Substrate alignment device

Abstract

The utility model relates to the technical field of substrate alignment, in particular to a substrate alignment device which comprises a base, a limiting part, a height limiting part and a clamping part, the limiting part comprises a plurality of sets of limiting assemblies, each side edge of the base is provided with the limiting assembly, each set of limiting assembly comprises a mounting block, a plurality of limiting holes formed in the mounting block and limiting columns, and the limiting columns are inserted into different limiting holes to limit substrates of different sizes and specifications; the height limiting part comprises height limiting columns uniformly distributed on the upper surface of the base, and the height limiting columns are used for supporting the substrate and limiting the height of the substrate; the clamping part comprises a plurality of clamping assemblies, the clamping assemblies are movably connected to the side edges of the base, each clamping assembly comprises a movable clamping frame and a clamping roller located at the top end of the movable clamping frame, the clamping rollers are driven to move inwards and outwards through movement of the movable clamping frames, and then the clamping rollers clamp the edges of a substrate so as to fix the substrate.

Description

TECHNICAL FIELD

[0001] The utility model relates to substrate alignment technical field especially relates to a substrate alignment device. BACKGROUND

[0002] When using glove box operation, generally using mechanical arm to grab smaller glass substrate. When each mechanical arm places substrate on the transfer loading platform, error will be produced, when using multiple mechanical arms to grab, deliver substrate, will lead to error superposition. Therefore, need substrate alignment device to calibrate error.

[0003] The existing substrate alignment device can generally only adapt to single size glass substrate, cannot satisfy the calibration demand of multiple specifications substrate. When needing to handle multiple specifications glass substrate in glove box, need to configure a series of different size substrate alignment devices, this method increases cost and space occupation, reduces production efficiency and flexibility. Therefore, it is urgent to design a substrate alignment device to adapt to different size specifications glass substrate calibration operation. SUMMARY

[0004] The utility model discloses to the deficiency of prior art, develops a kind of substrate alignment device, the utility model improves the versatility of substrate alignment device, to adapt to different size specifications substrate calibration operation.

[0005] The technical scheme for solving the technical problem of the utility model is:

[0006] The application provides a substrate alignment device, which comprises a base, a limiting part, a height limiting part and a clamping part.

[0007] The limiting part comprises a plurality of limiting assemblies, each side of the base is provided with the limiting assembly, each limiting assembly comprises a mounting block, a plurality of limiting holes opened on the mounting block and a limiting column, the limiting column is inserted into different limiting holes to limit substrates of different sizes.

[0008] The height limiting part comprises height limiting columns uniformly distributed on the upper surface of the base, and the height limiting columns support the substrates and limit their heights.

[0009] The clamping part comprises a plurality of clamping assemblies, the clamping assemblies are movably connected to each side of the base, each clamping assembly comprises a movable clamping frame and a clamping roller located at the top end of the movable clamping frame, the movable clamping frame moves to drive the clamping roller to move in and out, and then the clamping roller clamps the edge of the substrate to fix the substrate.

[0010] As an improvement of the above-mentioned scheme, the mobile clamping frame comprises a support frame, a guide rod and a movable rod, the clamping roller is mounted at the top end of the support frame, a guide hole is formed in the support frame, the inner end of the guide rod is fixedly connected to the base, and the outer end thereof is slidingly connected in the guide hole;

[0011] The inner end of the movable rod extends into the base and is connected with a driving member, the movable rod is slidingly connected with the base, the outer end of the movable rod is connected with the support frame, the movable rod is driven to move in and out by the driving member, thereby driving the support frame to move correspondingly, and the guide rod moves in the guide hole, and the substrate is clamped by the clamping roller.

[0012] As an improvement of the above-mentioned scheme, the driving member comprises a plurality of air cylinders and a gas distribution pipeline connected with the air cylinders, and each movable rod is individually drivingly connected with an air cylinder.

[0013] As an improvement of the above-mentioned scheme, the driving member is a linkage driving device for synchronously driving a plurality of movable rods.

[0014] As an improvement of the above-mentioned scheme, the vertical distances from the center points of different limiting holes to the symmetry axis of the base are different, thereby limiting substrates of different length-width sizes.

[0015] As an improvement of the above-mentioned scheme, each side of the base is respectively provided with at least one set of limiting assemblies, and the limiting assemblies are used to limit the length and width of the substrate.

[0016] As an improvement of the above-mentioned scheme, each side of the base is respectively provided with at least two sets of clamping assemblies, so as to enhance the stability and reliability of clamping.

