Pure water system for semiconductor process

Abstract

The utility model provides a pure water system for a semiconductor process, which comprises a pretreatment water tank for storing pretreatment water; the pretreatment water pump is connected with a water outlet of the pretreatment water tank; the ultraviolet sterilization device is connected with the pretreatment water pump, the ultraviolet sterilization device is linked with the pretreatment water pump, when the pretreatment water pump runs, the ultraviolet sterilization device runs along with the pretreatment water pump, and when the pretreatment water pump stops running, the ultraviolet sterilization device stops running along with the pretreatment water pump; a water inlet of the reverse osmosis device is connected with a water outlet of the ultraviolet sterilization device; the return pipeline is connected with the water outlet of the ultraviolet sterilization device and the water inlet of the pretreatment water tank and is used for returning the pretreatment water flowing through the ultraviolet sterilization device to the pretreatment water tank when the reverse osmosis device stops running. The water purification system can prolong the service life of the ultraviolet sterilization device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically to a pure water system for semiconductor processes. Background Technology

[0002] In the pure water systems of current chip packaging and testing plants, ultraviolet (UV) sterilization devices are typically linked to reverse osmosis (RO) devices. When the RO device starts or stops, the UV sterilization device will also turn on or off accordingly to ensure water quality safety. During normal operation of the RO device, the UV sterilization device remains on, continuously sterilizing the water flow.

[0003] In actual operation, because the water production capacity of the pure water system exceeds the water demand of the user, the RO device is started and stopped on demand, multiple times a day. The associated UV sterilization device will also operate accordingly. Under this frequent start and stop state, the UV sterilization device is prone to lamp or rectifier burnout failure.

[0004] If the linkage logic between the UV sterilization device and the RO device is canceled, the UV sterilization device will remain on regardless of whether the RO system is running or in standby mode, and the UV sterilization device will trigger an alarm due to overheating.

[0005] In view of the above-mentioned technical problems, the present invention provides a new pure water system for semiconductor processes to at least partially solve the above problems. Utility Model Content

[0006] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0007] To address the existing problems, this utility model provides a pure water system for semiconductor processes, the pure water system comprising:

[0008] Pre-treatment water tank, used to store pre-treated water;

[0009] A pretreatment water pump is connected to the outlet of the pretreatment water tank;

[0010] An ultraviolet sterilization device is connected to the pretreatment water pump. The ultraviolet sterilization device is linked to the pretreatment water pump. When the pretreatment water pump is running, the ultraviolet sterilization device runs accordingly. When the pretreatment water pump stops running, the ultraviolet sterilization device stops running accordingly.

[0011] A reverse osmosis device, wherein the inlet of the reverse osmosis device is connected to the outlet of the ultraviolet sterilization device;

[0012] A return pipeline connects the outlet of the ultraviolet sterilization device to the inlet of the pretreatment water tank, and is used to return the pretreated water flowing through the ultraviolet sterilization device to the pretreatment water tank when the reverse osmosis device stops operating.

[0013] In one embodiment, the pretreatment water pump remains in continuous operation unless a stop command is received.

[0014] In one embodiment, the inlet of the reverse osmosis device is connected to the outlet of the ultraviolet sterilization device through a reverse osmosis pipeline. A first valve is provided on the reverse osmosis pipeline, and a second valve is provided on the return pipeline. When the reverse osmosis device is running, the first valve is open and the second valve is closed. When the reverse osmosis device stops running, the second valve is open and the first valve is closed.

[0015] In one embodiment, the pure water system further includes a controller connected to the first valve, the second valve, and the reverse osmosis device, for controlling the first valve and the second valve according to the operating status of the reverse osmosis device.

[0016] In one embodiment, the controller includes a programmable logic controller.

[0017] In one embodiment, the first valve and the second valve comprise a pneumatic valve or a solenoid valve.

[0018] In one embodiment, the pure water system further includes a reverse osmosis pre-filter, the outlet of the ultraviolet sterilization device is connected to the inlet of the reverse osmosis pre-filter, and the reverse osmosis device and the return pipeline are connected to the outlet of the reverse osmosis pre-filter.

[0019] In one embodiment, the pure water system further includes a T-connector, which is connected to the outlet of the ultraviolet sterilization device, the reverse osmosis device, and the return pipeline, respectively.

