Spin coating device and solar cell production system

Abstract

The utility model provides a spin-coating device and a solar cell production system, the spin-coating device comprises a spin-coating main body, the spin-coating main body comprises a bearing part, the bearing part is configured to bear a to-be-spin-coated part, and the to-be-spin-coated part is uniformly coated in the rotating process; the detection mechanism comprises a light source assembly and a light processing assembly; the light source assembly is connected to the spin-coating main body and is configured to generate emitted light rays and project the emitted light rays to the bearing part; the light processing assembly is configured to process reflected light which is reflected after the emitted light is absorbed so as to detect spin-coating information of the part to be spin-coated; the spin-coating information comprises spin-coating defects. According to the spin coating device, in the process of uniformly coating the to-be-spin-coated part, the spin coating information of the to-be-spin-coated part can be detected, the functions of the spin coating device are enriched, and the test result is more stable; and the structure is simplified, and the cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to battery technology field especially relates to a spin -coating device and solar cell production system. BACKGROUND

[0002] In the preparation process of perovskite solar cell, the spin -coating device is as the basic equipment of spin -coating wet -process coating, and the solution can be uniformly coated on the workpiece surface through the rotating mode. However, the function of the existing spin -coating device is relatively single. SUMMARY

[0003] The spin -coating device and solar cell production system provided by the application aim to solve the problem of the single function of the existing spin -coating device.

[0004] To solve the above technical problem, one technical scheme adopted by the application is to provide a spin -coating device, which comprises:

[0005] A spin -coating main body, comprising a bearing part, the bearing part is configured to bear a to-be-coated workpiece and carry out uniform coating treatment on the to-be-coated workpiece during rotation.

[0006] A detection mechanism, comprising a light source assembly and a light processing assembly; the light source assembly is configured to generate emitting light and project to the bearing part; the light processing assembly is configured to process the reflected light reflected back after absorbing the emitting light to detect the spin -coating information of the to-be-coated workpiece; the spin -coating information includes spin -coating defects.

[0007] The above-mentioned spin -coating device can utilize the spin -coating main body to carry out uniform coating treatment on the to-be-coated workpiece, and further integrates the detection mechanism on the spin -coating device, so that the spin -coating information of the to-be-coated workpiece can be further detected by the detection mechanism during the uniform coating treatment of the to-be-coated workpiece, to obtain the relevant information of the to-be-coated workpiece in the spin -coating process, thereby facilitating the later research on the film forming mechanism of the to-be-coated workpiece, optimizing the film forming quality, and enriching the function of the spin -coating device. Moreover, the to-be-coated workpiece can be detected without transferring after the spin -coating treatment, which reduces the risk of uneven spin -coating of the to-be-coated workpiece caused by transfer, affecting the detection result, and the test result is more stable. In addition, by connecting the light source assembly of the detection mechanism to the spin -coating main body, the optical axis direction of the emitting light emitted by the light source assembly can be kept relatively fixed with the bearing part, thereby reducing the risk of relatively offsetting the optical axis direction of the emitting light relative to the bearing part caused by the shaking of the rotating main body during the uniform coating treatment, and causing unstable light signals. In addition, it is not necessary to additionally add a bracket structure for placing the light source assembly, which simplifies the structure and reduces the cost.

[0008] In one embodiment, the optical axis direction of the emitting light projected by the light source assembly to the bearing part is perpendicular to the bearing part.

[0009] The above scheme can make the reflected light, which is reflected after absorbing the emitted light, also vertically exit the carrier by making the emitted light vertically shoot to the carrier. In this way, the light source assembly and the light processing assembly can share the same first transmission socket. Compared with the scheme in which the light source assembly and the light processing assembly correspond to one first transmission socket respectively, one first transmission socket is saved, the structure of the spin coating device is simplified, and the cost is reduced. In addition, the overall sealing performance of the spin coating device can be improved.

[0010] In one embodiment, the detection mechanism is arranged outside the spin coating body.

[0011] The above scheme can reduce the influence of the detection mechanism on the original internal structure layout of the spin coating body, has less modification to the existing spin coating body, can directly use the existing spin coating equipment, and is easy to obtain the spin coating body, thereby saving the cost. In addition, the solvent volatilized from the surface of the to-be-coated piece can be prevented from entering the inside of the detection mechanism and polluting the detection mechanism, thereby reducing the influence on the performance of the electronic devices in the inside of the detection mechanism.

[0012] In one embodiment, the light source assembly comprises:

[0013] a light-emitting light source configured to generate emitted light;

[0014] a first light transmission member, a first end of the first light transmission member being connected to the light-emitting light source and being configured to transmit the emitted light;

[0015] a first transmission socket connected to the spin coating body and connected to a second end of the first light transmission member, and being configured to project the emitted light transmitted by the first light transmission member to the carrier.

[0016] The above scheme can change the propagation path of the emitted light generated by the light-emitting light source by making the light source assembly comprise the light-emitting light source, the first light transmission member, and the first transmission socket, and transmitting the emitted light through the first light transmission member, so that the emitted light propagates along a preset direction. In addition, these components are common devices in the field and can be directly used without the need to prepare new product structures again, thereby saving the preparation cost. In addition, the first transmission socket is fixedly connected to the spin coating body, so that the optical axis direction of the light projected by the first transmission socket remains relatively fixed with the carrier, thereby reducing the risk of instability of the optical signal caused by the relative deviation of the optical axis direction of the emitted light from the carrier due to the shaking of the spin body during the spin coating process.

[0017] In one embodiment, the light emitting source is arranged on one side of the spin coating body and is independent of the spin coating body.

