High-purity gas supply disc

Abstract

The utility model relates to the field of gas supply discs, in particular to a high-purity gas supply disc which comprises a disc body, a pressure gauge, a pressure reducing valve, a one-way valve and a low-pressure diaphragm valve are installed on the disc body, one side of the low-pressure diaphragm valve is connected with one side of the pressure reducing valve, and the other side of the pressure reducing valve is connected with one side of the one-way valve. A pressure sensor and a pneumatic diaphragm valve are further installed on the disc body, the pneumatic diaphragm valve is located between the pressure reducing valve and the one-way valve, and the pressure sensor is located between the pressure gauge and the pressure reducing valve. According to the product, the operation efficiency, the space utilization rate, the safety and the compliance can be remarkably improved through the highly integrated design of the tray body; through the pneumatic diaphragm valve, the concentration alarm of the pressure gauge and the linkage of the pressure sensor, automation can be realized; the one-way valve is installed on the bypass, so that gas backflow can be prevented, and blow-by is prevented.

Description

Technical Field

[0001] This utility model relates to the field of gas supply plates, specifically a high-purity gas supply plate. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is a common type of equipment used to prepare various types of thin films. It requires various auxiliary devices, and the gas supply plate is a common auxiliary device for CVD equipment.

[0003] While existing air supply panels can supply air for CVD equipment, they do not automatically alert users when a malfunction occurs, and their level of automation does not meet user needs. Utility Model Content

[0004] To achieve the above objectives, the purpose of this utility model is to provide a high-purity gas supply plate, which can solve the problems existing in the background art. This utility model provides the following technical solution:

[0005] A high-purity gas supply plate includes a plate body. A pressure gauge, a pressure reducing valve, a check valve, and a low-pressure diaphragm valve are mounted on the plate body. One side of the low-pressure diaphragm valve is connected to one side of the pressure reducing valve, and the other side of the pressure reducing valve is connected to one side of the check valve. A pressure sensor and a pneumatic diaphragm valve are also mounted on the plate body. The pneumatic diaphragm valve is located between the pressure reducing valve and the check valve, and the pressure sensor is located between the pressure gauge and the pressure reducing valve. In this product, the pressure gauge is used to display the cylinder pressure, the pressure reducing valve is used to regulate the internal pressure of the pipeline to achieve a stable flow output, and the check valve is used for... To prevent gas backflow, a low-pressure diaphragm valve is used to control the gas delivery at the downstream end, a pressure sensor is used to monitor the cylinder pressure in real time, and a pneumatic diaphragm valve is used to link with the PLC control switch. The working process of this product is as follows: Before use, connect the cylinders on both sides, close all pneumatic diaphragm valves, open the cylinders, observe the internal pressure through the pressure gauge to confirm that there are no leaks in the connection, open the pneumatic diaphragm valve, adjust the pressure reducing valve to the equipment operating pressure, and then continuously supply gas. You can also open the middle pneumatic diaphragm valve as needed to mix the gas.

[0006] As a further aspect of this invention, a precision filter is also installed on the disc body. The precision filter is connected to a low-pressure diaphragm valve to maintain the cleanliness of the downstream gas and to continuously supply gas to the CVD equipment.

[0007] As a further aspect of this invention, the filtration accuracy of the precision filter is at least 0.003μm. This filtration accuracy can guarantee the filtration effect, thereby ensuring that the cleanliness of the downstream gas always meets the production requirements of the CVD equipment.

[0008] As a further embodiment of this utility model: the pressure gauge, pressure sensor, pneumatic diaphragm valve, check valve, pressure reducing valve, and low-pressure diaphragm valve are all mounted on the disc body by VCR welding.

[0009] As a further embodiment of this invention: the precision filter is installed on the disc body by VCR (Vacuum Coupling Radius Seal) welding, which can ensure good connection and excellent sealing performance.

[0010] Compared with the prior art, the beneficial effects of this utility model are:

[0011] This product significantly improves operational efficiency, space utilization, safety, and compliance through its highly integrated design within the control panel. Automation is achieved through the linkage of a pneumatic diaphragm valve, pressure gauge concentration alarm, and pressure sensor. A one-way valve is installed on the bypass to prevent gas backflow and thus prevent cross-contamination. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the high-purity gas supply plate in an embodiment of this utility model.

