Liquid medicine circulation system

Abstract

The utility model relates to a liquid medicine circulating system which comprises an inner tank and an outer tank which are arranged inside and outside, a first pipeline, a circulating pump, a second pipeline, a filter and a third pipeline are sequentially arranged between the inner tank and the outer tank, the inner tank is connected with an inner tank discharge pipeline, and an outer tank discharge pipeline is arranged between the first pipeline and the inner tank discharge pipeline. A filtered impurity discharge pipeline is arranged between the filter and the inner tank discharge pipeline, and a backwashing pipeline is arranged on the second pipeline; a first pneumatic valve is arranged at the position, close to the inner groove, of the inner groove discharging pipeline, a second pneumatic valve is arranged on the outer groove discharging pipeline, a third pneumatic valve is arranged on the first pipeline, a fourth pneumatic valve is arranged on the third pipeline, a fifth pneumatic valve is arranged on the filtered impurity discharging pipeline, and a sixth pneumatic valve is arranged at the position, close to an outlet, of the inner groove discharging pipeline. A ball valve is arranged on the backwashing pipeline close to the second pipeline. The wafer cleaning device has the advantages that impurities can be quickly removed in a non-stop state in a liquid medicine circulation process, and the wafer cleaning efficiency is ensured.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of wafer cleaning, and particularly relates to a liquid medicine circulating system. BACKGROUND

[0002] With the continuous improvement of wafer processing, as an important link in wafer processing, the requirement for cleaning process is also continuously upgraded. The tank type wet process equipment widely used in batch type wafer wet cleaning, etching, photoresist removal and other processes in the field of integrated cable also needs continuous innovation and continuous improvement of its performance to ensure the increasingly fierce market competition.

[0003] The tank type wet process equipment proportionally mixes different liquid medicines in the cleaning process tank according to process requirements so as to clean wafers. The tank type wet process equipment generally comprises an inner tank and an outer tank. The wafer is cleaned in the inner tank. There are a large amount of suspended solids and metal ions in the liquid medicine in the inner tank. The concentration of the suspended solids is high, and the suspended solids are difficult to settle. Therefore, a liquid medicine circulating system needs to be arranged between the inner tank and the outer tank. The liquid medicine containing suspended solids or metal ions on the upper surface of the inner tank is circulated to the outer tank. After being filtered by a filter, the liquid medicine is circulated to the inner tank again, so that the liquid medicine is recycled. However, the existing liquid medicine circulating system has the following technical defects: the suspended solids and the metal ions are attached to the inner wall of the pipeline and the filter element in the filter. After being used for a period of time, the inside of the circulating system is blocked, the liquid medicine cannot be normally circulated and transported, and the wafer cleaning efficiency is affected. SUMMARY

[0004] The utility model aims at overcoming the above defects and provides a liquid medicine circulating system, which can quickly remove impurities in the liquid medicine circulating process without stopping the machine, so as to ensure the wafer cleaning efficiency.

[0005] The utility model discloses a liquid medicine circulating system, including inner and outer settings inner tank and outer tank, inner tank and outer tank have first pipeline, circulating pump, second pipeline, filter and third pipeline in sequence between them, first pipeline, circulating pump, second pipeline, filter and third pipeline are connected to form a circulating pipeline, the inner tank is connected with inner tank discharge pipeline, first pipeline and inner tank discharge pipeline have outer tank discharge pipeline between them, filter and inner tank discharge pipeline have filter impurity discharge pipeline between them, first pipeline and second pipeline have backwashing pipeline on them;

[0006] The position of the inner tank discharge pipeline close to the inner tank has a pneumatic valve one, the outer tank discharge pipeline has a pneumatic valve two, the first pipeline has a pneumatic valve three, the third pipeline has a pneumatic valve four, the filter impurity discharge pipeline has a pneumatic valve five, the position of the inner tank discharge pipeline close to the outlet has a pneumatic valve six, and the backwashing pipeline has a ball valve close to the second pipeline.

[0007] The further improvement of the utility model lies in that the filter includes a filter shell and a filter core cylinder arranged in the filter shell, the outlet end of the second pipeline is connected with the inlet end of the filter shell, the inlet end of the third pipeline is connected with the first outlet end of the filter shell, and the inlet end of the filter impurity discharge pipeline is connected with the second outlet end of the filter shell.

