Spectrometer

Abstract

The utility model discloses a spectrograph, relates to reconstruction type spectrograph field, including the spectrograph, the spectrograph includes the shell, photoelectric detector array and a plurality of light sources, photoelectric detector array and the plurality of light sources are provided in the shell, the shell is provided with the detection light exit, the detection light exit is provided with the light source, the light source is provided with the light source, and the light source is provided with the light source. The plurality of light sources are arranged around the photoelectric detector array, the light sources are used for emitting detection light towards a detection light outlet, and the photoelectric detector array and the light sources are located on the same side of the detection light outlet; reflected light of an object to be detected at the detection light outlet can reach a photosensitive surface of the photoelectric detector array through the detection light outlet, and the photoelectric detector array comprises a detector substrate and a plurality of photoelectric detectors arranged on the detector substrate. The spectrometer provided by the utility model has the advantages of small size, economy and applicability.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of reconstruction type spectrometer, specifically relates to a spectrometer. BACKGROUND

[0002] The reconstruction type spectrometer modulates the incident light through specific optical structure or device, makes different response of light of different wavelengths, then measures these response signals by photoelectric detector, finally extracts the frequency content of unknown spectrum from the measurement results by means of calculation algorithm, realizes the reconstruction of spectrum, and completes the spectral analysis of object.

[0003] The reconstruction type spectrometer includes optical module, photoelectric detector array and calculation module. The optical module sends detection light to the object to be detected, collects the response signal of the object to be detected to the detection light, and transmits the response signal to the photoelectric detector array. The photoelectric detector array receives and measures the response signal. The calculation module extracts the frequency information of the spectrum from the response signal measured by the photoelectric detector array by means of the pre-set calculation algorithm, and reconstructs the spectral characteristics of the object to be detected. By analyzing the reconstructed spectral information, the important information such as chemical composition and physical state of the object to be detected can be obtained.

[0004] How to provide a small volume, economical and applicable reconstruction type spectrometer is pursued in the art. UTILITY MODEL CONTENT

[0005] The utility model aims at solving one of the technical problems in the related art to some extent. Therefore, the utility model provides a spectrometer, which has the advantages of small volume and economy.

[0006] In order to achieve the above purpose, the utility model adopts the following technical scheme in the first aspect:

[0007] A spectrometer, the spectrometer includes a housing, a photoelectric detector array and a plurality of light sources, the photoelectric detector array and a plurality of the light source are arranged in the housing, and a detection light outlet is formed on the housing, wherein a plurality of the light source is arranged around the photoelectric detector array, the light source is used to emit detection light towards the detection light outlet, the photoelectric detector array and the light source are located on the same side of the detection light outlet, and the reflected light of the object to be detected at the detection light outlet can reach the photosensitive surface of the photoelectric detector array through the detection light outlet, and the photoelectric detector array includes a detector substrate and a plurality of photoelectric detectors arranged on the detector substrate.

[0008] Optionally, the plurality of photoelectric detectors on the detector substrate are arranged in multiple rows and multiple columns.

[0009] Optionally, the photoelectric detector comprises a detector body and a plating layer arranged on a light-sensitive surface of the detector body, and the plating layer is capable of providing a spectral resolving parameter by filtering light.

[0010] Optionally, the plurality of photoelectric detectors are divided into a plurality of groups, each group comprising at least one photoelectric detector, the plating layers of photoelectric detectors in different groups provide different spectral resolving parameters, and the plating layers of photoelectric detectors in the same group provide different spectral resolving parameters.

[0011] Optionally, the detector substrate is arranged with four groups of photoelectric detectors, each group comprising four photoelectric detectors, the plating layers of photoelectric detectors in each group provide different spectral resolving parameters, and the plating layers of photoelectric detectors in the same group provide different spectral resolving parameters.

[0012] Optionally, the photoelectric detector array and the light source are arranged on the same side in the shell.

