Diaphragm adjusting device and semiconductor detection equipment

Abstract

The utility model discloses a diaphragm adjusting device and semiconductor detection equipment. The diaphragm adjusting device comprises a moving assembly, a rotating assembly and an adjusting part, the moving assembly comprises a base, a sliding block and a linear driving piece, the sliding block is installed on the base and is in sliding fit with the base in the sliding direction, and the linear driving piece is connected with the base and the sliding block; the rotating assembly comprises a rotating frame and a rotary driving piece, the rotating frame is installed on the sliding block and connected with the diaphragm piece in the sliding direction, the rotating frame is in rotating fit with the sliding block around a rotating axis, the rotating axis and the sliding direction are arranged in an intersecting mode, and the rotating driving piece is arranged on the rotating frame. The rotary driving part is mounted on the base, and the rotary driving part and the rotating frame are arranged in a separable manner; the adjusting piece is elastically connected with the rotating frame and the sliding block. The adjusting piece can improve the repeated positioning precision; the rotary driving piece and the rotating frame can be separated, the diaphragm can be independently adjusted through the moving assembly and the rotating assembly, and the adjusting precision is high.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor technology, and particularly relates to a diaphragm adjusting device and a semiconductor detection equipment. BACKGROUND

[0002] A scanning electron microscope (SEM) is a kind of electronic semiconductor detection equipment, which uses electromagnetic field to focus electrons and change the motion track of the electrons. In order to prevent the electrons deviating from the axis and having energy not meeting the requirements from moving downward, and to reduce or eliminate other scattered electrons, a diaphragm is generally arranged on an objective lens. The intensity and range of the electron beam irradiated to a sample are controlled by adjusting the diaphragm, so as to optimize the imaging effect. Therefore, the positioning accuracy of the diaphragm has an important influence on the electron beam imaging.

[0003] When the position of the diaphragm is adjusted, how to design the moving assembly to meet the high-precision requirement during the adjustment becomes a problem to be solved in the field. CONTENT OF THE UTILITY MODEL

[0004] Embodiments of the application provide a diaphragm adjusting device and a semiconductor detection equipment, which can improve the adjusting accuracy and the repeat positioning accuracy of the diaphragm sheet.

[0005] In a first aspect, the embodiments of the application provide a diaphragm adjusting device, which comprises a moving assembly, a rotating assembly and an adjusting piece. The moving assembly comprises a base, a sliding block and a linear driving piece. The sliding block is installed on the base and is in sliding fit with the base in a sliding direction. The linear driving piece is connected with the base and the sliding block and is used to drive the sliding block to slide in the sliding direction. The rotating assembly comprises a rotating frame and a rotary driving piece. The rotating frame is installed on the sliding block and is connected with a diaphragm sheet in the sliding direction. The rotating frame is in rotary fit with the sliding block around a rotating axis. The rotating axis is arranged perpendicularly to the sliding direction. The rotary driving piece is installed on the base and is arranged in a separable manner with the rotating frame and is used to push the rotating frame to rotate. The adjusting piece is elastically connected between the rotating frame and the sliding block and is used to provide a reverse force when the rotary driving piece pushes the rotating frame to rotate and to maintain the rotating frame and the sliding block at an initial angle when the rotary driving piece is separated from the rotating frame.

[0006] Optionally, the rotating frame comprises a rotating shaft and a frame body. The rotating shaft is installed on the sliding block and is fixedly connected with the sliding block in a circumferential direction. The axis of the rotating shaft is the rotating axis and is arranged perpendicularly to the sliding direction. The frame body is installed on the rotating shaft and is in rotary connection with the rotating shaft. The frame body is connected with the diaphragm sheet in the sliding direction.

[0007] Optionally, the frame body comprises a rotating part, a connecting part and a bearing part; the rotating part is rotationally connected with the rotating shaft; one end of the connecting part is connected with the rotating part and the other end is connected with the diaphragm piece; the connecting part is located on one side of the rotating part in the sliding direction and extends away from the rotating part; the bearing part is connected with one end of the rotating part and is spaced apart from the sliding block; the bearing part is located on the other side of the rotating part in the sliding direction and extends away from the rotating part, and is used for providing a driving position for the rotary driving member.

[0008] Optionally, the connecting part is detachably connected with the rotating part; the rotating part is provided with a pitch fine adjustment member, the pitch fine adjustment member is threadedly connected with the rotating part and abuts against the connecting part, and the axis of the pitch fine adjustment member is arranged in parallel with the rotating axis; the rotating part is provided with a yaw fine adjustment member, the yaw fine adjustment member is threadedly connected with the rotating part and abuts against the connecting part, and the axis of the yaw fine adjustment member is arranged in perpendicular to the sliding direction and the rotating axis.

[0009] Optionally, the bearing part is provided with a bearing groove at one end away from the rotating part, the bearing groove has a bearing surface facing the rotary driving member, the bearing groove is arranged in parallel with the extension direction of the connecting part, and the bearing surface is used for providing an abutting position for the rotary driving member; the distance between the bearing surface and the rotating shaft is not less than the distance between the diaphragm piece and the rotating shaft.

[0010] Optionally, the rotating frame further comprises a gap adjustment member, the gap adjustment member is threadedly connected with the rotating part and one end thereof abuts against the sliding block, the gap adjustment member is arranged in parallel with the rotating axis, and is used for adjusting the gap between the rotating part and the sliding block along the rotating axis.

[0011] Optionally, the rotating frame further comprises a pressing member, the pressing member is threadedly connected with the rotating part and one end thereof abuts against the rotating shaft, the axis of the pressing member intersects with the rotating axis, and is used for reducing the rotary gap between the rotating part and the rotating shaft.

[0012] Optionally, the adjustment member comprises an adjustment rod and an elastic member; the adjustment rod comprises an adjustment segment and a limiting end, the adjustment segment is threadedly connected with the sliding block, and the limiting end abuts against the end surface of the bearing part facing away from the sliding block; the elastic member is compressively arranged between the bearing part and the sliding block, one end of the elastic member abuts against the sliding block and the other end abuts against the end surface of the bearing part facing the sliding block.

[0013] Optionally, the base comprises a matching part, a mounting part and an assembly part; the matching part is provided with a guide rail which is in sliding cooperation with the sliding block; the mounting part is connected to one end of the matching part in the sliding direction and is arranged perpendicularly to the matching part; the mounting part is provided with an avoiding opening and a limiting piece; the axis of the limiting piece is arranged in parallel to the rotation axis; the limiting piece is in threaded connection with the mounting part and extends into the avoiding opening and is used for limiting the rotating frame; the assembly part is connected to the other end of the matching part in the sliding direction; the matching part comprises a linear assembly part and a rotary assembly part; the linear assembly part is arranged in parallel to the mounting part; the rotary assembly part is arranged perpendicularly to the linear assembly part; the linear assembly part is connected with the linear driving piece; the rotary assembly part is connected with the rotary driving piece.

[0014] Optionally, the diaphragm adjusting device further comprises a detection assembly; the detection assembly comprises a grating ruler and a displacement sensor; the grating ruler comprises a ruler grating and a reading head; the ruler grating is mounted on the matching part; the reading head is mounted on the rotating frame; the reading head is used for cooperating with the ruler grating to detect the displacement of the rotating frame in the sliding direction; the displacement sensor is mounted on the rotary assembly part and is used for detecting the rotation amount of the rotating frame around the rotation axis.