[0008] The filter shell is internally provided with a rotating shaft, the top of the filter shell is provided with a speed reducer motor for driving the rotating shaft to rotate, and the rotating shaft is provided with a cleaning brush assembly in contact with the inner wall of the filter core cylinder.

[0009] The further improvement of the utility model lies in that the filter core cylinder includes a circular ring part and a plurality of uniformly distributed filter holes arranged on the circular ring part, the top of the circular ring part is provided with a cover part, the outlet end of the second pipeline and the inlet end of the third pipeline are arranged on the outer side of the circular ring part, and the inlet end of the filter impurity discharge pipeline is arranged at the lower end of the circular ring part.

[0010] The further improvement of the utility model lies in that the cleaning brush assembly includes a plurality of connecting rods arranged in a ring on the outer wall of the rotating shaft, the plurality of connecting rods are arranged in a staggered manner from top to bottom, the extension direction of the connecting rods is perpendicular to the extension direction of the rotating shaft, the outer side end of the connecting rod is provided with a silica gel scraper in contact with the inner wall of the circular ring part, a spring is arranged on the connecting rod, and the two ends of the spring are connected with the corresponding silica gel scraper and the rotating shaft.

[0011] The further improvement of the utility model lies in that the outer wall of the connecting rod is provided with a convex rib, and the inner part of the silica gel scraper is provided with a groove matched with the convex rib.

[0012] The further improvement of the utility model lies in that the first pressure sensor is arranged at the position close to the filter of the second pipeline, and the second pressure sensor is arranged at the position close to the filter of the third pipeline.

[0013] The further improvement of the utility model lies in that the inner groove is provided with a heater, and the top of the inner groove is provided with a liquid level meter.

[0014] The further improvement of the utility model lies in that the first pipeline and the second pipeline are flexible structures.

[0015] Compared with the prior art, the utility model has the following advantages:

[0016] 1. In the utility model, the backwashing pipeline is arranged on the first pipeline and the second pipeline in front of the filter, when the first pipeline, the second pipeline and the filter are blocked by too many impurities, the circulating pump stops starting, the liquid circulation between the inner tank and the outer tank is blocked, the first pipeline and the second pipeline are pressure washed through the backwashing pipeline, the impurities attached to the inner wall of the pipeline and the impurities in the filter are discharged to the filter impurity discharge pipeline, and the impurities in the pipeline and the filter are removed under the non-stop state.

[0017] 2, The utility model discloses a filter of specific structure is provided, when the backwash pipeline is washed to the first pipeline and the second pipeline inside, the rotating shaft in the filter is driven to rotate in a circle under the deceleration motor, drives a plurality of cleaning brush subassembly on the rotating shaft outer circle to rotate along the inner wall of filter core cylinder to scrape off the impurity of filter core inner wall, and the impurity is discharged after flowing to the filter impurity discharge pipeline with the backwash water flow in the first pipeline, the second pipeline, thereby reach the removal of the impurity in the pipeline and filter inside under the non-stop state, do not need to replace filter core, shorten the cleaning time limit of the impurity in the first pipeline, the second pipeline and filter inside, realize the liquid medicine circulation fast, guarantee wafer cleaning efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the principle schematic drawing of a liquid medicine circulating system in the utility model.

[0019] Figure 2 It is the structure schematic drawing of filter in the utility model. Figure 1

[0020] Figure 3 It is the enlarged schematic drawing of cleaning brush subassembly in the utility model. Figure 2

[0021] Mark in drawing:

[0022] 1-inner groove, 2-outer groove, 3-first pipeline, 4-circulating pump, 5-second pipeline, 6-filter, 7-third pipeline, 8-inner groove discharge pipeline, 9-outer groove discharge pipeline, 10-filter impurity discharge pipeline, 11-backwash pipeline, 12-pneumatic valve one, 13-pneumatic valve two, 14-pneumatic valve three, 15-pneumatic valve four, 16-pneumatic valve five, 17-pneumatic valve six, 18-ball valve, 19-first pressure sensor, 20-second pressure sensor;

[0023] 61-filter housing, 62-filter core cylinder, 63-rotating shaft, 64-deceleration motor, 65-cleaning brush subassembly;

[0024] 621-annular part, 622-filter hole, 623-sealing cover part;

[0025] 651-connecting rod, 652-silica gel scraper, 653-spring, 654-convex rib, 655-groove. DETAILED DESCRIPTION

[0026] In order to deepen the understanding of the utility model, the utility model will be further detailed in conjunction with examples and drawings below, and the examples are only used to explain the utility model and do not constitute the limitation to the protection scope of the utility model.