[0020] The pure water system for semiconductor processes in this embodiment links the ultraviolet sterilization device with the pretreatment water pump instead of the reverse osmosis device, effectively avoiding malfunctions caused by frequent start-stop of the ultraviolet sterilization device. At the same time, the reflux circulation method ensures that the water flows continuously through the ultraviolet sterilization device, solving the problem of heat generation during continuous operation of the ultraviolet sterilization device and effectively improving the service life of the ultraviolet sterilization device. Attached Figure Description

[0021] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0022] In the attached image:

[0023] Figure 1 This diagram illustrates a pure water system according to a specific embodiment of the present invention when the reverse osmosis device is not in operation.

[0024] Figure 2 A schematic block diagram of a pure water system according to a specific embodiment of the present invention during the operation of a reverse osmosis device is shown.

[0025] Figure 3 The temperature curve of the ultraviolet sterilization device of the pure water system according to a specific embodiment of the present invention is shown. Detailed Implementation

[0026] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0027] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0028] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0029] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0030] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0031] To fully understand this utility model, detailed steps and structures will be presented in the following description to illustrate the technical solution proposed by this utility model. Preferred embodiments of this utility model are described in detail below; however, in addition to these detailed descriptions, this utility model may have other embodiments.

[0032] The following is for reference. Figure 1 and Figure 2 A pure water system according to an embodiment of the present invention is described. For example... Figures 1 to 2 As shown, the pure water system of this utility model embodiment includes: a pretreatment water tank 101 for storing pretreatment water; a pretreatment water pump 102 connected to the outlet of the pretreatment water tank 101; an ultraviolet sterilization device 103 connected to the pretreatment water pump, the ultraviolet sterilization device 103 being linked with the pretreatment water pump 102, the ultraviolet sterilization device operating when the pretreatment water pump 102 is running, and the ultraviolet sterilization device 102 stopping when the pretreatment water pump 102 stops running; a reverse osmosis device 107 connected to the outlet of the ultraviolet sterilization device 103; and a return pipeline 106 connecting the outlet of the ultraviolet sterilization device 103 to the inlet of the pretreatment water tank 101.

[0033] The pretreatment water tank 101 is used to store pretreated water. For example, the raw water can be pretreated to obtain pretreated water, which can then be transported to the pretreatment water tank 101 for storage. Alternatively, the pretreatment water tank 101 can receive raw water and pretreat it therein.

[0034] For example, when pretreating raw water in the pretreatment tank 101, a raw water inlet can be provided at the top of the pretreatment tank 101, through which the raw water enters the pretreatment tank. A filter is installed inside the pretreatment tank 101 to filter the raw water. In one example, an appropriate proportion of flocculant and bactericide can be added to the raw water before it passes through the filter to remove suspended solids. The pretreatment tank 101 can also perform other pretreatments on the raw water according to process requirements.

[0035] The outlet of the pretreatment water tank 101 is connected to the pretreatment water pump 102, which pumps the pretreatment water from the pretreatment water tank 101 and sends it to the subsequent treatment unit. For example, the outlet of the pretreatment water tank 101 is located at its bottom, and the outlet is connected to an outlet pipe. The pretreatment water pump 102 is mounted on the outlet pipe.

[0036] The ultraviolet (UV) sterilization device 103 is connected to the pretreatment water pump 102, which pumps pretreated water from the pretreatment water tank into the UV sterilization device 103 for sterilization. The UV sterilization device 103 is equipped with UV sterilization lamps for sterilizing the pretreated water. Exemplarily, the UV sterilization device 103 may include a sterilization chamber containing UV sterilization lamps. These lamps emit short-wave ultraviolet (UVC) light to destroy the DNA or RNA structure of bacteria, viruses, and other microorganisms in the water, achieving disinfection. UVC ultraviolet light has high energy and can penetrate the cell walls of microorganisms, causing damage to their DNA or RNA molecular structure, thus rendering them unable to reproduce and survive.

[0037] The ultraviolet sterilization device 103 is linked to the pretreatment water pump 102. When the pretreatment water pump 102 is running, the ultraviolet sterilization device 103 will also run, that is, the ultraviolet sterilization lamp will emit ultraviolet light to disinfect and sterilize. When the pretreatment water pump 102 stops running, the ultraviolet sterilization device 103 will also stop running, that is, the ultraviolet sterilization lamp will be turned off.

