Diaphragm adjusting device and semiconductor detection equipment

Abstract

The utility model discloses a diaphragm adjusting device and semiconductor detection equipment. The diaphragm adjusting device comprises a multi-stage displacement adjusting unit, a multi-stage offset adjusting unit and an adapter. Each displacement adjusting unit comprises a displacement seat and a displacement driving part which are fixedly connected with each other, and every two adjacent stages of displacement adjusting units are in transmission fit; each offset adjusting unit comprises an offset seat and an offset driving part which are fixedly connected with each other, and every two adjacent levels of offset adjusting units are in transmission fit; the switching seat is in transmission fit with the last-stage displacement adjusting unit in the first direction and is in transmission fit with the first-stage offset adjusting unit in the second direction, the first direction is the length direction of the diaphragm adjusting device, and the second direction and the first direction are arranged in an intersecting mode. The diaphragm adjusting device can perform multi-stage linear displacement adjustment on the diaphragm sheet in two directions, thereby improving the adjustment precision of the diaphragm sheet, reducing the concentricity error of the diaphragm hole and the electron beam, and ensuring the imaging quality during detection.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and in particular relates to an aperture adjustment device and a semiconductor testing equipment. Background Technology

[0002] With the rapid development of the semiconductor industry, the demand for high-precision defect detection equipment in wafer manufacturing processes is becoming increasingly urgent and widespread, highlighting the indispensability of these devices in ensuring product quality.

[0003] When inspecting wafers, electron beam inspection is usually used. An aperture needs to be set between the electron beam pump source and the workpiece being inspected so that the central beam of the electron beam can pass through while the remaining electrons are blocked, thereby making the image clearer. However, the current aperture adjustment accuracy is difficult to meet the inspection requirements. Utility Model Content

[0004] This application provides an aperture adjustment device and a semiconductor testing equipment, which can improve the aperture adjustment accuracy.

[0005] In a first aspect, embodiments of this application provide an aperture adjustment device, including a multi-stage displacement adjustment unit, a multi-stage offset adjustment unit, and a transition seat; the displacement adjustment unit includes a displacement seat and a displacement driving member fixedly connected to each other, wherein the displacement driving member of the upper stage of two adjacent displacement adjustment units is driven to the displacement seat of the lower stage, and the displacement seat of the lower stage is slidably connected to the displacement seat of the upper stage; the offset adjustment unit includes an offset seat and an offset driving member fixedly connected to each other, wherein the offset driving member of the lower stage of two adjacent offset adjustment units is driven to the offset seat of the upper stage, and the offset seat of the lower stage is slidably connected to the offset seat of the upper stage; the transition seat is slidably connected to the displacement seat of the last stage displacement adjustment unit and driven to its displacement driving member in a first direction, and is slidably connected to the offset seat of the first stage offset adjustment unit and driven to its offset driving member in a second direction, wherein the first direction is the length direction of the aperture adjustment device, and the second direction intersects with the first direction.

[0006] Optionally, the multiple displacement adjustment units, the adapter, and the multiple offset adjustment units are arranged sequentially along the first direction, and the first direction is perpendicular to the second direction.

[0007] Optionally, in the multi-level displacement adjustment unit, the next-level displacement adjustment unit is farther away from the displacement seat of the first-level displacement adjustment unit than the previous-level displacement adjustment unit; in the multi-level offset adjustment unit, the next-level offset adjustment unit is closer to the displacement seat of the first-level offset adjustment unit than the previous-level offset adjustment unit.

[0008] Optionally, the number of stages of the multi-stage displacement adjustment unit is two, including a first-stage displacement adjustment unit and a second-stage displacement adjustment unit, the first-stage displacement adjustment unit is used for coarse adjustment of the displacement amount of the diaphragm sheet, and the second-stage displacement adjustment unit is used for fine adjustment of the displacement amount of the diaphragm sheet; the number of stages of the multi-stage offset adjustment unit is two, including a first-stage offset adjustment unit and a second-stage offset adjustment unit, the first-stage offset adjustment unit is used for coarse adjustment of the offset amount of the diaphragm sheet, and the second-stage offset adjustment unit is used for fine adjustment of the offset amount of the diaphragm sheet.

[0009] Optionally, in the first-stage displacement adjustment unit, the displacement seat includes a first mounting plate, a connecting plate and a first bearing plate; the first mounting plate is fixedly connected with the displacement driving member, and the first mounting plate is arranged perpendicularly to the first direction; the connecting plate is arranged in parallel with the first mounting plate, the connecting plate is provided with a relief opening and a sealing element, the sealing element is located on the side of the connecting plate away from the first mounting plate, and is used for sealing the relief opening; the first bearing plate has a length along the first direction, one end of the first bearing plate is connected with the bottom of the first mounting plate, the other end of the first bearing plate is connected with the bottom of the connecting plate, and the top surface of the first bearing plate is slidably connected with the second-stage displacement adjustment unit along the first direction.

[0010] Optionally, in the second-stage displacement adjustment unit, the displacement seat includes a second mounting plate and a second bearing plate; the second mounting plate is arranged in parallel with the first mounting plate, the second mounting plate is fixedly connected with the displacement driving member on the side facing the first mounting plate, and is drivingly connected with the displacement driving member of the first-stage displacement adjustment unit; the second bearing plate is arranged in parallel with the first bearing plate, and is connected with the bottom of the second mounting plate, the bottom surface of the second bearing plate is slidably matched with the first-stage displacement adjustment unit, and the top surface of the second bearing plate is slidably matched with the adapter seat along the first direction.

[0011] Optionally, the adapter seat includes a displacement adapter plate, an offset adapter plate and an adapter bearing plate; the displacement adapter plate is arranged in parallel with the second mounting plate, and is drivingly connected with the displacement driving member of the second-stage displacement adjustment unit; the offset adapter plate is arranged perpendicularly to the displacement adapter plate, and is drivingly connected with the offset driving member of the first-stage offset adjustment unit; the adapter bearing plate is arranged in parallel with the second bearing plate, and is connected with the bottom of the displacement adapter plate and the bottom of the offset adapter plate, the bottom surface of the adapter bearing plate is slidably matched with the second-stage displacement adjustment unit along the first direction, and the top surface of the adapter bearing plate is slidably matched with the first-stage offset adjustment unit along the second direction.

