent holes are provided at the center of the upper cover 1 and the lower cover 3. Vent holes are also provided on the side guard ring 2. A second sealing buffer is provided at the mating position between the bottom surface of the upper cover 1 and the sputtering surface 44 of the target material. A second sealing buffer is provided at the mating position between the top surface of the lower cover 3 and the back plate surface 41 of the target material. A second sealing buffer is provided at the mating position between the inner circumferential side of the side guard ring 2 and the side surface 43 of the back plate.

[0043] In this way, by connecting external vacuum equipment through the air extraction holes of the upper cover 1, lower cover 3 and side cover 2, the upper cover 1, lower cover 3 and side cover 2, which are installed in place, can be tightly attached to the surface of the sputtering target.

[0044] The materials of the first and second sealing buffer portions have a certain degree of elasticity, and their contraction after vacuuming allows the other inner surfaces of the protective device to adhere to the sputtering target surface. Preferably, both the first and second sealing buffer portions can be made of silicone gaskets. Other materials that combine a certain degree of tight sealing and cushioning function can also be used.

[0045] The design of the first and second sealing buffer sections not only prevents over-blasting, but also prevents the protective device from damaging or scratching the surface of the sputtering target, thus providing better protection for the surface of the sputtering target and helping to improve the product quality of the sputtering target.

[0046] Combination Figure 4 and Figure 5 As shown, in this embodiment, the second sealing buffer portions on the upper cover 1 and the lower cover 3 are arranged in concentric rings around the air extraction hole, with notches on the inner rings. The notches are designed to prevent the upper cover 1 and the lower cover 3 from being unstable when vacuuming.

[0047] Preferably, a protective ring groove 34 is provided on the outer circumferential edge of the top surface of the lower protective plate 3, and the lower edge of the side protective ring 2 can cooperate with the protective ring groove 34.

[0048] Example 2:

[0049] Combination Figure 5 and Figure 6 As shown, the target blasting protection device in this embodiment is basically the same as that in Embodiment 1. The difference is that, in this embodiment, the second sealing buffer parts on the upper cover 1 and the lower cover 3 are arranged in multiple strip-shaped radial distributions around the air extraction hole. Multiple silicone gaskets extend radially and are evenly distributed around the air extraction hole. This design provides a better sealing effect after vacuuming.

[0050] The steps for using the target sandblasting protective device of this utility model are as follows: (1) Fix the upper cover 1 and the lower cover 3 to the sputtering surface and back plate surface of the sputtering target product respectively, and fix the side guard ring 2 to the side of the target back plate and the lower cover 3. (2) Use a vacuum device to extract the air from the air extraction hole of the upper cover 1, the side guard ring 2 and the lower cover 3 respectively, so that they are in close contact with the outer surface of the target. (3) Use sandblasting equipment to perform sandblasting operations on the sandblasting area.

[0051] In summary, it can be seen from the above description that the embodiments of this utility model achieve the following technical effects:

[0052] 1. The protective device of this application is designed to fit tightly to the outer surface of the sputtering target by means of an upper cover, side guard rings and a lower guard plate. The cooperation between the side guard rings and the lower guard plate enables other surfaces of the sputtering target to be well shielded during the sandblasting process, and the assembly and disassembly of the protective device are very convenient.

[0053] 2. The protective device of this application, by designing the position and shape of the first sealing buffer part and further designing a sealing ring on the inner side of the first sealing buffer part, provides double protection so that sand particles will not enter the protective device of the sputtering target during the sandblasting process, thus solving the problem of over-spraying during sandblasting. The inclined design also facilitates the spatial arrangement of the sandblasting equipment.

[0054] 3. The protective device of this application, by designing the first and second sealing buffer parts with silicone gaskets, effectively achieves the functions of sealing and buffering, and can prevent the protective device from being crushed or scratched on the surface of the sputtering target, thus providing good protection for the surface of the sputtering target.

[0055] 4. The protective device of this application, through the design of the air extraction hole and the shape distribution of the second sealing buffer part on the upper cover and lower cover plate, allows the internal air to be extracted from the protective device by a vacuum device, thereby making the protective device fit tightly against the surface of the sputtering target.

[0056] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A target blasting protective device, comprising an upper protective cover (1), side protective rings (2), and a lower protective plate (3), characterized in that, The sputtering target (4) can be placed on the lower guard plate (3). The top surface of the lower guard plate (3) can be tightly fitted with the back plate surface (41) of the target. The side guard ring (2) is tightly fitted with the flange surface (42) of the target, the side surface (43) of the back plate and the edge of the lower guard plate (3). The side guard ring (2) and the lower guard plate (3) completely cover the side surface (43) of the back plate. The upper cover (1) is fastened to the sputtering target (4). The upper cover (1) can be tightly fitted with the sputtering surface (44) of the target and the part of the side surface (45) of the target adjacent to the sputtering surface (44).

2. The protective device according to claim 1, characterized in that: The upper edge of the side guard ring (2) and the lower edge of the upper cover (1) both include an annular first sealing buffer portion (11, 21). The upper edge of the side guard ring (2) is tightly fitted with the target flange surface (42) through the first sealing buffer portion, and the lower edge of the upper cover (1) is tightly fitted with the target side surface (45) through the first sealing buffer portion.

3. The protective device according to claim 2, characterized in that: The upper edge of the side guard ring (2) and the lower edge of the upper cover (1) are both provided with a tapered surface, and the outer side of the first sealing buffer part (11, 21) forms part of the tapered surface.

4. The protective device according to claim 2, characterized in that: A first sealing ring groove (12) is provided at the position of the bottom outer edge of the upper cover (1) near the first sealing buffer part. The first sealing ring groove (12) is used to accommodate the first sealing ring (5).

5. The protective device according to claim 4, characterized in that: A second sealing ring groove (22) is provided on the inner side of the side guard ring (2) near the first sealing buffer part. The second sealing ring groove (22) is used to accommodate the second sealing ring (6).

6. The protective device according to any one of claims 2-5, characterized in that: Second sealing buffer parts (13, 23, 31) are provided on the bottom surface of the upper cover (1), the top surface of the lower cover (3), and the circumferential inner side of the side guard ring (2) at the mating position with the outer surface of the sputtering target (4).

7. The protective device according to claim 6, characterized in that: The first sealing buffer (11, 21) and / or the second sealing buffer (13, 23, 31) are configured as silicone gaskets.

8. The protective device according to claim 6, characterized in that: Air extraction holes (14, 32) are provided at the center of the upper cover (1) and the lower cover (3).

9. The protective device according to claim 8, characterized in that: The second sealing buffer portion on the upper cover (1) and / or the lower cover (3) is configured to be distributed in a plurality of strip-shaped radial patterns around the air extraction hole (14, 32); or configured to be distributed in concentric rings around the air extraction hole (14, 32), wherein the inner ring is provided with a notch (15, 33).

10. The protective device according to claim 1, characterized in that: The outer edge of the top surface of the lower guard plate (3) is provided with a guard groove (34), the lower edge of the side guard (2) can cooperate with the guard groove (34), and the side guard (2) is provided with an air extraction hole.

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