Positive pressure protection device of open type encoder of measuring machine

Abstract

The utility model discloses a positive pressure protection device for an open type encoder of a measuring machine, which comprises a protection cover body with an open end, and the protection cover body is used for wrapping the encoder to form a closed space; an air blowing connector is arranged on the protective cover body and is used for filling air into the closed space to form positive pressure; and the protective cover body is also provided with a pressure relief hole. The air blowing connector is connected with an air inflation device, compressed air can be inflated into the closed space to form positive pressure in the protection device, invasion of pollutants such as external dust and water vapor is avoided, and the encoder is effectively protected. Therefore, the positive pressure protection device provided by the utility model can effectively avoid the problem that the encoder on the measuring platform of the measuring machine table is polluted by the external environment, so that the operation precision is reduced, and meanwhile, the utilization rate of the machine table is also improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor production, and particularly relates to a positive pressure protection device for an open encoder of a measuring machine. BACKGROUND

[0002] A semiconductor measuring machine has high precision requirements for the operation of a measuring platform. Figures 1-2 As shown in FIG. 1, which is a schematic diagram of a typical structure of a measuring platform, the measuring platform includes a bearing platform 10, a measuring mechanism 14 disposed on the bearing platform, and an open encoder 12 disposed at the bottom of the bearing platform. The open encoder 12 is provided with a communication line and a pipeline connection for connecting the communication line and the pipeline. When the equipment using the open encoder is in a general environment, the open encoder at the bottom of the measuring platform is easily polluted by dust, water vapor, oil vapor, and the like in the environment, which will inevitably affect the position accuracy of the machine and may even cause the machine to be unable to be used.

[0003] Therefore, the present application provides a micro-positive pressure protection device to avoid the pollution of the encoder on the measuring platform by dust, water vapor, oil vapor, and the like from the outside environment, which has important technical value. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims at providing a positive pressure protection device for an open encoder of a measuring machine to solve the problems of the prior art.

[0005] The utility model is achieved by the following technical scheme:

[0006] A positive pressure protection device for an open encoder of a measuring machine includes a protection cover with one end open, which is used to wrap the encoder to form a closed space.

[0007] The protection cover is provided with a gas blowing joint for filling gas into the closed space to form a positive pressure.

[0008] The protection cover is further provided with a pressure relief hole.

[0009] Preferably, the protection cover is open at the top end, and the top end of the protection cover is provided with a fixed clamping groove.

[0010] The fixed clamping groove is used to clamp the measuring machine on both sides of the encoder to fix the protection cover on the measuring machine.

[0011] Preferably, the fixed clamping groove is two, respectively located on the left and right sides of the protection cover, and the fixed clamping groove on the left side is directed to the right, and the fixed clamping groove on the right side is directed to the left.

[0012] Preferably, a threaded hole is arranged on the upper side wall of the fixed clamping groove, and a fixed top pin is arranged in the threaded hole to further connect the measuring machine platform and the upper side wall of the fixed clamping groove.

[0013] Preferably, the protective cover is composed of a left fixed plate, a right fixed plate, a front baffle, a rear baffle and a bottom baffle.

[0014] Preferably, the middle area of the front baffle and the rear baffle in the horizontal direction is thinned.

[0015] Preferably, the middle area of the rear baffle in the horizontal direction is raised.

[0016] Preferably, the left fixed plate, the right fixed plate, the front baffle, the rear baffle and the bottom baffle are fixed by screws.

[0017] Preferably, the air blowing connector is arranged on the rear baffle.

[0018] Preferably, the pressure relief hole is arranged on the left fixed plate.

[0019] The positive pressure protection device provided by the present application can effectively avoid the problem that the encoder on the measuring platform of the measuring machine is polluted by the external environment, thereby reducing the running accuracy, and also improves the machine operation rate. Therefore, the positive pressure protection device provided by the present application has good practical value and technical improvement significance in the stable operation of semiconductor equipment, especially measuring equipment. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a structural schematic diagram of a measuring platform in the prior art;

[0021] Figure 2 is a structural schematic diagram of the bottom of a measuring platform in the prior art;

[0022] Figure 3 is a structural schematic diagram of a positive pressure protection device provided by the present application;

[0023] REFERENCE SIGNS:

[0024] 1-left fixed plate; 2-right fixed plate; 3-front baffle; 4-rear baffle; 5-bottom baffle; 6-fixed clamping groove; 7-air blowing connector; 8-pressure relief hole; 9-threaded hole; 10-bearing platform; 11-bearing platform edge position; 12-open encoder; 13-communication line and pipeline connection; 14-measuring mechanism; 15-screw. DETAILED DESCRIPTION

[0025] The positive pressure protection device of the open encoder of the measuring machine provided by the present application is as follows: Figure 3As shown, the protective cover includes an open end, and the protective cover can cover the encoder from below the measuring machine to wrap the encoder in a closed space together with the measuring machine.