[0018] The above scheme, by making the light emitting source independent of the spin coating body, compared to the scheme of arranging the light emitting source on the spin coating body, reduces the obstruction caused by the large volume light emitting source to the opening process of the cover of the spin coating body; and can reduce the large volume light emitting source crushing the spin coating body and / or the light emitting source shielding part of the spin coating body, affecting the performance of the spin coating body. In addition, there is no need to integrate the light emitting source again in the related process of the spin coating device, the process is simple, and the cost is saved. The spin coating device can take into account the original spin coating function and the detection function of the detection mechanism. In addition, the relative position of the light emitting source and the spin coating body is not limited, and any position of the light emitting source and the spin coating body can be selected.

[0019] In one embodiment, the spin coating body comprises:

[0020] The shell forms a hollow cavity;

[0021] The cover is arranged on the shell and cooperates with the hollow cavity to form a containing cavity; the carrier is arranged in the containing cavity; wherein the cover has a light transmission hole, the light transmission hole is projected on the carrier along the height direction of the shell; the first transmission socket is connected to the light transmission hole and projects the emitted light to the carrier through the light transmission hole.

[0022] The above scheme, by making the spin coating body include a shell and a cover detachably connected to the shell, a containing cavity can be formed in the spin coating body, to improve the sealing performance of the containing cavity and reduce the risk of solution splashing from the surface of the spin coating part to the outside of the spin coating body during the spin coating process; at the same time, rapid vacuumization in the containing cavity can be realized to quickly realize the process of vacuum drying crystallization. Moreover, this scheme is convenient for maintenance and replacement of related parts inside the spin coating body. In addition, by providing a light transmission hole on the cover and connecting the first transmission socket to the light transmission hole, the connection between the first transmission socket and the cover is realized, and the light transmitted by the first transmission socket can be projected to the surface of the carrier through the light transmission hole; this connection scheme does not need to set other fixing parts, nor does it need to use welding process to realize the connection, saving the cost.

[0023] In one embodiment, the spin coating body forms a containing cavity; the carrier is located in the containing cavity; the spin coating device further comprises a vacuum drying mechanism, the vacuum drying mechanism comprises a first vacuum pump, the first vacuum pump is in communication with the containing cavity and is configured to vacuumize the containing cavity.

[0024] The above scheme, by making the spin coating device further include a vacuum drying mechanism, to vacuumize the containing cavity; in this way, after the to-be-coated piece is subjected to spin coating treatment in the spin coating body, vacuum drying can be continued in the spin coating body, vacuum drying can be quickly performed, so that vacuum drying can be realized within an effective time; and the to-be-coated piece after spin coating treatment does not need to be transferred, saving the transfer step, simplifying the process, and reducing the risk of uneven spin coating caused by shaking of the to-be-coated piece during transfer. In addition, the vacuum drying mechanism is also integrated on the spin coating mechanism, so that the original spin coating equipment, vacuum drying treatment equipment and photoluminescence detection equipment are integrated in the same set of equipment, so that the perovskite solution can realize the original photoluminescence test in the spin coating and vacuum drying crystallization process, and the perovskite crystallization process can be better observed, which creates conditions for perovskite battery mechanism research and development; and the integration of each product in the entire processing system of the to-be-coated piece is improved, and the product footprint is reduced.

[0025] In one embodiment, the spin coating body further comprises a driving member connected with the bearing member and configured to drive the bearing member to rotate;

[0026] The spin coating device further comprises a controller connected with the driving member, the first vacuum pump and the detection mechanism respectively, and controls the detection mechanism and the driving member to work simultaneously; or controls the detection mechanism and the first vacuum pump to work simultaneously.

[0027] The above scheme, by the controller controlling the driving member and the detection mechanism to work simultaneously, the detection mechanism can detect the spin coating information of the surface of the to-be-coated piece in the spin coating process, so as to obtain more related information, which is convenient for subsequent research on the film forming mechanism of the to-be-coated piece and optimization of the film forming quality. Or by the controller controlling the detection mechanism and the first vacuum pump to work simultaneously, the detection mechanism can continue to detect the spin coating information of the to-be-coated piece in the vacuum drying process; in this way, the spin coating information of the to-be-coated piece in the spin coating process and the vacuum drying process can be detected, and the detection of the spin coating information of the to-be-coated piece in the spin coating process and the vacuum drying process is completed by the same set of detection mechanism; compared with the scheme that the spin coating process detection and the vacuum drying process detection correspond to one set of detection mechanism respectively, the number of detection mechanisms is reduced, the cost is reduced, and the product integration is improved; and the to-be-coated piece does not need to be transferred multiple times, which more effectively reduces the risk of uneven spin coating caused by the to-be-coated piece during transfer.

[0028] In one embodiment, the carrier has a carrier surface and a non-carrier surface; the carrier has at least one vacuum suction hole penetrating through the carrier surface and the non-carrier surface. The spin coating device further comprises a vacuum suction mechanism, the vacuum suction mechanism comprises a second vacuum pump, the second vacuum pump is in communication with the vacuum suction hole; and the second vacuum pump is the same vacuum pump as the first vacuum pump.

[0029] The above scheme, by setting the vacuum suction mechanism, not only can improve the adsorption force between the to-be-coated piece and the carrier, and make the first vacuum pump and the second vacuum pump be the same vacuum pump, realize one pump multiple use, reduce the number of vacuum pumps, reduce the cost, and simplify the product structure.

[0030] In one embodiment, the spin coating information further comprises crystallization information of the solution on the surface of the to-be-coated piece.

[0031] The above scheme can synchronously obtain the crystallization information of the surface of the to-be-coated piece in the spin coating process and the vacuum drying process through the detection mechanism, increase relevant data information in the crystallization process, and be more conducive to later research on the film forming mechanism of the to-be-coated piece and optimization of film forming quality.

[0032] In one embodiment, the to-be-coated piece comprises a battery piece.

