Chip carrying device and chip testing equipment

Abstract

The utility model provides a chip carrying device and chip testing equipment, and relates to the technical field of chip testing. The adsorption device comprises an adsorption piece, a first connecting assembly and a first driving piece, the adsorption piece is provided with a suction nozzle, the adsorption piece and the first driving piece are arranged in a staggered mode in the extending direction of the first driving piece, the first connecting assembly is connected with the adsorption piece, and the first driving piece is arranged to controllably drive the first connecting rod assembly to drive the adsorption piece to move in the direction close to a detected chip. And the suction nozzle adsorbs the tested chip. According to the technical scheme, the first driving part and the adsorption part are equivalently designed in a staggered mode, namely, the moving center of the adsorption part is biased, the key position right opposite to the adsorption part is reserved, more mechanism arrangement space is reserved, other mechanisms such as a visual detection mechanism can be arranged, and the mechanism arrangement efficiency is improved. Therefore, the layout limitation of the chip carrying device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip testing technical field, in particular to a kind of chip handling device and chip testing equipment. BACKGROUND

[0002] The turret conveying mechanism refers to a high-precision motion device that directly drives a multi-station turret with a direct-drive motor. It achieves high-speed indexing positioning through zero-backlash transmission and is commonly used in semiconductor packaging, precision assembly, and other applications.

[0003] The current turret conveying mechanism drives the indexing disc to rotate through the rotation of the direct-drive motor. The pick-and-place system on the indexing disc generally uses a vacuum suction nozzle, which is installed on the indexing disc. When it is necessary to adsorb the measured chip, the suction nozzle is moved downward by the pressing mechanism, thereby adsorbing the measured chip below. The suction nozzle is often used as a critical position, and various mechanisms need to be arranged frequently. However, the pressing mechanism and the suction nozzle in the prior art are in concentric position, which means that the pressing mechanism and the suction nozzle are on a straight line, causing the critical position above the suction nozzle to be occupied, resulting in a limited layout of the entire mechanism. Therefore, it is urgent to design a chip handling device that can improve the overall equipment layout limitations. SUMMARY

[0004] An object of the present utility model is to provide a chip handling device that solves the technical problem of limitations in the overall layout of the chip handling device in the prior art.

[0005] A further object of the present utility model is to improve the flexibility of the overall chip handling device.

[0006] Another further object of the present utility model is to provide a chip testing equipment with a chip handling device.

[0007] In particular, the present utility model provides a chip handling device, comprising:

[0008] A turret comprising a driving mechanism and a turntable assembly connected to the driving mechanism, the turntable assembly being arranged to rotate under the drive of the driving mechanism;

[0009] A plurality of adsorption devices arranged along the periphery of the turntable assembly, the plurality of adsorption devices being arranged to rotate with the turntable assembly;

[0010] Each adsorption device comprises a suction member, a first connection assembly, and a first driving member. The suction member has a suction nozzle and is arranged offset from the first driving member along its extension direction. The first connection assembly is connected to the suction member. The first driving member is arranged to drive the first connection assembly to move the suction member towards the measured chip, so that the suction nozzle adsorbs the measured chip.

[0011] Optionally, the first connecting assembly comprises:

[0012] a pressing structure arranged in alignment with the first driving shaft of the first driving member;

[0013] a connecting member connected with the pressing structure and the suction accessory, the arrangement direction of the connecting member being perpendicular to the arrangement direction of the pressing structure.

[0014] Optionally, each of the suction devices further comprises:

[0015] a mounting block connected with the rotating disc assembly, the mounting block being provided with a first mounting hole and a second mounting hole, the pressing structure being movably mounted in the first mounting hole, and the suction accessory being movably mounted in the second mounting hole.

[0016] Optionally, the pressing structure comprises:

[0017] a shaft sleeve at least partially located in the first mounting hole;

[0018] a pressing shaft penetrating through the shaft sleeve and being movable relative to the shaft sleeve;

[0019] a pressing block mounted at the end of the pressing shaft and used for abutting against the first driving member.

[0020] Optionally, the shaft sleeve has a protruding protrusion, and the pressing structure further comprises:

[0021] a resilient member sleeved on the pressing shaft, one end of the resilient member abutting against the protrusion, and the other end of the resilient member abutting against the pressing block, the resilient member being arranged to be in a contracted state when the first driving member drives the connecting assembly to move the suction accessory towards the direction of approaching the measured chip, so as to reset the first connecting assembly and the suction accessory when the first driving member withdraws the driving force.

