Gallium arsenide-containing fragment cleaning structure

By designing a cleaning cylinder, a shaft-driven fragment holding structure, and a hoisting structure, combined with nozzles and filters, the problems of fragment damage and incomplete cleaning during gallium arsenide fragment cleaning were solved. This enabled comprehensive cleaning and recycling of the cleaning fluid, improving the cleaning effect and the practicality of the device.

CN223916068UActive Publication Date: 2026-02-17CHAOYANG SHUOMEI HIGH PURITY SEMICONDUCTOR MATERIALS CO LTD
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Patent Information

Application Number
CN202422945358.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-29
Publication Date
2026-02-17
Estimated Expiration
2034-11-29

AI Technical Summary

Technical Problem

Existing gallium arsenide (GaAs) fragment cleaning devices are prone to fragment breakage or scratches during the cleaning process, and the cleaning effect is poor, affecting the accuracy of subsequent processing.

Method used

A gallium arsenide (GaAs) fragment cleaning structure was designed, including a cleaning cylinder, a motor-driven rotating shaft, a fragment holding structure, and a hoisting structure. Through rotation and nozzle cleaning, combined with the use of a drain valve and filter, all-round cleaning and recycling of cleaning fluid are achieved.

Benefits of technology

This technology enables comprehensive cleaning of gallium arsenide fragments, preventing fragment damage, improving cleaning efficiency, and allowing the cleaning solution to be reused, thus enhancing the practicality of the device.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a gallium arsenide-containing fragment cleaning structure which comprises a cleaning cylinder, a base is fixedly assembled at the lower end of the cleaning cylinder, the inner wall of the cleaning cylinder is fixedly communicated with a drain valve, the inner wall of the drain valve is in threaded connection with a filter, and through the effect of the cleaning cylinder, the cleaning cylinder is used for containing cleaning liquid and fragment raw materials. The motor drives the rotating shaft to rotate, so that the fragment containing structure is driven to rotate, fragments in the fragment containing structure can be continuously and comprehensively cleaned in cleaning liquid, the cleaning effect is guaranteed, meanwhile, the position of the fragment containing structure can be adjusted through the hoisting structure, the fragment containing structure can be rotationally cleaned through a spray head, and the cleaning effect is better guaranteed; the stability of the equipment is guaranteed through the base, meanwhile, the motor is conveniently fixed, cleaning liquid can be effectively filtered and discharged through matched use of the drainage valve and the filter, it is guaranteed that the cleaning liquid can be repeatedly used, use is convenient, and practicability is high.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of arsenic gallium scrap cleaning, and particularly relates to an arsenic gallium scrap cleaning structure. BACKGROUND

[0002] During production, processing or storage, arsenic gallium scrap is prone to adsorb dust particles on the surface. These dust particles may come from the surrounding environment, such as the air flow bringing tiny dust. If not removed, in the subsequent processing process, such as photoetching, etching and other processes in semiconductor device manufacturing, the dust particles will affect the process precision, which may cause circuit short circuit or open circuit and other problems. The existing arsenic gallium scrap cleaning device is often equipped with a stirring device inside. The stirring operation in the cleaning process may cause arsenic gallium scrap to collide with each other, thereby causing damage or scratches on the scrap, which is poor in practicability. SUMMARY

[0003] The utility model aims at providing an arsenic gallium scrap cleaning structure to solve the problems in the above background.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: an arsenic gallium scrap cleaning structure, comprising a cleaning cylinder, a base is fixedly assembled at the lower end of the cleaning cylinder, a motor is fixedly assembled on the surface of the base, the motor shaft of the motor penetrates the bottom surface of the cleaning cylinder, a rotating shaft is fixedly assembled at the end of the motor shaft, a scrap containing structure is fixedly assembled on the outer wall of the rotating shaft, a lifting structure is fixedly assembled on the outer side wall of the upper edge of the cleaning cylinder, a rotating block is fixedly assembled at the lower end of the lifting structure, the rotating block is rotatably assembled on the inner wall of the scrap containing structure, the rotating block is sleeved on the outer wall of the rotating shaft, two spray heads are penetratively assembled on the inner wall of the upper end of the cleaning cylinder, a drain valve is fixedly communicated with the inner wall of the cleaning cylinder, and a filter is screwed on the inner wall of the drain valve.

