Ceramic tube target forming device

Abstract

The utility model discloses a ceramic tube target forming device, which is used for solving the problems of non-uniform powder filling and poor exhaust effect during cold isostatic pressing forming of a ceramic tube target in the prior art. The device comprises a cylindrical elastic leather sheath formed by pouring polyethylene resin and a cylindrical rigid core rod concentrically arranged with the cylindrical elastic leather sheath, wherein the cylindrical elastic leather sheath and the cylindrical rigid core rod form an annular powder filling space; the bottom sealing assembly and the top sealing assembly respectively seal the bottom and the top of the powder filling space; the vibration device is arranged below the bottom sealing assembly, comprises a flat-plate-shaped placing part and is used for placing a leather sheath and a core rod, and the powder in the powder filling space is tamped through vibration; the powder filling device is arranged at the top of the leather sheath and used for filling powder into the powder filling space. The device disclosed by the utility model is simple in structure and convenient to operate, can realize uniform filling and effective exhausting of powder, and improves the forming quality and the yield of the ceramic tube target.

Description

Technical Field

[0001] This utility model relates to the field of ceramic forming technology, and more specifically, to a ceramic tube target forming device. Background Technology

[0002] Ceramic targets, as an important functional ceramic material, are widely used in sputtering coating and other fields. Cold isostatic pressing (CIP) is a common method for preparing ceramic targets. Uniform powder filling is crucial during CIP molding. Uneven powder filling leads to uneven green body density, which can easily cause defects such as deformation and cracking during subsequent sintering, severely affecting the quality and performance of the ceramic target.

[0003] In traditional CIP (Ceramic In-Place Press) molding processes for ceramic tube targets, powder filling is often done manually or using simple mechanical methods, which makes it difficult to ensure the uniformity and density of the powder. Especially during the molding of tubular targets, uneven powder filling is more likely to occur in the annular powder filling space, making it difficult for gas inside the powder to escape. This ultimately results in an uneven and rough surface of the green body, and even cracking. In the subsequent isostatic pressing process, problems such as water ingress into the tube target may also occur.

[0004] To solve the above problems, it is necessary to improve the powder filling device and mold of the ceramic tube target to achieve uniform powder filling and effective venting, thereby improving the molding quality of the ceramic tube target. Utility Model Content

[0005] The purpose of this invention is to provide a ceramic tube target forming device to solve the problems of uneven powder filling and difficulty in gas discharge in the existing ceramic tube target CIP forming process, thereby improving the forming quality of ceramic tube targets and avoiding defects such as uneven surface, cracking and water ingress during pressing.

[0006] This utility model provides a ceramic tube target forming device, comprising:

[0007] The sheath is a tubular elastic body;

[0008] The core rod is a rigid cylindrical body, concentrically arranged with the sheath, forming an annular powder-filling space between them;

[0009] A bottom sealing assembly, disposed at the bottom of the sheath and the mandrel, is used to seal the bottom of the powder-filling space;

[0010] A vibration device is disposed below the bottom sealing assembly for vibrating and compacting the powder in the powder filling space; the vibration device includes a flat plate placement part, and the core rod and the leather sleeve are placed on the upper surface of the placement part;

[0011] A powder filling device is located at the top of the sleeve and is used to fill the powder filling space with powder.

[0012] A top sealing assembly is provided on top of the sleeve and mandrel after powder filling to seal the top of the powder filling space.

[0013] Furthermore, the mandrel is made of stainless steel tubing. Stainless steel tubing has sufficient strength and rigidity to ensure dimensional accuracy during the molding process, and is corrosion-resistant and easy to clean.

[0014] Furthermore, the bottom sealing assembly includes an annular first rubber ring, which is cast from polyethylene resin and fitted onto the bottom of the mandrel. The inner wall of the first rubber ring is interference-fitted with the mandrel, and the outer wall of the first rubber ring is interference-fitted with the sheath. The interference fit ensures good sealing performance and prevents powder leakage.

[0015] Furthermore, the top sealing assembly includes an annular second rubber ring, which is cast from polyethylene resin and is used to be fitted onto the top of the mandrel after the powder filling is completed. The inner wall of the second rubber ring is interference-fitted with the mandrel, and the outer wall of the second rubber ring is interference-fitted with the sheath.