[0013] Optionally, the plurality of light sources are arranged around the photoelectric detector array with a straight line perpendicular to the photoelectric detector array as an axis.

[0014] Optionally, the internal space of the shell is divided by a curved partition plate, the inside of the curved partition plate is a photoelectric detector array accommodating portion, and the outside of the curved partition plate is a light source accommodating portion; the light source is installed in the light source accommodating portion; the photoelectric detector array is installed in the photoelectric detector array accommodating portion; and the light source accommodating portion and the photoelectric detector array accommodating portion are both formed with the detection light outlet.

[0015] Optionally, the light source comprises a light-emitting element and a collimating lens, and the collimating lens is arranged on the light-emitting side of the light-emitting element.

[0016] Optionally, the photoelectric detector array accommodating portion is installed with a focusing lens, and the focusing lens is arranged on the light-sensitive surface side of the photoelectric detector array.

[0017] The spectrometer comprises a shell, a photoelectric detector array and a plurality of light sources, the plurality of light sources are arranged around the photoelectric detector array and on the same side in the shell; the photoelectric detector array comprises a detector substrate and a plurality of photoelectric detectors arranged on the detector substrate; and the photoelectric detector comprises a detector body and a plating layer arranged on a light-sensitive surface of the detector body.

[0018] The multiple light sources are responsible for emitting detection light to irradiate on an object to be detected, and the object to be detected reflects the detection light to a light-sensitive surface of the photodetector array; the photodetector array is responsible for receiving the reflected light of the object to be detected and measuring a response signal, and the spectrometer extracts frequency information of a spectrum from the response signal measured by the photodetector array by means of a calculation algorithm, reconstructs spectral characteristics of the object to be detected, and determines performance parameters of the object to be detected by analyzing the reconstructed spectral information.

[0019] The spectrometer omits a traditional dispersion element such as a grating or a prism, and provides a spectral calculation parameter in a light filtering manner by using a plating layer of the photodetector; in addition, the plating layer of the spectrometer is directly grown on the light-sensitive surface of the photodetector, and a structure mode in which the plating layer and the photodetector are separated is abandoned. The spectrometer effectively reduces the volume of the spectrometer by reducing optical elements and changing the separated structure of the plating layer and the photodetector into an integrated structure. In addition, the multiple light sources of the spectrometer are arranged in a surrounding mode of the photodetector array, the light sources and the photodetector array are closely combined, and the volume of the spectrometer is further reduced.

[0020] The features and advantages of the present application will be described in detail in the following specific embodiments and drawings. The best mode of the present application or means will be fully described in combination with the drawings, but it is not a limitation on the technical scheme of the present application. In addition, the features, elements and components appearing in each of the following text and drawings are multiple, and different symbols or numbers are marked for convenience of representation, but all represent the same or similar structure or function parts. BRIEF DESCRIPTION OF DRAWINGS

[0021] The present application will be further described below in combination with the drawings:

[0022] Figure 1 The structure of the spectrometer and the light propagation path diagram in one embodiment of the present application.

[0023] Figure 2 The side view structure diagram of the photodetector in one embodiment of the present application.

[0024] Figure 3 The structure diagram of the photodetector array in one embodiment of the present application.

[0025] Figure 4 The film coating flow chart of the photodetector array in one embodiment of the present application.

[0026] Figure 5 The structure diagram of the wafer and the photodetector array in one embodiment of the present application.

[0027] Figure 6 A structure diagram of the spectrometer in one embodiment of the utility model.

[0028] Figure 7 A structure diagram of the spectrometer and a light propagation path diagram in another embodiment of the utility model.

[0029] Figure 8 A structure diagram of the spectrometer and a light propagation path diagram in another embodiment of the utility model.

[0030] Figure 9 Spectral reconstruction error in one embodiment of the utility model.

[0031] Figure 10 Receiving spectrum of the photoelectric detector with different plating layers in the photoelectric detector array in one embodiment of the utility model.