[0005] Preferably, the scrap containing structure comprises a sleeve, the sleeve is fixedly assembled on the outer wall of the rotating shaft, four meshing bags are uniformly assembled on the outer wall of the sleeve, a connecting rod is fixedly assembled at the lower end of the sleeve, a counterweight ring is fixedly assembled at the lower end of the connecting rod, the counterweight ring is sleeved on the outer wall of the rotating shaft, and the inner wall of the upper end of the sleeve is rotatably connected with the rotating block.

[0006] Preferably, the lifting structure comprises a support plate, the support plate is fixedly assembled on the outer side wall of the upper end of the cleaning cylinder, a winch is fixedly assembled on the surface of the support plate, a winding rope is fixedly wound on the outer wall of the winding roller of the winch, a support wheel is fixedly assembled on the inner wall of the upper end of the cleaning cylinder, the winding rope is attached to the outer wall of the support wheel and is fixedly connected with the rotating block.

[0007] Preferably, a supporting cylinder is fixedly assembled on the outer wall of the cleaning cylinder and is sleeved on the outer wall of the rotating shaft.

[0008] Compared with the prior art, the beneficial effects of the utility model are: through the effect of the cleaning cylinder, the cleaning liquid and the fragment raw material are contained, the rotation of the rotating shaft is driven by the motor, so that the fragment containing structure is driven to rotate, the fragments in the fragment containing structure are continuously and comprehensively cleaned in the cleaning liquid, the cleaning effect is ensured, the position of the fragment containing structure can be adjusted through the lifting structure, the nozzle can be used for rotary cleaning, the cleaning effect is better ensured, the stability of the equipment is ensured through the base, the motor is conveniently fixed, the cleaning liquid can be effectively filtered and discharged through the cooperation of the drain valve and the filter, the cleaning liquid can be repeatedly used, the use is convenient, and the practicality is strong. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 It is a structure perspective view of the utility model;

[0010] Figure 2 It is a structure plane section view of the utility model;

[0011] Figure 3 It is Figure 2 It is an enlarged schematic view of structure A.

[0012] In the drawing: 1-cleaning cylinder, 2-base, 3-motor, 4-fragment containing structure, 41-sleeve, 42-net bag, 43-connecting rod, 44-counterweight ring, 5-rotating shaft, 6-lifting structure, 61-branch plate, 62-winch, 63-hoisting rope, 64-branch wheel, 7-nozzle, 8-filter, 9-drain valve, 10-branch cylinder, 11-rotating block. DETAILED DESCRIPTION

[0013] The technical scheme in the embodiments of the utility model will be clearly and completely described in combination with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0014] Please refer to Figures 1-3The utility model provides a kind of gallium arsenide containing fragment cleaning structure, including cleaning cylinder 1, the lower end of cleaning cylinder 1 is fixedly equipped with base 2, the surface of base 2 is fixedly equipped with motor 3, the motor shaft of motor 3 penetrates the bottom surface of cleaning cylinder 1, the motor shaft end of motor 3 is fixedly equipped with rotating shaft 5, the outer wall of rotating shaft 5 is fixedly equipped with fragment containing structure 4, the upper along outside wall of cleaning cylinder 1 is fixedly equipped with hoisting structure 6, the lower end of hoisting structure 6 is fixedly equipped with rotating block 11, rotating block 11 is rotatably equipped in the inner wall of fragment containing structure 4, rotating block 11 is sleeved on the outer wall of rotating shaft 5, two sprayers 7 are penetrated and equipped on the inner wall upper end of cleaning cylinder 1, the inner wall of cleaning cylinder 1 is fixedly communicated with drain valve 9, the inner wall of drain valve 9 is screwed with filter 8.

[0015] by the effect of cleaning cylinder 1, for containing washing liquid and fragment raw material, rotating shaft 5 is driven to rotate by motor 3, so as to drive fragment containing structure 4 to rotate, the fragments in fragment containing structure 4 can be continuously and comprehensively cleaned in washing liquid, the cleaning effect is ensured, the position of fragment containing structure 4 can be adjusted by hoisting structure 6, it can be rotated and cleaned by sprayer 7, the cleaning effect is better, the stability of equipment is ensured by base 2, motor 3 is conveniently fixed, washing liquid can be effectively filtered and discharged by the cooperation of drain valve 9 and filter 8, the washing liquid can be repeatedly used, it is convenient to use, and it is strong in practicality.

[0016] fragment containing structure 4 includes sleeve 41, sleeve 41 is fixedly equipped on the outer wall of rotating shaft 5, four net bags 42 are evenly equipped on the outer wall of sleeve 41, connecting rod 43 is fixedly equipped on the lower end of sleeve 41, counterweight ring 44 is fixedly equipped on the lower end of connecting rod 43, counterweight ring 44 is sleeved on the outer wall of rotating shaft 5, the inner wall upper end of sleeve 41 is rotatably connected with rotating block 11.