[0033] The above scheme can perform uniform coating treatment on the solution on the surface of the battery piece through the spin coating device, and detect spin coating information of the battery piece in the spin coating process through the detection mechanism; that is, the spin coating information of the battery piece in the spin coating process is obtained, and the battery piece does not need to be transferred, thereby reducing the risk of uneven spin coating of the battery piece due to transfer and affecting the detection result.

[0034] To solve the above technical problems, another technical scheme adopted by the present application is to provide a solar cell production system, which comprises the above-mentioned spin coating device.

[0035] The above description is only a summary of the technical scheme of the present application. In order to more clearly understand the technical means of the present application, the specific embodiments of the present application can be implemented in accordance with the content of the description, and in order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following specific embodiments of the present application are described. BRIEF DESCRIPTION OF DRAWINGS

[0036] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a better understanding of the preferred embodiments, and are not considered to be limiting of the present application. Moreover, like reference numerals denote like elements throughout the several views of the drawings. In the drawings:

[0037] Figure 1This is a schematic diagram of the overall structure of a spin coating apparatus provided in an embodiment of this application;

[0038] Figure 2 for Figure 1 Top view of the spin coating apparatus shown;

[0039] Figure 3 for Figure 2 A cross-sectional view of the spin coating apparatus shown along the AA direction;

[0040] Figure 4 for Figure 2 A cross-sectional view of the spin coating apparatus shown in the BB direction;

[0041] Figure 5 This is a schematic diagram of the overall structure of a spin coating apparatus provided in another embodiment of this application;

[0042] Figure 6 for Figure 5 Top view of the spin coating apparatus shown;

[0043] Figure 7 for Figure 6 A cross-sectional view of the spin coating apparatus shown along the AA direction;

[0044] Figure 8 for Figure 6 A cross-sectional view of the spin coating apparatus shown in the BB direction.

[0045] Explanation of reference numerals in the attached figures

[0046] 100 Spin coating device; 10 Spin coating body; 11 Support component; 111 Vacuum adsorption hole; 12 Housing; 13 Cover; 131 Light transmission hole; 14 Receiving cavity; 15 Driving component; 16 Rotating shaft; 17 Sealing ring; 20 Detection mechanism; 21 Light source assembly; 211 Light emission source; 212 First light transmission component; 213 First transmission socket; 22 Light processing assembly; 221 Second transmission socket; 222 Second light transmission component; 223 Image processing assembly; 30 Vacuum drying mechanism; 31 First vacuum pump; 32 First vacuum pipeline; 41 Second vacuum pipeline;

[0047] 200 parts to be coated. Detailed Implementation

[0048] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0049] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this application; the use of the terms "including," "comprising," or "having" and variations thereof herein is intended to be broad and encompass the terms "consisting of" and "consisting essentially of" and variations thereof. Unless otherwise required by context, singular terms shall include pluralities and vice versa. Unless otherwise required by context, the use herein of the singular is also to be construed as a reference to the plural and vice versa.

[0050] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise explicitly and specifically limited.

[0051] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily independent or alternative embodiments to each other. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0052] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which means that there are three cases of A alone, A and B together, and B alone. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0053] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two), and similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0054] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. The orientation or positional relationship indicated is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, and is not intended to indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application.

[0055] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0056] In the research and development of perovskite solar cells, the spin coating device is a basic equipment for spin coating wet film coating. The solution dropped on the surface of the workpiece can be uniformly coated on the surface of the workpiece by rotating. Then the workpiece after uniform coating is transferred to a vacuum drying mechanism for subsequent vacuum drying process, so that a large amount of solvent on the surface of the workpiece is volatilized, and the solute solution is crystallized into a film; but the function of the existing spin coater is relatively single. In order to study the mechanism of perovskite film formation and optimize the film formation quality, it is necessary to detect the photoluminescence absorption spectrum in the perovskite film formation process, but the existing detection process cannot detect the related information of the spin coating process and / or vacuum drying process; and the workpiece needs to be transferred for many times, the process is complicated, and the detection result is relatively unstable.

[0057] Based on this, the embodiments of the present application provide a spin coating device. By integrating the detection mechanism on the spin coating main body, the function of the spin coating device is not only enriched; and the related information of the workpiece to be coated in the spin coating process can be detected, so that the film formation mechanism of the workpiece to be coated is more conducive to the later research, the film formation quality is optimized, and the function of the spin coating device is enriched; and the workpiece to be coated does not need to be transferred after the spin coating treatment, so that the risk of uneven spin coating of the workpiece to be coated due to transfer affecting the detection result is reduced, and the test result is more stable.

[0058] The present application will be described in detail below with reference to the drawings and embodiments.

[0059] Please refer to Figures 1 to 4 , Figure 1 The overall structure schematic diagram of the spin coating device provided by an embodiment of the present application is shown in Figure 2 The top view of the spin coating device shown in Figure 1 The A-A sectional view of the spin coating device shown in Figure 3 The A-A sectional view of the spin coating device shown in Figure 2 The A-A sectional view of the spin coating device shown in Figure 4 The A-A sectional view of the spin coating device shown in Figure 2B-B sectional view of the spin coating device. In this embodiment, a spin coating device 100 is provided, which comprises a spin coating body 10 and a detection mechanism 20. The spin coating body 10 can uniformly coat the solution dropped on the surface of the to-be-coated piece 200 on the surface of the to-be-coated piece 200 in a rotating manner. The solution can be a perovskite solution.

[0060] In combination Figure 3 , the spin coating body 10 comprises a carrier 11. The carrier 11 is configured to carry the to-be-coated piece 200, that is, the carrier 11 is a platform for placing the to-be-coated piece 200, and the position and angle of the to-be-coated piece 200 can be accurately controlled. The carrier 11 ensures that the to-be-coated piece 200 is stable and adjustable during measurement, so that the light emitted by the light source assembly 21 of the detection mechanism 20 can be accurately irradiated onto the to-be-coated piece 200, and the reflected light can smoothly reach the light processing assembly 22 of the detection mechanism 20. The carrier 11 can be in the form of a plate.