[0016] Furthermore, the first and second rubber rings are made of polyethylene resin with a hardness greater than or equal to Shore A 40A. Polyethylene resin has good elasticity and sealing properties, and its moderate hardness ensures a good seal without damaging the sheath and the mandrel.

[0017] Furthermore, the sheath is made of polyethylene resin with a thickness of 8mm-12mm. Polyethylene resin has good flexibility and pressure resistance, enabling it to withstand the pressure during the CIP process, and its moderate thickness ensures the overall strength and service life of the mold.

[0018] Furthermore, the powder filling device includes an inverted conical powder filling section and an insertion section located at the bottom of the powder filling section. The insertion section is tubular and is inserted into the powder filling space with a gap between it and the core rod. The inverted conical powder filling section facilitates the pouring of powder, while the insertion section guides the powder into the powder filling space and maintains a certain distance from the core rod to avoid clogging and ensure that the powder flows smoothly into the powder filling space.

[0019] Furthermore, the vibration device is a vibratory motor or an electromagnetic vibrator. A vibratory motor or electromagnetic vibrator can generate stable vibrations, achieving effective compaction of the powder.

[0020] Furthermore, the vibration frequency of the vibration device is 10-60Hz, and the amplitude is 0.1-3mm. This range of vibration parameters can effectively promote powder filling and venting, while avoiding excessive vibration of the powder leading to stratification.

[0021] The ceramic tube target forming device provided by this utility model, by using a core rod, a sleeve and a rubber ring to form an annular powder filling space, sealing the bottom and top with rubber rings, and setting a vibration device and a powder filling device, has the following beneficial effects:

[0022] Good powder filling uniformity: The powder filling device is used to assist in filling the powder, and the powder can flow naturally into the mold, avoiding the unevenness of manual powder filling.

[0023] Good gas discharge effect: Vibrating and compacting the powder with a vibration device can effectively promote the discharge of gas inside the powder and reduce porosity defects.

[0024] High molding quality: Uniform powder filling and effective gas discharge can improve the density uniformity and compactness of the ceramic tube target blank, thereby improving the molding quality of the ceramic tube target and avoiding defects such as uneven surface, cracking and water ingress during pressing.

[0025] Easy to operate: The device has a simple structure, is easy to operate, and is easy to industrialize.

[0026] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0027] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0028] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention (without the powder filling device installed);

[0029] Figure 2 This is a schematic diagram of the structure of Embodiment 1 of the present invention (installation of powder filling device).

[0030] Explanation of reference numerals in the attached drawings: 1. Sheath; 2. Core rod; 3. Powder filling space; 4. Vibration device; 5. Powder filling section; 6. Insertion section. Detailed Implementation

[0031] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0032] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0033] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0034] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0036] Example 1

[0037] This embodiment provides a ceramic tube target forming device, such as... Figure 1 and Figure 2 As shown, it includes:

[0038] The sleeve 1 is a cylindrical elastomer, cast from polyethylene resin, with a thickness of 8mm-12mm, preferably 10mm. Its inner diameter is determined based on the outer diameter of the ceramic target. The height of the sleeve 1 is equal to the height of the mandrel 2, both determined according to the height of the ceramic target. For example, if a ceramic target with a height of 200mm is required, the heights of both the sleeve 1 and the mandrel 2 should be slightly greater than 200mm to facilitate subsequent sealing, and the equal length of the sleeve 1 and mandrel 2 makes manual operation easier.

[0039] The mandrel 2, a rigid cylindrical body, is concentrically positioned inside the sleeve 1. It is preferably made of 304 stainless steel tubing with a wall thickness of 15mm, and its outer diameter is determined based on the inner diameter of the ceramic target. The height of the mandrel 2 is the same as the length of the sleeve 1. To facilitate the subsequent hoisting of the assembled mold to the isostatic pressing device for pressing, a stainless steel strip (not shown in the figure) is welded axially inside the hollow interior of the mandrel 2. This stainless steel strip penetrates the inner cavity of the mandrel 2, with its two ends extending beyond the upper and lower end faces of the mandrel 2, forming lifting lugs. Using a welded stainless steel strip ensures that the hollow structure of the mandrel 2 is not blocked and provides a reliable lifting structure, facilitating mold handling and installation.