[0012] Optionally, in the first-stage offset adjustment unit, the offset seat comprises a third mounting plate, a third bearing plate and a matching plate; the third mounting plate is arranged in parallel with the offset adapter plate and is fixedly connected with the offset driving element on the side away from the offset adapter plate; the third bearing plate comprises a first-stage matching part, a second-stage matching part and a connecting part, the first-stage matching part is arranged in parallel with the adapter bearing plate, the bottom surface of the first-stage matching part is in sliding fit with the adapter seat, the second-stage matching part is arranged in parallel with the first-stage matching part, the top surface of the second-stage matching part is in sliding fit with the second-stage offset adjustment unit along the second direction, the connecting part is connected at the top with the first-stage matching part and at the bottom with the second-stage matching part, and the connecting part is arranged perpendicularly to the first direction; the matching plate is arranged in parallel with the third mounting plate and is connected at the bottom with the second-stage matching part, the matching plate and the third mounting plate are located on the same side of the third bearing plate, and the matching plate is in transmission connection with the offset driving element of the second-stage offset adjustment unit.

[0013] Optionally, the offset seat comprises a fourth mounting plate, a fourth bearing plate and a diaphragm support; the fourth mounting plate is arranged in parallel with the matching plate and is fixedly connected with the offset driving element on the side away from the matching plate; the fourth bearing plate is arranged in parallel with the second-stage matching part and is connected at the bottom with the fourth mounting plate, the bottom surface of the fourth bearing plate is in sliding fit with the first-stage offset adjustment unit, and the fourth bearing plate is provided on the side facing the avoiding opening with a mounting part; the diaphragm support is connected at one end with the mounting part and at the other end with the sealing element in sealing connection in the first direction, the diaphragm support is provided with a mounting surface for providing a mounting position for the diaphragm, and the mounting surface and the displacement driving element axis of the first-stage displacement adjustment unit are located in the same plane.

[0014] In a second aspect, the embodiments of the present application further provide a semiconductor detection device, which comprises the diaphragm adjustment device in any of the embodiments of the first aspect.

[0015] The embodiments of the present application provide a diaphragm adjustment device and a semiconductor detection device, the diaphragm adjustment device comprises a multi-stage displacement adjustment unit, a multi-stage offset adjustment unit and an adapter seat. The multi-stage displacement adjustment unit can realize multi-stage adjustment in the first direction, thereby improving the displacement adjustment precision of the diaphragm sheet; the multi-stage offset adjustment unit can realize multi-stage adjustment in the second direction, thereby improving the offset adjustment precision of the diaphragm sheet. The adapter seat adapts the multi-stage displacement adjustment unit and the multi-stage offset adjustment unit, so that the diaphragm adjustment device can realize linear displacement adjustment of the diaphragm sheet in two directions, thereby improving the adjustment precision of the diaphragm sheet, reducing the concentricity error of the diaphragm hole and the electron beam, and ensuring the imaging quality during detection. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments of the present application will be briefly introduced as follows, and other drawings can be obtained by those of ordinary skill in the art without any creative effort on the premise that the drawings are not creative.

[0017] Figure 1 Structural schematic view of the light diaphragm adjusting device of some embodiments of the present application from one perspective;

[0018] Figure 2 Structural schematic view of the light diaphragm adjusting device of some embodiments of the present application from another perspective;

[0019] Figure 3 Structural schematic view of the light diaphragm adjusting device of some embodiments of the present application from still another perspective;

[0020] Figure 4 Structural schematic view of the light diaphragm adjusting device of some embodiments of the present application from yet another perspective.

[0021] In the drawings:

[0022] 1-displacement seat; 11-first mounting plate; 12-connection plate; 121-seal; 13-first bearing plate; 14-second mounting plate; 15-second bearing plate; 2-displacement driving member; 3-offset seat; 31-third mounting plate; 32-third bearing plate; 321-first level cooperation part; 322-second level cooperation part; 323-connection part; 33-cooperation plate; 34-fourth mounting plate; 35-fourth bearing plate; 351-mounting part; 36-light diaphragm support; 4-offset driving member; 5-adapting seat; 51-displacement adapting plate; 52-offset adapting plate; 53-adapting bearing plate; 6-light diaphragm piece; X-first direction; Y-second direction. DETAILED DESCRIPTION

[0023] The features and exemplary embodiments of various aspects of the present application will be described in detail below, in order to make the purposes, technical solutions and advantages of the present application more clear and apparent, the present application will be further described in detail below in combination with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, but not to limit the present application. The present application can be implemented without some of these specific details by those skilled in the art. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0024] It is to be understood that the terminology used herein such as first and second, and the like, is only intended to distinguish one entity or operation from another entity or operation, and is not intended to imply that such entities or operations are necessarily related or ordered in time. Also, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by an "includes" statement does not exclude the existence of additional elements of the same nature as those included in the process, method, article, or apparatus that includes the stated elements.

[0025] With the rapid development of the semiconductor industry, the demand for defect detection equipment in wafer manufacturing process is more and more extensive. Since the features to be detected on the wafer are all of microscopic size, the commonly used optical detection equipment can hardly meet the use requirements, and most wafer detection equipment adopts electron beam detection. In order to ensure clear imaging of electron beam detection, an aperture diaphragm needs to be installed between the electron beam pump source and the workpiece to be detected, and the precise adjustment of the aperture diaphragm is the key to clear imaging. The aperture diaphragm is a rectangular aperture diaphragm sheet, which is usually provided with a plurality of aperture diaphragm holes with different apertures along the length direction. By using different aperture diaphragm holes and electron beams emitted by the electron beam pump source in concentric cooperation, the detection parameters of the optical detection equipment can be changed. However, the adjustment accuracy of the aperture diaphragm is not ideal, and it is difficult to accurately adjust the concentricity of the electron beam current and the aperture diaphragm hole, thereby it is difficult to meet the use requirements of electron beam detection.