[0026] The protective cover is provided with a blowing joint 7, and is also provided with a pressure relief hole 8.

[0027] The blowing joint 7 is connected to the inflation device, and compressed gas can be filled into the closed space to form a positive pressure inside the protective device, so as to avoid the invasion of external dust, water vapor and other pollutants, and effectively protect the encoder; the pressure relief hole 8 can not only relieve pressure, but also provide a passage for the communication cable and pipeline of the measuring machine.

[0028] The positive pressure protection device provided by the application can effectively avoid the problem that the encoder on the measuring platform of the measuring machine is polluted by the external environment, which leads to a decrease in running accuracy, and also improves the machine operation rate. Therefore, the positive pressure protection device provided by the application has good practical value and technical improvement significance in the stable operation of semiconductor equipment, especially measuring equipment.

[0029] As understood by those skilled in the art, the protective cover should be fixed on the measuring machine, and conventional techniques such as fixing screws can be used for fixation. The application provides a preferred fixation method, the upper end of the protective cover is open, and a fixing clamping groove 6 is arranged at the upper end of the protective cover, the fixing clamping groove is used for clamping with the edge position 11 of the bearing platform of the measuring machine on both sides of the encoder, so as to fix the protective cover on the measuring machine and prevent the protective cover from moving.

[0030] Preferably, the fixing clamping groove 6 is two, which are respectively located on the left and right sides of the protective cover; wherein the clamping groove direction of the left side is to the right, and the clamping groove direction of the right side is to the left. The clamping groove is clamped into the edge position 11 of the bearing platform of the measuring machine, that is, the protective cover is clamped with the measuring machine.

[0031] Preferably, a threaded hole 9 is arranged on the upper side wall of the fixing clamping groove 6, and a fixing top screw is used to further connect the bearing platform of the measuring machine and the upper side wall of the fixing clamping groove. In this way, the fixing clamping groove can prevent the protective cover from moving left and right (with the direction shown as a reference), and the fixing top screw can further prevent the protective cover from moving up and down and front and back, so that the protective cover is firmly fixed on the measuring machine. Figure 3

[0032] Preferably, the protective cover is spliced by a left side fixed plate 1, a right side fixed plate 2, a front side baffle 3, a rear side baffle 4 and a bottom baffle 5. Preferably, the splicing is fixed by a screw 15. The protective cover is spliced, and the size and shape of each side baffle can be adjusted according to the actual situation, so that it can also be used in a space-limited area.

[0033] ​Preferably, the middle region of the front side baffle 3 and the rear side baffle 4 in horizontal direction is thinned, to provide more space inside the device and avoid interference.

[0034] Preferably, the middle region of the rear side baffle 4 in horizontal direction is heightened, to shield the neutral gear region and achieve higher sealing effect.

[0035] Preferably, the blowing joint 7 is arranged on the rear side baffle 4, to facilitate connection of the blowing device. The pressure relief hole 8 is arranged on the left side fixed plate 1.

[0036] Although the preferred embodiments of the present application have been described, those skilled in the art who are familiar with the basic inventive concept can make further changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application. Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A positive pressure protection device for an open encoder on a measuring machine, characterized in that, It includes a protective cover with one open end, used to enclose the encoder to form a closed space; The protective cover is equipped with an air inlet for filling the enclosed space with gas to create positive pressure. The protective cover is also provided with a pressure relief hole; the upper end of the protective cover is open; the upper end of the protective cover is provided with a fixing slot; The fixing slot is used to engage with the edge of the bearing platform of the measuring machine on both sides of the encoder, fixing the protective cover to the measuring machine; there are two fixing slots, located on the left and right sides of the protective cover respectively; the fixing slot on the left faces to the right, and the fixing slot on the right faces to the left; the slot is used to engage with the edge of the bearing platform of the measuring machine. The upper side wall of the fixed slot is provided with a threaded hole, and a fixing set screw is passed through the threaded hole to further connect the measuring machine base to the upper side wall of the fixed slot. The protective cover is composed of a left fixed plate, a right fixed plate, a front baffle, a rear baffle, and a bottom baffle. The middle area of ​​the front baffle and the rear baffle in the horizontal direction is thinned.

2. The positive pressure protection device for the open encoder of the measuring machine as described in claim 1, characterized in that, The middle area of ​​the rear side baffle is raised in the horizontal direction.

3. The positive pressure protection device for the open encoder of the measuring machine as described in claim 1, characterized in that, The left fixing plate, the right fixing plate, the front baffle, the rear baffle, and the bottom baffle are connected and fixed together by screws.

4. The positive pressure protection device for the open encoder of the measuring machine as described in claim 1, characterized in that, The air blowing connector is located on the rear side baffle.

5. The positive pressure protection device for the open encoder of the measuring machine as described in claim 1, characterized in that, The pressure relief hole is located on the left side fixing plate.

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