[0032] BRIEF DESCRIPTION OF DRAWINGS

[0033] Wherein, 100, shell;101, curved partition;102, detection light outlet;200, photoelectric detector array;201, photoelectric detector;2011, photoelectric detector photosensitive part;202, plating layer;300, light source;301, light emitting element;302, collimating lens;400, object to be detected;500, focusing lens;600, wafer. DETAILED DESCRIPTION

[0034] The embodiments of the utility model are described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. Based on the embodiments in the embodiments, it is intended to explain the utility model, and cannot be understood as a limitation of the utility model.

[0035] In the specification, "one embodiment" or "an example" or "an example" means that the specific features, structures or characteristics described in connection with the embodiment itself can be included in at least one embodiment of the utility model disclosure. The appearance of the phrase "in one embodiment" at various positions in the specification does not necessarily refer to the same embodiment.

[0036] In the related art, a spectrometer needs to separate light of wavelengths matching application requirements by using a light splitting element, and the type, number and position of the light splitting element need to be adjusted according to actual application requirements, so that the entire spectrometer structure is complex and bulky, and cannot be applied to a limited space. In addition, since the existing spectrometer adopts a structure mode of separating a filter and a photodetector to complete front-end coupling, not only is the light coupling loss large and the light flux reaching the photodetector small, but the internal structure separation mode further increases the complexity and volume of the spectrometer structure, and cannot meet the actual application requirements of miniaturization and portability.

[0037] As a first aspect of the present application, a spectrometer is provided, which comprises a housing 100, a photodetector array 200 and a plurality of light sources 300, the photodetector array 200 and the plurality of light sources 300 are arranged in the housing 100, and a detection light outlet 102 is formed on the housing 100, wherein the plurality of light sources 300 are arranged around the photodetector array 200, the light source 300 is used to emit detection light towards the detection light outlet 102, the photodetector array 200 and the light source 300 are located on the same side of the detection light outlet 102, and the reflected light of the object to be detected 400 at the detection light outlet 102 can reach the light-sensitive surface of the photodetector array 200 through the detection light outlet 102, and the photodetector array 200 comprises a detector substrate and a plurality of photodetectors 201 arranged on the detector substrate.

[0038] The arrangement mode of the plurality of light sources 300 around the photodetector array 200 and the light source 300 and the photodetector array 200 on the same side of the detection light outlet 102 enables light to be incident on the object to be detected 400 from multiple angles, and compared with the single light source 300 or the non-surrounding layout of the plurality of light sources 300 in the prior art, the light distribution on the object to be detected 400 is more uniform. Concentrating the light source 300 in the limited space around the photodetector array 200 makes the structure of the spectrometer more compact, and the volume of the spectrometer is reduced.

[0039] The first aspect of the present application provides a spectrometer, the light source 300 emits detection light of a specific wavelength to the object to be detected 400 through the detection light outlet 102, and the reflected light of the object to be detected 400 reaches the light-sensitive surface of the photodetector array 200 through the detection light outlet. Figure 1 As shown in the figure, the light emitting element 301 emits detection light to the object to be detected 400, and the photodetector array 200 receives the reflected light of the object to be detected 400.

[0040] In the present application, the specific structure of the light source 300 is not specially limited, as long as it can surround the photodetector array 200 and emit detection light to the detection light outlet 102.

[0041] The photoelectric detector array 200 comprises a plurality of photoelectric detectors 201, as an optional embodiment, wherein the plurality of photoelectric detectors 201 are arranged in a plurality of rows and a plurality of columns on a detector substrate, and more particularly, the light-sensitive surfaces of the photoelectric detectors 201 are arranged on the front surface, and the electrodes are arranged on the back surface, so that the arrangement can eliminate the interference of electricity and simplify the manufacturing process.