[0061] Further, the carrier 11 can be rotated, and the carrier 11 is configured to perform uniform coating treatment on the to-be-coated piece 200 carried thereon during rotation, so that the solution dropped on the surface of the to-be-coated piece 200 is uniformly coated on the surface of the to-be-coated piece 200. The uniform coating treatment refers to a process of uniformly coating the solution dropped on the surface of the to-be-coated piece 200 on the surface of the to-be-coated piece 200.

[0062] The detection mechanism 20 can detect the spin coating information on the surface of the to-be-coated piece 200 by photoluminescence (PL). The test principle of photoluminescence is as follows: the to-be-coated piece 200 is irradiated by an external light source, absorbs photons to obtain energy, generates excitation to re-emit photons, and forms reflected light. Then the reflected light is photosensitive and imaged. The light intensity after imaging is proportional to the concentration of non-equilibrium minority carriers at the corresponding position. Since defects can reduce the concentration of minority carriers in the region and thus weaken the fluorescence effect, after imaging, dark spots, lines or certain areas are formed. Therefore, photoluminescence can be used to determine whether defects exist on the surface of the to-be-coated piece 200; and the crystallization process on the surface of the to-be-coated piece 200 can also be observed.

[0063] In combination Figure 1 , the detection mechanism 20 specifically comprises a light source assembly 21 and a light processing assembly 22. The light source assembly 21 is configured to generate emitted light and project it to the carrier 11. The emitted light can be in the form of continuous light or in the form of pulsed light. The wavelength of the emitted light should be within the absorption spectrum range of the perovskite film, that is, the photon energy of the emitted light should be greater than the band gap width of the perovskite film material, so as to ensure that the photoexcited state can be generated.

[0064] The light processing assembly 22 is configured to process the reflected light reflected back after absorbing the emitted light rays to detect the spin coating information of the spin coating piece 200. The spin coating information includes spin coating defects. The spin coating defects include dust, dirt, and the like on the surface of the spin coating piece 200.

[0065] In combination with the above, Figure 1 The light processing assembly 22 can include a second transmission socket 221, a second light transmission piece 222, and an image processing assembly 223. The second transmission socket 221 is connected to the spin coating body 10, and the second transmission socket 221 is configured to receive the reflected light. The second light transmission piece 222 has a first end and a second end opposite to each other, the first end of the second light transmission piece 222 is connected to the second transmission socket 221, and the second end of the second light transmission piece 222 is connected to the image processing assembly 223. The second light transmission piece 222 is configured to transmit the reflected light to the image processing assembly 223. The second light transmission piece 222 can be an optical fiber.

[0066] The image processing assembly 223 includes a photoelectric sensor (not shown) and an image processor (not shown). The photoelectric sensor is a device capable of converting the received light signal into an electrical signal, generally including a photosensitive element (such as a CCD or CMOS camera) and related signal processing circuit. The photoelectric sensor is configured to receive the reflected light and convert the light signal of the input reflected light into an output electrical signal. The image processor is configured to receive and process the electrical signal converted by the photoelectric sensor in real time, form a digital image, and detect the spin coating information on the surface of the spin coating piece 200 based on the digital image.

[0067] The above spin coating device 100 can utilize the spin coating body 10 to perform the uniform coating process on the spin coating piece 200. By further integrating the detection mechanism 20 on the spin coating device 100, the spin coating information of the spin coating piece 200 can be further detected by the detection mechanism 20 during the uniform coating process of the spin coating piece 200, so as to obtain the relevant information of the spin coating piece 200 during the spin coating process, thereby facilitating the later research on the film forming mechanism of the spin coating piece 200, optimizing the film forming quality, and enriching the functions of the spin coating device 100. Moreover, the spin coating piece 200 can be detected without being transferred after the spin coating process, thereby reducing the risk of uneven spin coating of the spin coating piece 200 due to the transfer, affecting the detection results, and stabilizing the test results. In addition, by connecting the light source assembly 21 of the detection mechanism 20 to the spin coating body 10, the optical axis direction of the emitted light rays emitted by the light source assembly 21 can be relatively fixed with the carrier 11, thereby reducing the risk of relative deviation of the optical axis direction of the emitted light rays from the carrier 11 due to the shaking of the spin coating body 10 during the uniform coating process, and the instability of the light signal. Furthermore, there is no need to additionally add a bracket structure for placing the light source assembly 21, thereby simplifying the structure and reducing the cost.

[0068] In one embodiment, in combination Figure 3 The light axis direction of the emitted light rays projected by the light source assembly 21 to the carrier 11 is perpendicular to the carrier 11.

[0069] The light axis direction of the emitted light rays refers to the propagation direction of the light axis of the emitted light rays emitted from the light source assembly 21 and incident on the carrier 11. The light axis direction of the emitted light rays is specifically perpendicular to the carrier surface on which the carrier 11 is located.

[0070] In this embodiment, by making the emitted light rays vertically incident on the carrier 11, the reflected light reflected after absorbing the emitted light rays can also be emitted vertically to the carrier 11. In this way, the light source assembly 21 and the light processing assembly 22 can share the same transmission socket. Compared with the scheme in which the emitted light rays are obliquely incident on the carrier 11, i.e., the light axis direction of the emitted light rays is obliquely arranged relative to the carrier 11, the light source assembly 21 and the light processing assembly 22 correspond to one transmission socket respectively, one transmission socket is saved, the structure of the spin coating device 100 is simplified, and the cost is reduced. Moreover, it is beneficial to improve the overall sealing performance of the spin coating device 100.

[0071] In one embodiment, in combination Figure 1 Or Figure 2 The detection mechanism 20 is arranged on the outside of the spin coating main body 10.