[0015] In the second aspect, the embodiments of the present application provide a semiconductor detection device; the semiconductor detection device comprises a device main body, a diaphragm sheet and the diaphragm adjusting device in the above technical solution; the diaphragm adjusting device is mounted on the device main body; the diaphragm sheet is mounted on the diaphragm adjusting device.

[0016] The embodiments of the present application provide a diaphragm adjusting device and a semiconductor detection device; the diaphragm adjusting device comprises a moving assembly, a rotating assembly and an adjusting piece; the moving assembly comprises a base, a sliding block and a linear driving piece; the rotating assembly comprises a rotating frame and a rotary driving piece; the sliding block is in sliding cooperation with the base; the rotating frame is in rotating cooperation with the sliding block; the rotating frame is connected with the diaphragm sheet; the moving assembly and the rotating assembly can realize the position adjustment of the diaphragm sheet; the adjusting piece is elastically connected between the rotating frame and the sliding block; when the rotating frame is not affected by the force of the rotary driving piece, the rotating frame and the sliding block can be maintained at an initial angle, so as to improve the repeated positioning accuracy of the diaphragm sheet when swinging; the rotary driving piece and the rotating frame are arranged in a separable mode; the translation of the diaphragm sheet in the sliding direction is not affected by the rotary driving piece, so as to improve the adjusting accuracy of the diaphragm sheet. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application; those skilled in the art can also obtain other drawings according to these drawings without paying creative labor.

[0018] Figure 1 Structure diagram of the light diaphragm adjusting device from another perspective for some embodiments of the present application;

[0019] Figure 2 Structure diagram of the light diaphragm adjusting device from another perspective for some embodiments of the present application;

[0020] Figure 3 Connection diagram of the moving assembly and the rotating assembly for some embodiments of the present application;

[0021] Figure 4 Partial sectional view of the light diaphragm adjusting device for some embodiments of the present application;

[0022] Figure 5 Structure diagram of the light diaphragm sheet for some embodiments of the present application.

[0023] In the drawings:

[0024] 1-moving assembly; 11-base; 111-mating part; 1111-guide rail; 112-mounting part; 1121-avoidance opening; 1122-limiting piece; 113-fitting part; 1131-linear fitting part; 1132-rotary fitting part; 12-sliding block; 13-linear driving piece; 2-rotating assembly; 21-rotating frame; 211-rotating shaft; 212-frame body; 2121-rotating part; 21211-elevation fine adjustment piece; 21212-tilt fine adjustment piece; 2122-connection part; 2123-bearing part; 21231-bearing surface; 213-adjusting piece; 214-pressing piece; 22-rotary driving piece; 3-adjusting piece; 31-adjusting rod; 4-detecting assembly; 41-grating ruler; 411-ruler grating; 412-reading head; 42-displacement sensor; 5-light diaphragm sheet; 51-zero position hole; 52-grating hole. DETAILED DESCRIPTION

[0025] The features and exemplary embodiments of various aspects of the present application will be described in detail below with reference to the drawings. The following detailed description is merely intended to explain the present application, and is not intended to limit the present application. The present application can be implemented without some of the specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by showing examples of the present application.

[0026] It is to be understood that the terminology used herein such as first and second, and the like, is only used to distinguish one entity or action from another entity or action, without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0027] Scanning Electron Microscope (SEM) is a kind of semiconductor detection equipment. SEM obtains image and element information through the interaction of the electron beam generated by it and the sample surface, and the resolution can reach sub-nanometer level. The magnification of SEM is continuously or stepwise adjustable from tens of times to 230,000 times, the depth of field of the field of view is large, and the stereoscopic effect is strong, so that the sample surface topography characteristics can be observed, measured and analyzed under the condition of almost no damage to the sample.

[0028] In SEM, the electron (a negatively charged particle) is focused by electromagnetic field and the motion track of the electron is changed, and its lens system includes condenser magnetic lens, objective lens, scanning coil and lens barrel. The condenser magnetic lens is located at the upper part of the lens barrel, and the condenser magnetic lens controls the initial beam spot size. The objective lens is located at the lower part of the lens barrel, and the objective lens focuses the electron beam correctly aimed by the condenser magnetic lens on the sample. The scanning coil makes the electron beam scan on the sample surface in a raster manner.

[0029] In order to prevent the off-axis, energy unsatisfied demand electron from moving downward, and reduce or exclude other scattered electrons, a diaphragm is generally arranged on the objective lens. By adjusting the aperture size of the diaphragm, the intensity and range of the electron beam irradiated to the sample can be controlled, and the imaging effect is optimized, so the positioning accuracy of the diaphragm has an important influence on the electron beam imaging.

[0030] In SEM, there are mainly two ways to make the electron beam emitted by the electron gun pass through a specific hole on the diaphragm: the first way is that the diaphragm is fixed, and the electron beam motion track is adjusted by adjusting the electromagnetic field to make it pass through the hole; the second way is that the diaphragm moves, and the hole is moved to the position of the electron beam to make the center axis of the hole and the electron beam flow axis accurately centered, and the moving diaphragm has two types of manual and automatic.

[0031] When the first mode is adopted, an additional electromagnetic field component needs to be added in the scanning electron microscope, and an electric control module needs to be added. When the second mode is adopted for manual adjustment, the adjustment accuracy is low, and due to the poor stability of the hand (easy to shake), even if a high-precision measuring device is used for position feedback, it is difficult to adjust to the required micron or sub-micron level of centering accuracy. When the second mode is adopted for automatic adjustment, the required centering accuracy can be obtained through high-precision motion feedback of the precise moving component and the detection component. However, the motion resolution of the driving unit of the moving component, the measurement accuracy of the detection component, and the control accuracy during feedback comprehensively affect the centering accuracy. Moreover, the overall modal of the moving component and the stiffness of the motion part thereof affect the long-term retention and the repeat positioning accuracy of the centering accuracy.

[0032] Therefore, how to design the moving component to meet the requirements of high accuracy and high repeat positioning accuracy of the centering during automatic adjustment has become a problem to be solved in the field.

[0033] In view of this, the embodiments of the present application provide a diaphragm adjusting device and a semiconductor detection equipment.

[0034] Please refer to Figures 1 to 5 , Figure 1 A structure schematic diagram of the diaphragm adjusting device of some embodiments of the present application from one perspective; Figure 2 A structure schematic diagram of the diaphragm adjusting device of some embodiments of the present application from another perspective; Figure 3 A connection schematic diagram of the moving component and the rotating component of some embodiments of the present application; Figure 4 A partial sectional view of the diaphragm adjusting device of some embodiments of the present application; Figure 5 A structure schematic diagram of the diaphragm sheet of some embodiments of the present application.