[0026] In view of this, the present application provides an aperture diaphragm adjusting device, which is parallel to the length direction of the aperture diaphragm sheet when connected to the semiconductor detection equipment. The aperture diaphragm adjusting device comprises a plurality of stages of displacement adjusting units, a plurality of stages of offset adjusting units, and an adapter seat. Adjacent two stages of displacement adjusting units are in transmission cooperation, adjacent two stages of offset adjusting units are in transmission cooperation, the adapter seat is in transmission cooperation with the last stage of displacement adjusting units in the length direction of the aperture diaphragm adjusting device, and the adapter seat is in transmission cooperation with the first stage of offset adjusting units in the direction intersecting the length direction of the aperture diaphragm adjusting device. The plurality of stages of displacement adjusting units can adjust the displacement of the aperture diaphragm sheet in multiple stages, and the plurality of stages of offset adjusting units can adjust the offset of the aperture diaphragm sheet in multiple stages, so as to improve the adjustment accuracy of the aperture diaphragm sheet, thereby improving the concentricity of the aperture diaphragm sheet and the electron beam current, and ensuring the imaging quality.

[0027] The aperture diaphragm adjusting device can be used as a component for adjusting the aperture diaphragm sheet in the semiconductor detection equipment, and can provide accurate adjustment of the aperture diaphragm sheet when the semiconductor detection equipment is working, and is suitable for use in each process of wafer production. The semiconductor detection equipment can include but is not limited to a feature size scanning electron microscope.

[0028] Please refer toFigures 1 to 4 wherein, Figure 1 A structural schematic diagram of a light diaphragm adjusting device according to some embodiments of the present application from one perspective; Figure 2 A structural schematic diagram of a light diaphragm adjusting device according to some embodiments of the present application from another perspective; Figure 3 A structural schematic diagram of a light diaphragm adjusting device according to some embodiments of the present application from yet another perspective; Figure 4 A structural schematic diagram of a light diaphragm adjusting device according to some embodiments of the present application from still another perspective.

[0029] As Figure 1 shown in the drawings, the embodiments of the present application provide a light diaphragm adjusting device, which comprises a plurality of displacement adjusting units, a plurality of offset adjusting units and an adapter seat 5; the displacement adjusting unit comprises a displacement seat 1 and a displacement driving member 2 fixedly connected with each other, the displacement driving member 2 of an upper displacement adjusting unit in adjacent two displacement adjusting units is drivingly connected with a lower displacement seat 1, and the lower displacement seat 1 is slidingly connected with the upper displacement seat 1; the offset adjusting unit comprises an offset seat 3 and an offset driving member 4 fixedly connected with each other, the offset driving member 4 of a lower offset adjusting unit in adjacent two offset adjusting units is drivingly connected with an upper offset seat 3, and the lower offset seat 3 is slidingly connected with the upper offset seat 3; the adapter seat 5 is slidingly connected with the displacement seat 1 of the last displacement adjusting unit in a first direction X and is drivingly connected with the displacement driving member 2 thereof, and is slidingly connected with the offset seat 3 of the first offset adjusting unit in a second direction Y and is drivingly connected with the offset driving member 4 thereof, the first direction X is the length direction of the light diaphragm adjusting device, and the second direction Y is arranged intersecting the first direction X.

[0030] The plurality of displacement adjusting units can comprise two or more displacement adjusting units drivingly connected in series, and the displacement amount of the light diaphragm sheet 6 can be adjusted step by step in the first direction X; the plurality of offset adjusting units can comprise two or more offset adjusting units drivingly connected in series, and the offset amount of the light diaphragm sheet 6 can be adjusted step by step in the second direction Y. In the plurality of displacement adjusting units, the displacement seat 1 of the first displacement adjusting unit does not translate, but serves as a base for providing a mounting position for the light diaphragm adjusting device and for connecting to a semiconductor detection device. In the plurality of offset adjusting units, the offset seat 3 of the last offset adjusting unit is connected with the light diaphragm sheet 6. When the second direction Y is arranged intersecting the first direction X, the second direction Y can be perpendicular to the first direction X, or the second direction Y can not be perpendicular to the first direction X.

[0031] The plurality of displacement adjusting units can be drivingly connected in series along the first direction X, or drivingly connected in series along the second direction Y; the plurality of offset adjusting units can be drivingly connected in series along the first direction X, or drivingly connected in series along the second direction Y.

[0032] In the multi-stage displacement adjusting unit, the displacement seats 1 of each stage can be the same or different, and the displacement seat 1 of the next stage is installed on the displacement seat 1 of the previous stage. In the multi-stage displacement adjusting unit, the displacement seats 1 of each stage can be the same or different, and the displacement seat 1 of the next stage is installed on the displacement seat 1 of the previous stage. For example, when the multi-stage displacement adjusting unit has three stages, the second-stage displacement seat 1 and the third-stage displacement seat 1 can have the same structure, and the first-stage displacement seat 1 and the second-stage displacement seat 1 can have different structures. When the multi-stage displacement adjusting unit has three stages, the second-stage displacement seat 3 and the third-stage displacement seat 3 can have the same structure, and the first-stage displacement seat 3 and the second-stage displacement seat 3 can have different structures.

[0033] In the displacement adjusting unit, the displacement seat 1 provides a mounting position for the displacement driving member 2, which can be mounted on the displacement seat 1 by bolts to achieve fixed connection with the displacement seat 1. In the adjacent two-stage displacement adjusting unit, the displacement driving member 2 of the previous stage is in transmission connection with the displacement seat 1 of the next stage, and can drive the displacement seat 1 of the next stage to slide on the displacement seat 1 of the previous stage in the first direction X.

[0034] In the displacement adjusting unit, the displacement seat 1 provides a mounting position for the displacement driving member 2, which can be mounted on the displacement seat 1 by bolts to achieve fixed connection with the displacement seat 1. In the adjacent two-stage displacement adjusting unit, the displacement driving member 2 of the previous stage is in transmission connection with the displacement seat 1 of the next stage, and can drive the displacement seat 1 of the next stage to slide on the displacement seat 1 of the previous stage in the first direction X.