[0072] The outside of the spin coating main body 10 refers to the outside of the accommodation cavity 14 of the spin coating main body 10. In some specific embodiments, the entire detection mechanism 20 can be located on the outside of the spin coating main body 10. Alternatively, part of the detection mechanism 20 can be located on the outside of the spin coating main body 10. For example, one of the light source assembly 21 and the light processing assembly 22 is arranged on the outside of the spin coating main body 10, and the other is arranged in the accommodation cavity 14 of the spin coating main body 10. Of course, part of the light source assembly 21 can be arranged on the outside of the spin coating main body 10, and part of the light source assembly 21 can be arranged in the accommodation cavity 14 of the spin coating main body 10. In addition, part of the light processing assembly 22 can be arranged on the outside of the spin coating main body 10, and part of the light processing assembly 22 can be arranged in the accommodation cavity 14 of the spin coating main body 10.

[0073] Arranging the detection mechanism 20 on the outside of the spin coating main body 10 can reduce the influence of the detection mechanism 20 on the original internal structure layout of the spin coating main body 10, and the existing spin coating main body 10 needs to be changed less. The existing spin coating equipment can be directly used, the spin coating main body 10 is easy to obtain, and the cost is saved. Moreover, the solvent volatilized from the surface of the to-be-coated piece 200 can be prevented from entering the inside of the detection mechanism 20 and polluting the detection mechanism 20, thereby reducing the influence on the performance of the electronic devices in the inside of the detection mechanism 20.

[0074] In one embodiment, in combination Figure 1The light source assembly 21 comprises a light-emitting light source 211, a first light transmission member 212, and a first transmission socket 213. The light-emitting light source 211 is configured to generate emitted light rays. The light-emitting light source 211 can be a laser light source that emits laser light of a specific wavelength as excitation light source and provides photons of a certain energy.

[0075] The first light transmission member 212 has opposite first and second ends. The first end of the first light transmission member 212 is connected to the light-emitting light source 211, and the second end of the first light transmission member 212 is connected to the first transmission socket 213. The first light transmission member 212 is configured to transmit the emitted light rays. The first light transmission member 212 can be an optical fiber.

[0076] The first transmission socket 213 is connected to the spin body 10, and the first transmission socket 213 is configured to project the emitted light rays transmitted by the first light transmission member 212 to the carrier 11. In some embodiments, the first transmission socket 213 is configured to make the emitted light rays emitted by the first light transmission member 212 in various directions incident on the carrier 11 in the same direction. It can be understood that when the optical axis direction of the emitted light rays projected by the light source assembly 21 to the carrier 11 is perpendicular to the carrier 11, the first transmission socket 213 and the second transmission socket 221 can be the same socket.

[0077] In this embodiment, by making the light source assembly 21 comprise the light-emitting light source 211, the first light transmission member 212, and the first transmission socket 213, and by transmitting the emitted light rays through the first light transmission member 212, not only can the first light transmission member 212 be used to change the propagation path of the emitted light rays generated by the light-emitting light source 211 so that the emitted light rays propagate in a predetermined direction, but also these components are common devices in the field and can be directly used without the need to re-manufacture new product structures, saving manufacturing costs. In addition, by fixing the first transmission socket 213 to the spin body 10, the optical axis direction of the light rays projected by the first transmission socket 213 can be kept relatively fixed with the carrier 11, so as to reduce the risk of instability of the optical signal caused by the relative shift of the optical axis direction of the emitted light rays relative to the carrier 11 due to the shaking of the spin body during the spin coating process.

[0078] In one embodiment, the light-emitting light source 211 is arranged on one side of the spin body 10 and is independent of the spin body 10. That is, the light-emitting light source 211 is arranged separately from the spin body 10, and no support plate is arranged on the spin body 10 to carry the light-emitting light source 211.

[0079] In one embodiment, the image processing assembly 223 is arranged on one side of the spin body 10 and is independent of the spin body 10. That is, the image processing assembly 223 is arranged separately from the spin body 10 and no support plate is arranged on the spin body 10 to support the image processing assembly 223. Specifically, the image processing assembly 223 and the image processing assembly 223 can be arranged on the same side of the spin body 10; or the image processing assembly 223 and the image processing assembly 223 are arranged on opposite sides of the spin body 10.

[0080] The above scheme, by arranging the light emitting source 211 independently relative to the spin body 10, compared with the scheme of arranging the light emitting source 211 on the spin body 10, reduces the obstruction caused by the large volume light emitting source 211 to the opening process of the cover 13 of the spin body 10; and can reduce the large volume light emitting source 211 crushing the spin body 10 and / or the light emitting source 211 shielding part of the spin body 10, affecting the performance of the spin body 10. In addition, there is no need to integrate the light emitting source 211 again in the related process of the spin coating device, the process is simple, and the cost is saved. The spin coating device can take into account the original spin coating function and the detection function of the detection mechanism 20. In addition, the relative position of the light emitting source 211 and the spin body 10 is not limited, and any position of the light emitting source 211 and the spin body 10 can be selected.

[0081] In one embodiment, in combination with Figure 3 and Figure 4 The spin body 10 includes a shell 12 and a cover 13. The shell 12 is arranged to form a hollow cavity. The cover 13 is arranged on the shell 12 and cooperates with the hollow cavity to form a containing cavity 14. The carrier 11 is arranged in the containing cavity 14. The cover 13 has a light transmission hole 131, the orthographic projection of the light transmission hole 131 along the height direction Y of the shell 12 falls on the carrier 11; the first transmission socket 213 is connected to the light transmission hole 131 and projects the emitted light to the carrier 11 through the light transmission hole 131.

[0082] The shell 12 is an open-ended cavity structure, the shell 12 has a bottom wall and a side wall arranged on the bottom wall; the side wall is connected to the bottom wall along the circumferential direction of the bottom wall and cooperates with the bottom wall to form a hollow cavity, and the end opposite to the bottom wall of the shell 12 forms an open end. The cover 13 is detachably connected to the open end of the shell 12 to cover or expose the open end of the shell 12, so as to facilitate the replacement or maintenance of other device structures in the spin body 10 at any time.