[0022] Optionally, each of the suction devices further comprises:

[0023] a reset sensor mounted on the mounting block and used for sensing the position of the connecting member.

[0024] Optionally, each of the suction devices further comprises a rotating mechanism, the rotating mechanism comprising:

[0025] a second driving member arranged in misalignment with the suction accessory along the extension direction of the suction accessory;

[0026] a second connecting assembly connected with the second driving member and the suction accessory respectively, the second driving member being arranged to drive the second connecting assembly to rotate the suction accessory in a controlled manner, so as to adjust the angle of the suction accessory.

[0027] Optionally, the second connecting assembly comprises:

[0028] a first synchronous wheel sleeved on the second driving shaft of the second driving member;

[0029] a second synchronous wheel sleeved on the suction accessory;

[0030] a synchronous belt sleeved on the first synchronous wheel and the second synchronous wheel to follow the rotation of the first synchronous wheel when the second driving member rotates the second driving shaft, thereby driving the second synchronous wheel to rotate the suction accessory.

[0031] Optionally, the chip testing device further comprises:

[0032] a rack, wherein the turret is installed on the rack, and the rack comprises a plurality of columns;

[0033] a visual detection mechanism installed on the columns, wherein each suction accessory is arranged to be able to rotate to a position aligned with the visual detection mechanism along with the turntable assembly, and the visual detection mechanism is located on the same side of the suction accessory as the first driving member.

[0034] In particular, the utility model further provides a chip testing device, which comprises the above chip conveying device.

[0035] In the utility model, the suction device comprises a suction accessory, a first connecting assembly and a first driving member, the suction accessory has a suction nozzle, and is arranged to be staggered along the extension direction of the first driving member, the first connecting assembly is connected with the suction accessory, and the first driving member is arranged to drive the first connecting assembly to move the suction accessory towards the direction of approaching the measured chip in a controlled manner, so that the suction nozzle adsorbs the measured chip. The above technical scheme is equivalent to staggered design of the first driving member and the suction accessory, that is, the first driving member is offset, the key position opposite to the suction accessory is reserved, more mechanism arrangement space is left, some other mechanisms, such as a visual detection mechanism, can be arranged, and therefore the limitation of the layout of the chip conveying device is improved.

[0036] Further, the utility model further comprises a rotating mechanism, the rotating mechanism comprises a second driving member and a second connecting assembly, and the second driving member is arranged to be staggered along the extension direction of the suction accessory. The second connecting assembly is connected with the second driving member and the suction accessory respectively, and the second driving member is arranged to drive the second connecting assembly to rotate the suction accessory in a controlled manner, so as to adjust the angle of the suction accessory. The above technical scheme adds the second driving member to each suction accessory, so that each suction accessory has the circumferential direction adjusting function, the angle of the measured chip can be adjusted individually, and the flexibility of the whole chip conveying device is improved.

[0037] The above, as well as other objects, advantages and features of the present application, will become apparent as the description proceeds. BRIEF DESCRIPTION OF DRAWINGS

[0038] Some specific embodiments of the present application will now be described in detail by way of example with reference to the drawings. The same reference numbers in different drawings identify the same or similar components or parts. It should be understood that the drawings are not necessarily to scale. In the drawings:

[0039] Figure 1 is a schematic structural view of a chip handling device according to one embodiment of the present application;

[0040] Figure 2 is a schematic structural view of a chip handling device according to one embodiment of the present application; Figure 1 is a schematic sectional view of a suction device of the chip handling device shown in

[0041] Figure 3 is a schematic sectional view of a suction device of the chip handling device shown in Figure 2 is a schematic enlarged view of part A in

[0042] Figure 4 is a schematic structural view of a suction device according to one embodiment of the present application; Figure 2

[0043] Figure 5 is a schematic structural view of a vision detection mechanism and a suction accessory according to one embodiment of the present application.