[0035] The displacement driving member 2 and the displacement driving member 4 are both components that can provide linear driving. The displacement driving member 2 provides driving force in the first direction X, and the displacement driving member 4 provides driving force in the second direction Y. For example, the displacement driving member 2 can be a linear motor. In the adjacent two-stage displacement adjusting unit, the linear motor of the previous stage is in threaded connection with the displacement seat 1 of the next stage, and can drive the displacement seat 1 of the next stage to translate in the first direction X when the linear motor rotates. The displacement driving member 2 can also be a ball screw pair, which provides driving force by manually driving the screw. The displacement driving member 2 can also be a linear motor provided with a manual knob coaxially, which can not only achieve automatic driving but also manual adjustment. The displacement driving member 4 can also be a linear motor, a ball screw pair, or a linear motor with a knob.

[0036] In the multi-stage displacement adjusting unit, the displacement driving member 2 of the next stage has higher motion resolution than the displacement driving member 2 of the previous stage. In the multi-stage displacement adjusting unit, the displacement driving member 4 of the next stage has higher motion resolution than the displacement driving member 4 of the previous stage.

[0037] In the technical solutions of the above embodiments, the diaphragm adjusting device comprises a plurality of displacement adjusting units, a plurality of offset adjusting units and an adapter 5. When adjusting the diaphragm sheet 6, the plurality of displacement adjusting units can realize multi-stage adjustment in the first direction X, thereby improving the displacement adjustment precision of the diaphragm sheet 6; the plurality of offset adjusting units can realize multi-stage adjustment in the second direction Y, thereby improving the offset adjustment precision of the diaphragm sheet 6. The adapter 5 adapts the plurality of displacement adjusting units and the plurality of offset adjusting units, and can assemble the plurality of displacement adjusting units and the plurality of offset adjusting units into a transmission-matched whole. The diaphragm adjusting device adjusts the diaphragm sheet 6 in two directions, and multi-stage adjustment is performed in both directions, which can improve the adjustment precision of the diaphragm sheet 6, reduce the concentricity error of the diaphragm hole and the electron beam, and thereby ensure the imaging quality during detection.

[0038] As shown in Figure 1 In some embodiments of the present application, the plurality of displacement adjusting units, the adapter 5 and the plurality of offset adjusting units are arranged in the first direction X in sequence, and the first direction X is arranged perpendicularly to the second direction Y.

[0039] When gradually approaching the diaphragm sheet 6 along the first direction X, the i-th (i≥2) displacement adjusting unit is installed on the upper displacement adjusting unit in sequence, the adapter 5 is installed on the last displacement adjusting unit, the first offset adjusting unit is installed on the adapter 5, the i-th (i≥2) offset adjusting unit is installed on the upper offset adjusting unit, and the last offset adjusting unit is connected to the diaphragm sheet 6.

[0040] When adjusting the diaphragm sheet 6, the diaphragm sheet 6 needs a large amount of translation in the first direction X in order to replace different diaphragm holes and adjust; the diaphragm sheet 6 needs a small amount of translation in the second direction Y, which is only used for adjusting the concentricity of the center of the diaphragm hole on the diaphragm sheet 6 and the electron beam.

[0041] In the technical solutions of the above embodiments, the plurality of displacement adjusting units gradually approach the diaphragm sheet 6 when transmission connection is performed, and the plurality of offset adjusting units gradually approach the diaphragm sheet 6 when transmission connection is performed, which can reduce transmission error and improve adjustment precision. Compared with the plurality of displacement adjusting units, the plurality of offset adjusting units are closer to the diaphragm sheet 6, which can reduce the influence of the rigidity of the plurality of displacement adjusting units on the adjustment of the diaphragm sheet 6, and further improve the adjustment precision.

[0042] As shown in Figure 1 In some embodiments of the present application, in the plurality of displacement adjusting units, the lower displacement adjusting unit is farther away from the displacement seat 1 of the first displacement adjusting unit than the upper displacement adjusting unit; in the plurality of offset adjusting units, the lower offset adjusting unit is closer to the displacement seat 1 of the first offset adjusting unit than the upper offset adjusting unit.

[0043] With the displacement seat 1 of the first-stage displacement adjusting unit as a reference, in the multi-stage displacement adjusting unit, the displacement seat 1 of the first-stage displacement adjusting unit is gradually away from the second-stage displacement adjusting unit; in the multi-stage offset adjusting unit, the displacement seat 1 of the first-stage displacement adjusting unit is gradually close to the first-stage offset adjusting unit.

[0044] In the technical solutions of the above-described embodiments, the multi-stage displacement adjusting unit is gradually away from the displacement seat 1 of the first-stage displacement adjusting unit, and the multi-stage offset adjusting unit is gradually close to the displacement seat 1 of the first-stage displacement adjusting unit, so that the multi-stage displacement adjusting unit and the multi-stage offset adjusting unit can be arranged in a full use of space, and the distance between the diaphragm sheet 6 and the driving shaft of the displacement driving member 2 of the first-stage displacement adjusting unit is reduced, thereby reducing the adjustment error and improving the adjustment accuracy.

[0045] As shown in Figure 1 In some embodiments of the present application, the number of stages of the multi-stage displacement adjusting unit is two, including a first-stage displacement adjusting unit and a second-stage displacement adjusting unit, the first-stage displacement adjusting unit is used for coarsely adjusting the displacement of the diaphragm sheet 6, and the second-stage displacement adjusting unit is used for finely adjusting the displacement of the diaphragm sheet 6; the number of stages of the multi-stage offset adjusting unit is two, including a first-stage offset adjusting unit and a second-stage offset adjusting unit, the first-stage offset adjusting unit is used for coarsely adjusting the offset of the diaphragm sheet 6, and the second-stage offset adjusting unit is used for finely adjusting the offset of the diaphragm sheet 6.

[0046] The movement resolution of the second-stage displacement driving member 2 is higher than that of the first-stage displacement driving member 2, and the movement resolution of the second-stage offset driving member 4 is higher than that of the first-stage offset driving member 4.