[0038] In this embodiment of the utility model, the linkage between the ultraviolet sterilization device 103 and the reverse osmosis device 107 is eliminated. Instead, the ultraviolet sterilization device 103 is linked with the pretreatment water pump 102. This can prevent the ultraviolet sterilization device 103 from frequently starting and stopping with the reverse osmosis device 107, thereby avoiding the burning out of the lamp tube and rectifier of the ultraviolet sterilization device 103.

[0039] The outlet of the ultraviolet sterilization device 103 is connected to the reverse osmosis pipeline 105 and the return pipeline 106. The reverse osmosis pipeline 105 is connected to the inlet of the reverse osmosis device 107, and the return pipeline 106 is connected to the inlet of the pre-treated water tank 101.

[0040] like Figure 2 As shown, when the reverse osmosis unit 107 is operating, pretreated water that has passed through the ultraviolet sterilization device 103 is transported to the reverse osmosis unit 107 for reverse osmosis treatment via the reverse osmosis pipeline 105. Reverse osmosis treatment utilizes pressure difference as the driving force to separate the solvent in a solution through a reverse osmosis membrane. Its basic principle is to pressurize the water to be treated, forcing it to permeate through the extremely small pores of the reverse osmosis membrane, thereby separating pure water and dissolved impurities. The extremely small pore size of the reverse osmosis membrane can effectively filter out impurities such as salt, bacteria, and viruses from the water.

[0041] like Figure 1 As shown, when the reverse osmosis unit 107 stops operating, the pretreated water that has passed through the ultraviolet sterilization unit 103 is returned to the pretreated water tank 101 via the return pipe 106. Therefore, by adding the return pipe 106, water can continuously flow through the ultraviolet sterilization unit 103 regardless of whether the reverse osmosis unit 107 is operating, avoiding the problem of overheating of the chamber caused by continuous operation of the ultraviolet sterilization unit 103 and improving the service life of the ultraviolet sterilization unit 103.

[0042] For example, a first valve 108 is provided on the reverse osmosis pipeline 105, and a second valve 109 is provided on the return pipeline 106. When the reverse osmosis unit 107 is running, the first valve 108 is opened and the second valve 109 is closed. Figure 2 As shown, at this time, the water flows back from the return pipe 106 to the pretreatment tank 101. When the reverse osmosis unit 107 stops operating, the second valve 109 opens and the first valve 108 closes, as shown. Figure 1 As shown, water flows through the reverse osmosis pipeline 105 into the reverse osmosis unit 107 without flowing back to the pretreatment tank 101. The first valve 108 and the second valve 109 can be pneumatic valves, powered by compressed air. A solenoid valve drives a pneumatic actuator, which in turn moves the valve to open or close it. Pneumatic valves offer advantages such as fast response and simple operation. Alternatively, the first valve 108 and the second valve 109 can be solenoid valves or other suitable valve types.

[0043] In one embodiment, the pure water system further includes a controller connected to a first valve 108, a second valve 109, and a reverse osmosis unit 107. The controller controls the first valve 108 and the second valve 109 according to the operating status of the reverse osmosis unit 107. When the reverse osmosis unit 107 is running, the controller controls the first valve 108 to open and the second valve 109 to close, allowing the reverse osmosis unit 107 to produce water normally. When the reverse osmosis unit 107 is in standby mode, the controller controls the first valve 108 to close and the second valve 109 to open, at which time the water flows back to the pretreatment water tank 101.

[0044] The controller can be a programmable logic controller (PLC). By editing the control program of the PLC, it can collect and transmit signals, accurately control the action of the first valve 108 and the second valve 109, and provide feedback valve status signals.

[0045] In one embodiment, the pretreatment water pump 102 remains continuously running unless a stop command is received, and only stops running when a stop command is received. The stop command can be a manual stop command or a stop command sent by the controller. Since the pretreatment water pump 102 does not start and stop frequently, the number of start-stop cycles of the ultraviolet sterilization device 103 linked to it is also reduced; at the same time, since the ultraviolet sterilization device is cooled by a reflux circulation method, the ultraviolet sterilization device 103 has the conditions for long-term continuous operation.