[0035] In a first aspect, as Figures 1 to 3As shown, the embodiment of the present application provides a diaphragm adjusting device, which comprises a moving assembly 1, a rotating assembly 2 and an adjusting member 3. The moving assembly 1 comprises a base 11, a sliding block 12 and a linear driving member 13. The sliding block 12 is installed on the base 11 and is in sliding fit with the base 11 in a sliding direction. The linear driving member 13 is connected with the base 11 and the sliding block 12 and is used to drive the sliding block 12 to slide in the sliding direction. The rotating assembly 2 comprises a rotating frame 21 and a rotating driving member 22. The rotating frame 21 is installed on the sliding block 12 and is connected with the diaphragm plate 5 in the sliding direction. The rotating frame 21 is in rotating fit with the sliding block 12 around a rotating axis, and the rotating axis is arranged intersecting with the sliding direction. The rotating driving member 22 is installed on the base 11 and is arranged in separable mode with the rotating frame 21, and is used to push the rotating frame 21 to rotate. The adjusting member 3 is elastically connected between the rotating frame 21 and the sliding block 12, and is used to provide a counterforce when the rotating driving member 22 pushes the rotating frame 21 to rotate, and to maintain the rotating frame 21 and the sliding block 12 at an initial angle when the rotating driving member 22 is separated from the rotating frame 21.

[0036] In the moving assembly 1, the base 11 is used as a mounting base. The base 11 can be mounted on the wall of a lens barrel. The sliding block 12 and the linear driving member 13 are both mounted on the base 11. Meanwhile, the base 11 can also be used as a component connected with a semiconductor detection device, and as a component providing sliding guide for the sliding block 12. The sliding block 12 is in sliding fit with the base 11. Under the driving of the linear driving member 13, the sliding block 12 can slide in the sliding direction, so as to adjust the position of the diaphragm plate 5 in the sliding direction.

[0037] The sliding block 12 is in sliding fit with the base 11. The base 11 can be provided with a guide rail 1111, which provides sliding guide for the sliding block 12. When the guide rail 1111 is arranged on the base 11, the guide rail 1111 can be directly machined on the base 11, or the guide rail 1111 can be mounted on the base 11. The guide rail 1111 and the sliding block 12 are in sliding fit, which can improve the motion accuracy of the sliding block 12 in the sliding direction. Meanwhile, the guide rail 1111 protrudes from the surface of the base 11, which can also improve the rigidity of the base 11 in the sliding direction, so as to improve the long-term maintenance of motion accuracy and the repeat positioning accuracy. Exemplarily, the base 11 can be made of metal material with high strength and small density. The base 11 can be provided with a cantilever beam in the sliding direction, so as to improve the safety factor through stress simulation.

[0038] The linear driving member 13 can provide a pushing force and a pulling force for the displacement of the sliding block 12 in the sliding direction. Exemplarily, the linear driving member 13 can be one of a direct push motor, a pneumatic cylinder, and a hydraulic cylinder; the linear driving member 13 can also be a combination of a motor and a transmission mechanism, the motor providing a rotary driving force, and the transmission mechanism realizing the conversion between the rotary motion and the linear motion. The transmission mechanism can be a nut fixed to the sliding block 12 and a bolt coaxially installed on the motor shaft, the motor shaft rotating to drive the bolt to rotate, and the linear driving of the sliding block 12 being realized through the thread cooperation; the transmission mechanism can also be a gear installed on the motor shaft and a rack fixed to the sliding block 12, the motor shaft rotating to drive the gear to rotate, and the linear driving of the sliding block 12 being realized through the meshing of the gear and the rack.

[0039] Preferably, the linear driving member 13 is a direct push motor, and the direct push motor is connected to the sliding block 12 through bolt connection. The direct push motor has high motion resolution, and can improve the adjustment accuracy of the diaphragm plate 5 in the sliding direction. The direct push motor and the sliding block 12 are fastened through the bolt, which can reduce the transmission error of the direct push motor and the sliding block 12 during transmission, and improve the adjustment accuracy.

[0040] In the rotating assembly 2, the rotating frame 21 is rotatably installed on the sliding block 12, and the rotating frame 21 rotates on the sliding block 12 about the rotating axis. The rotating frame 21 is connected to the diaphragm plate 5 in the sliding direction, and the rotating axis is arranged to intersect the sliding direction, and when the rotating frame 21 rotates, the diaphragm plate 5 can be driven to swing relative to the sliding direction, so as to finely adjust the diaphragm plate 5. When the rotating axis is arranged to intersect the sliding direction, the rotating axis can be arranged to be perpendicular to the sliding direction, or the rotating axis and the sliding direction can have an included angle less than 90°.

[0041] The rotary driving member 22 is arranged to be separable from the rotating frame 21, and the rotary driving member 22 can be extended and retracted towards the rotating frame 21, and when extended, the rotary driving member 22 can gradually approach the rotating frame 21, contact the rotating frame 21, and drive the rotating frame 21 to rotate; when retracted, the rotating frame 21 is reversely rotated under the action of the counterforce of the adjusting member 3, until the rotating frame 21 is separated from the rotary driving member 22.

[0042] When the rotary driving member 22 contacts the rotating frame 21 and applies a pushing force to the rotating frame 21, the rotating frame 21 can be driven to rotate about the rotating axis; when the rotary driving member 22 does not contact the rotating frame 21, no force is applied to the rotating frame 21, and the motion accuracy of the rotating frame 21 in the sliding direction is not affected.

[0043] Exemplarily, the rotary driving member 22 can be one of a direct push motor, a pneumatic cylinder, and a hydraulic cylinder, and when abutting against the rotating frame 21, the rotary driving member 22 can provide a pushing force for the rotating frame 21 to drive the rotating frame 21 to rotate.

[0044] Preferably, the rotary driving member 22 is a linear motor, and the free end of the push rod of the linear motor is rounded (e.g., in the shape of a ball) to provide a pushing force when abutting against the rotating frame 21, reduce friction, and improve the motion resolution, thereby improving the motion accuracy of the diaphragm 5 when swinging.

[0045] When the rotary driving member 22 and the linear driving member 13 are both linear motors, the axes of the push rods of the two linear motors can be parallel, intersecting, or coplanar. In addition, the rotary driving member 22 and the linear driving member 13 can be provided with handwheels connected to the main shafts of the linear motors, so that the diaphragm 5 can be adjusted by the handwheels during debugging, thereby improving the flexibility.

[0046] The adjusting member 3 is elastic to provide a force adjustment. The adjusting member 3 is connected between the rotating frame 21 and the sliding block 12. When the rotary driving member 22 does not contact the rotating frame 21, the adjusting member 3 can maintain the rotating frame 21 and the sliding block 12 at an initial angle by its own elastic force, thereby keeping the rotating frame 21 and the sliding block 12 relatively stationary. When the rotary driving member 22 drives the rotating frame 21 to rotate, the adjusting member 3 can be elastically deformed to provide a counterforce to keep the rotating frame 21 abutting against the rotary driving member 22 at all times. Illustratively, the adjusting member 3 can be an elastic member such as a spring or a rubber block, which can maintain the rotating frame 21 and the sliding block 12 relatively stationary when not subjected to an external force, and can be elastically deformed when the rotating frame 21 is subjected to a driving force of the rotary driving member 22, without affecting the rotation of the rotating frame 21. In addition, the angle between the rotating frame 21 and the sliding block 12 can be adjusted by changing the length of the adjusting member 3 connected between the rotating frame 21 and the sliding block 22, and the angle between the rotating frame 21 and the sliding block 12 when the rotating frame 21 is not subjected to a pushing force of the rotary driving member 22 is the initial angle.