[0044] Reference signs:

[0045] 100 - chip handling device, 10 - turret, 20 - suction device, 30 - rack, 40 - vision detection mechanism, 11 - driving mechanism, 12 - turntable assembly, 121 - upper index plate, 122 - lower index plate, 21 - suction accessory, 211 - suction nozzle, 22 - first driving member, 221 - first driving shaft, 23 - first connecting assembly, 231 - connecting member, 232 - pressing-down structure, 233 - pressing-down shaft, 234 - shaft sleeve, 235 - elastic member, 236 - pressing-down block, 237 - protruding block, 24 - mounting block, 241 - first mounting hole, 242 - second mounting hole, 25 - reset sensor, 26 - spline structure, 27 - second driving member, 271 - second driving shaft, 28 - second connecting assembly, 281 - synchronous belt, 282 - first synchronous pulley, 283 - second synchronous pulley, 31 - stand column. DETAILED DESCRIPTION

[0046] ​The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary, and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0047] In the description of the present application, it should be understood that the terms "upper", "lower", and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0048] The terms "first", "second", etc. are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features, i.e. one or more of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited. When a certain feature "includes or contains" a certain or certain features, unless otherwise specifically described, it indicates that other features and can further include other features are not excluded.

[0049] Unless otherwise specifically defined and limited, the terms "connection", "installation", and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. Those skilled in the art should be able to understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0050] Unless otherwise limited, all terms (including technical terms and scientific terms) used in the description of the present embodiment have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0051] Figure 1 is a schematic structural view of a chip handling device 100 according to an embodiment of the present application, Figure 2 is Figure 1 is a schematic sectional view of the suction device 20 of the chip handling device 100 shown in Figure 3 is Figure 2 is a schematic enlarged view of part A in Figures 1 to 3As shown, in one specific embodiment, the chip handling device 100 comprises a turret 10 and a plurality of suction devices 20, the turret 10 comprises a driving mechanism 11 and a rotating disc assembly 12 connected with the driving mechanism 11, the rotating disc assembly 12 is arranged to rotate under the driving of the driving mechanism 11. The plurality of suction devices 20 are arranged along the periphery of the rotating disc assembly 12, and the plurality of suction devices 20 are arranged to rotate with the rotating disc assembly 12. Each suction device 20 comprises a suction member 21, a first connecting assembly 23 and a first driving member 22, the suction member 21 has a suction nozzle 211, and is arranged to be staggered with the first driving member 22 along the extension direction of the first driving member 22, the first connecting assembly 23 is connected with the suction member 21, and the first driving member 22 is arranged to drive the first connecting assembly to move the suction member 21 towards the measured chip in a controlled manner, so that the suction nozzle 211 adsorbs the measured chip. It can be understood that when the suction member 21 rotates to a position aligned with the measured chip, the first driving member 22 drives the suction member 21 to move towards the measured chip.

[0052] This embodiment is equivalent to staggered design of the first driving member 22 and the suction member 21, that is, the first driving member 22 is biased, the key position opposite to the suction member 21 is reserved, more mechanism arrangement space is left, and some other mechanisms such as visual detection mechanism can be arranged, so that the limitation of the layout of the chip handling device 100 is improved.

[0053] In some embodiments, the suction member 21 can move to above the suction member 21 following the rotating disc assembly 12, and the first driving member 22 drives the suction member 21 to press down, so as to adsorb the measured chip. The first driving member 22 and the suction member 21 are arranged to be staggered along the vertical direction.

[0054] In some embodiments, the rotating disc assembly 12 comprises an upper index plate 121 and a lower index plate 122, the upper index plate 121 is located above the lower index plate 122, and the plurality of suction members 21 are arranged along the periphery of the lower index plate 122. The first driving members 22 are arranged along the periphery of the upper index plate 121. The upper index plate 121 and the lower index plate 122 are synchronous rotating following the driving structure, so as to realize the synchronous rotation of the first driving members 22 and the suction members 21. The first driving member 22 is a direct drive motor, which is connected with the upper index plate 121 and the lower index plate 122 to provide rotary power for the upper index plate 121 and the lower index plate 122.

[0055] In some embodiments, the first connecting assembly 23 comprises a pressing structure 232 and a connecting member 231, the pressing structure 232 is arranged to be aligned with the first driving shaft 221 of the first driving member 22. The connecting member 231 is connected with the pressing structure 232 and the suction member 21, and the arrangement direction of the connecting member 231 is perpendicular to the arrangement direction of the pressing structure. It can be understood that the pressing structure 232 is arranged along the vertical direction, and the connecting member 231 is arranged along the horizontal direction, so as to be arranged perpendicularly to the pressing structure 232, seeFigure 2 and Figure 3 .