[0047] In the technical solutions of the above-described embodiments, the number of stages of the multi-stage displacement adjusting unit is two, so that the displacement of the diaphragm sheet 6 can be quickly coarsely adjusted and finely adjusted with high resolution; the number of stages of the multi-stage offset adjusting unit is two, so that the offset of the diaphragm sheet 6 can be quickly coarsely adjusted and finely adjusted with high resolution.

[0048] As shown in Figure 2As shown in some embodiments of this application, in the first-stage displacement adjustment unit, the displacement seat 1 includes a first mounting plate 11, a connecting plate 12, and a first bearing plate 13; the first mounting plate 11 is fixedly connected to the displacement driving member 2, and the first mounting plate 11 is arranged perpendicular to the first direction X; the connecting plate 12 is arranged parallel to the first mounting plate 11, and the connecting plate 12 is provided with a clearance opening and a sealing member 121, the sealing member 121 is located on the side of the connecting plate 12 away from the first mounting plate 11, and is used to seal the clearance opening; the length of the first bearing plate 13 is along the first direction X, and one end is connected to the bottom of the first mounting plate 11 and the other end is connected to the bottom of the connecting plate 12, and the top surface of the first bearing plate 13 is slidably connected to the second-stage displacement adjustment unit along the first direction X.

[0049] In the first-stage displacement adjustment unit, the displacement drive 2 is located on the side of the first mounting plate 11 facing away from the connecting plate 12. The drive shaft of the first-stage displacement drive 2 passes through the first mounting plate 11 and is connected to the second-stage displacement seat 1. The seal 121 is located on the side of the connecting plate 12 facing away from the first mounting plate 11. The seal 121 can be a bellows, providing a seal for the internal environment of the semiconductor testing equipment when the aperture adjustment device is connected to the semiconductor testing equipment.

[0050] In the above embodiment, the first mounting plate 11, the first support plate 13, and the connecting plate 12 are connected, and the first-stage displacement seat 1 is U-shaped. The first mounting plate 11 can provide an installation position for the displacement drive 2; the first support plate 13 can provide an installation base for the aperture adjustment device, facilitating the assembly of the aperture adjustment device; the connecting plate 12 can provide a position for the aperture adjustment device to connect to the semiconductor detection equipment, facilitating connection with the semiconductor detection equipment.

[0051] like Figure 3 As shown in some embodiments of this application, in the second-stage displacement adjustment unit, the displacement seat 1 includes a second mounting plate 14 and a second bearing plate 15; the second mounting plate 14 is arranged parallel to the first mounting plate 11, and the side of the second mounting plate 14 facing the first mounting plate 11 is fixedly connected to the displacement driving member 2 and is connected to the displacement driving member 2 of the first-stage displacement adjustment unit; the second bearing plate 15 is arranged parallel to the first bearing plate 13 and is connected to the bottom of the second mounting plate 14, the bottom surface of the second bearing plate 15 is slidably engaged with the first-stage displacement adjustment unit, and the top surface is slidably engaged with the adapter seat 5 along the first direction X.

[0052] The second level displacement seat 1 is L-shaped, and the driving shaft of the second level displacement driving member 2 is in transmission connection with the adapter seat 5 after passing through the second mounting plate 14. When the first level displacement seat 1 is in sliding cooperation with the second level displacement seat 1, the top surface of the first bearing plate 13 can be provided with a guide rail in the first direction X, and the bottom surface of the second bearing plate 15 can be provided with a sliding block, so as to realize sliding cooperation through the guide rail and the sliding block. When the second level displacement seat 1 is in sliding cooperation with the adapter seat 5, the top surface of the second bearing plate 15 can be provided with a guide rail in the first direction X, and the bottom surface of the adapter seat 5 can be provided with a sliding block, so as to realize sliding cooperation through the guide rail and the sliding block.

[0053] In the technical scheme of the above embodiment, the second level displacement seat 1 comprises the second mounting plate 14 and the second bearing plate 15. The second mounting plate 14 can not only provide a mounting position for the second level displacement driving member 2, but also provide a transmission position for the first level displacement driving member 2; and the second bearing plate 15 can provide a cooperation position with the first level displacement seat 1 and the adapter seat 5. The second bearing plate 15 is connected with the bottom of the second mounting plate 14, which is convenient for arranging the second level displacement driving member 2 above the first level displacement driving member 2, and is also convenient for transmission connection between the second level displacement seat 1 and the adapter seat 5.

[0054] As shown in Figure 2 and Figure 3 In some embodiments of the present application, the adapter seat 5 comprises a displacement adapter plate 51, an offset adapter plate 52 and an adapter bearing plate 53; the displacement adapter plate 51 is arranged in parallel with the second mounting plate 14 and is in transmission connection with the displacement driving member 2 of the second level displacement adjusting unit; the offset adapter plate 52 is arranged perpendicularly with the displacement adapter plate 51 and is in transmission connection with the offset driving member 4 of the first level offset adjusting unit; the adapter bearing plate 53 is arranged in parallel with the second bearing plate 15 and is connected with the bottom of the displacement adapter plate 51 and the bottom of the offset adapter plate 52, and the bottom surface of the adapter bearing plate 53 is in sliding cooperation with the second level displacement adjusting unit in the first direction X, and the top surface is in sliding cooperation with the first level offset adjusting unit in the second direction Y.

[0055] The displacement adapter plate 51 and the offset adapter plate 52 are connected on the two sides adjacent to the adapter bearing plate 53, and the displacement adapter plate 51 and the offset adapter plate 52 can be connected or not connected.

[0056] The bottom surface of the adapter bearing plate 53 can be provided with a sliding block, and the sliding block is in sliding cooperation with the guide rail on the top surface of the second bearing plate 15; the top surface of the adapter bearing plate 53 can be provided with a guide rail in the second direction Y, and the bottom surface of the first level offset adjusting unit is provided with a sliding block, and the guide rail and the sliding block are in sliding cooperation.

[0057] Exemplarily, the displacement adapter plate 51 can be provided with a buffer block on the side facing the second mounting plate 14, so as to avoid collision between the displacement adapter plate 51 and the second mounting plate 14.