[0047] In the technical solutions of the above embodiments, the linear driving member 13 drives the sliding block 12 to slide to adjust the position of the diaphragm 5 in the sliding direction, and the rotary driving member 22 drives the rotating frame 21 to rotate to adjust the position of the diaphragm 5 when swinging about the rotation axis, thereby achieving the position adjustment of the diaphragm 5. The adjusting member 3 is elastically connected between the rotating frame 21 and the sliding block 12, and can maintain the rotating frame 21 and the sliding block 12 at an initial angle when the rotating frame 21 is not subjected to a driving force of the rotary driving member 22, thereby improving the repeatability of the diaphragm 5 when swinging. The rotary driving member 22 and the rotating frame 21 are separately arranged, and the translation of the diaphragm 5 in the sliding direction is not affected by the rotary driving member 22, thereby improving the adjustment accuracy of the diaphragm 5.

[0048] In some embodiments of the present application, as shown in Figure 1As shown, the rotating frame 21 comprises a rotating shaft 211 and a frame body 212; the rotating shaft 211 is mounted on the sliding block 12 and fixedly connected with the sliding block 12 in the circumferential direction, the axis of the rotating shaft 211 is the rotating axis, and the rotating axis is arranged perpendicularly to the sliding direction; the frame body 212 is mounted on the rotating shaft 211 and rotatably connected with the rotating shaft 211, and the frame body 212 is connected with the diaphragm plate 5 in the sliding direction.

[0049] The rotating shaft 211 is fixedly connected with the sliding block 12, and the rotating shaft 211 is rotatably connected with the frame body 212, so that only the frame body 212 rotates around the rotating shaft 211 when the rotating frame 21 rotates, instead of the rotating shaft 211 and the frame body 212 rotating on the sliding block 12 at the same time, which can reduce the influence of the assembly precision of the rotating shaft 211 and the sliding block 12 on the motion precision of the frame body 212. For example, the rotating shaft 211 can be selected as a high-precision oil-free copper bushing to improve the wear resistance and the rotation precision of the frame body 212.

[0050] The rotating axis is arranged perpendicularly to the sliding direction, and the frame body 212 is connected with the diaphragm plate 5 in the sliding direction, so that the translation and the swing of the diaphragm plate 5 are located in the same plane, and the position adjustment of the diaphragm plate 5 can be realized in the plane, and the displacement of the diaphragm plate 5 is limited in the plane.

[0051] In the technical scheme of the above embodiment, the rotating shaft 211 is fixedly connected with the sliding block 12 in the circumferential direction, which can provide a good basis for the rotation of the frame body 212, thereby improving the precision of the swing of the diaphragm plate 5. The frame body 212 is connected with the diaphragm plate 5 in the sliding direction, and the rotating axis is arranged perpendicularly to the sliding direction, so that the position adjustment of the diaphragm plate 5 can be realized in the plane, and the position of the diaphragm plate 5 will not be changed in the direction perpendicular to the plane during the adjustment.

[0052] In some embodiments of the present application, as shown in Figure 2 As shown, the frame body 212 comprises a rotating part 2121, a connecting part 2122 and a bearing part 2123; the rotating part 2121 is rotatably connected with the rotating shaft 211; one end of the connecting part 2122 is connected with the rotating part 2121, and the other end is connected with the diaphragm plate 5, the connecting part 2122 is located on one side of the rotating part 2121 in the sliding direction and extends away from the rotating part 2121; the bearing part 2123 is connected to one end of the rotating part 2121 and is arranged in a spaced manner with the sliding block 12, the bearing part 2123 is located on the other side of the rotating part 2121 in the sliding direction and extends away from the rotating part 2121, and is used for providing a driving position for the rotary driving member 22.

[0053] The frame body 212 can be integrally formed or can be in a split type. In the sliding direction, the rotating portion 2121 is located between the connecting portion 2122 and the bearing portion 2123. When the connecting portion 2122 extends away from the rotating portion 2121, the connecting portion 2122 can extend along a straight line perpendicular to the interface between the rotating portion 2121 and the connecting portion 2122 or can extend along a straight line at an acute angle to the interface. When the bearing portion 2123 extends away from the rotating portion 2121, the bearing portion 2123 can extend along a straight line perpendicular to the interface between the bearing portion 2123 and the connecting portion 2122 or can extend along a straight line at an acute angle to the interface.

[0054] When the bearing portion 2123 is connected to the rotating portion 2121, one end of the bearing portion 2123 can be connected to an end of the rotating portion 2121 (one end of the rotating portion 2121 in a direction perpendicular to the sliding direction and the rotation axis) to leave a gap between the bearing portion 2123 and the slider 12. When the swivel drive 22 presses the bearing portion 2123, the connecting portion 2122 can be driven to rotate to achieve the swing of the diaphragm sheet 5.

[0055] In the technical solutions of the above embodiments, the connecting portion 2122 and the bearing portion 2123 both extend away from the rotating portion 2121, and the connecting portion 2122 and the bearing portion 2123 are located on both sides of the rotating portion 2121 in the sliding direction, which facilitates the arrangement of the mounting position and the cooperation position of the swivel drive 22.

[0056] In some embodiments of the present application, as shown in Figure 2 and Figure 4 the connecting portion 2122 is detachably connected to the rotating portion 2121; the rotating portion 2121 is provided with a pitch fine adjustment member 21211, the pitch fine adjustment member 21211 is threadedly connected to the rotating portion 2121 and abuts against the connecting portion 2122, and the axis of the pitch fine adjustment member 21211 is arranged in parallel to the rotation axis; the rotating portion 2121 is provided with a yaw fine adjustment member 21212, the yaw fine adjustment member 21212 is threadedly connected to the rotating portion 2121 and abuts against the connecting portion 2122, and the axis of the yaw fine adjustment member 21212 is arranged perpendicular to the sliding direction and the rotation axis.

[0057] When the connecting portion 2122 is connected to the rotating portion 2121, the detachable connection of the connecting portion 2122 and the rotating portion 2121 can be achieved by a bolt connection. For example, the rotating portion 2121 can be provided with a connecting groove, one end of the connecting portion 2122 is located in the connecting groove and is screwed into a bolt along the extension direction of the connecting portion 2122, and the detachable connection of the connecting portion 2122 and the rotating portion 2121 can be achieved by the bolt.

[0058] One end of the connecting portion 2122 is connected with the rotating portion 2121, and the other end is provided with the diaphragm sheet 5. The one end of the diaphragm sheet 5 is away from the one end of the rotating portion 2121 in the sliding direction, so that the assembly precision of the connecting portion 2122 and the rotating portion 2121 at the connection position has a great influence on the position precision of the diaphragm sheet 5.