[0056] In some embodiments, each suction device 20 further comprises a mounting block 24 connected with the rotary table assembly 12, the mounting block 24 is provided with a first mounting hole 241 and a second mounting hole 242, the lower pressing structure 232 is movably installed in the first mounting hole 241, and the suction member 21 is movably installed in the second mounting hole 242. It can be understood that the connecting member 231 is fixed on the suction member 21 and the lower pressing structure 232, when the first driving member 22 drives the lower pressing structure 232 to move downward relative to the first mounting hole 241, the suction member 21 is driven to move downward relative to the second mounting hole 242 through the connecting member 231, so as to suck the measured chip below.

[0057] In some embodiments, the lower pressing structure 232 comprises a shaft sleeve 234, a lower pressing shaft 233 and a lower pressing block 236, at least part of the shaft sleeve 234 is located in the first mounting hole 241. The lower pressing shaft 233 is arranged in the shaft sleeve 234 and can move relative to the shaft sleeve 234. The lower pressing block 236 is installed at the end of the lower pressing shaft 233 and is used to abut against the first driving member 22. It can be understood that when the first driving member 22 abuts against the lower pressing block 236, the lower pressing shaft 233 of the lower pressing structure 232 is driven to move downward relative to the shaft sleeve 234, and the shaft sleeve 234 is fixed. Referring to Figure 3 , there is a gap between the first driving member 22 and the lower pressing block 236, and when the first driving shaft 221 of the first driving member 22 moves downward by a certain distance, it will abut against the lower pressing block 236.

[0058] This embodiment is equivalent to adopting a double-shaft parallel structure, using the connecting member 231 to connect the suction member 21 and the lower pressing shaft 233, wherein the lower pressing shaft 233 serves as the driving shaft, the lower pressing block 236 at the top of the lower pressing shaft 233 directly contacts the first driving member 22, and the lower pressing shaft 233 transmits the pressing force to the suction member 21 through the connecting member 231, so as to realize the eccentric pressing function. In order to prevent uncertain circumferential direction movement of the lower pressing shaft 233 and the suction member 21, the lower pressing shaft 233 and the suction member 21 are both connected with the connecting member 231 by using a ball spline structure. The design of this eccentric structure can leave space above the suction member 21, so as to add other functions above the suction member 21. The concentric design of the lower pressing structure 232 and the suction member 21 of the traditional turret 10 mechanism does not have this advantage.

[0059] In some embodiments, the shaft sleeve 234 has a protruding bump 237, and the pressing structure 232 further comprises a resilient member 235, which is sleeved on the pressing shaft 233 and abuts against the bump 237 at one end and the pressing block 236 at the other end. The resilient member 235 is arranged to be in a contracted state when the first driving member 22 drives the first connecting assembly 23 to move the suction member 21 towards the measured chip, so as to reset the first connecting assembly 23 and the suction member 21 when the first driving member 22 withdraws the driving force. When the first driving shaft 221 of the first driving member 22 drives the suction member 21 to press the chip, the first driving shaft 221 of the first driving member 22 moves upward to reset, at which time the resilient member 235 drives the pressing shaft 233 to move upward by its elastic property, so as to move the suction member 21 upward to reset the suction member 21. Here, the resilient member 235 is a spring. In other embodiments, the resilient member 235 can also be a component having the same elastic property as the spring.

[0060] In some embodiments, each suction device 20 further comprises a reset sensor 25, which is installed on the mounting block 24 and used to sense the position of the connecting member 231, as shown in Figure 3 . This embodiment can sense whether the connecting member 231 is reset by the reset sensor 25. If the connecting member 231 is reset, it indicates that the suction member 21 is reset, and a reset signal can be transmitted to the first driving member 22 of the turret 10, so that the first driving member 22 drives the rotating disc assembly 12 to rotate, thereby moving the suction rod.

[0061] In the prior art, the suction member 21 of the suction device 20 is generally hard-connected to the rotating disc assembly 12 by threads, and the suction member 21 and the rotating disc assembly 12 form an integral body, which can only rotate as a whole and each individual suction member 21 does not have an adjusting function. When the measured chip adsorbed on the suction member 21 has an angle deviation due to various reasons, this structure cannot have an angle correction function, and when the measured chip on the suction member 21 needs to be rotated at different angles for detection, this structure also cannot achieve this function.