[0042] The filter and the photoelectric detector 201 are separated in the existing spectrometer, so that the light coupling loss is large, and the light flux reaching the photoelectric detector 201 is small. The internal structure separation also increases the complexity of the structure of the spectrometer to a certain extent. In order to solve the above problems, as an optional embodiment, the photoelectric detector 201 in the spectrometer comprises a detector body and a plating layer 202 arranged on the light-sensitive surface of the detector body, and the plating layer 202 can provide a spectral calculation parameter through light filtering. The structure of growing the plating layer 202 directly on the photoelectric detector 201 can not only increase the light receiving area, reduce the light coupling loss, and enhance the light flux reaching the photoelectric detector 201, but also further reduce the volume of the spectrometer. Figure 2 A side view structural schematic diagram of the photoelectric detector 201 is given, the plating layer 202 completely covers the photoelectric detector 201, and the middle region of the photoelectric detector 201 is a photoelectric detector light-sensitive part 2011.

[0043] The photoelectric detector array 200 comprises a plurality of photoelectric detectors 201 arranged in a plurality of rows and a plurality of columns, and the light-sensitive surface of each photoelectric detector 201 is plated with a plating layer 202 for providing a spectral calculation parameter. As an optional embodiment, the plurality of photoelectric detectors 201 are divided into a plurality of groups, each group comprises at least one photoelectric detector 201, the plating layer 202 of the photoelectric detectors 201 in different groups provides different spectral calculation parameters, and the plating layer 202 of the photoelectric detectors 201 in the same group provides different spectral calculation parameters.

[0044] The specified plating layer 202 is directly grown on the surface of the photoelectric detector 201 to replace the traditional structure mode of separating the filter and the photoelectric detector 201, so that the volume of the spectrometer is reduced, and the film system that can meet the actual application requirements can be plated in the production process according to the actual application requirements. As an optional embodiment, the detector substrate is arranged with four groups of photoelectric detectors 201, each group comprises four photoelectric detectors 201, the plating layer 202 of each group of photoelectric detectors 201 provides different spectral calculation parameters, and the plating layer 202 of the photoelectric detectors 201 in the same group provides different spectral calculation parameters.

[0045] Figure 3A photodetector array 200 consisting of 16 photodetectors 201 arranged in a four-row, four-column configuration is presented. The film systems directly grown on the photodetectors 201 are all different, comprising a total of 16 different film systems. Each film system provides specific spectral calculation parameters through filtering, enhancing the response of the photodetector array 200 to the light signal reflected by the object 400 being detected. Figure 4 The following are the coating steps for the photodetector array 200 in actual production: First, expose the photodetector 201 at a designated location and cover all photodetectors 201 not at the designated location with photoresist. Then, coat the exposed photodetectors 201 with the first specified film system. After coating, clean all the photoresist. This completes the coating of the first designated photodetector 201. Next, repeat the above steps for the second designated photodetector 201 with the second specified film system. By sequentially changing the designated location and film system, the coating of all 16 photodetectors 201 in the photodetector array 200 is finally completed.

[0046] In actual production, to further improve coating efficiency and simplify the production process, multiple photodetector arrays 200 are usually divided into a single wafer, and each photodetector array 200 consists of multiple photodetectors 201. For example... Figure 5 As shown, Figure 5 Each photodetector array 200 consists of 16 photodetectors 201. During each coating process, the photodetectors 201 at the same location in each photodetector array 200 are activated, and the remaining parts are covered with photoresist. A specified film system is then applied to the photodetectors 201 at the same location in all photodetector arrays 200. After coating, all photoresist is cleaned. This method of simultaneously coating all photodetector arrays 200 effectively simplifies the manufacturing process.

[0047] In the spectrometer, the photodetector array 200 and the light source 300 are located on the same side of the detection light outlet 102. The detection light emitted by the light source 300 is reflected by the object to be detected 400 and then reaches the photodetector array 200 through the detection light outlet 102, until it is received by the photodetector array 200. As an optional embodiment, the photodetector array 200 and the light source 300 are both disposed on the same side within the spectrometer housing 100, such as... Figure 6 As shown, the photodetector array 200 and the light source 300 are positioned at the same height on the same side of the housing 100, which reduces the height difference between the light source 300 and the photodetector array 200 in the spectrometer, reduces the size of the spectrometer, improves the integration of the entire spectrometer system, and makes the spectrometer more compact.

