Automatic fragment blowing device

Abstract

The utility model belongs to the technical field of fragment blowing, and particularly relates to an automatic fragment blowing device which comprises an air pipe connector, a blowing bottom plate is fixedly installed on the outer side surface of the air pipe connector, and an electromagnetic valve is detachably installed on the top surface of the blowing bottom plate and located on the edge of one side. And two groups of blowing units are detachably mounted on the bottom surface of the blowing bottom plate and located on the edges of the two sides correspondingly, and the two groups of blowing units comprise air knife fixing plates. In the tooth jacking process, fragments possibly exist at the tooth jacking position of the metal boat, the accuracy of next tooth jacking is seriously affected, and the fragments are prone to being generated repeatedly, in order to avoid the result, after the action of jacking the fragments is finished, an air knife of a blowing device is used for collecting and blowing air in the process that a carrying table for transplanting the metal boat carries the metal boat to be conveyed towards a main machine; fragments at the bottoms of the top teeth of the metal boat are blown out, and the fragments on the top teeth of the metal boat can be automatically cleaned in a non-contact mode through the blowing unit.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of fragment blowing technology, and specifically relates to a fragment automatic blowing device. BACKGROUND

[0002] With the development of automatic processing technology, film plating machine technology appears, and the existing film plating machine mainly has the following types: PVD equipment, mainly including magnetron sputtering film plating machine, ion sputtering film plating machine, electron gun evaporation film plating machine, traditional CVD film plating machine and a special branch of CVD-ALD film plating machine.

[0003] A patent with publication number CN 116145111 A discloses an ALD film plating equipment, which comprises: an outer shell, an opening is formed in the circumferential side wall of the outer shell; an inner cylinder, the inner cylinder is connected to the inside of the outer shell, the circumferential outer wall of the inner cylinder and the inner wall of the outer shell form a working cavity, and in the working state, the working cavity is in a vacuum state; a conveying part, the conveying part is located in the working cavity, and the conveying part can move in the working cavity, and the conveying part is used for carrying a substrate to move in the working cavity; a process assembly. The middle region of the inner cylinder does not need to be kept in vacuum, and is in normal pressure state, which is beneficial to greatly reduce the use amount of precursor in ALD process, reduce production cost, effectively reduce the energy consumption of pump body and heating, and improve economic benefit.

[0004] In the prior art, the fragments on the metal boat top teeth of the existing ALD film plating equipment need to be manually cleaned by the operator using a special brush, and if not cleaned in time, the residual fragments on the metal boat top teeth will damage the silicon wafer in the next top tooth action. The above operation mode has the following disadvantages: affecting the equipment productivity; and easily causing secondary damage of the silicon wafer and the top teeth in the cleaning process.

[0005] Therefore, a fragment automatic blowing device is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0006] In order to make up for the deficiencies of the prior art and solve the above problems, a fragment automatic blowing device is proposed.

[0007] The utility model discloses a technical scheme that solves its technical problem is adopted: A kind of fragment automatic blowing device of the utility model, including gas pipe joint, the outside surface of gas pipe joint is fixedly installed with blowing bottom plate, the top surface of blowing bottom plate and located on one side edge position detachably installed with electromagnetic valve, the bottom surface of blowing bottom plate and located on both side edge positions are respectively detachably installed with two groups of blowing unit, two groups of the blowing unit include air knife fixed plate, the bottom surface of blowing bottom plate is arranged on the outside surface of air knife fixed plate, blowing air pressure plate is fixedly installed on the inner wall surface of air knife fixed plate, blowing air plate is arranged on the inner wall surface of blowing air pressure plate, speed regulating valve is arranged on the outer wall surface of blowing air plate.

[0008] Preferably, the blowing unit can rotate at a certain angle on the air knife fixed plate, and the air knife fixed plate is connected to the waist hole of the blowing bottom plate and can move a certain distance along the y-axis.

[0009] Preferably, the blowing bottom plate is fixed on the metal boat transplanting carrier and moves with the carrier; a top tooth is arranged below the carrier, and the X-axis position of the top tooth is fixed.