[0058] In the technical solution of the above embodiment, the adapter 5 includes a displacement adapter plate 51, an offset adapter plate 52, and an adapter support plate 53. The displacement adapter plate 51 can realize the transmission connection with the second-stage displacement drive member 2, the offset adapter plate 52 can realize the transmission connection with the first-stage offset drive member 4, and the adapter support plate 53 can realize the sliding engagement with the first-stage offset seat 3 and the second-stage displacement seat 1. Thus, the adapter 5 can connect the two-stage displacement adjustment unit and the two-stage offset adjustment unit into one unit, realizing the automatic adjustment of the two translation degrees of the aperture 6.

[0059] like Figure 3 As shown in some embodiments of this application, in the first-stage offset adjustment unit, the offset seat 3 includes a third mounting plate 31, a third bearing plate 32, and a mating plate 33; the third mounting plate 31 is arranged parallel to the offset adapter plate 52 and is fixedly connected to the offset drive member 4 on the side facing away from the offset adapter plate 52; the third bearing plate 32 includes a primary mating part 321, a secondary mating part 322, and a connecting part 323, the primary mating part 321 is arranged parallel to the adapter bearing plate 53, the bottom surface of the primary mating part 321 is slidably mated with the adapter seat 5, and the secondary mating part 322... Parallel to the first-level mating part 321, the top surface of the second-level mating part 322 slides with the second-level offset adjustment unit along the second direction Y. The top of the connecting part 323 is connected to the first-level mating part 321 and the bottom is connected to the second-level mating part 322. The connecting part 323 is perpendicular to the first direction X. The mating plate 33 is parallel to the third mounting plate 31 and the bottom is connected to the second-level mating part 322. The mating plate 33 and the third mounting plate 31 are located on the same side of the third bearing plate 32. The mating plate 33 is connected to the offset driving member 4 of the second-level offset adjustment unit.

[0060] In the first-stage offset seat 3, the third mounting plate 31 and the mating plate 33 may or may not be connected. Preferably, the third mounting plate 31 is connected to the mating plate 33, which can improve the rigidity of the first-stage offset seat 3. The drive shaft of the first-stage offset drive 4 passes through the third mounting plate 31 and is connected to the offset adapter plate 52 for transmission.

[0061] The bottom surface of the primary mating part 321 may be provided with a slider, which slides in engagement with the guide rail on the top surface of the transition bearing plate 53. The top surface of the secondary mating part 322 may be provided with a guide rail along the second direction Y, and the bottom surface of the second-stage offset seat 3 may be provided with a slider that slides in engagement with the guide rail.

[0062] In the technical scheme of the above embodiment, the third mounting plate 31 is arranged on the side away from the offset adapter plate 52 and is used to mount the first offset driving member 4, so that the first offset driving member 4 is located above the third bearing plate 32, the space occupation is reduced, and the stress is optimized. The second matching part 322 of the third bearing plate 32 is closer to the first bearing plate 13 than the first matching part 321, so that the installation height of the second offset adjusting unit is reduced, the distance between the diaphragm sheet 6 and the driving shaft of the first displacement driving member 2 is reduced, and the adjustment accuracy is improved. The matching plate 33 and the third mounting plate 31 are located on the same side of the third bearing plate 32, so that the second offset adjusting unit is located above the first bearing plate 13, the space occupation is reduced, and the stress is optimized.

[0063] As shown in Figure 3 and Figure 4 In some embodiments of the present application, the offset seat 3 includes a fourth mounting plate 34, a fourth bearing plate 35, and a diaphragm support 36. The fourth mounting plate 34 is arranged parallel to the matching plate 33 and is fixedly connected to the offset driving member 4 on the side away from the matching plate 33. The fourth bearing plate 35 is arranged parallel to the second matching part 322 and is connected to the bottom of the fourth mounting plate 34. The bottom surface of the fourth bearing plate 35 is in sliding fit with the first offset adjusting unit, and the fourth bearing plate 35 is provided with a mounting part 351 on the side facing the avoiding opening. The diaphragm support 36 is connected to the mounting part 351 at one end in the first direction X and is sealingly connected to the sealing member 121 at the other end. The diaphragm support 36 is provided with a mounting surface for providing a mounting position for the diaphragm. The mounting surface and the displacement driving member 2 axis of the first displacement adjusting unit are located in the same plane.

[0064] The second offset driving member 4 is mounted on the side of the fourth mounting plate 34 away from the matching plate 33. The driving shaft of the second offset driving member 4 is in transmission connection with the matching plate 33 after passing through the fourth mounting plate 34.

[0065] The mounting part 351 is located on the fourth bearing plate 35 and is used to provide a mounting position for the diaphragm support 36. The diaphragm support 36 is detachably connected to the mounting part 351. For example, the mounting part 351 can have a fastening opening and an adjusting groove. The mounting part 351 is divided into two parts by the adjusting groove and is connected by a bolt. After the diaphragm support 36 is inserted into the fastening opening and the bolt is tightened, the adjusting groove becomes narrower, and the fastening opening can clamp the diaphragm support 36.

[0066] For example, the diaphragm support 36 can include a connecting rod, a mounting head, and a bearing sheet. The mounting head is connected to one end of the connecting rod away from the mounting part 351. The connecting rod passes through the avoiding opening, and the sealing member 121 is connected between the connecting plate 12 and the mounting head. The bearing sheet is mounted on the mounting head and can be connected to the mounting head by a bolt. The bearing sheet is processed with a bearing surface, which is used to place the diaphragm sheet 6 and can clamp the diaphragm sheet 6 in cooperation with the pressing sheet.

[0067] In the technical solution of the above embodiment, the second-stage offset drive 4 is installed on the side of the fourth mounting plate 34 facing away from the mating plate 33. This not only allows the second-stage offset drive 4 to be located above the first bearing plate 13, optimizing space utilization and force distribution, but also shortens the distance between the fourth mounting plate 34 and the mating plate 33, reducing the impact on stiffness and improving transmission accuracy. The mounting surface and the axis of the first-stage displacement drive 2 are located in the same plane, which can improve the transmission accuracy of the first-stage displacement drive 2 and reduce the adjustment amount of the second-stage displacement drive 2, thereby reducing the adjustment workload.