[0017] when fragment containing structure 4 is needed to be used, two fragments can be inserted into net bag 42 vertically, sleeve 41 is driven to rotate by rotating shaft 5, sleeve 41 drives net bag 42 and the fragments in it to rotate, comprehensive rotary cleaning is carried out, connecting rod 43 and counterweight ring 44 are driven to rotate, counterweight ring 44 can ensure that it sinks into the inside of cleaning cylinder 1 without lifting fragment containing structure 4, and fully contacts with washing liquid.

[0018] hoisting structure 6 includes support plate 61, support plate 61 is fixedly equipped on the outer side wall upper end of cleaning cylinder 1, hoist 62 is fixedly equipped on the surface of support plate 61, hoisting rope 63 is fixedly wound on the outer wall of winding drum of hoist 62, support wheel 64 is fixedly equipped on the inner wall upper end of cleaning cylinder 1, hoisting rope 63 is attached to the outer wall of support wheel 64 and is fixedly connected with rotating block 11.

[0019] When the lifting structure 6 needs to be used, the winch 62 is started to wind and unwind the lifting rope 63, the lifting rope 63 drives the supporting wheel 64 to displace, and simultaneously drives the fragment containing structure 4 to displace, the supporting plate 61 is used for fixing the winch 62, the supporting wheel 64 ensures the movement effect of the lifting rope 63, avoids abrasion, and simultaneously due to the gravity of the fragment containing structure 4, the lifting rope 63 is always taut, and the rotating block 11 is limited from rotating with the sleeve 41.

[0020] The outer wall of the cleaning barrel 1 is fixedly provided with the supporting barrel 10, and the supporting barrel 10 is sleeved on the outer wall of the rotating shaft 5.

[0021] The supporting barrel 10 can ensure the stability of the rotating shaft 5.

[0022] Although the embodiments of the present application have been shown and described, it should be understood by those ordinary skilled in the art that various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A structure for cleaning GaAs containing fragments, characterized by: The utility model provides a kind of washing barrel, including washing barrel (1), the lower end of the washing barrel (1) is fixedly equipped with base (2), the surface of the base (2) is fixedly equipped with motor (3), the motor shaft of the motor (3) penetrates washing barrel (1) bottom surface, the motor shaft end of the motor (3) is fixedly equipped with rotating shaft (5), the outer wall of the rotating shaft (5) is fixedly equipped with fragment containing structure (4), the upper along outer wall of the washing barrel (1) is fixedly equipped with hoisting structure (6), the lower end of the hoisting structure (6) is fixedly equipped with rotating block (11), the rotating block (11) is rotatably equipped in the inner wall of fragment containing structure (4), the rotating block (11) is sleeved on the outer wall of rotating shaft (5), the inner wall upper end of the washing barrel (1) is equipped with two spray heads (7) penetrating, the inner wall of the washing barrel (1) is fixedly connected with drain valve (9), the inner wall of the drain valve (9) is screwed with filter (8).

2. A structure for cleaning GaAs-containing fragments according to claim 1, characterized in that: The fragment containing structure (4) includes sleeve (41), the sleeve (41) is fixedly equipped on the outer wall of rotating shaft (5), the outer wall of the sleeve (41) is evenly equipped with four net bags (42), the lower end of the sleeve (41) is fixedly equipped with connecting rod (43), the lower end of the connecting rod (43) is fixedly equipped with counterweight ring (44), the counterweight ring (44) is sleeved on the outer wall of rotating shaft (5), the inner wall upper end of the sleeve (41) is rotatably connected with rotating block (11).

3. A structure for cleaning GaAs containing fragments according to claim 1, characterized in that: The hoisting structure (6) includes support plate (61), the support plate (61) is fixedly equipped on the outer wall upper end of washing barrel (1), the surface of the support plate (61) is fixedly equipped with winch (62), the outer wall of the winding stick of the winch (62) is fixedly wound with lifting rope (63), the inner wall upper end of the washing barrel (1) is fixedly equipped with support wheel (64), the lifting rope (63) is attached to the outer wall of support wheel (64) and is fixedly connected with rotating block (11).

4. The structure for cleaning GaAs-containing fragments according to claim 1, wherein: The outer wall of the washing barrel (1) is fixedly equipped with support cylinder (10), and the support cylinder (10) is sleeved on the outer wall of rotating shaft (5).