[0062] Figure 4 is Figure 2 a schematic structural view of the suction device 20. As Figure 4 shown, and referring to Figure 2 and Figure 3In view of the defects in the prior art, in the embodiment, each adsorption device 20 further comprises a rotating mechanism, which comprises a second driving member 27 and a second connecting assembly 28. The second driving member 27 is arranged in a staggered manner along the extension direction of the suction member 21. The second connecting assembly 28 is connected with the second driving member 27 and the suction member 21 respectively. The second driving member 27 is configured to drive the second connecting assembly 28 to rotate the suction member 21 to adjust the angle of the suction member 21. Here, the first driving member 22 is a driving member for driving the suction member 21 to move downward, and the second driving member 27 is a driving member for driving the suction member 21 to rotate in the R direction. The second driving member 27 is installed on the lower indexing disc 122, and the driver for driving the second driving member 27 is also placed on the lower indexing disc 122. The coding line and the power line are directly connected with the driver, which not only simplifies the line, but also shortens the length of the line, and to some extent, avoids the motor step loss problem caused by the line problem.

[0063] In the embodiment, the second driving member 27 is added to each suction member 21, so that each suction member 21 has a circumferential direction adjustment function. In actual work, the angle of the measured chip can be adjusted individually according to the specific situation, which solves the problem that the measured chip adsorbed by each suction member 21 cannot be individually rotated and adjusted when the turret 10 is conveying. The improved adsorption device 20 is more flexible and can cope with more working situations.

[0064] In the embodiment, not only the first driving member 22 is biased, but also the second driving member 27 is biased, so that the space at the top of the suction member 21 can be reserved for other mechanisms.

[0065] In some embodiments, the second connecting assembly 28 comprises a first synchronous wheel 282, a second synchronous wheel 283 and a synchronous belt 281. The first synchronous wheel 282 is sleeved on the second driving shaft 271 of the second driving member 27, and the second synchronous wheel 283 is sleeved on the suction member 21. The synchronous belt 281 is sleeved on the first synchronous wheel 282 and the second synchronous wheel 283, so as to rotate with the first synchronous wheel 282 when the first synchronous wheel 282 rotates with the second driving shaft 271 of the second driving member 27, thereby driving the second synchronous wheel 283 to rotate the suction member 21. In the embodiment, the length of the synchronous belt 281 can be designed to adapt to the distance between the second driving member 27 and the suction member 21. In other embodiments, the second connecting assembly 28 can also be designed in other structures, such as the matching structure of gear and rack. The second driving member 27 is a driving motor.

[0066] The embodiment adds a rotating mechanism to each suction accessory 21, and the second driving member 27 is connected to the suction accessory 21 in a synchronous wheel connection manner, so as to facilitate the arrangement of the second driving member 27, and the second driving member 27 can transmit power to the suction accessory 21 through a synchronous belt 281 when moving, so as to realize the circumferential direction positioning of the suction nozzle 211. The second driving member 27 interacts with a visual inspection system and other control systems, and can realize the accurate positioning of the measured chip.

[0067] In some embodiments, the second connecting assembly 28 further comprises a spline structure 26, the spline structure 26 comprises a spline sleeve connected with the second synchronous wheel 283, the spline sleeve is connected with the suction accessory 21, and the suction accessory 21 is arranged to be able to rotate with the spline sleeve and to be able to move up and down relative to the spline sleeve. The second synchronous wheel 283 is fixed on the spline sleeve through a fixing member. The embodiment can realize that the second synchronous wheel 283 can drive the suction accessory 21 to rotate, and can realize that the suction accessory 21 can move up and down relative to the second synchronous wheel 283 under the driving of the first driving member 22.

[0068] Figure 5 is a schematic structural view of a visual inspection mechanism 40 and a suction accessory 21 according to an embodiment of the present application. As shown in Figure 5 In some embodiments, the chip handling device 100 further comprises a rack 30 and a visual inspection mechanism 40, the turret 10 is installed on the rack 30, and the rack 30 comprises a plurality of columns 31. The visual inspection mechanism 40 is installed on the column 31, each suction accessory 21 is arranged to be able to rotate with the rotating disc assembly 12 to a position aligned with the visual inspection mechanism 40, and the visual inspection mechanism 40 and the first driving member 22 are located on the same side of the suction accessory 21. It can be understood that the embodiment reserves a position at the top of the suction accessory 21, and the visual inspection mechanism 40 is installed at the top of the suction accessory 21, so as to obtain the actual position of the measured chip. When it is judged according to the actual position of the measured chip that the position of the measured chip needs to be adjusted, the rotating mechanism drives the suction accessory 21 to rotate, so as to adjust the position of the measured chip.

