PECVD spraying gas box hoisting device

Abstract

The utility model discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) spraying gas box hoisting device which comprises a vertical fixed outer frame, the fixed outer frame consists of four main edges and four auxiliary edges, the positions of the main edges correspond to the side edges of a gas box, the positions of the auxiliary edges correspond to the corners of the gas box, and the vertical fixed outer frame is arranged on the side edges of the gas box. A vertical mounting hole is formed in the position, corresponding to the position of a screw hole, close to the stepped side face of the air box, of the fixing outer frame in a penetrating mode, a stud nut penetrates through the mounting hole and the screw hole so that the air box and the fixing outer frame can be fixed, a supporting frame is arranged on the inner side of the fixing outer frame, and the supporting frame is connected with the air box. A winding film is arranged on the supporting frame to cover the spraying air holes, a hanging connection frame is further installed on the upper portion of the fixed outer frame, and a plurality of hanging rings are evenly distributed on the hanging connection frame around the center of gravity of the air box. The utility model has the advantages that the structure is simple, the hoisting safety is improved, and the integrity of the spraying gas box is ensured.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic technology, specifically to a PECVD spray gas box hoisting device. Background Technology

[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) technology utilizes low-temperature plasma generated by gas glow discharge in a vacuum environment to enhance the chemical activity of reactants and promote chemical reactions between gases, thereby depositing the desired coating layer on the substrate. The gas chamber (for uniform gas distribution) is the most important component in the PECVD coating process. Its main function is to ensure a uniform input of the gas required for the reaction, guaranteeing coating quality. The gas chamber is made of heavy aluminum alloy and has an anodized surface. Because the process chamber requires high surface insulation of its internal components, the gas chamber must be protected from impacts, scratches, dents, dents, and blockages during transportation and assembly to prevent arcing caused by surface damage during the deposition process.

[0003] Existing technologies use sling wrapping or installing lifting rings on the air box for hoisting, but these have the following problems: First, the lifting rings available on the market cannot be installed securely due to the special structure of the spray air box, so hoisting with lifting rings and ropes is not possible; second, using sling wrapping can easily cause irreversible damage to the surface of the air box during hoisting due to the vibration of the overhead crane and the swaying during movement, and there is also a risk of it falling; third, due to the weight of the air box, it is not easy to securely bind or loosen the wrapping before and after hoisting, posing a safety hazard; fourth, using slings in direct contact with the air box can cause debris to fall and clog the spray air holes. Summary of the Invention

[0004] This utility model proposes a PECVD spray air box hoisting device to solve the technical problems existing in the prior art.

[0005] According to one aspect of this utility model, a PECVD spray air box hoisting device is provided, characterized in that it includes: an upright fixed outer frame, the fixed outer frame being composed of four main sides and four secondary sides, the positions of the main sides corresponding to the sides of the air box, the positions of the secondary sides corresponding to the corners of the air box, a vertical mounting hole being provided through the fixed outer frame at a position corresponding to the screw hole position close to the stepped side of the air box, the air box being fixed to the fixed outer frame by means of a stud nut passing through the mounting hole and the screw hole, a support frame being provided on the inner side of the fixed outer frame, a wrapping film being provided on the support frame to cover the spray air holes, and a lifting frame being installed on the upper part of the fixed outer frame, with multiple lifting rings evenly distributed around the center of gravity of the air box on the lifting frame.

[0006] Furthermore, the support frame is a strip structure with uniform spacing.

[0007] Furthermore, the suspension frame is a strip structure with uniform spacing.

[0008] As can be seen from the technical solution provided by this utility model, the structure of this utility model is simple. The device consists of a support frame, lifting ring, stretch film, fixed outer frame and studs. It is hoisted by non-contact method. When in use, the studs are connected to the air box and pass through the fixed outer frame and are fixed with nuts. The hoisting is carried by a hoisting rope through the lifting ring. The stretch film is used to isolate dust and debris generated by the vehicle and during hoisting to prevent clogging of the spray air holes. The shape and structure of this device can evenly distribute the force during hoisting, save manpower, improve hoisting safety, ensure the integrity of the spray air box, and avoid the risk of the spray air holes being blocked.

[0009] The above description is merely an overview of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0010] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings.

[0011] Figure 1 This is a structural schematic diagram of a PECVD spray air box hoisting device according to the present invention. Detailed Implementation

[0012] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0013] The following is a detailed description of a self-adjustable horizontal squeegee device for screen printing provided by this utility model. Contents not described in detail in the embodiments of this utility model are prior art known to those skilled in the art. Where specific conditions are not specified in the embodiments of this utility model, they should be performed according to conventional conditions in the art or conditions recommended by the manufacturer.

[0014] See Figure 1This utility model discloses a PECVD spray air box hoisting device, comprising: an upright fixed outer frame 5, the fixed outer frame 5 being composed of four main sides and four secondary sides, the positions of the main sides corresponding to the sides of the air box 4, and the positions of the secondary sides corresponding to the corners of the air box 4; vertical mounting holes are provided through the fixed outer frame at positions corresponding to the screw holes close to the stepped side of the air box; stud nuts 6 are passed through the mounting holes and the screw holes to fix the air box 4 to the fixed outer frame 5; a support frame 2 is provided on the inner side of the fixed outer frame 5; a wrapping film is provided on the support frame 2 to cover the spray air holes; a lifting frame is also installed on the upper part of the fixed outer frame 5; and multiple lifting rings 1 are evenly distributed around the center of gravity of the air box on the lifting frame.

[0015] In a specific embodiment, the support frame 2 is a strip structure with uniform spacing.

[0016] As a specific embodiment, the suspension frame is a strip structure with uniform spacing.

[0017] The present invention has the following significant advantages: First, it avoids direct contact with the critical surface of the gas box, thus preventing damage and affecting the deposition process; second, it uses threaded connections, ensuring reliable hoisting, high efficiency, and saving manpower, thereby improving the safety of workers and the gas box; third, it distributes force evenly, avoiding the insecurity of traditional hoisting and the complexity of disassembly and assembly, thus saving time.

[0018] It should be clarified that this utility model is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of this utility model is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order of steps, after understanding the spirit of this utility model.

Claims

1. A PECVD showerhead lifting device, characterized in that, The utility model relates to a kind of gas box fixing frame, including: Vertical fixed frame, the fixed frame is made of four main edges and four vice edges, the position of the main edge corresponds with the side of gas box, the position of the vice edge corresponds with the corner of gas box, vertical mounting hole is set on the fixed frame and is close to the position of the stepped side face of gas box Screw hole, through the mounting hole and the screw hole with the stud nut, to fix gas box with the fixed frame, support frame is set in the inside position of the fixed frame, winding film is set on the support frame and covers spray gas hole, hanger bracket is also installed on the upper portion of the fixed frame, and a plurality of lifting lugs are evenly distributed around the center of gravity of the gas box on the hanger bracket.

2. The PECVD showerhead hoist of claim 1, wherein, The support frame is a uniformly spaced strip structure.

3. The PECVD showerhead hoist of claim 1, wherein, The hanger bracket is a uniformly spaced strip structure.

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