[0059] The error caused by the assembly precision to the position precision of the diaphragm sheet 5 mainly exists in two directions. One direction is parallel to the rotating axis, in which the connecting portion 2122 may be inclined downward under the influence of gravity, or inclined upward under the influence of machining precision, assembly precision and the like, so that the actual position of the connecting portion 2122 has a pitch angle with the theoretical position. The other direction is perpendicular to the sliding direction and the rotating axis, in which the connecting portion 2122 is inclined under the influence of assembly precision, machining precision and the like, so that the actual position of the connecting portion 2122 has a yaw angle with the theoretical position.

[0060] The axis of the pitch fine adjustment member 21211 is parallel to the rotating axis, and the pitch angle can be adjusted by adjusting the extrusion force of the pitch fine adjustment member 21211 to the connecting portion 2122. The axis of the yaw fine adjustment member 21212 is perpendicular to the sliding direction and the rotating axis, and the yaw angle can be adjusted by adjusting the extrusion force of the yaw fine adjustment member 21212 to the connecting portion 2122.

[0061] Exemplarily, the pitch fine adjustment member 21211 can be a stud or a bolt, which realizes the abutment with the connecting portion 2122 and the threaded connection with the rotating portion 2121 at the same time. The yaw fine adjustment member 21212 can be a stud or a bolt, which realizes the abutment with the connecting portion 2122 and the threaded connection with the rotating portion 2121 at the same time.

[0062] In the technical solution of the above embodiment, the connecting portion 2122 is detachably connected with the rotating portion 2121, and the connecting portion 2122 and the rotating portion 2121 are designed in a split type, which can improve the machining precision and convenience of the frame body 212. The pitch fine adjustment member 21211 and the yaw fine adjustment member 21212 are arranged on the rotating portion 2121 to adjust the connecting portion 2122, which can improve the assembly precision of the connecting portion 2122, and thus improve the position precision of the diaphragm sheet 5.

[0063] In some embodiments of the present application, as shown in Figure 2 and Figure 3 The bearing portion 2123 is provided with a bearing groove at the one end away from the rotating portion 2121, and the bearing groove is provided with a bearing surface 21231 facing the rotary driving member 22. The bearing groove is arranged in parallel with the extension direction of the connecting portion 2122, and the bearing surface 21231 is used to provide an abutment position for the rotary driving member 22. The distance between the bearing surface 21231 and the rotating shaft 211 is not less than the distance between the diaphragm sheet 5 and the rotating shaft 211.

[0064] The bearing groove is milled on the bearing part 2123, and is recessed on the surface of the bearing part 2123. The bearing groove is processed by milling to improve the position accuracy and roughness of the surface (bearing surface 21231) for matching the rotary driving member 22. In other possible designs, the bearing surface 21231 can also be a small flat surface protruding from the surface of the bearing part 2123. For example, the bearing surface 21231 can be formed on a protrusion of the bearing part 2123, and the protrusion faces the surface of the rotary driving member 22.

[0065] The bearing surface 21231 is arranged in parallel with the extension direction of the connecting part 2122, and the swing angle of the diaphragm plate 5 can be obtained by judging the rotation angle of the bearing surface 21231. The rotary driving member 22 can drive the frame 212 to rotate when the rotary driving member 22 abuts against the bearing surface 21231. The bearing surface 21231 has a first end close to the rotation shaft 211 and a second end far away from the rotation shaft 211. The distance between the first end and the rotation shaft 211 is not less than the distance between the diaphragm plate 5 and the rotation shaft 211, and thus the distance between the force point of the rotary driving member 22 on the bearing surface 21231 and the rotation shaft 211 is always greater than the distance between the diaphragm plate 5 and the rotation shaft 211.

[0066] In the technical solutions of the above embodiments, the bearing part 2123 is provided with the bearing groove, and the surface of the bearing groove for transmission matching with the rotary driving member is the bearing surface 21231. By matching the rotary driving member 22 with the bearing surface 21231, the accuracy of the swing of the diaphragm plate 5 can be improved, and the processing amount of the frame 212 can be reduced (only the position accuracy and surface roughness of the bearing surface 21231 need to be ensured by processing, and the entire surface of the bearing part 2123 facing the rotary driving member 22 does not need to be processed). The distance between the bearing surface 21231 and the rotation shaft 211 is not less than the distance between the diaphragm plate 5 and the rotation shaft 211. When the swing position of the diaphragm plate 5 is adjusted, the extension amount of the rotary driving member 22 is lengthened, so that the movement resolution of the diaphragm plate 5 when swinging is greater than the movement resolution of the rotary driving member 22, and the adjustment accuracy is improved.

[0067] In some embodiments of the present application, as shown in Figure 1 The rotary frame 21 further includes a gap adjusting member 213, which is threadedly connected with the rotating part 2121 and abuts against the sliding block 12 at one end. The gap adjusting member 213 is arranged in parallel with the rotation axis, and is used to adjust the gap between the rotating part 2121 and the sliding block 12 along the rotation axis.

[0068] When the rotating frame 21 is rotationally connected with the sliding block 12, the rotating shaft 211 is fixed on the sliding block 12, the frame body 212 is arranged on the sliding block 12, the rotating part 2121 is rotationally connected with the rotating shaft 211, and a gap is formed between the rotating part 2121 and the sliding block 12. The gap adjusting part 213 is in threaded connection with the rotating part 2121 and abuts against the sliding block 12, and the gap between the rotating part 2121 and the sliding block 12 can be adjusted by adjusting the gap adjusting part 213.

[0069] The number of the gap adjusting parts 213 can be one or multiple, and when the number of the gap adjusting parts 213 is multiple, the multiple gap adjusting parts 213 are arranged in parallel. Preferably, the number of the gap adjusting parts 213 is two, and the two gap adjusting parts 213 are symmetrically arranged on both sides of the rotating shaft 211.

[0070] The gap adjusting part 213 can be a bolt or a combination of a bolt and a nut. Each gap adjusting part 213 preferably includes a bolt and a nut, the gap between the rotating part 2121 and the sliding block 12 is adjusted by the bolt, and then the nut is abutted against the rotating part 2121 to fasten the bolt.

[0071] In the technical scheme of the above embodiment, the rotating frame 21 adjusts the gap between the rotating part 2121 and the sliding block 12 by the gap adjusting part 213, the position of the frame body 212 can be adjusted, the frame body 212 can be leveled, the diaphragm plate 5 and the linear driving part 13 can be adjusted to the same plane, and thus the adjustment accuracy in the sliding direction is improved.

[0072] In some embodiments of the present application, as shown in Figure 1 and Figure 4 The rotating frame 21 further includes a pressing part 214, the pressing part 214 is in threaded connection with the rotating part 2121 and abuts against the rotating shaft 211 at one end, the axis of the pressing part 214 intersects with the rotating axis, and the pressing part 214 is used for reducing the swing gap between the rotating part 2121 and the rotating shaft 211.

[0073] When the rotating part 2121 rotates around the rotating shaft 211, there is a swing gap between the outer surface of the rotating shaft 211 and the rotating part 2121. The rotating part 2121 will inevitably swing in the swing gap, and thus the existence of the swing gap will reduce the movement accuracy of the rotating part 2121. The pressing part 214 is in threaded connection with the rotating part 2121 and abuts against the rotating shaft 211, which can make the rotating shaft 211 contact with the rotating part 2121 and reduce the swing gap.