[0017] As an improvement of the above-mentioned scheme, the top end of the height limiting column and the clamping roller are made of anti-static material, so as to prevent the substrate from being affected by static electricity during operation.

[0018] Compared with the prior art, the above-mentioned scheme has the following advantages or beneficial effects:

[0019] The substrate alignment device provided in the present application supports the substrate and limits its height by the height limiting column, aligns substrates of different size specifications by inserting the limiting column into different limiting holes, and fixes the substrate by clamping the edge of the substrate by the clamping part, thereby improving the versatility of the substrate alignment device and adapting to substrate calibration operations of different size specifications. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are used to provide further understanding of the present application, and constitute a part of the specification, and are used to explain the present application together with embodiments of the present application, and do not constitute a limitation to the present application.

[0021] Fig. 1 It is a structural schematic view of the substrate alignment device of the embodiment (one).

[0022] Fig. 2 It is a structural schematic view of the substrate alignment device of the embodiment (two).

[0023] Fig. 3 It is a structural schematic view of the substrate alignment device of the embodiment (three).

[0024] In the figure: 1 base, 2 limiting part, 3 height limiting part, 4 clamping part, 5 air cylinder, 21 mounting block, 22 limiting hole, 23 limiting column, 31 height limiting column, 41 movable clamping frame, 42 clamping roller, 411 support frame, 4111 guide hole, 412 guide rod, 413 movable rod. DETAILED DESCRIPTION

[0025] For the purpose of clearly illustrating the technical features of the present application, the present application will be described in detail below with specific embodiments and in conjunction with the accompanying drawings. The following disclosure provides many different embodiments or examples to implement the different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. In addition, the present application can repeatedly refer to numbers and / or letters in different examples. Such repetition is for the purpose of simplification and clarity, and in itself does not indicate the relationship between the various embodiments and / or settings being discussed. It should be noted that the components illustrated in the drawings are not necessarily drawn to scale. The present application omits the description of known components and processing techniques and processes to avoid unnecessary limitation of the present application. The orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as limiting or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly. For example, it can be a fixed connection, or a detachable connection, or an integral connection; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0026] Referring to Figs. 1-3 The embodiment provides a substrate alignment device, which comprises a base 1, a limiting part 2, a height limiting part 3 and a clamping part 4, the limiting part 2 and the clamping part 4 are arranged on the side edges of the base 1, and the height limiting part 3 is arranged above the base 1.

[0027] The limiting part 2 comprises a plurality of limiting assemblies, two limiting assemblies are arranged on each long edge of the base 1, and one limiting assembly is arranged on each short edge of the base 1 and located on the symmetry axis. In the width direction of the substrate, the limiting assemblies arranged on the long edges are used for limiting; in the length direction of the substrate, the limiting assemblies arranged on the short edges are used for limiting. Each limiting assembly comprises a mounting block 21, a plurality of limiting holes 22 formed in the mounting block 21 and a limiting column 23, the limiting column 23 can be inserted into any one of the limiting holes 22; the vertical distance from the center point of different limiting holes 22 to the symmetry axis of the base 1 is different, and by inserting the limiting column 23 into the appropriate limiting hole 22, substrates of different sizes can be limited.

[0028] The height-limiting part 3 includes four height-limiting holes evenly arranged on the upper surface of the base 1, and four height-limiting columns 31 used in cooperation with the height-limiting holes. The height-limiting columns 31 can be inserted into the height-limiting holes, and the top ends of the height-limiting columns 31 are in contact with the bottom of the substrate, so as to support the substrate and limit the height of the substrate in the vertical direction. In one embodiment, the height-limiting columns 31 are fixedly connected to the base 1; in another embodiment, the top ends of the height-limiting columns 31 are made of PEEK material, which can prevent the substrate from being affected by static electricity during operation.

[0029] The clamping part 4 includes a plurality of clamping assemblies, and at least two clamping assemblies are arranged on each side of the base 1. The clamping assemblies are movably connected to the side of the base 1.

[0030] Each clamping assembly includes a moving clamping frame 41 and a clamping roller 42 arranged at the top end of the moving clamping frame 41. The moving clamping frame 41 drives the clamping roller 42 to move inwards and outwards by moving the moving clamping frame 41, so as to clamp the clamping roller 42 on the edge of the substrate to fix the substrate. In one embodiment, the clamping roller 42 is made of PEEK material.

