Rotary suction nozzle mechanism

Abstract

The embodiment of the utility model discloses a rotary suction nozzle mechanism, which comprises a main shaft and a suction nozzle arranged at the bottom of the main shaft, a vertically through air passage is arranged in the main shaft and the suction nozzle, and a lens for sealing the top of the air passage is arranged at the top of the main shaft. The lens is arranged at the top of the air passage, so that a user can conveniently arrange a camera at the top of the suction nozzle to shoot a chip, the camera is closer to the chip, visual positioning and chip angle identification are easier, and the correction precision of the chip is improved; the utility model has a floating structure and prevents the chip from being crushed.

Description

TECHNICAL FIELD

[0001] The utility model relates to manipulator technical field especially relates to a rotary suction nozzle mechanism. BACKGROUND

[0002] In the semiconductor process, the chip needs to be moved from one position to another position in the process of testing or pasting, and the chip movement needs to be vacuumed by the suction nozzle. Since the chip angle needs to be relatively accurate during the chip placement process, a camera is needed to shoot the chip, identify the chip angle, and then adjust the suction nozzle rotation through control.

[0003] However, the working distance of high-precision vision cameras is generally short, and most cameras in the prior art are arranged below the chip or above the chip side to shoot, which requires high-precision cameras and low accuracy. SUMMARY

[0004] The technical problem to be solved by the embodiments of the utility model lies in providing a rotary suction nozzle mechanism to improve positioning accuracy.

[0005] In order to solve the above technical problems, the embodiments of the utility model provide a rotary suction nozzle mechanism, which comprises a main shaft and a suction nozzle arranged at the bottom of the main shaft, the main shaft and the suction nozzle are provided with an air passage penetrating up and down, and the top of the main shaft is provided with a lens sealing the top of the air passage.

[0006] Further, it further comprises a rotating bearing, a synchronous wheel, a linear slide group, a vacuum pipe joint, a floating block, and a limit pin, the synchronous wheel is arranged on the rotating bearing, the linear slide group is vertically arranged on the synchronous wheel, the main shaft is connected with the linear slide group, the floating block is arranged on the main shaft, the side surface of the floating block is provided with a limit groove for limiting the front end of the limit pin on both sides, the limit pin is arranged on the synchronous wheel and the front end of the limit pin is located in the limit groove, and the vacuum pipe joint is arranged on the floating block and communicates with the air passage.

[0007] Further, the linear slide group is composed of a sliding shaft sleeve and a sliding inner sleeve arranged in the sliding shaft sleeve, the main shaft is arranged in the sliding inner sleeve, and the sliding shaft sleeve and the sliding inner sleeve are respectively connected with the synchronous wheel and the main shaft.

[0008] Further, the limit grooves on both sides are vertically parallel.

[0009] Further, the limit pin is cylindrical.

[0010] Further, the front end of the limit pin is in the shape of a circular truncated cone.

[0011] Further, the bottom of the main shaft is provided with a suction nozzle fixing block for fixing the suction nozzle.

[0012] Further, the main shaft is limited in up and down movement by the suction nozzle fixing block and the floating block.

[0013] Further, the driving mechanism for driving the synchronous wheel to rotate is further included.

[0014] Further, the limiting screw is further included, and the synchronous wheel is provided with a limiting plate corresponding to the limiting screw.

[0015] The utility model discloses a lens is arranged at the top of the air channel, and the camera is arranged at the top of the suction nozzle to shoot the chip, so that the camera is closer to the chip and is easier to visually position and identify the chip angle, and the correction accuracy of the chip is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a perspective view of a rotating nozzle mechanism of an embodiment of the utility model from one angle.

[0017] Figure 2 is a perspective view of a rotating nozzle mechanism of an embodiment of the utility model from another angle.

[0018] Figure 3 is a bottom view of a rotating nozzle mechanism of an embodiment of the utility model.

[0019] Figure 4 is Figure 3 is a sectional view at C-C of the embodiment.

[0020] Figure 5 is a partial structure view of a rotating nozzle mechanism of an embodiment of the utility model.

[0021] BRIEF DESCRIPTION OF DRAWINGS

[0022] Main shaft 1, suction nozzle 2, air channel 3, lens 4, rotating bearing 5, synchronous wheel 6, limiting groove 7, vacuum pipe joint 8, floating block 9, limiting pin 10, sliding shaft sleeve 11, sliding inner sleeve 12, suction nozzle fixing block 13, driving mechanism 14, limiting screw 15, limiting plate 16. DETAILED DESCRIPTION

[0023] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict, and the utility model will be further described in detail in combination with the drawings and specific embodiments.

[0024] In the embodiment of the utility model, if there is a directional indication (such as up, down, left, right, front, back, etc.), it is only used to explain the relative position relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), if the specific posture changes, the directional indication also changes accordingly.

[0025] In addition, in the utility model, if the description of "first", "second" and the like is used only for the purpose of description, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can be explicitly or implicitly included at least one feature.

[0026] Please refer to Figures 1-5 The rotating nozzle mechanism of the embodiment of the utility model includes a main shaft and a nozzle.

