Unilateral air supply disc

Abstract

The utility model relates to the field of air supply discs, in particular to a single-side air supply disc which comprises a disc body, a diaphragm valve, a pressure reducing valve, a one-way valve and a diaphragm valve are installed on the disc body, the diaphragm valve is connected with one side of the pressure reducing valve, the other side of the pressure reducing valve is connected with one side of the one-way valve, and a precision filter is further installed on the disc body. And one side of the precision filter is connected with the other side of the one-way valve, and the other side of the precision filter is connected with the diaphragm valve. The precise filter is arranged at the outlet of the pressure reducing valve, so that the use cleanliness of gas at the rear end can be kept, the basic requirements of production of the CVD equipment can be met, and gas can be continuously supplied to the CVD equipment.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of gas supply disc, and specifically relates to a single-side gas supply disc. BACKGROUND

[0002] Chemical vapor deposition equipment (CVD equipment) is a common device for preparing various types of thin films, which needs to be assisted by various devices, and the gas supply disc is a common device for assisting the work of the CVD equipment.

[0003] The existing gas supply disc can supply gas for the work of the CVD equipment, but the cleanliness of the rear-end gas will decrease after the gas supply disc works for a period of time, at which time the work requirements of the CVD equipment cannot be met, so the CVD equipment cannot be continuously supplied with gas. UTILITY MODEL CONTENTS

[0004] To achieve the above-mentioned purpose, the utility model aims at providing a single-side gas supply disc, which can solve the problems in the background art. The utility model provides the following technical scheme:

[0005] A single-side gas supply disc comprises a disc body, a diaphragm valve, a pressure reducing valve, a check valve and a diaphragm valve are installed on the disc body, the diaphragm valve is connected to one side of the pressure reducing valve, the other side of the pressure reducing valve is connected to one side of the check valve, a precision filter is also installed on the disc body, one side of the precision filter is connected to the other side of the check valve, and the other side of the precision filter is connected to the diaphragm valve. In the product, the diaphragm valve is used to control the opening and closing of the gas source, the pressure reducing valve is used to regulate the internal pressure of the pipeline, so as to realize the stable output of the flow, the check valve is used to prevent the backflow of the gas, the precision filter is used to maintain the use cleanliness of the rear-end gas, and the diaphragm valve is used to control the delivery of the rear-end gas. The working process of the product is as follows: before use, connect the hose to the diaphragm valve, confirm that the pressure reducing valve and the diaphragm valve are in the closed state, open the diaphragm valve for a short time to empty it for 2 seconds, repeat the opening and closing for 2-3 times (which is used to discharge the residual air in the pipeline and ensure the cleanliness of the gas), then open the main control diaphragm valve, adjust the pressure reducing valve to the required rear-end use pressure, open the diaphragm valve of the outlet to deliver the gas to the rear-end use point after the pressure is stable, and when it is necessary to cut off the rear-end gas, only need to close the diaphragm valve of the outlet.

[0006] As a further scheme of the utility model, the diaphragm valve and the pressure reducing valve are installed on the disc body in a threaded connection mode, which can ensure firm connection.

[0007] As a further scheme of the utility model, the check valve is installed on the disc body in a clamping sleeve mode.

[0008] As a further scheme of the utility model, the precision filter and the diaphragm valve are installed on the disc body in a welding mode.

[0009] As a further scheme of the utility model: the precision filter and the diaphragm valve are both installed on the disc body in a VCR (Vacuum Coupling Radius Seal) welding mode, which can guarantee firmness and good sealing performance.

[0010] Compared with the prior art, the utility model has the beneficial effects that:

[0011] The product can keep the use cleanliness of the rear-end gas by being equipped with the precision filter at the outlet of the pressure reducing valve, thereby meeting the basic requirement of CVD equipment production and continuously supplying the CVD equipment with gas. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a structure schematic view of the unilateral gas supply disc in the utility model embodiment.