[0010] Preferably, the two blowing air pressure plates are fixed on both sides of the blowing air plate to form a cavity, and air is introduced into the cavity through the air inlet by the speed regulating valve.

[0011] Preferably, the inner wall surfaces on both sides of the cavity are provided with inclined grooves and blowing grooves, and the air introduced into the cavity is concentrated and blown out through the blowing grooves on both sides.

[0012] The utility model has the beneficial effects that:

[0013] The utility model provides a kind of fragment automatic blowing device, in the process of top tooth, there can be fragment in the top tooth of metal boat, seriously influence the accuracy when top tooth next time, it is easy to repeatedly produce fragment, to avoid this result, in the end of top piece action, the carrier of metal boat transplanting carries metal boat and is transmitted to the direction of host computer in process, using the air knife set air of blowing device, the fragment at the bottom of boat top tooth is blown away, can be realized automatic contactless cleaning fragment on the top tooth of metal boat by blowing unit, operator does not need to stop machine and manually clean fragment, save a lot of maintenance time, can effectively improve equipment capacity. BRIEF DESCRIPTION OF DRAWINGS

[0014] The drawings described herein are used to provide further understanding of the utility model and constitute a part of the present application, and the illustrative embodiments of the utility model and the description thereof are used to explain the utility model, and do not constitute improper limitation on the utility model. In the drawings:

[0015] Figure 1 is the three-dimensional structure schematic diagram of the utility model;

[0016] Figure 2 is the three-dimensional structure schematic diagram of the speed regulating valve in the utility model;

[0017] Figure 3 is the three-dimensional structure schematic diagram of the blowing plate in the utility model;

[0018] Figure 4 is the three-dimensional structure schematic diagram of the blowing groove in the utility model.

[0019] Legend: 1, gas pipe joint; 2, blowing bottom plate; 3, electromagnetic valve; 4, air knife fixing plate; 5, blowing unit; 6, speed regulating valve; 61, air inlet; 62, inclined groove; 63, blowing groove; 7, blowing plate; 8, blowing pressure plate. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0021] The specific embodiments are given below.

[0022] Please refer to Figure 1 - Figure 4 The utility model provides a kind of fragment automatic blowing device, including gas pipe joint 1, gas pipe joint 1's outer surface is fixedly installed with blowing bottom plate 2, the top surface of blowing bottom plate 2 and located on one side edge position is detachably installed with electromagnetic valve 3, the bottom surface of blowing bottom plate 2 and located on both side edge positions are respectively detachably installed with two groups of blowing unit 5, two groups of blowing unit 5 include air knife fixing plate 4, the outer surface of air knife fixing plate 4 is arranged on the bottom surface of blowing bottom plate 2, blowing pressure plate 8 is fixedly installed on the inner side wall surface of air knife fixing plate 4, blowing plate 7 is arranged on the inner side wall surface of blowing pressure plate 8, speed regulating valve 6 is arranged on the outer side wall surface of blowing plate 7, blowing unit 5 can rotate a certain angle in air knife fixing plate 4, air knife fixing plate 4 is connected with the waist hole of blowing bottom plate 2, can move a certain distance in y axis, blowing bottom plate 2 is fixed on metal boat transplanting loading platform and moves with loading platform;Top tooth is equipped below loading platform, and top tooth X axis position is fixed, two blowing pressure plates 8 are fixed on both sides of blowing plate 7, form cavity, pass through speed regulating valve 6 and air inlet 61, inclined groove 62 and blowing groove 63 are arranged on the inner side wall surface of both sides of cavity, and gas in cavity is blown out by two sides blowing groove 63 by concentrating through inclined groove 62;