[0013] In the diagram: 1-Pressure gauge; 2-Pressure sensor; 3-Pneumatic diaphragm valve; 4-Check valve; 5-Pressure reducing valve; 6-Low-pressure diaphragm valve; 7-Precision filter; 8-Disc body. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0016] Please see Figure 1This utility model provides a high-purity gas supply plate, including a plate body 8. A pressure gauge 1, a pressure reducing valve 5, a one-way valve 4, and a low-pressure diaphragm valve 6 are installed on the plate body 8. One side of the low-pressure diaphragm valve 6 is connected to one side of the pressure reducing valve 5, and the other side of the pressure reducing valve 5 is connected to one side of the one-way valve 4. A pressure sensor 2 and a pneumatic diaphragm valve 3 are also installed on the plate body 8. The pneumatic diaphragm valve 3 is located between the pressure reducing valve 5 and the one-way valve 4, and the pressure sensor 2 is located between the pressure gauge 1 and the pressure reducing valve 5. In this product, the pressure gauge 1 is used to display the cylinder pressure, and the pressure reducing valve 5 is used to regulate the internal pressure of the pipeline, thereby achieving stable gas supply. The product features a constant flow output, a one-way valve 4 to prevent gas backflow, a low-pressure diaphragm valve 6 to control the delivery of gas to the downstream end, a pressure sensor 2 to monitor the cylinder pressure in real time, and a pneumatic diaphragm valve 3 to link with the PLC control switch. The working process of this product is as follows: Before use, connect the cylinders on both sides, close all pneumatic diaphragm valves 3, open the cylinders, observe the internal pressure through pressure gauge 1 to confirm that there is no leakage in the connection, and after opening the pneumatic diaphragm valve 3, adjust the pressure reducing valve 5 to the operating pressure of the equipment, and then continuously supply gas. Alternatively, the middle pneumatic diaphragm valve 3 can be opened as needed for gas mixing.

[0017] In one embodiment of this utility model, a precision filter 7 is also installed on the disc body 8. The precision filter 7 is connected to the low-pressure diaphragm valve 6 to maintain the cleanliness of the downstream gas and to continuously supply gas to the CVD equipment.

[0018] In one embodiment of this utility model, the precision filter 7 has a filtration accuracy of at least 0.003 μm. This filtration accuracy can ensure the filtration effect, thereby ensuring that the cleanliness of the downstream gas always meets the production requirements of the CVD equipment.

[0019] In one embodiment of this utility model, the pneumatic diaphragm valve 3 is a high-pressure pneumatic diaphragm valve, which has readily available components, a wide range of applications, and a long service life.

[0020] In one embodiment of this utility model, the pressure gauge 1, pressure sensor 2, pneumatic diaphragm valve 3, check valve 4, pressure reducing valve 5, and low-pressure diaphragm valve 6 are all mounted on the disc body 8 by VCR welding, resulting in a strong connection.

[0021] In one embodiment of this utility model, the precision filter 7 is installed on the disc body 8 by VCR (Vacuum Coupling Radius Seal) welding, which can ensure good connection and excellent sealing performance.

[0022] It should be noted that, in this utility model, unless otherwise explicitly specified and limited, the terms "fixed," "set up," etc., should be interpreted broadly. For example, they can refer to welded connections, bolted connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A high-purity gas supply panel comprising a panel body, a pressure gauge, a pressure reducing valve, a check valve and a low-pressure diaphragm valve mounted on the panel body, one side of the low-pressure diaphragm valve being connected to one side of the pressure reducing valve, the other side of the pressure reducing valve being connected to one side of the check valve, characterized in that, The disc body is further provided with a pressure sensor and a pneumatic diaphragm valve, the pneumatic diaphragm valve is located between the pressure reducing valve and the one-way valve, and the pressure sensor is located between the pressure gauge and the pressure reducing valve.

2. The high-purity gas supply panel of claim 1, wherein The disc body is further provided with a precision filter connected with the low-pressure diaphragm valve.

3. The high-purity gas supply panel of claim 2, wherein The precision filter has a filtering precision of at least 0.003 microns.

4. The high-purity gas supply panel according to claim 2 or 3, characterized by, The precision filter is welded on the disc body by VCR welding.

5. The high-purity gas supply panel of claim 1, wherein The pressure gauge, the pressure sensor, the pneumatic diaphragm valve, the one-way valve, the pressure reducing valve and the low-pressure diaphragm valve are all welded on the disc body by VCR welding.

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