[0069] The embodiment further provides a chip testing equipment, which comprises the chip handling device 100.

[0070] At this point, those skilled in the art should recognize that although the present application has been shown and described in detail in the above embodiments, many other variations or modifications can be directly determined or deduced according to the disclosure of the present application without departing from the spirit and scope of the present application. Therefore, the scope of the present application should be understood and recognized as covering all these other variations or modifications.

Claims

1. A chip handling device, characterized by The application relates to a chip adsorption device, comprising: a turret, comprising a driving mechanism and a rotating disc assembly connected with the driving mechanism, the rotating disc assembly being arranged to rotate under the driving of the driving mechanism; a plurality of adsorption devices, arranged at intervals along the circumferential side of the rotating disc assembly, the plurality of adsorption devices being arranged to rotate with the rotating disc assembly; each of the adsorption devices comprising an adsorption component, a first connecting assembly and a first driving member, the adsorption component having a suction nozzle and being arranged to be staggered with the first driving member along the extension direction of the adsorption component, the first connecting assembly being connected with the adsorption component, and the first driving member being arranged to drive the first connecting assembly to move the adsorption component towards the measured chip so that the suction nozzle adsorbs the measured chip.

2. The chip handling device according to claim 1, characterized in that The first connecting assembly comprises: a pressing structure arranged to be aligned with the first driving shaft of the first driving member; a connecting member connected with the pressing structure and the adsorption component, the arrangement direction of the connecting member being perpendicular to the arrangement direction of the pressing structure.

3. The chip handling device according to claim 2, characterized in that Each of the adsorption devices further comprises: a mounting block connected with the rotating disc assembly, the mounting block being provided with a first mounting hole and a second mounting hole, the pressing structure being movably mounted in the first mounting hole, and the adsorption component being movably mounted in the second mounting hole.

4. The chip handling device according to claim 3, characterized in that The pressing structure comprises: a shaft sleeve located at least partially in the first mounting hole; a pressing shaft penetrating in the shaft sleeve and being movable relative to the shaft sleeve; a pressing block mounted at the end of the pressing shaft and used for abutting against the first driving member.

5. The chip handling device according to claim 4, characterized in that The shaft sleeve has a protruding lug, and the pressing structure further comprises: a resilient member sleeved on the pressing shaft and abutting against the lug at one end and the pressing block at the other end, the resilient member being arranged to be in a contracted state when the first driving member drives the connecting assembly to move the adsorption component towards the measured chip, so as to drive the first connecting assembly to reset and thus drive the adsorption component to reset when the first driving member withdraws the driving force.

6. The chip handling device according to claim 5, characterized in that Each of the adsorption devices further comprises: a reset sensor mounted on the mounting block and used for sensing the position of the connecting member.

7. The chip handling device according to any one of claims 1 to 6, characterized in that Each of the adsorption devices further comprises a rotating mechanism, the rotating mechanism comprising: a second driving member arranged to be staggered with the adsorption component along the extension direction of the adsorption component; a second connecting assembly connected with the second driving member and the adsorption component respectively, the second driving member being arranged to drive the second connecting assembly to rotate the adsorption component so as to adjust the angle of the adsorption component.

8. The chip handling device according to claim 7, characterized in that The second connecting assembly comprises: a first synchronous wheel sleeved on the second driving shaft of the second driving member; a second synchronous wheel sleeved on the adsorption component; a synchronous belt sleeved on the first synchronous wheel and the second synchronous wheel, so as to rotate with the first synchronous wheel when the first synchronous wheel rotates with the second driving shaft of the second driving member, thereby driving the second synchronous wheel to rotate the adsorption component.

9. The chip handling device according to any one of claims 1 to 6, characterized in that The application further comprises: a rack, the turret being mounted on the rack, the rack comprising a plurality of columns. A vision inspection mechanism is mounted on the column, each of the suction attachments is configured to follow rotation of the carousel assembly to a position in alignment with the vision inspection mechanism, and the vision inspection mechanism is located on the same side of the suction attachment as the first drive member.

10. A chip testing apparatus characterized by comprising: A chip handling device comprising a chip handling device as claimed in any of claims 1-9.

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