[0013] In the drawing: 1 - diaphragm valve; 2 - pressure reducing valve; 3 - check valve; 4 - precision filter; 5 - diaphragm valve; 6 - disc body. DETAILED DESCRIPTION

[0014] The technical scheme in the utility model embodiments will be described clearly and completely below in combination with the drawings in the utility model embodiments. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0015] The specific implementation of the utility model will be described in detail below in combination with specific embodiments.

[0016] Please refer to Figure 1The utility model discloses an embodiment provides a kind of unilateral gas supply disc, including disc body 6, diaphragm valve 1, pressure reducing valve 2, check valve 3 and diaphragm valve 5 are installed on the disc body 6, diaphragm valve 1 is connected with the side of pressure reducing valve 2, the other side of pressure reducing valve 2 is connected with the side of check valve 3, precision filter 4 is also installed on disc body 6, the side of precision filter 4 is connected with the other side of check valve 3, the other side of precision filter 4 is connected with diaphragm valve 5, diaphragm valve 1 is used to control gas source switch in the product, pressure reducing valve 2 is used to control internal pressure of pipeline, to realize the output of stable flow, check valve 3 is used to prevent gas backflow, precision filter 4 is used to keep the use cleanliness of rear-end gas, diaphragm valve 5 is used to control the delivery of rear-end gas, the working process of the product is as follows: before use, first connect hose to diaphragm valve 5, confirm that pressure reducing valve 2 and diaphragm valve 5 are all in closed state, open diaphragm valve 5 for two seconds, repeat the operation of diaphragm valve 1 for two to three times (the operation is used to discharge residual air in pipeline, guarantee gas cleanliness), then adjust pressure reducing valve 2 to the required rear-end use pressure, after pressure stabilizes, open the diaphragm valve 5 of export, can deliver gas to rear-end use point, when needing to cut off rear-end gas, only need to close the diaphragm valve 5 of export.

[0017] In an embodiment of the utility model, the filtering precision of precision filter 4 is at least 0.003 μm, and the filtering precision can guarantee filtering effect, and thus ensure that the use cleanliness of rear-end gas always meets the production demand of CVD equipment.

[0018] In an embodiment of the utility model, diaphragm valve 1 and pressure reducing valve 2 are both installed on disc body 6 in a threaded connection mode, and the connection firmness can be guaranteed.

[0019] In an embodiment of the utility model, check valve 3 is installed on disc body 6 in a clamping sleeve mode, and the connection firmness is good, and the sealing effect is good.

[0020] In an embodiment of the utility model, precision filter 4 and diaphragm valve 5 are both installed on disc body 6 in a welding mode, the connection firmness is good, and the device can work continuously.

[0021] In an embodiment of the utility model, precision filter 4 and diaphragm valve 5 are both installed on disc body 6 in a VCR (Vacuum Coupling Radius Seal, vacuum connection radial seal) welding mode, and the connection firmness and the sealing property can be guaranteed.

[0022] It should be noted that in the utility model, unless another explicit provision and limitation, the term "fixed", "set" and other terms should be broad understanding, for example, can be welding connection, can also be bolted connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through the intermediate medium, can be two elements inside the communication or the interaction relationship of two elements, unless otherwise explicitly limited. For those of ordinary skill in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0023] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A single-sided air supply plate, comprising a plate body, wherein a diaphragm valve, a pressure reducing valve, a check valve, and a diaphragm valve are mounted on the plate body, the diaphragm valve being connected to one side of the pressure reducing valve, and the other side of the pressure reducing valve being connected to one side of the check valve, characterized in that, A precision filter is also installed on the disc. One side of the precision filter is connected to the other side of the check valve, and the other side of the precision filter is connected to the diaphragm valve.

2. The single-sided air supply plate according to claim 1, characterized in that, Both the diaphragm valve and the pressure reducing valve are installed on the disc body using a threaded connection.

3. The single-sided air supply plate according to claim 1 or 2, characterized in that, The one-way valve is mounted on the disc body using a ferrule.

4. The single-sided air supply plate according to claim 1, characterized in that, Both the precision filter and the diaphragm valve are mounted on the disc body by welding.

5. The single-sided air supply plate according to claim 4, characterized in that, Both the precision filter and the diaphragm valve are mounted on the disc using VCR welding.

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