[0031] The moving clamping frame 41 includes a support frame 411, a guide rod 412, and a movable rod 413. The clamping roller 42 is arranged at the top end of the support frame 411. The support frame 411 is provided with a guide hole 4111, and the inner end of the guide rod 412 is fixedly connected to the base 1, and the outer end of the guide rod 412 is slidably connected to the guide hole 4111. The inner end of the movable rod 413 extends into the base 1 and is connected with a driving member. The movable rod 413 is slidably connected between the base 1 and the support frame 411, and the outer end of the movable rod 413 is fixedly connected to the support frame 411. The driving member drives the movable rod 413 to move inwards and outwards, so as to drive the support frame 411 to move correspondingly, and the guide rod 412 moves in the guide hole 4111, and then the substrate is clamped by the clamping roller 42.

[0032] In one embodiment, the driving member includes a plurality of air cylinders 5 and a gas distribution pipeline. The compressed gas is provided to each air cylinder 5 through the gas distribution pipeline, so that a single air cylinder 5 drives a single movable rod 413 to move; in another embodiment, the driving member can be a linkage driving device, which drives a plurality of movable rods 413 to move synchronously.

[0033] In this embodiment, three clamping assemblies are arranged on each long side of the base 1, two of which are symmetrically arranged, and the other is arranged in the direction of the symmetry axis, and each clamping assembly includes at least one clamping roller 42. Through these clamping assemblies, the substrate is clamped in the width direction, and the two symmetrically arranged clamping rollers 42 in the clamping assembly arranged in the direction of the symmetry axis can enhance the clamping stability and reliability. Meanwhile, two clamping assemblies are symmetrically arranged on each short side of the base 1, which are used for clamping the substrate in the length direction.

[0034] Although the specific embodiments of the utility model have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of the utility model. Based on the technical solution of the utility model, various modifications or variations that can be made by those skilled in the art without creative effort are still within the scope of protection of the utility model.

Claims

1. A substrate alignment device, characterized in that: It includes a base (1), a limiting part (2), a height limiting part (3), and a clamping part (4); The limiting part (2) includes multiple sets of limiting components. Each side of the base (1) is provided with the limiting components. Each set of limiting components includes a mounting block (21), multiple limiting holes (22) opened on the mounting block (21), and a limiting post (23). The limiting post (23) is inserted into different limiting holes (22) to limit substrates of different sizes and specifications. The height limiting part (3) includes height limiting columns (31) evenly distributed on the upper surface of the base (1), which support the substrate and limit its height. The clamping part (4) includes multiple sets of clamping components, which are movably connected to each side of the base (1). Each set of clamping components includes a movable clamping frame (41) and a clamping roller (42) located at the top of the movable clamping frame (41). The movement of the movable clamping frame (41) drives the clamping roller (42) to move in and out, thereby clamping the substrate at the edge of the substrate to fix the substrate.

2. The substrate alignment device according to claim 1, characterized in that: The movable clamping frame (41) includes a support frame (411), a guide rod (412) and a movable rod (413). The clamping roller (42) is installed on the top of the support frame (411). The support frame (411) has a guide hole (4111). The inner end of the guide rod (412) is fixedly connected to the base (1), and its outer end is slidably connected in the guide hole (4111). The inner end of the movable rod (413) extends into the base (1) and is connected to a driving member. The movable rod (413) is slidably connected to the base (1), and the outer end of the movable rod (413) is connected to the support frame (411). The driving member drives the movable rod (413) to move in and out, thereby causing the support frame (411) to move accordingly. At the same time, the guide rod (412) moves in the guide hole (4111), and then the substrate is clamped by the clamping roller (42).

3. The substrate alignment device according to claim 2, characterized in that: The drive unit includes multiple cylinders (5) and air distribution pipes connected to the cylinders (5), and each of the movable rods (413) is individually connected to one of the cylinders (5) for transmission.

4. The substrate alignment device according to claim 2, characterized in that: The driving component is a linkage driving device used to synchronously drive multiple movable rods (413).

5. A substrate alignment device according to claim 1, characterized in that: The vertical distance from the center point of the different limiting holes (22) to the axis of symmetry of the base (1) is different, thereby enabling the limiting of substrates with different length and width dimensions.

6. The substrate alignment device according to claim 1, characterized in that: Each side of the base (1) is provided with at least one set of limiting components, which limit the substrate in the length and width directions.

7. A substrate alignment device according to claim 6, characterized in that: Each side of the base (1) is provided with at least two sets of the clamping components.

8. A substrate alignment device according to claim 1, characterized in that: The top of the height limiting column (31) and the clamping roller (42) are both made of antistatic material.

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