[0048] As an alternative embodiment, in addition to arranging the photoelectric detector array 200 and the light source 300 on the same side of the shell 100, the plurality of light sources 300 are arranged around the photoelectric detector array 200 along a straight line perpendicular to the photoelectric detector array 200.

[0049] Compared with the traditional arrangement, such as placing the light source 300 in a single position or dispersing the light source 300 and the photoelectric detector array 200 in a larger space, the surrounding arrangement effectively reduces the volume of the spectrometer while improving the uniformity of the light on the surface of the object 400 to be detected and enhancing the light signal reflected by the object 400 to be detected received by the photoelectric detector array 200.

[0050] In order to avoid the detection light emitted by the light source 300 being directly received by the photoelectric detector array 200, as an alternative embodiment, the internal space of the spectrometer shell 100 is divided by a curved partition 101, the inside of the curved partition 101 is a photoelectric detector array accommodating portion, and the outside of the curved partition 101 is a light source accommodating portion; the light source 300 is installed in the light source accommodating portion; the photoelectric detector array 200 is installed in the photoelectric detector array accommodating portion; and the light source accommodating portion and the photoelectric detector array accommodating portion are both formed with a detection light outlet 102.

[0051] By arranging the curved partition 101, the light source 300 and the photoelectric detector array 200 are separated, the light is guided towards the detection light outlet 102, the unnecessary propagation of the light in the unnecessary area is reduced, the proportion of the incident light on the object 400 to be detected is further improved, in addition, the curved partition 101 avoids the mutual interference between the detection light emitted by the light source 300 and the reflected light of the object 400 to be detected, so that the result is more accurate.

[0052] In order to further improve the proportion of the detection light emitted by the light source 300 on the object 400 to be detected, as an alternative embodiment, the light source 300 includes a light emitting element 301 and a collimating lens 302, and the collimating lens 302 is arranged on the light emitting side of the light emitting element 301.

[0053] The collimating lens 302 converts the divergent detection light emitted by the light emitting element 301 into parallel light with a relatively fixed propagation direction, the parallel light with a fixed propagation direction is irradiated onto the object 400 to be detected, and the object 400 to be detected can receive more emitted light, thereby improving the accuracy of the result.

[0054] The specific type of the light emitting element 301 is not specially limited, and in order to reduce power consumption and size, the light emitting element 301 can be a light emitting diode (LED) or other wide-spectrum light source.

[0055] Specifically, as shown in Figure 7 For example, the detection light emitted by the LED chip is directed towards the object to be detected 400, and the reflected light is focused by the focusing lens 500 and then converges towards the photodetector array 200 at the same height as the LED chip, thereby increasing the energy of the reflected light received by the photodetector array 200.

[0056] To further increase the energy of the reflected light of the object to be detected 400 entering the photodetector array 200, as an optional embodiment, the focusing lens 500 is installed in the photodetector array accommodating portion.

[0057] The focusing lens 500 converges the reflected light of the object to be detected 400 towards the photodetector array 200, thereby increasing the energy of the reflected light received by the photodetector array 200.

[0058] Specifically, as shown in Figure 8 For example, the detection light emitted by the LED chip is directed towards the object to be detected 400, and the reflected light is focused by the focusing lens 500 and then converges towards the photodetector array 200 at the same height as the LED chip, thereby increasing the energy of the reflected light received by the photodetector array 200.