[0027] The nozzle is arranged at the bottom of the main shaft. The main shaft and the nozzle are internally provided with an air passage penetrating up and down, that is, the air passage is divided into two sections up and down, the upper section is located in the main shaft, and the lower section is located in the nozzle. Preferably, the top of the nozzle is located in the main shaft (that is, in the upper section of the air passage). The top of the main shaft is provided with a lens for sealing the top of the air passage. Thus, the camera for positioning can be directly arranged above the nozzle, so that the camera can directly take pictures above the chip, improving the precision; the position of the nozzle can also be determined without plugging and unplugging the air pipe, so that the control system can visually position the nozzle in real time through the camera. In specific implementation, the lens is a plane lens, a convex lens or a concave lens, etc.

[0028] As an embodiment, the rotating nozzle mechanism further includes a rotating bearing, a synchronous wheel, a linear sliding group, a vacuum pipe joint, a floating block and a limiting pin. The synchronous wheel is arranged on the rotating bearing, the linear sliding group is vertically arranged on the synchronous wheel, the main shaft is connected to the linear sliding group, the floating block is arranged on the main shaft, and the side surface of the floating block is provided with a limiting groove for limiting both sides of the front end of the limiting pin. The limiting pin is arranged on the synchronous wheel, and the front end of the limiting pin is located in the limiting groove. The vacuum pipe joint is arranged on the floating block and communicates with the air passage. Preferably, the linear sliding group is composed of a sliding shaft sleeve and a sliding inner sleeve arranged in the sliding shaft sleeve. The main shaft is arranged in the sliding inner sleeve, and the sliding shaft sleeve and the sliding inner sleeve are respectively connected to the synchronous wheel and the main shaft. The main shaft, the synchronous wheel and the nozzle are coaxially arranged. The sliding shaft sleeve and the sliding inner sleeve can slide relative to each other, so that the nozzle at the bottom of the main shaft can float up and down, preventing the chip from being damaged.

[0029] As an embodiment, the left and right sides of the limiting groove are vertically parallel. The upper and lower ends of the limiting groove can be provided with a through hole.

[0030] As an embodiment, the limiting pin is cylindrical. Preferably, the front end of the limiting pin is in the shape of a circular truncated cone, which is more convenient for the limiting pin to extend into. The limiting pin is always tangent to the left and right sides of the limiting groove, so that the installation precision of the limiting pin does not need to be controlled, and the overall precision can be guaranteed. After long-term work, even if the overall rotating nozzle mechanism is deformed, the limiting precision can still be guaranteed.

[0031] As an embodiment, the bottom of the main shaft is provided with a nozzle fixing block for fixing the nozzle. The main shaft is limited in up and down movement by the nozzle fixing block and the floating block.

[0032] As an implementation form, the rotating nozzle mechanism further comprises a driving mechanism for driving the synchronous wheel to rotate.

[0033] As an implementation form, the rotating nozzle mechanism further comprises a limiting screw, and the synchronous wheel is provided with a limiting plate corresponding to the limiting screw. The limiting screw and the limiting plate are matched to limit the rotation stroke of the synchronous wheel.

[0034] The structure of the utility model is simple, and the overall height can be very low, so that the camera is closer to the chip when taking pictures above the chip.

[0035] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalent ranges.

Claims

1. A rotary nozzle mechanism comprising a main shaft and a nozzle provided at the bottom of the main shaft, characterized in that, The main shaft and the suction nozzle are provided with a gas passage penetrating from top to bottom, and the top of the main shaft is provided with a lens sealing the top of the gas passage; The rotating suction nozzle mechanism further comprises a rotating bearing, a synchronous wheel, a linear sliding group, a vacuum pipe joint, a floating block, and a limiting pin. The synchronous wheel is mounted on the rotating bearing, the linear sliding group is vertically mounted on the synchronous wheel, the main shaft is connected to the linear sliding group, the floating block is mounted on the main shaft, the floating block is provided with a limiting slot on the side surface thereof for limiting the front end of the limiting pin, the limiting pin is mounted on the synchronous wheel and the front end of the limiting pin is located in the limiting slot, and the vacuum pipe joint is mounted on the floating block and communicates with the gas passage.

2. The rotating mouthpiece mechanism of claim 1, wherein, The linear sliding group is composed of a sliding shaft sleeve and a sliding inner sleeve mounted in the sliding shaft sleeve. The main shaft is arranged in the sliding inner sleeve. The sliding shaft sleeve and the sliding inner sleeve are respectively connected to the synchronous wheel and the main shaft.

3. The rotating mouthpiece mechanism of claim 1, wherein, The limiting slots on both sides are vertically parallel.

4. The rotating mouthpiece mechanism of claim 3, wherein, The limiting pin is cylindrical.

5. The rotating mouthpiece mechanism of claim 4, wherein, The front end of the limiting pin is in the shape of a circular truncated cone.

6. The rotating mouthpiece mechanism of claim 1, wherein, The bottom of the main shaft is provided with a suction nozzle fixing block for fixing the suction nozzle.

7. The rotating mouthpiece mechanism of claim 6, wherein, The main shaft is limited in up-down movement by the suction nozzle fixing block and the floating block.

8. The rotating mouthpiece mechanism of claim 1, wherein, The mechanism further comprises a driving mechanism for driving the synchronous wheel to rotate.

9. The rotating mouthpiece mechanism of claim 1, wherein, The synchronous wheel is provided with a limiting plate corresponding to the limiting screw.

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