[0068] This application also provides a semiconductor testing device, which includes the aperture adjustment device in any of the above embodiments.

[0069] Since the semiconductor testing equipment includes the aperture adjustment device in any of the above embodiments, the semiconductor testing equipment has all the advantages of the above embodiments, which will not be repeated here.

[0070] like Figures 1 to 4 As shown, in some embodiments of this application, the aperture adjustment device includes a first-stage displacement seat 1, a first-stage displacement drive 2, a second-stage displacement seat 1, a second-stage displacement drive 2, an adapter 5, a first-stage offset seat 3, a first-stage offset drive 4, a second-stage offset seat 3, and a second-stage offset drive 4. The first-stage displacement drive 2, the second-stage displacement drive 2, the first-stage offset drive 4, and the second-stage offset drive 4 are all linear motors. The lead of the first-stage displacement drive 2 is greater than the lead of the second-stage displacement drive 2; the lead of the first-stage offset drive 4 is greater than the lead of the second-stage offset drive 4. The first-stage displacement drive 2 is mounted on the first-stage displacement seat 1, passes through the first-stage displacement seat 1, and is threadedly engaged with the second-stage displacement seat 1. The second-stage displacement drive 2 is mounted on the second-stage displacement seat 1, passes through the second-stage displacement seat 1, and is threadedly engaged with the adapter 5. The first-stage offset drive 4 is mounted on the first-stage offset seat 3, passes through the first-stage offset seat 3, and is threadedly engaged with the adapter 5. The second-stage offset drive 4 is mounted on the second-stage offset seat 3, passes through the second-stage offset seat 3, and is threaded into the first-stage offset seat 3. The second-stage displacement drive 2 is located above the first-stage displacement drive 2 and is arranged parallel to the first-stage displacement drive 2. The distance between the second-stage offset drive 4 and the first-stage displacement seat 1 is less than the distance between the first-stage offset drive 4 and the first-stage displacement seat 1, and it is arranged parallel to the first-stage displacement seat 1. The driving directions of the second-stage displacement drive 2 and the first-stage offset drive 4 are perpendicular. The first-stage displacement seat 1 and the second-stage displacement seat 1 are in sliding engagement; the second-stage displacement seat 1 and the adapter seat 5 are in sliding engagement; the adapter seat 5 and the first-stage offset seat 3 are in sliding engagement; the first-stage offset seat 3 and the second-stage offset seat 3 are in sliding engagement; the second-stage offset seat 3 is connected to the aperture plate 6. During the sliding engagement, guide rails and sliders can be used to provide sliding guidance.

[0071] The displacement amount of the diaphragm plate 6 is adjusted when translating along the first direction X, and the offset amount of the diaphragm plate 6 is adjusted when translating along the second direction Y. When coarsely adjusting the displacement amount, the first-stage displacement drive member 2 drives the second-stage displacement seat 1 to translate along the first direction X, and the second-stage displacement drive member 2 drives the adapter seat 5 to translate along the first direction X, so that the second-stage displacement seat 1 and the adapter seat 5 translate in the same direction, and the displacement amount can be quickly coarsely adjusted. When finely adjusting the displacement amount, the second-stage displacement seat 1 and the adapter seat 5 translate in opposite directions, so that the transmission error of the first-stage displacement drive member 2 and the second-stage displacement drive member 2 is reduced to be less than the lead difference of the first-stage displacement drive member 2 and the second-stage displacement drive member 2. When coarsely adjusting the offset amount, the first-stage offset drive member 4 drives the first-stage offset seat 3 to translate along the second direction Y, and the second-stage offset drive member 4 drives the second-stage offset seat 3 to translate along the second direction Y, so that the first-stage offset seat 3 and the second-stage offset seat 3 translate in the same direction, and the offset amount can be quickly coarsely adjusted. When finely adjusting the offset amount, the first-stage offset seat 3 and the second-stage offset seat 3 translate in opposite directions, so that the transmission error of the first-stage offset drive member 4 and the second-stage offset drive member 4 is reduced to be less than the lead difference of the first-stage offset drive member 4 and the second-stage offset drive member 4.

[0072] The diaphragm plate 6 is adjusted by the diaphragm adjustment device, so that the diaphragm plate 6 in the vacuum environment inside the semiconductor detection device can be precisely adjusted outside the semiconductor detection device, the adjustment precision is improved, and the imaging effect is ensured.

[0073] The above describes only specific implementation manners of the present application, and those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described system, modules and units can refer to the corresponding processes in the foregoing method embodiments, which will not be described herein. It should be understood that the protection scope of the present application is not limited to this, and any skilled person in the art can easily think of various equivalent modifications or replacements within the technical range disclosed in the present application, and these modifications or replacements should be covered in the protection scope of the present application.

Claims

1. An aperture adjustment device, characterized by The application relates to a multi-stage displacement adjusting unit and a multi-stage offset adjusting unit. The multi-stage displacement adjusting unit comprises displacement seats (1) and displacement driving members (2) fixedly connected with each other, the displacement driving member (2) of an upper stage of the displacement adjusting unit is drivingly connected with the displacement seat (1) of a lower stage of the displacement adjusting unit, and the displacement seat (1) of the lower stage is slidingly connected with the displacement seat (1) of the upper stage. The multi-stage offset adjusting unit comprises offset seats (3) and offset driving members (4) fixedly connected with each other, the offset driving member (4) of a lower stage of the offset adjusting unit is drivingly connected with the offset seat (3) of an upper stage of the offset adjusting unit, and the offset seat (3) of the lower stage is slidingly connected with the offset seat (3) of the upper stage. An adapter seat (5) is slidingly connected with the displacement seat (1) of the displacement adjusting unit of the last stage in a first direction (X) and is drivingly connected with the displacement driving member (2) of the displacement adjusting unit of the last stage, and the adapter seat (5) is slidingly connected with the offset seat (3) of the offset adjusting unit of the first stage in a second direction (Y) and is drivingly connected with the offset driving member (4) of the offset adjusting unit of the first stage, the first direction (X) is the length direction of the diaphragm adjusting device, and the second direction (Y) is arranged to intersect the first direction (X).