[0027] ​​In the description of the utility model, it is understood that the terms indicate the orientation or positional relationship, such as the orientation or positional relationship based on the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated structure or unit must have a particular orientation, therefore, it cannot be understood as the limitation of the utility model.

[0028] In the utility model, except for another explicit provision and limitation, if there are terms such as '' connection '' '' set with '' '' have '' etc., it should be understood in a broad sense, for example, it can be fixedly connected, can be detachably connected, or integrally connected, can be mechanically connected, can be directly connected, or connected through an intermediate medium, for the person skilled in the art, the basic meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0029] A kind of chemical liquid circulating system, refer to Figure 1 , including inner groove 1 and outer groove 2 arranged inside and outside, first pipeline 3, circulating pump 4, second pipeline 5, filter 6 and third pipeline 7 are sequentially arranged between inner groove 1 and outer groove 2, first pipeline 3, circulating pump 4, second pipeline 5, filter 6 and third pipeline 7 are connected to form circulating pipeline, inner groove 1 is connected with inner groove discharge pipeline 8, outer groove discharge pipeline 9 is arranged between first pipeline 3 and inner groove discharge pipeline 8, filter impurity discharge pipeline 10 is arranged between filter 6 and inner groove discharge pipeline 8, backwash pipeline 11 is arranged on first pipeline 3 and second pipeline 5;

[0030] The position of inner groove discharge pipeline 8 close to inner groove 1 is provided with pneumatic valve one 12, outer groove discharge pipeline 9 is provided with pneumatic valve two 13, first pipeline 3 is provided with pneumatic valve three 14, third pipeline 7 is provided with pneumatic valve four 15, filter impurity discharge pipeline 10 is provided with pneumatic valve five 16, the position of inner groove discharge pipeline 8 close to outlet is provided with pneumatic valve six 17, ball valve 18 is arranged on the position of backwash pipeline 11 close to second pipeline 5.

[0031] The chemical liquid circulating system in the application includes the following multiple modes:

[0032] Chemical liquid circulating mode: in this mode, circulating pump 4 is opened, pneumatic valve three 14 and pneumatic valve four 15 are opened, and the remaining pneumatic valves are closed.

[0033] Inner groove chemical liquid discharge mode: pneumatic valve one 12 and pneumatic valve six 17 are opened, the remaining pneumatic valves are closed, and circulating pump 4 is closed.

[0034] Outer groove chemical liquid discharge mode: pneumatic valve two 13, pneumatic valve three 14 and pneumatic valve six 17 are opened, the remaining pneumatic valves and circulating pump are closed.

[0035] Backwash cleaning impurities mode: ball valve 18 is opened, pneumatic valve three 14, pneumatic valve five 16 and pneumatic valve six 17 are opened, filter opens self-cleaning mode, the rest of the pneumatic valve and circulating pump are closed.

[0036] The first pipeline 3 and the second pipeline 5 are provided with backwash pipelines 11 at the front of the filter 6, when the first pipeline 3, the second pipeline 5 and the filter 6 are blocked by too many impurities, the circulating pump 4 is stopped, the liquid circulation between the inner tank 1 and the outer tank 2 is blocked, the first pipeline 3 and the second pipeline 5 are flushed by the backwash pipeline 11, the impurities attached to the inner wall of the pipeline and the impurities in the filter 6 are discharged to the filter impurity discharge pipeline 10, and the impurities in the pipeline and the filter 6 are removed under the condition of no shutdown.