[0040] The powder-filling space 3 is an annular space formed by the concentric arrangement of the sleeve 1 and the core rod 2. The shape and size of the powder-filling space 3 determine the shape and size of the ceramic tube target.

[0041] The bottom sealing assembly includes an annular first rubber ring, cast from polyethylene resin, preferably with a Shore hardness greater than or equal to 40A, and is an O-ring. The first rubber ring is fitted onto the bottom of the mandrel 2, with its inner wall interlocking with the mandrel 2 and its outer wall interlocking with the sheath 1, thereby achieving a bottom seal.

[0042] The vibration device 4 includes a small vibration motor and a flat plate-shaped placement part. The vibration motor is fixed below the placement part, which is preferably made of a rigid material such as steel or aluminum plate. The assembled mold (including the sleeve 1, the mandrel 2, and the first rubber ring) is placed on the upper surface of the placement part. The vibration frequency of the vibration motor is adjustable.

[0043] The powder filling device includes an inverted conical powder filling section 5 and an insertion section 6. The powder filling section 5 is preferably a stainless steel funnel. The insertion section 6 is preferably a stainless steel tube. The insertion section 6 is fixed at the bottom center of the powder filling section 5. The length and outer diameter design of the insertion section 6 ensures that after it is inserted into the powder filling space 3, a certain annular gap remains between it and the core rod 2, facilitating powder falling while preventing contact between the insertion section 6 and the core rod 2.

[0044] The top sealing assembly includes an annular second rubber ring, cast from polyethylene resin, preferably with a Shore hardness greater than or equal to 40A, and the same specifications as the first rubber ring. The second rubber ring is used to fit over the top of the mandrel 2 after powder filling, with its inner wall interlocking with the mandrel 2 and its outer wall interlocking with the top of the sheath 1, thereby achieving a top seal.

[0045] Specific implementation steps:

[0046] Assemble the bottom sealing assembly: Place the first rubber ring on the bottom of the mandrel 2, utilizing the elasticity of the polyethylene resin to ensure an interference fit between its inner wall and the mandrel 2. Then, place the leather sleeve 1 over the mandrel 2 and the first rubber ring, ensuring an interference fit between the outer wall of the first rubber ring and the inner wall of the leather sleeve 1, thus forming a bottom seal. Finally, secure the mandrel 2, the first rubber ring, and the leather sleeve 1 tightly around its outer perimeter using hose clamps or wire. Place the assembled mold on the upper surface of the flat placement part of the vibration device 4, ensuring good contact between the bottom of the mold and the surface of the placement part.

[0047] Install the powder filling device: Insert the insertion part 6 of the powder filling device into the powder filling space 3, adjust the position of the powder filling device so that the insertion part 6 is located in the center of the powder filling space 3, and the insertion depth is appropriate, ensuring that there is a certain distance between the bottom of the insertion part 6 and the top of the first rubber ring to avoid blockage.

[0048] Powder filling and vibration compaction: Ceramic powder (e.g., alumina ceramic powder) is slowly poured into the powder filling section 5 of the powder filling device. The powder flows naturally into the powder filling space 3 through the powder filling section 5 and the insertion section 6. At the same time, the vibration device 4 is activated to vibrate the placement section, thereby causing the mold to vibrate. During the vibration process, powder is continuously added to the powder filling device until the powder filling space 3 is filled with powder and the powder surface basically no longer settles.

[0049] Remove the powder filling device and seal the top: Stop the vibration device 4 and carefully remove the powder filling device. After powder filling, place the second rubber ring on the top of the mandrel 2. Utilizing the elasticity of the polyethylene resin, its inner wall will be press-fitted with the mandrel 2, and its outer wall will be press-fitted with the top of the sleeve 1, thus achieving a top seal. Finally, secure the mandrel 2, the second rubber ring, and the sleeve 1 tightly around the outer periphery with a hose clamp or wire.