[0083] The cover 13 can be plate-shaped. The light-transmitting hole 131 penetrates the upper and lower surfaces of the cover 13 along the thickness direction of the cover 13. The first transmission socket 213 is connected to the light-transmitting hole 131 in a plug-in manner, and the light outlet of the first transmission socket 213 is arranged opposite the light-transmitting hole 131, so that the light emitted from the light outlet of the first transmission socket 213 is projected to the bearing member 11 through the light-transmitting hole 131.

[0084] In some embodiments, the light-transmitting hole 131 can fall on the central region of the bearing member 11 in the orthographic projection along the height direction Y of the shell 12. Wherein, if the bearing member 11 is circular, the central region of the bearing member 11 refers to the region close to the center of the circle. If the bearing member 11 is rectangular or other polygonal shape, the central region of the bearing member 11 refers to the region close to the intersection of the diagonals.

[0085] In some embodiments, please continue to refer to Figure 3 , the spin coating body 10 further comprises a sealing ring 17, which is annular and arranged around the accommodating cavity 14 between the shell 12 and the cover 13, for sealing the connection gap between the shell 12 and the cover 13, improving the sealing performance of the accommodating cavity 14, and facilitating rapid vacuumization in the accommodating cavity 14.

[0086] In the above embodiments, by making the spin coating body 10 comprise the shell 12 and the cover 13 detachably connected to the shell 12, an accommodating cavity 14 can be formed in the spin coating body 10 to improve the sealing performance of the accommodating cavity 14 and reduce the risk of solution splashing from the surface of the to-be-coated member 200 to the outside of the spin coating body 10 during the spin coating process. Moreover, it is convenient to overhaul and replace the related parts inside the spin coating body 10. In addition, by providing the light-transmitting hole 131 on the cover 13 and connecting the first transmission socket 213 to the light-transmitting hole 131, the connection of the first transmission socket 213 and the cover 13 is realized, and the light transmitted by the first transmission socket 213 can be projected to the surface of the bearing member 11 through the light-transmitting hole 131. This connection scheme does not need to set other fixing members, nor does it need to use welding process to realize the connection, thereby saving the cost.

[0087] In one embodiment, please refer to Figures 5 to 8 , Figure 5 for the overall structure schematic diagram of the spin coating device 100 provided by another embodiment of the present application; Figure 6 for Figure 5 the top view of the spin coating device 100; Figure 7 for Figure 6 the A-A sectional view of the spin coating device 100; Figure 8 for Figure 6A B-B sectional view of the spin coating device 100. The spin coating device 100 further comprises a vacuum drying mechanism 30. The vacuum drying mechanism 30 comprises a first vacuum pump 31. The first vacuum pump 31 is in communication with the accommodating cavity 14. The first vacuum pump 31 is configured to vacuumize the accommodating cavity 14, so as to perform vacuum drying treatment on the solution coated on the surface of the to-be-coated workpiece 200 after the solution is uniformly coated on the surface of the to-be-coated workpiece 200, so as to volatilize part of the solvent on the surface of the to-be-coated workpiece 200.

[0088] In some embodiments, after the solution is uniformly coated on the surface of the to-be-coated workpiece 200, the vacuum drying mechanism 30 is started to quickly vacuumize the accommodating cavity 14. In some embodiments, the vacuum degree in the accommodating cavity 14 can be selected to be less than 10 Pa within 10 seconds, so that a large amount of solvent is volatilized to form an intermediate phase, thereby assisting the subsequent annealing process to crystallize.

[0089] In some embodiments, the vacuum drying mechanism 30 further comprises a first vacuum pipeline 32. One end of the first vacuum pipeline 32 is in communication with the first vacuum pump 31. The other end of the first vacuum pipeline 32 is in communication with the accommodating cavity 14. In some embodiments, the first vacuum pipeline 32 can be a vacuum pipe which is different from the spin coating body 10. The vacuum pipe can be a flexible pipe or a rigid pipe. Of course, the first vacuum pipeline 32 can also be a channel which is formed on the side wall and / or the bottom wall of the housing 12. One end of the channel extends to the outer wall of the housing 12 and is in communication with the first vacuum pump 31. The other end of the channel extends to the inner wall of the housing 12 and is in communication with the accommodating cavity 14.

[0090] The above scheme further comprises the vacuum drying mechanism 30 to vacuumize the accommodating cavity 14. Thus, after the to-be-coated workpiece 200 is treated by the spin coating body 10, the to-be-coated workpiece 200 can continue to be dried in the spin coating body 10. The to-be-coated workpiece 200 can be quickly dried, so that the to-be-coated workpiece 200 can be dried in an effective time. Moreover, the to-be-coated workpiece 200 after the spin coating treatment does not need to be transferred, so that the transfer step is saved, the process is simplified, and the risk of uneven spin coating caused by shaking of the to-be-coated workpiece 200 during the transfer process is reduced. In addition, the vacuum drying mechanism 30 is integrated on the spin coating body 10, so that the original two sets of equipment are integrated into one set of equipment, the integration degree of the product is improved, and the floor area of the product is reduced.

[0091] In one embodiment, the vacuum drying mechanism 30 can be combined with the spin coating mechanism 20. Figure 7The spin coating body 10 further comprises a driving member 15 and a rotating shaft 16. The driving member 15 is connected with the rotating shaft 16, and the rotating shaft 16 is connected with the bearing member 11. The driving member 15 is configured to drive the rotating shaft 16 to rotate, so as to drive the bearing member 11 to rotate synchronously during the rotation of the rotating shaft 16. In a specific embodiment, the driving member 15 controls the rotating shaft 16 to rotate at a set speed, so as to uniformly coat the solution on the surface of the to-be-coated member 200 on the surface of the to-be-coated member 200. The driving member 15 can be a servo motor.