[0037] On the basis of the embodiment, the filter 6 comprises a filter shell 61 and a filter core cylinder 62 arranged in the filter shell 61, the outlet end of the second pipeline 5 is connected with the inlet end of the filter shell 61, the inlet end of the third pipeline 7 is connected with the first outlet end of the filter shell 61, and the inlet end of the filter impurity discharge pipeline 10 is connected with the second outlet end of the filter shell 61.

[0038] The filter shell 61 is internally provided with a rotating shaft 63, the top of the filter shell 61 is provided with a speed reducer motor 64 for driving the rotating shaft 63 to rotate, and the rotating shaft 63 is provided with a cleaning brush assembly 65 in contact with the inner wall of the filter core cylinder 62.

[0039] In the utility model, the filter 6 with a specific structure is arranged, when the first pipeline 3 and the second pipeline 5 are flushed by the backwash pipeline 11, the rotating shaft 63 in the filter 6 rotates under the driving of the speed reducer motor 64, the plurality of cleaning brush assemblies 65 on the outer circumference of the rotating shaft 63 are driven to rotate along the inner wall of the filter core cylinder 62, so that the impurities on the inner wall of the filter core are scraped off, the impurities flow to the filter impurity discharge pipeline 10 together with the backwash water flow in the first pipeline 3 and the second pipeline 5, and then are discharged, so that the impurities in the pipeline and the filter 6 under the condition of no shutdown are removed, the filter core does not need to be replaced, the cleaning time of the impurities in the first pipeline 3, the second pipeline 5 and the filter 6 is shortened, the liquid circulation is quickly realized, and the wafer cleaning efficiency is ensured.

[0040] On the basis of the embodiment, the filter core cylinder 62 comprises a circular ring part 621 and a plurality of uniformly distributed filter holes 622 arranged on the circular ring part 621, the top of the circular ring part 621 is provided with a cover part 623, the outlet end of the second pipeline 5 and the inlet end of the third pipeline 7 are arranged on the outer side of the circular ring part 621, and the inlet end of the filter impurity discharge pipeline 10 is arranged at the lower end of the circular ring part 621.

[0041] On the basis of the embodiment, the cleaning brush assembly 65 comprises a plurality of connecting rods 651 arranged in a ring on the outer wall of the rotating shaft 63, the connecting rods 651 are arranged in a staggered manner from top to bottom, the extending direction of the connecting rods 651 is perpendicular to the extending direction of the rotating shaft 63, the outer side end of the connecting rod 651 is sleeved with a silica gel scraper 652 in contact with the inner wall of the annular part 621, the connecting rod 651 is sleeved with a spring 653, and the two ends of the spring 653 are connected with the corresponding silica gel scraper 652 and the rotating shaft 63 respectively.

[0042] Further, the outer wall of the connecting rod 651 is provided with a convex rib 654, and the inner part of the silica gel scraper 652 is provided with a groove 655 matched with the convex rib 654.

[0043] In the application, the spring 653 is arranged between the silica gel scraper 652 and the rotating shaft 63, and the silica gel scraper 652 has a certain buffering property between the inner wall of the filter core cylinder 62 during rotation with the rotating shaft 63, that is, when encountering large-particle impurities, the rotation of the silica gel scraper 652 is avoided to wear itself and the filter core cylinder 62, wherein the convex rib 654 on the outer wall of the connecting rod 651 and the groove 655 in the inner part of the silica gel scraper 652 are matched with each other, so that the straightness of the elastic contraction of the silica gel scraper 652 when touching the large-particle impurities is ensured, and the jamming of the silica gel scraper 652 is avoided.

[0044] On the basis of the embodiment, the first pressure sensor 19 is arranged at the position close to the filter 6 of the second pipeline 5, and the second pressure sensor 20 is arranged at the position close to the filter 6 of the third pipeline 7.

[0045] When the pressure values of the inlets and outlets on both sides of the filter 6 reach the system predetermined value, the filter 6 starts the self-cleaning mode, that is, the speed reducer motor 64 is started, and at the same time, the liquid circulating system is in the backwashing mode to remove the impurities in the pipeline and the filter 6.

[0046] On the basis of the embodiment, the inner tank 1 is provided with a heater, and the inner tank 1 is provided with a liquid level meter on the top.