[0074] Exemplarily, the compression member 214 can be a bolt, which is in threaded connection with the rotating part 2121 and abuts against the rotating shaft 211. The compression member 214 can also be a combination of a bolt and a spring, the bolt is in threaded connection with the rotating part 2121 and extends into the gap between the rotating part 2121 and the rotating shaft 211, the spring is in compression and is sleeved on the bolt, one end of the spring abuts against the rotating shaft 211 and the other end abuts against the rotating part 2121, the spring uses the elastic force to make the rotating part 2121 contact the rotating shaft 211, and the positioning instability caused by the backlash is reduced.

[0075] Preferably, the axis of the compression member 214 is perpendicular to the rotating axis, and the axis of the compression member 214 is parallel to the extension direction of the connecting part 2122, which can avoid the mutual influence between the compression member 214 and the gap adjusting member 213.

[0076] In the technical scheme of the above embodiment, the rotating frame 21 is in threaded connection with the rotating part 2121 through the compression member 214 and abuts against the rotating shaft 211, which can reduce the influence of the backlash on the movement accuracy of the rotating frame 21, thereby improving the adjustment accuracy when the diaphragm sheet 5 swings.

[0077] In some embodiments of the present application, as shown in Figure 3 The adjusting member 3 includes an adjusting rod 31 and an elastic member. The adjusting rod 31 includes an adjusting section and a limiting end, the adjusting section is in threaded connection with the sliding block 12, and the limiting end abuts against the end face of the bearing part 2123 which is away from the sliding block 12. The elastic member is in compression between the bearing part 2123 and the sliding block 12, one end of the elastic member abuts against the sliding block 12 and the other end abuts against the end face of the bearing part 2123 which faces the sliding block 12.

[0078] The adjusting rod 31 is installed on the sliding block 12 in a threaded connection manner, the limiting end abuts against the end face of the bearing part 2123 which is away from the sliding block 12, and the elastic member is in compression between the bearing part 2123 and the sliding block 12, which can always provide the bearing part 2123 with a pushing force away from the sliding block 12 and limit the angle between the bearing part 2123 and the sliding block 12. The length of the adjusting section in threaded connection with the sliding block 12 can be adjusted to adjust the interval between the sliding block 12 and the bearing part 2123, thereby adjusting the initial angle.

[0079] Exemplarily, the adjusting rod 31 is a bolt, and the elastic member is a butterfly spring. The bearing part 2123 is processed with a through hole, the sliding block 12 is processed with a threaded hole, and the butterfly spring is located between the bearing part 2123 and the sliding block 12. The bolt passes through the through hole and then passes into the butterfly spring, and then is in threaded connection with the threaded hole. The head of the bolt abuts against the bearing part 2123, and the diameter of the through hole is smaller than the outer contour of the head of the bolt and larger than the outer contour of the rod of the bolt. At the initial angle, the extension direction of the connecting part 2122 is parallel to the sliding direction of the sliding block 12.

[0080] In the technical scheme of the above embodiment, the adjusting piece 3 comprises an adjusting rod 31 and an elastic piece, the elastic piece can always provide the bearing part 2123 with a pushing force away from the sliding block 12, and the adjusting rod 31 can adjust the initial angle in cooperation with the elastic piece. The adjusting rod 31 adjusts the initial angle in the form of threaded connection between the adjusting section and the sliding block 12, so that continuous adjustment can be realized and the adjustment accuracy is improved.

[0081] In some embodiments of the present application, as shown in Figures 2 to 4 The base 11 comprises a matching part 111, a mounting part 112 and an assembling part 113. The matching part 111 is provided with a guide rail 1111 which is in sliding cooperation with the sliding block 12. The mounting part 112 is connected to one end of the matching part 111 in the sliding direction and is arranged perpendicularly to the matching part 111. The mounting part 112 is provided with a clearance 1121 and a limiting piece 1122. The axis of the limiting piece 1122 is arranged in parallel to the rotation axis. The limiting piece 1122 is in threaded connection with the mounting part 112 and extends into the clearance 1121, and is used for limiting the rotary frame 21. The assembling part 113 is connected to the other end of the matching part 111 in the sliding direction. The matching part 111 comprises a linear assembling part 1131 and a rotary assembling part 1132. The linear assembling part 1131 is arranged in parallel to the mounting part 112, and the rotary assembling part 1132 is arranged perpendicularly to the linear assembling part 1131. The linear assembling part 1131 is connected to the linear driving piece 13, and the rotary assembling part 1132 is connected to the rotary driving piece 22.

[0082] The matching part 111 and the guide rail 1111 are arranged in a split type. The guide rail 1111 can be selected as a super-precision type, and has the characteristics of high precision and high rigidity. The guide rail 1111 can be installed on the matching part 111 by means of bolt connection, welding connection and the like. In order to ensure that the guide rail 1111 does not shake in the sliding direction, a bolt can also be installed on the matching part 111, so that the bolt applies a pushing force to the guide rail 1111 along the sliding direction, and the movement precision of the sliding block 12 is improved to a sub-micron level.

[0083] The mounting part 112 is connected to one end of the matching part 111 in the sliding direction, and is provided with the clearance 1121 through which the connecting part 2122 passes, so as to send the diaphragm 5 into the semiconductor detection equipment. The limiting piece 1122 can be in threaded connection with the mounting part 112 and extends into the clearance 1121 at the end to contact the connecting part 2122, so as to limit the displacement of the connecting part 2122 in the direction of the rotation axis.

[0084] The mounting portion 112 can also be provided with a sealing member, which can provide sealing after the diaphragm adjusting device is mounted on the semiconductor detection equipment. Exemplarily, the sealing member is a bellows, one end of which is surrounded outside the escape opening 1121 to seal the escape opening 1121, and the other end is sealingly connected with the connecting portion 2122, so that the diaphragm sheet 5 can be sealed in the semiconductor detection equipment to maintain the vacuum degree of the semiconductor detection equipment. In addition, the bellows has the characteristic of deflecting force, and the moving assembly 1 drives the diaphragm sheet 5 to translate, and the rotating assembly 2 drives the diaphragm sheet 5 to swing by a small angle, which conforms to the force characteristic of the bellows.

[0085] The linear assembly portion 1131 is provided with the linear driving member 13, and the rotary assembly portion 1132 is provided with the rotary driving member 22. The rotary assembly portion 1132 is arranged perpendicularly to the linear assembly portion 1131, and the linear driving member 13 is arranged perpendicularly to the rotary driving member 22.

[0086] In the technical scheme of the above embodiment, the matching portion 111 is provided with the guide rail 1111, which is in sliding cooperation with the sliding block 12, so that the movement accuracy of the sliding block 12 can be improved, thereby improving the adjustment accuracy of the diaphragm sheet 5 in the sliding direction. In addition, the matching portion 111 can also improve its rigidity by being provided with the guide rail 1111, thereby improving the long-term maintenance of the movement accuracy and improving the repeat positioning accuracy. The upper portion of the mounting portion 112 is provided with the limiting member 1122, which can limit the diaphragm sheet 5, thereby reducing the displacement interference of the diaphragm sheet 5 in the direction of the rotation axis and improving the adjustment accuracy. The rotary assembly portion 1132 of the assembly portion 113 is arranged perpendicularly to the linear assembly portion 1131, and the linear driving member 13 is arranged perpendicularly to the rotary driving member 22, thereby improving the convenience of adjusting the diaphragm sheet 5.