[0092] In this embodiment, the spin coating device 100 further comprises a controller (not shown in the figure). The controller is electrically connected with the driving member 15, the first vacuum pump 31 and the detection mechanism 20, and controls the detection mechanism 20 and the driving member 15 to work simultaneously. Alternatively, the controller controls the detection mechanism 20 and the first vacuum pump 31 to work simultaneously. The “simultaneously work” means that one component starts to work, and the other component also starts to work synchronously. The controller controls the light-emitting light source 211, the light processing assembly 22 and the first vacuum pump 31 to work simultaneously. That is, during the vacuum drying process, the light-emitting light source 211 continuously emits emitted light to the surface of the to-be-coated member 200, so as to perform in-situ photoluminescence test in real time.

[0093] The above scheme can make the detection mechanism 20 detect the spin coating information of the surface of the to-be-coated member 200 in the spin coating process, so as to obtain more related information, and facilitate subsequent research on the film forming mechanism of the to-be-coated member 200 and optimization of the film forming quality. Alternatively, the controller controls the detection mechanism 20 and the first vacuum pump 31 to work simultaneously, so as to continue to use the detection mechanism 20 to detect the spin coating information of the to-be-coated member 200 in the vacuum drying process. In this way, the spin coating information of the to-be-coated member 200 in the spin coating process and the vacuum drying process can be detected, and the detection of the spin coating information of the to-be-coated member 200 in the spin coating process and the vacuum drying process is completed by the same detection mechanism 20. Compared with the scheme in which the detection of the spin coating process and the detection of the vacuum drying process correspond to one detection mechanism 20 respectively, the number of detection mechanisms 20 is reduced, the cost is reduced, and the product integration is improved. Moreover, the to-be-coated member 200 does not need to be transferred for multiple times, and the risk of uneven spin coating caused by the to-and-fro transfer of the to-be-coated member 200 is further reduced.

[0094] In one embodiment, the detection mechanism 20 can be combined with the spin coating device 100. Figure 7The carrier 11 has a carrier surface and a non-carrier surface; the carrier 11 has at least one vacuum suction hole 111 penetrating through the carrier surface and the non-carrier surface. The spin coating device 100 further comprises a vacuum suction mechanism, which comprises a second vacuum pump (not shown in the figure), and the second vacuum pump is in communication with the vacuum suction hole 111. When the second vacuum pump is working, the vacuum suction hole 111 in communication with the second vacuum pump generates a suction force, so that the to-be-coated object 200 is tightly adsorbed on the carrier surface of the carrier 11 when the to-be-coated object 200 is arranged on the carrier 11.

[0095] The vacuum suction hole 111 can be distributed at a central position of the carrier 11 or an edge position of the carrier 11. The number of the vacuum suction hole 111 can be one or more, and the plurality of vacuum suction holes 111 can be uniformly distributed on the carrier 11.

[0096] In some embodiments, the carrier 11 can have one vacuum suction hole 111. The ratio of the cross-sectional area of the vacuum suction hole 111 to the cross-sectional area of the carrier 11 is greater than 0.5 and less than 1; for example, the ratio can be 0.6, 0.7, 0.8 or 0.9. In this way, by increasing the cross-sectional area of the vacuum suction hole 111, the vacuum suction force can be increased to improve the stability of the to-be-coated object 200 on the carrier 11.

[0097] In some embodiments, the vacuum suction mechanism further comprises a second vacuum pipeline 41, one end of the second vacuum pipeline 41 is in communication with the second vacuum pump; the other end of the second vacuum pipeline 41 is in communication with the vacuum suction hole 111. The second vacuum pipeline 41 can be a vacuum pipe different from the spin coating body 10, and the vacuum pipe can be a hose or a hard pipe. Of course, in other embodiments, part of the second vacuum pipeline 41 can also be a channel structure formed in the rotating shaft 16, one end of the channel structure extends to the end surface of one end of the rotating shaft 16 in the axial direction of the rotating shaft 16 and is in communication with the vacuum suction hole 111, and the other end of the channel structure extends to the outer wall surface of the rotating shaft 16 to communicate with the second vacuum pump.

[0098] In some embodiments, the second vacuum pump and the first vacuum pump 31 can be the same vacuum pump; to simplify the structure and reduce the cost.

[0099] When the second vacuum pump and the first vacuum pump 31 are the same vacuum pump (for ease of understanding, referred to as a shared vacuum pump below), the vacuum drying mechanism 30 further includes a first control valve connected to the controller and arranged in the first vacuum pipeline 32, and the first control valve is configured to control the communication and closing of the first vacuum pipeline 32. The controller controls the first control valve to open to communicate the shared vacuum pump and the containing cavity 14 to perform the vacuum drying process after the spin coating process is completed. When the shared vacuum pump is started, the shared vacuum pump can be in communication with the second vacuum pipeline 41 at all times to continuously vacuum adsorb the to-be-coated workpiece 200 on the carrier 11.

[0100] The above embodiment can not only improve the adsorption force between the to-be-coated workpiece 200 and the carrier 11 by providing the spin coating device 100 with the vacuum adsorption mechanism, but also use one pump for multiple purposes by using the first vacuum pump 31 and the second vacuum pump as the same vacuum pump, thereby reducing the number of vacuum pumps, reducing the cost, and simplifying the product structure.

[0101] In one embodiment, the spin coating information further includes crystallization information of the solution on the surface of the to-be-coated workpiece 200. The crystallization information includes uniformity of crystallization, size of crystalline particles, and the like during crystallization.

[0102] The above scheme can synchronously obtain the crystallization information of the surface of the to-be-coated workpiece 200 in the spin coating process and the vacuum drying process by the detection mechanism 20, thereby increasing relevant data information in the crystallization process and being more conducive to later research on the film formation mechanism of the to-be-coated workpiece 200 and optimization of film formation quality.