[0050] CIP molding: The sealed mold is hoisted into a cold isostatic press via a stainless steel strip extending from the top of mandrel 2 for isostatic pressing. Appropriate pressure and holding time are set according to the ceramic material and target size. For example, for alumina ceramic targets, a pressure of 200 MPa and a holding time of 10 minutes can be used.

[0051] Demolding and subsequent processing: After isostatic pressing, remove the mold, carefully disassemble the second rubber ring, sleeve 1, and the first rubber ring, and remove the ceramic tube target blank. Perform subsequent processing such as drying and sintering on the blank to obtain the final ceramic tube target product.

[0052] The ceramic tube target forming apparatus provided in this embodiment can achieve uniform filling and effective venting of ceramic powder, resulting in ceramic tube target blanks with good density uniformity, smooth and flat surfaces, and no defects such as cracks. No water ingress occurred during the subsequent CIP forming process. Compared with traditional manual powder filling methods, this invention can significantly improve the forming quality and yield of ceramic tube targets.

[0053] Other implementation methods:

[0054] Depending on actual needs, the ceramic tube target forming device of this utility model can also be modified and improved in various ways. For example:

[0055] The shape of the powder filling section of the powder filling device can be adjusted according to the flowability of the powder; for example, it can be cylindrical, pyramidal, etc.

[0056] The type of vibration device 4 can be selected according to the actual situation. For example, a pneumatic vibrator or a hydraulic vibrator can be used. The shape of the placement part can also be adjusted as needed, such as a circle or a square.

[0057] The materials, specific types, dimensions, and hardness of the polyethylene resin used in the sheath 1, core rod 2, and rubber ring can be adjusted according to the ceramic material and the target size.

[0058] Auxiliary structures such as exhaust channels can be added as needed to further improve exhaust performance.

[0059] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A ceramic tube target forming apparatus, characterized by comprising: include: The sheath (1) is a tubular elastic body; The core rod (2) is a cylindrical rigid body, which is concentrically arranged with the sheath (1), and an annular powder filling space (3) is formed between the two. A bottom sealing assembly is provided at the bottom of the sleeve (1) and the mandrel (2) for sealing the bottom of the powder filling space (3); A vibration device (4) is provided below the bottom sealing assembly for vibrating and compacting the powder in the powder filling space (3); A powder filling device is provided on the top of the sleeve (1) for filling powder into the powder filling space (3); A top sealing assembly is provided on top of the sleeve (1) and the mandrel (2) after the powder filling is completed to seal the top of the powder filling space (3).

2. The ceramic tube target forming apparatus according to claim 1, wherein The mandrel (2) is a stainless steel tube.

3. The ceramic tube target forming apparatus according to claim 1, wherein The bottom sealing assembly includes an annular first rubber ring, which is cast from polyethylene resin and fitted onto the bottom of the mandrel (2). The inner wall of the first rubber ring is press-fitted with the mandrel (2), and the outer wall of the first rubber ring is press-fitted with the sheath (1).

4. The ceramic tube target forming apparatus according to claim 3, wherein The top sealing assembly includes an annular second rubber ring, which is cast from polyethylene resin and fitted onto the top of the mandrel (2). The inner wall of the second rubber ring is press-fitted with the mandrel (2), and the outer wall of the second rubber ring is press-fitted with the sheath (1).

5. The ceramic tube target forming apparatus according to claim 4, wherein The first and second rubber rings are made of polyethylene resin with a hardness greater than or equal to Shore A 40A.

6. The ceramic pipe target forming apparatus according to any one of claims 1 to 4, characterized by The material of the leather case (1) is polyethylene resin, with a thickness of 8mm-12mm.

7. The ceramic pipe target forming apparatus according to any one of claims 1 to 4, characterized by The powder filling device includes an inverted conical powder filling part (5) and an insertion part (6) located at the bottom of the powder filling part (5). The insertion part (6) is tubular and is inserted into the powder filling space (3) with a gap between it and the core rod (2).

8. The ceramic pipe target forming apparatus according to any one of claims 1 to 4, characterized by The vibration device (4) is a vibration motor or an electromagnetic vibrator, and includes a flat plate-shaped placement part, with the core rod (2) and the leather sleeve (1) placed on the upper surface of the placement part.

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