[0059] The spectrometer disclosed by the utility model has the advantages that the plurality of light sources 300 are arranged around the photodetector array 200, and the light source 300 and the photodetector array 200 are located on the same side in the shell 100, so that the arrangement mode is surrounded, compared with the traditional arrangement mode, for example, the photodetector 201 and the light source 300 are dispersed in a larger space, the volume of the spectrometer is effectively reduced, the light source 300 and the photodetector array 200 are arranged on the same side in the shell 100, the height difference is reduced, and the volume of the spectrometer is further reduced, the surface of the photodetector 201 in the photodetector array 200 is directly plated with the plating layer 202, and the integrated structure of the plating layer 202 and the photodetector 201 is combined closely, so that the structure of the filter and the photodetector 201 in the prior art is separated, the volume of the spectrometer can be further reduced.

[0060] The spectrometer disclosed by the utility model emits detection light through the light source 300, the detection light is reflected by the object to be detected 400 and then received by the photodetector array 200, the frequency content of the unknown spectrum is extracted based on the received light signal, and the spectrum reconstruction is completed. Figure 9 The spectrum reconstruction error in the utility model is used. Figure 10In an embodiment of the utility model, the receiving spectrum of the photoelectric detector 201 with different filtering characteristics in the photoelectric detector array 200.

Claims

1. A spectrometer comprising a housing (100), a photodetector array (200) and a plurality of light sources (300), the photodetector array (200) and the plurality of light sources (300) being arranged in the housing (100), a detection light exit (102) being formed in the housing (100), characterized in that A plurality of light sources (300) are arranged around the photodetector array (200), and the light sources (300) are used to emit detection light towards a detection light outlet (102), the photodetector array (200) and the light sources (300) are located on the same side of the detection light outlet (102), and the reflected light of an object (400) to be detected at the detection light outlet (102) can reach the light-sensitive surface of the photodetector array (200) through the detection light outlet (102), and the photodetector array (200) comprises a detector substrate and a plurality of photodetectors (201) arranged on the detector substrate.

2. The optical spectrometer of claim 1, wherein, The plurality of photodetectors (201) on the detector substrate are arranged in multiple rows and multiple columns.

3. The optical spectrometer of claim 2, wherein, The photodetector (201) comprises a detector body and a plating layer (202) arranged on the light-sensitive surface of the detector body, and the plating layer (202) can provide spectral calculation parameters through light filtering.

4. The optical spectrometer of claim 3, wherein, The plurality of photodetectors (201) are divided into multiple groups, each group comprising at least one photodetector (201), the plating layers (202) of the photodetectors (201) in different groups provide different spectral calculation parameters, and the plating layers (202) of the photodetectors (201) in the same group provide different spectral calculation parameters.

5. The optical spectrometer of claim 2, wherein, The detector substrate is arranged with four groups of photodetectors (201), each group containing four photodetectors (201), the plating layers (202) of the photodetectors (201) in each group provide different spectral calculation parameters, and the plating layers (202) of the photodetectors (201) in the same group provide different spectral calculation parameters.

6. The optical spectrometer of claim 1, wherein, The photodetector array (200) and the light source (300) are both arranged on the same side of the shell (100).

7. The optical spectrometer of claim 1, wherein, The plurality of light sources (300) are arranged around the photodetector array (200) with a straight line perpendicular to the photodetector array (200) as an axis.

8. The optical spectrometer of claim 1, wherein, The internal space of the shell (100) is divided by a curved partition plate (101), the inside of the curved partition plate (101) is a photodetector array accommodating portion, the outside of the curved partition plate (101) is a light source accommodating portion; the light source (300) is installed in the light source accommodating portion; the photodetector array (200) is installed in the photodetector array accommodating portion; the light source accommodating portion and the photodetector array accommodating portion are both formed with the detection light outlet (102).

9. The optical spectrometer of claim 8, wherein, The light source (300) comprises a light emitting element (301) and a collimating lens (302), and the collimating lens (302) is arranged on the light emitting side of the light emitting element (301).

10. The optical spectrometer of claim 8, wherein, The photodetector array accommodating portion is installed with a focusing lens (500), and the focusing lens (500) is arranged on the light-sensitive surface side of the photodetector array (200).

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