[0103] In one embodiment, the to-be-coated workpiece 200 includes a battery piece. The battery piece can be a crystalline silicon battery piece. After the image processor collects the fluorescent image of the battery piece, a mature detection algorithm in the related art can be used to analyze and judge defects such as short circuit, scratch, and dirt of the battery piece.

[0104] In this embodiment, the spin coating device 100 can perform uniform coating of the battery piece while detecting the spin coating information of the battery piece in the spin coating process by the detection mechanism 20, that is, the spin coating information of the battery piece in the spin coating process is obtained without transferring the battery piece, thereby reducing the risk of uneven spin coating of the battery piece due to transfer and affecting the detection result.

[0105] In one embodiment, a solar cell production system is also provided, and the solar cell production system includes the spin coating device described above. The specific structure and functions of the spin coating device can be referred to the related description above.

[0106] The solar cell production system provided by the embodiment comprises a spin coating device 100, which can utilize a spin coating main body 10 to perform uniform coating treatment on a to-be-coated piece 200, and further integrates a detection mechanism 20 on the spin coating device 100, so that the spin coating information of the to-be-coated piece 200 can be further detected by the detection mechanism 20 during the uniform coating treatment of the to-be-coated piece 200, to obtain the relevant information of the to-be-coated piece 200 in the spin coating process, thereby being more conducive to the later research on the film forming mechanism of the to-be-coated piece 200, the optimization of the film forming quality, and the enrichment of the functions of the spin coating device 100. Moreover, the to-be-coated piece 200 can be detected without being transferred after the spin coating treatment, thereby reducing the risk of affecting the detection result due to the uneven spin coating of the to-be-coated piece 200 caused by the transfer, and the test result is more stable. In addition, by connecting the light source assembly 21 of the detection mechanism 20 to the spin coating main body 10, the optical axis direction of the emitted light of the light source assembly 21 can be kept relatively fixed with the carrier 11, thereby reducing the risk of the optical axis direction of the emitted light relatively deviating from the carrier 11 due to the shaking of the spin coating main body 10 during the uniform coating treatment, and causing the instability of the optical signal. In addition, a bracket structure for placing the light source assembly 21 is not additionally required, thereby simplifying the structure and reducing the cost.

[0107] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the claims and the specification of the present application. Especially, as long as there is no structural conflict, each technical feature mentioned in each embodiment can be combined in any way. The present application is not limited to the specific embodiments disclosed in the text, but includes all technical solutions falling within the scope of the claims.

Claims

1. A spin coating apparatus characterized by comprising: The application relates to a spin coating device. The spin coating device comprises a spin coating body and a detection mechanism. The spin coating body comprises a carrier configured to carry a to-be-coated object and perform uniform coating treatment on the to-be-coated object during rotation. The detection mechanism comprises a light source assembly and a light processing assembly. The light source assembly is connected to the spin coating body and configured to generate emitted light and project the emitted light to the carrier. The light processing assembly is configured to process reflected light reflected back after absorbing the emitted light to detect spin coating information of the to-be-coated object. The spin coating information comprises spin coating defects.

2. The spin coating device according to claim 1, wherein an optical axis direction of the emitted light projected to the carrier by the light source assembly is perpendicular to the carrier.

3. The spin coating device according to claim 1, wherein the detection mechanism is arranged outside the spin coating body.

4. The spin coating device according to any one of claims 1-3, wherein the light source assembly comprises a light emitting source configured to generate the emitted light, a first light transmission member having a first end connected to the light emitting source and configured to transmit the emitted light, and a first transmission socket connected to the spin coating body and connected to a second end of the first light transmission member and configured to project the emitted light transmitted by the first light transmission member to the carrier.

5. The spin coating device according to claim 4, wherein the light emitting source is arranged on one side of the spin coating body and independent of the spin coating body.

6. The spin coating device according to claim 5, wherein the spin coating body comprises a housing forming a hollow cavity, and a cover detachably connected to the housing and cooperating with the hollow cavity to form a containing cavity in which the carrier is arranged. The cover has a light transmission hole, a projection of the light transmission hole along a height direction of the housing falls on the carrier, and the first transmission socket is connected to the light transmission hole and projects the emitted light to the carrier through the light transmission hole.

7. The spin coating device according to claim 1, wherein the spin coating body forms a containing cavity, and the carrier is arranged in the containing cavity. The spin coating device further comprises a vacuum drying mechanism comprising a first vacuum pump in communication with the containing cavity and configured to perform vacuumization on the containing cavity.

8. The spin coating device according to claim 7, wherein the spin coating body further comprises a driving member connected to the carrier and configured to drive the carrier to rotate. The spin coating device further comprises a controller connected to the driving member, the first vacuum pump and the detection mechanism respectively and configured to control the detection mechanism and the driving member to work simultaneously or control the detection mechanism and the first vacuum pump to work simultaneously.

9. The spin coating device according to claim 7, wherein the carrier has a carrier surface and a non-carrier surface, and the carrier has at least one vacuum adsorption hole penetrating through the carrier surface and the non-carrier surface. ​ ​ ​ ​ ​ ​ ​ ​ The spin coating device further comprises a vacuum adsorption mechanism, the vacuum adsorption mechanism comprises a second vacuum pump, the second vacuum pump is communicated with the vacuum adsorption hole; and the second vacuum pump is the same vacuum pump as the first vacuum pump.

10. The spin coating device according to any one of claims 7-9, wherein, The spin coating information further comprises crystallization information of the solution on the surface of the to-be-coated piece.

11. The spin coating device according to claim 1, wherein, The to-be-coated piece comprises a battery piece.

12. A solar cell production system characterized by comprising: A spin coating device according to any one of claims 1-11.

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