[0087] In some embodiments of the present application, as shown in Figure 1 and Figure 2 The diaphragm adjusting device further comprises a detection assembly 4. The detection assembly 4 comprises a grating ruler 41 and a displacement sensor 42. The grating ruler 41 comprises a scale grating 411 and a reading head 412. The scale grating 411 is mounted on the matching portion 111, and the reading head 412 is mounted on the rotating frame 21. The reading head 412 is used to cooperate with the scale grating 411 to detect the displacement of the rotating frame 21 in the sliding direction. The displacement sensor 42 is mounted on the rotary assembly portion 1132 and is used to detect the rotation amount of the rotating frame 21 around the rotation axis.

[0088] When the sliding block 12 drives the diaphragm sheet 5 to displace in the sliding direction, the rotary driving member 22 does not contact the rotating frame 21, and the rotating frame 21 and the sliding block 12 are kept relatively stationary through the adjusting member 3, and the rotating frame 21 and the sliding block 12 displace synchronously in the sliding direction. The reading head 412 translates relative to the scale grating 411 to obtain the position of the rotating frame relative to the base 11, and the diaphragm hole position of the diaphragm sheet 5 can be obtained through calculation.

[0089] When the rotating frame 21 drives the aperture 5 to swing, the rotary drive 22 pushes the support part 2123 to make the frame 212 rotate around the rotating shaft 211, causing the aperture 5 to swing. When the distance between the support part 2123 and the rotary assembly part 1132 changes, the displacement sensor 42 obtains the swing angle of the aperture 5 by detecting the change in distance. The displacement sensor 42 is mounted on the rotary assembly part 1132, close to the rotary drive 22, and uses non-contact detection. For example, the displacement sensor 42 can be a high-resolution eddy current sensor or a capacitive sensor with a resolution of sub-micron level.

[0090] In the above embodiment, the scale grating 411 is mounted on the mating part 111, and the reading head 412 is mounted on the rotating frame 21. The grating grating 41 uses the base 11 as a detection reference to detect the displacement of the aperture 5 in the sliding direction. The displacement sensor 42 is mounted on the rotary assembly part 1132 to detect the change in the distance between the rotating frame 21 and the base 11, and also uses the base 11 as a detection reference to detect the angle of the aperture 5 swinging around the rotation axis. The detection references of the grating grating 41 and the displacement sensor 42 are consistent, and both directly detect the aperture 5, which can improve the measurement accuracy and thus improve the adjustment accuracy of the aperture 5.

[0091] Secondly, this application provides a semiconductor testing device, which includes a device body, an aperture 5, and an aperture adjustment device according to any of the above embodiments. The aperture adjustment device is mounted on the device body, and the aperture 5 is mounted on the aperture adjustment device.

[0092] The semiconductor testing equipment provided in this application embodiment has all the beneficial effects of the aforementioned first aspect aperture adjustment device. For details, please refer to the specific description of the aperture adjustment device in the above embodiments. This embodiment will not repeat the description here.

[0093] In some embodiments of this application, such as Figure 5 As shown, the aperture 5 is a rectangular metal sheet with a thickness ranging from 50 μm to 100 μm. The aperture 5 has multiple aperture holes of different sizes, with aperture diameters ranging from 20 μm to 1000 μm. The aperture 5 can also be gold-plated to improve conductivity. The aperture 5 is located above the objective lens of the main body of the device. The aperture adjustment device is mounted on the lens barrel of the main body of the device. The rotating bracket 21 (connecting part 2122) extends into the lens barrel, driving the aperture 5 to translate and / or oscillate, thereby positioning the aperture hole on the electron beam path.

[0094] Exemplarily, the diaphragm sheet 5 has four diaphragm holes and a zero hole 51, the aperture of the zero hole 51 ranges from 1 to 2 mm, which has no hindering effect on the electron beam flow of micron level, and the mechanical adjustment can meet the accuracy requirement. The apertures of the four diaphragm holes decrease successively, the smallest diaphragm hole has an aperture of 30 μm, and the largest diaphragm hole has an aperture of 100 μm. The large hole is used for low-magnification imaging to enhance the signal, and can also be used for backscattered electron (BSE) analysis. The small hole can obtain imaging with higher resolution and larger depth of field, but the image brightness and signal-to-noise ratio are low due to less passing electrons.

[0095] In order to quickly and accurately move the diaphragm sheet 5 and center the diaphragm hole with the electron beam flow, the detection assembly 4, the linear driving member 13 and the rotary driving member 22 can also be connected to the upper computer of the equipment main body, and each diaphragm hole is calibrated. Taking the first hole in the calibrated diaphragm hole as an example, the first hole is first moved to the electron beam flow path, the moving assembly 1 and the rotating assembly 2 are adjusted, the imaging shows that the electron beam diameter reaches the minimum value on the sample surface, and the focusing effect is best and the image is clearest and most explicit, and the values of the reading head 412 and the displacement sensor 42 at this time are recorded. Through long-term and repeated testing and recording, and comparison and analysis of the values, the position data of the first hole can be obtained.

[0096] In some embodiments of the present application, as shown in Figures 1 to 4 The diaphragm adjusting device includes a moving assembly 1, a rotating assembly 2, an adjusting member 3 and a detection assembly 4. The moving assembly 1 includes a base 11, a sliding block 12 and a linear driving member 13, the base 11 is installed on the lens barrel of the semiconductor detection equipment, the sliding block 12 is in sliding cooperation with the base 11, and the linear driving member 13 is connected with the base 11 and the sliding block 12. The rotating assembly 2 includes a rotating frame 21 and a rotary driving member 22, the diaphragm sheet 5 is installed on the rotating frame 21 and is in rotating cooperation with the sliding block 12, and the rotary driving member 22 is installed on the base 11 and is in separable arrangement with the rotating frame 21. The adjusting member 3 is elastically connected between the rotating frame 21 and the sliding block 12. The detection assembly 4 includes a grating ruler 41 and a displacement sensor 42, the grating ruler 41 includes a scale grating 411 and a reading head 412, the scale grating 411 is installed on the base 11, the reading head 412 is installed on the rotating frame 21, and the displacement sensor 42 is installed on the base 11. The linear driving member 13 and the rotary driving member 22 are both straight push motors.

[0097] When the linear driving member 13 drives the sliding block 12 to slide to drive the diaphragm sheet 5 to translate, the rotary driving member 22 is not in contact with the rotating frame 21, and the rotating frame 21 and the sliding block 12 remain relatively static under the action of the adjusting member 3. The push rod of the linear driving member 13 generates a pushing force or a pulling force on the sliding block 12, which can drive the diaphragm sheet 5 to translate, and the grating ruler 41 detects the displacement in real time.

[0098] The rotating assembly 2 moves with the moving assembly 1 and performs slight swing in a controlled state, which can meet the fine adjustment requirement of the diaphragm sheet 5. When the rotary driving member 22 drives the rotating frame 21 to rotate to drive the diaphragm sheet 5 to swing, the push rod of the rotary driving member 22 extends to contact the rotating frame 21 and provides a pushing force for the rotating frame 21, which can push the rotating frame 21 to rotate around the rotating axis to drive the diaphragm sheet 5 to swing, and the displacement sensor 42 detects the swing angle in real time.