[0023] When working, the tracheal joint 1 is provided with a blowing bottom plate 2 fixedly installed on the outer side surface of the tracheal joint 1, an electromagnetic valve 3 detachably installed on the top surface of the blowing bottom plate 2 and located at one side edge position, two groups of blowing pressure plates 8 detachably installed on the bottom surface of the blowing bottom plate 2 and located at both side edge positions, a wind knife fixing plate 4 fixedly installed on the outer side surface of the two groups of blowing pressure plates 8, a blowing plate 7 fixedly installed on the inner side wall surface of the wind knife fixing plate 4, a speed regulating valve 6 arranged on the outer side wall surface of the blowing plate 7, a blowing unit 5 arranged on the outer side surface of the speed regulating valve 6, the blowing unit 5 being capable of rotating at a certain angle on the wind knife fixing plate 4, the wind knife fixing plate 4 being connected with the waist hole of the blowing bottom plate 2 and being capable of moving a certain distance on the y-axis, and the blowing bottom plate 2 being fixed on the metal boat transplanting carrier and moving with the carrier, when the top tooth action is completed and the metal boat carrier is in the moving process, the fragment blowing device passes through the boat top tooth, blows the fragments at the bottom of the top tooth, and blows the fragments on the boat top tooth away.

[0024] In the top tooth process, fragments may exist at the top tooth of the metal boat, which seriously affects the accuracy of the next time of top tooth and easily repeatedly generates fragments, in order to avoid this result, after the top piece action is completed, the carrier of the metal boat transplanting carries the metal boat in the transmission process towards the main machine, the wind knife of the blowing device is used for collecting and blowing air, the fragments at the bottom of the top tooth of the boat are blown away, the blowing unit 5 can be used to realize the automatic non-contact cleaning of the fragments on the top tooth of the metal boat, the operator does not need to manually clean the fragments during shutdown, a lot of maintenance time is saved, and the equipment productivity can be effectively improved.

[0025] Working principle: in the top tooth process, fragments may exist at the top tooth of the metal boat, which seriously affects the accuracy of the next time of top tooth and easily repeatedly generates fragments, in order to avoid this result, after the top piece action is completed, the carrier of the metal boat transplanting carries the metal boat in the transmission process towards the main machine, the wind knife of the blowing device is used for collecting and blowing air, the fragments at the bottom of the top tooth of the boat are blown away, the blowing unit 5 can be used to realize the automatic non-contact cleaning of the fragments on the top tooth of the metal boat, the operator does not need to manually clean the fragments during shutdown, a lot of maintenance time is saved, and the equipment productivity can be effectively improved.

[0026] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited to the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application.

Claims

1. A device for automatic sweeping of debris, comprising a gas connector (1), characterized in that: The outer surface of the tracheal joint (1) is fixedly installed with a blowing bottom plate (2), the top surface of the blowing bottom plate (2) and located on one side edge position is detachably installed with a solenoid valve (3), the bottom surface of the blowing bottom plate (2) and located on both side edge positions is respectively detachably installed with two groups of blowing units (5), two groups of the blowing units (5) include a wind knife fixed plate (4), the outer surface of the wind knife fixed plate (4) is arranged on the bottom surface of the blowing bottom plate (2), the inner side wall surface of the wind knife fixed plate (4) is fixedly installed with a blowing pressure plate (8), the inner side wall surface of the blowing pressure plate (8) is provided with a blowing plate (7), and the outer side wall surface of the blowing plate (7) is provided with a speed regulating valve (6).

2. A debris auto purge apparatus as claimed in claim 1, wherein: The blowing unit (5) can rotate at a certain angle on the wind knife fixed plate (4), the wind knife fixed plate (4) is connected with the waist hole of the blowing bottom plate (2), and can move a certain distance on the y-axis.

3. A debris auto-purging device according to claim 2, wherein: The blowing bottom plate (2) is fixed on the metal boat transplanting loading platform and moves with the loading platform; the top teeth are arranged below the loading platform, and the X-axis position of the top teeth is fixed.

4. The debris auto-purging apparatus of claim 1, wherein: Two blowing pressure plates (8) are fixed on both sides of the blowing plate (7) to form a cavity, and air is introduced through the speed regulating valve (6) and the air inlet (61).

5. A debris auto-purging device according to claim 4, wherein: The inner wall surfaces on both sides of the cavity are provided with inclined grooves (62) and blowing grooves (63), and the air introduced into the cavity is concentrated and blown out through the blowing grooves (63) on both sides through the inclined grooves (62).

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