[0046] For example, a reverse osmosis pre-filter 104 is further provided between the reverse osmosis unit 107 and the ultraviolet sterilization unit 103. The outlet of the ultraviolet sterilization unit 103 is connected to the inlet of the reverse osmosis pre-filter 104, and the reverse osmosis pipeline 105 and the return pipeline 106 are connected to the outlet of the reverse osmosis pre-filter 104. The reverse osmosis pre-filter 104 is used to protect the reverse osmosis unit from contamination by larger particles in the feed water. For example, the reverse osmosis pre-filter 104 can use PP melt-blown filter cartridges, activated carbon filter cartridges, etc. for filtration.

[0047] For example, a tee connector can also be provided, which is connected to the outlet of the ultraviolet sterilization device 103, the reverse osmosis device 107, and the return pipe 106, respectively. Specifically, a tee connector can be provided at the outlet of the reverse osmosis pre-filter 104, with one end of the tee connector connected to the outlet of the reverse osmosis pre-filter 104 via a pipe, and the other two ends connected to the reverse osmosis pipe 105 and the return pipe 106, respectively. For example, the tee connector, the reverse osmosis pipe 105, the return pipe 106, the first valve 108, and the second valve 109 can all use the same pipe diameter.

[0048] Experiments showed that, within approximately six months of using the pure water system of this embodiment, neither the lamps nor the rectifier of the ultraviolet sterilization device were damaged, and the temperature of the cavity did not rise due to the continuous operation of the ultraviolet sterilization device. Figure 3 The temperature curve of the ultraviolet sterilization device cavity over a month shows that the temperature remained within the normal range, with an average temperature of 25°C, indicating no risk of overheating.

[0049] In summary, the pure water system for semiconductor processes according to the embodiments of this application links the ultraviolet sterilization device with the pretreatment water pump instead of the reverse osmosis device, effectively avoiding malfunctions caused by frequent start-ups and shutdowns of the ultraviolet sterilization device. At the same time, the reflux circulation method ensures that the water flows continuously through the ultraviolet sterilization device, solving the problem of heat generation during continuous operation of the ultraviolet sterilization device and effectively improving the service life of the ultraviolet sterilization device.

[0050] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0051] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0052] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0053] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A pure water system for semiconductor processes, characterized by, The pure water system comprises: a pretreated water tank for storing pretreated water; a pretreated water pump connected to a water outlet of the pretreated water tank; an ultraviolet sterilization device connected to the pretreated water pump, the ultraviolet sterilization device being linked with the pretreated water pump, and when the pretreated water pump is running, the ultraviolet sterilization device runs simultaneously, and when the pretreated water pump stops running, the ultraviolet sterilization device stops running simultaneously; a reverse osmosis device, a water inlet of the reverse osmosis device being connected to a water outlet of the ultraviolet sterilization device; a reflux pipeline connecting the water outlet of the ultraviolet sterilization device and the water inlet of the pretreated water tank, and used for refluxing pretreated water flowing through the ultraviolet sterilization device to the pretreated water tank when the reverse osmosis device stops running.

2. The pure water system of claim 1, wherein, The pretreated water pump keeps a continuous running state when no stop instruction is received.

3. The pure water system of claim 1, wherein, The water inlet of the reverse osmosis device is connected to the water outlet of the ultraviolet sterilization device through a reverse osmosis pipeline, a first valve is arranged on the reverse osmosis pipeline, and a second valve is arranged on the reflux pipeline, the first valve is opened and the second valve is closed when the reverse osmosis device is running, and the second valve is opened and the first valve is closed when the reverse osmosis device stops running.

4. The pure water system of claim 3, wherein, A controller is further included, the controller being connected to the first valve, the second valve and the reverse osmosis device, and used for controlling the first valve and the second valve according to a running state of the reverse osmosis device.

5. The pure water system of claim 4, wherein, The controller comprises a programmable logic controller.

6. The pure water system of claim 3, wherein, The first valve and the second valve comprise pneumatic valves or electromagnetic valves.

7. The pure water system of claim 1, wherein, A reverse osmosis pre-filter is further included, a water inlet of the reverse osmosis pre-filter being connected to a water outlet of the ultraviolet sterilization device, and the reverse osmosis device and the reflux pipeline being connected to a water outlet of the reverse osmosis pre-filter.

8. The pure water system of claim 1, wherein, A three-way joint is further included, the three-way joint being connected to the water outlet of the ultraviolet sterilization device, the reverse osmosis device and the reflux pipeline respectively.

Images