2. The aperture adjustment device of claim 1, wherein, The multi-stage displacement adjusting unit, the adapter seat (5) and the multi-stage offset adjusting unit are arranged in sequence along the first direction (X), and the first direction (X) is arranged to be perpendicular to the second direction (Y).

3. The aperture adjustment device of claim 1, wherein, In the multi-stage displacement adjusting unit, the displacement adjusting unit of a lower stage is farther away from the displacement seat (1) of the displacement adjusting unit of a first stage than the displacement adjusting unit of an upper stage. In the multi-stage offset adjusting unit, the offset adjusting unit of a lower stage is closer to the displacement seat (1) of the offset adjusting unit of a first stage than the offset adjusting unit of an upper stage.

4. The aperture adjustment device of claim 1, wherein, The number of stages of the multi-stage displacement adjusting unit is two, and the multi-stage displacement adjusting unit comprises a first-stage displacement adjusting unit and a second-stage displacement adjusting unit; the first-stage displacement adjusting unit is used for coarsely adjusting the displacement of a diaphragm sheet (6), and the second-stage displacement adjusting unit is used for finely adjusting the displacement of the diaphragm sheet (6). The number of stages of the multi-stage offset adjusting unit is two, and the multi-stage offset adjusting unit comprises a first-stage offset adjusting unit and a second-stage offset adjusting unit; the first-stage offset adjusting unit is used for coarsely adjusting the offset of the diaphragm sheet (6), and the second-stage offset adjusting unit is used for finely adjusting the offset of the diaphragm sheet (6).

5. The aperture adjustment device of claim 4, wherein, In the first-stage displacement adjusting unit, the displacement seat (1) comprises: A first mounting plate (11) is fixedly connected with the displacement driving member (2), and the first mounting plate (11) is arranged to be perpendicular to the first direction (X); A connecting plate (12) is arranged to be parallel to the first mounting plate (11), the connecting plate (12) is provided with a relief opening and a sealing member (121), the sealing member (121) is located on the side of the connecting plate (12) away from the first mounting plate (11), and is used for sealing the relief opening. The first bearing plate (13) is parallel to the first mounting plate (11) and is connected to the bottom of the first mounting plate (11) and the bottom of the connecting plate (12), and the top surface of the first bearing plate (13) is slidably connected to the displacement adjustment unit of the second stage along the first direction (X).

6. The aperture adjustment device of claim 5, wherein, In the displacement adjustment unit of the second stage, the displacement seat (1) comprises: The second mounting plate (14) is parallel to the first mounting plate (11) and is fixedly connected to the displacement driving member (2) on the side facing the first mounting plate (11) and is drivingly connected to the displacement driving member (2) of the displacement adjustment unit of the first stage; The second bearing plate (15) is parallel to the first bearing plate (13) and is connected to the bottom of the second mounting plate (14), and the bottom surface of the second bearing plate (15) is slidably connected to the displacement adjustment unit of the first stage, and the top surface is slidably connected to the adapter seat (5) along the first direction (X).

7. The aperture adjustment device of claim 6, wherein, The adapter seat (5) comprises: The displacement adapter plate (51) is parallel to the second mounting plate (14) and is drivingly connected to the displacement driving member (2) of the displacement adjustment unit of the second stage; The offset adapter plate (52) is perpendicular to the displacement adapter plate (51) and is drivingly connected to the offset driving member (4) of the offset adjustment unit of the first stage; The adapter bearing plate (53) is parallel to the second bearing plate (15) and is connected to the bottom of the displacement adapter plate (51) and the bottom of the offset adapter plate (52), and the bottom surface of the adapter bearing plate (53) is slidably connected to the displacement adjustment unit of the second stage along the first direction (X), and the top surface is slidably connected to the offset adjustment unit of the first stage along the second direction (Y).

8. The aperture adjustment device of claim 7, wherein, In the offset adjustment unit of the first stage, the offset seat (3) comprises: The third mounting plate (31) is parallel to the offset adapter plate (52) and is fixedly connected to the offset driving member (4) on the side away from the offset adapter plate (52); The third bearing plate (32) comprises a first matching part (321), a second matching part (322) and a connecting part (323), the first matching part (321) is parallel to the adapter bearing plate (53), the bottom surface of the first matching part (321) is slidably connected to the adapter seat (5), the second matching part (322) is parallel to the first matching part (321), the top surface of the second matching part (322) is slidably connected to the offset adjustment unit of the second stage along the second direction (Y), the connecting part (323) is connected to the first matching part (321) at the top and is connected to the second matching part (322) at the bottom, and the connecting part (323) is perpendicular to the first direction (X); A matching plate (33) is arranged in parallel with the third mounting plate (31) and connected to the second-level matching part (322) at the bottom. The matching plate (33) is located on the same side of the third bearing plate (32) as the third mounting plate (31). The matching plate (33) is in transmission connection with the offset driving member (4) of the second-level offset adjustment unit.

9. The aperture adjustment device of claim 8, wherein, In the second-level offset adjustment unit, the offset seat (3) comprises: A fourth mounting plate (34) is arranged in parallel with the matching plate (33) and fixedly connected to the offset driving member (4) on the side away from the matching plate (33). A fourth bearing plate (35) is arranged in parallel with the second-level matching part (322) and connected to the bottom of the fourth mounting plate (34). The bottom surface of the fourth bearing plate (35) is in sliding connection with the first-level offset adjustment unit. The fourth bearing plate (35) is provided with a mounting part (351) on the side facing the avoiding opening. A diaphragm support (36) is connected to the mounting part (351) at one end in the first direction (X) and sealingly connected to the sealing member (121) at the other end. The diaphragm support (36) is provided with a mounting surface for providing a mounting position for a diaphragm. The mounting surface and the axis of the displacement driving member (2) of the first-level displacement adjustment unit are located in the same plane.

10. A semiconductor inspection apparatus characterized by comprising: The diaphragm adjustment device comprises the diaphragm adjustment device according to any one of claims 1 to 9.

Images