[0099] The above is merely specific implementation of the present application, and those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the above-described system, module and unit can refer to the corresponding process in the foregoing method embodiments, which will not be described herein again. It should be understood that the protection scope of the present application is not limited to this, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the present application, and these modifications or replacements shall be covered within the protection scope of the present application.

Claims

1. An aperture adjustment device, characterized by The utility model relates to a kind of optical lens adjusting device, including: Mobile component (1), including pedestal (11), slider (12) and linear drive (13), the slider (12) is installed on the pedestal (11), and with the pedestal (11) sliding fit in sliding direction, the linear drive (13) is connected with the pedestal (11) and the slider (12), for driving the slider (12) sliding along the sliding direction; Rotary component (2), including rotary frame (21) and rotary drive (22), the rotary frame (21) is installed on the slider (12), and is connected with diaphragm sheet (5) in the sliding direction, the rotary frame (21) is rotationally fitted with the slider (12), the rotary axis is intersected with the sliding direction and is arranged, the rotary drive (22) is installed on the pedestal (11) and is detachably arranged with the rotary frame (21), for pushing the rotary frame (21) rotation; Adjusting part (3), elastically connected between the rotary frame (21) and the slider (12), for providing reverse force when the rotary drive (22) pushes the rotary frame (21) rotation, and maintaining the rotary frame (21) and the slider (12) at initial angle when the rotary drive (22) is separated from the rotary frame (21).

2. The aperture adjustment device of claim 1, wherein, The rotary frame (21) includes: Rotary shaft (211), is installed on the slider (12), and is fixedly connected with the slider (12) in circumferential direction, the axis of the rotary shaft (211) is the rotary axis, and is arranged perpendicularly with the sliding direction; Frame body (212), is installed on the rotary shaft (211), and is rotationally connected with the rotary shaft (211), the frame body (212) is connected with the diaphragm sheet (5) in the sliding direction.

3. The aperture adjustment device of claim 2, wherein, The frame body (212) includes: Rotating part (2121), is rotationally connected with the rotary shaft (211); Connecting part (2122), one end is connected with the rotating part (2121), and the other end is connected with the diaphragm sheet (5), the connecting part (2122) is located on one side of the rotating part (2121) in the sliding direction, and extends away from the rotating part (2121); Bearing part (2123), is connected to one end of the rotating part (2121) and is spaced apart from the slider (12), the bearing part (2123) is located on the other side of the rotating part (2121) in the sliding direction, and extends away from the rotating part (2121), for providing driving position for the rotary drive (22).

4. The aperture adjustment device of claim 3, wherein, The connecting part (2122) is detachably connected with the rotating part (2121); The rotating part (2121) is provided with pitch fine adjustment part (21211), the pitch fine adjustment part (21211) is threadedly connected with the rotating part (2121), and is abutted with the connecting part (2122), the axis of the pitch fine adjustment part (21211) is arranged in parallel with the rotary axis; The rotating part (2121) is provided with a swing fine adjustment part (21212), the swing fine adjustment part (21212) is in threaded connection with the rotating part (2121) and is in abutment with the connecting part (2122), and the axis of the swing fine adjustment part (21212) is perpendicular to the sliding direction and the rotating axis.

5. The aperture adjustment device of claim 3, wherein, The bearing part (2123) is provided with a bearing groove at one end away from the rotating part (2121), the bearing groove has a bearing surface (21231) facing the rotary drive part (22), the bearing groove is arranged in parallel with the extension direction of the connecting part (2122), and the bearing surface (21231) is used for providing an abutment position for the rotary drive part (22). The distance between the bearing surface (21231) and the rotating shaft (211) is not less than the distance between the diaphragm sheet (5) and the rotating shaft (211).

6. The aperture adjustment device of claim 3, wherein, The rotating frame (21) further comprises a gap adjusting part (213), the gap adjusting part (213) is in threaded connection with the rotating part (2121) and is in abutment with the sliding block (12) at one end, the gap adjusting part (213) is arranged in parallel with the rotating axis and is used for adjusting the gap between the rotating part (2121) and the sliding block (12) along the rotating axis.

7. The aperture adjustment device of claim 3, wherein, The rotating frame (21) further comprises a pressing part (214), the pressing part (214) is in threaded connection with the rotating part (2121) and is in abutment with the rotating shaft (211) at one end, the axis of the pressing part (214) intersects with the rotating axis and is arranged, and the pressing part (214) is used for reducing the rotary gap between the rotating part (2121) and the rotating shaft (211).

8. The aperture adjustment device of claim 3, wherein, The adjusting part (3) comprises: An adjusting rod (31) comprising an adjusting section and a limiting end, the adjusting section is in threaded connection with the sliding block (12), and the limiting end is in abutment with the end surface of the bearing part (2123) away from the sliding block (12); An elastic part, which is arranged in compression between the bearing part (2123) and the sliding block (12), one end of the elastic part is in abutment with the sliding block (12), and the other end is in abutment with the end surface of the bearing part (2123) facing the sliding block (12).

9. The aperture adjustment device of claim 1, wherein, The base (11) comprises: A matching part (111) provided with a guide rail (1111), the guide rail (1111) is in sliding cooperation with the sliding block (12); An installation part (112) connected to one end of the matching part (111) in the sliding direction and arranged perpendicularly to the matching part (111), the installation part (112) is provided with a avoiding opening (1121) and a limiting part (1122), the axis of the limiting part (1122) is arranged in parallel with the rotating axis, the limiting part (1122) is in threaded connection with the installation part (112) and extends into the avoiding opening (1121), and the limiting part (1122) is used for limiting the rotating frame (21). An assembling part (113) is connected to the other end of the fitting part (111) in the sliding direction, the fitting part (111) comprises a linear assembling part (1131) and a rotary assembling part (1132), the linear assembling part (1131) is arranged in parallel with the mounting part (112), the rotary assembling part (1132) is arranged perpendicularly to the linear assembling part (1131), the linear assembling part (1131) is connected to the linear driving part (13), and the rotary assembling part (1132) is connected to the rotary driving part (22).

10. The aperture adjustment device of claim 9, wherein, Further comprising a detection assembly (4), the detection assembly (4) comprises: A grating ruler (41) comprising a scale grating (411) and a reading head (412), the scale grating (411) is installed on the fitting part (111), the reading head (412) is installed on the rotating frame (21), and the reading head (412) is used for fitting the scale grating (411) to detect the displacement of the rotating frame (21) in the sliding direction; A displacement sensor (42) is installed on the rotary assembling part (1132) and is used for detecting the rotation amount of the rotating frame (21) around the rotation axis.

11. A semiconductor inspection apparatus characterized by comprising: Comprise: An apparatus body, a diaphragm sheet (5) and a diaphragm adjusting device as claimed in any one of claims 1 to 10; The diaphragm adjusting device is installed on the apparatus body, and the diaphragm sheet (5) is installed on the diaphragm adjusting device.

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