[0047] On the basis of the embodiment, the first pipeline 3 and the second pipeline 5 are flexible structures, and when backwashing, due to the change of the internal pressure of the pipeline, the first pipeline 3 and the second pipeline 5 generate a certain vibration, and the pipeline with a flexible structure can effectively buffer the vibration.

[0048] Those skilled in the art should understand that the utility model is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and the description in the specification only illustrate the principle of the utility model, and various changes and improvements can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A liquid medicine circulation system, characterized in that: The system includes an inner tank (1) and an outer tank (2) with internal and external connections. The inner tank (1) and the outer tank (2) are connected sequentially by a first pipeline (3), a circulation pump (4), a second pipeline (5), a filter (6), and a third pipeline (7). The first pipeline (3), the circulation pump (4), the second pipeline (5), the filter (6), and the third pipeline (7) are connected to form a circulation pipeline. The inner tank (1) is connected to an inner tank discharge pipeline (8). The first pipeline (3) and the inner tank discharge pipeline (8) are connected by an outer tank discharge pipeline (9). The filter (6) and the inner tank discharge pipeline (8) are connected by a filter impurity discharge pipeline (10). The first pipeline (3) and the second pipeline (5) are connected by a backwashing pipeline (11). The inner tank discharge pipe (8) has a pneumatic valve one (12) near the inner tank (1), the outer tank discharge pipe (9) has a pneumatic valve two (13), the first pipe (3) has a pneumatic valve three (14), the third pipe (7) has a pneumatic valve four (15), the filter impurity discharge pipe (10) has a pneumatic valve five (16), the inner tank discharge pipe (8) has a pneumatic valve six (17) near the outlet, and the backwash pipe (11) has a ball valve (18) near the second pipe (5).

2. The drug solution circulation system according to claim 1, characterized in that: The filter (6) includes a filter housing (61) and a filter cartridge (62) placed inside the filter housing (61). The outlet end of the second pipeline (5) is connected to the inlet end of the filter housing (61). The inlet end of the third pipeline (7) is connected to the first outlet end of the filter housing (61). The inlet end of the filter impurity discharge pipeline (10) is connected to the second outlet end of the filter housing (61). The filter housing (61) has a rotating shaft (63) inside, and a geared motor (64) for driving the rotating shaft (63) to rotate is located on the top of the filter housing (61). The rotating shaft (63) has a cleaning brush assembly (65) that contacts the inner wall of the filter element cylinder (62).

3. The drug solution circulation system according to claim 2, characterized in that: The filter cartridge body (62) includes an annular portion (621) and a plurality of uniformly distributed filter holes (622) on the annular portion (621). The top of the annular portion (621) has a cap portion (623). The outlet end of the second pipeline (5) and the inlet end of the third pipeline (7) are located outside the annular portion (621). The inlet end of the filter impurity discharge pipeline (10) is located at the lower end of the annular portion (621).

4. The drug solution circulation system according to claim 3, characterized in that: The cleaning brush assembly (65) includes a plurality of connecting rods (651) arranged around the outer wall of the rotating shaft (63). The plurality of connecting rods (651) are arranged in a staggered manner, and the extension direction of the connecting rods (651) is perpendicular to the extension direction of the rotating shaft (63). The outer end of the connecting rod (651) is fitted with a silicone scraper (652) that contacts the inner wall of the annular part (621). A spring (653) is fitted on the connecting rod (651), and the two ends of the spring (653) are respectively connected to the corresponding silicone scraper (652) and the rotating shaft (63).

5. The drug solution circulation system according to claim 4, characterized in that: The outer wall of the connecting rod (651) has a rib (654), and the inside of the silicone scraper (652) has a groove (655) that matches the rib (654).

6. The drug solution circulation system according to claim 5, characterized in that: The second pipeline (5) has a first pressure sensor (19) near the filter (6), and the third pipeline (7) has a second pressure sensor (20) near the filter (6).

7. The drug solution circulation system according to claim 6, characterized in that: The inner tank (1) has a heater and the top of the inner tank (1) has a level gauge.

8. The drug solution circulation system according to claim 7, characterized in that: The first pipeline (3) and the second pipeline (5) are flexible structures.

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