High-rigidity supporting panel for vibration isolation foundation seat

Abstract

The high-rigidity supporting panel for the vibration isolation foundation seat comprises a top plate and side plates fixedly arranged on the periphery of the top plate, the top plate and the side plates form an opening-shaped rectangular box body, opposite insertion type reinforcing ribs are arranged in the opening-shaped rectangular box body, and the opposite insertion type reinforcing ribs are connected with the top plate and the side plates. The plug-in type reinforcing rib is a rectangular reinforcing rib which is formed by orthogonally splicing a plurality of reinforcing ribs A and a plurality of reinforcing ribs B and is provided with a plurality of through hole grids, and the top face of the plug-in type reinforcing rib is fixedly connected with the bottom face of the top plate. And the peripheral sides of the plug-in reinforcing ribs are fixedly connected with the inner wall surfaces of the corresponding side plates of the open rectangular box body respectively. According to the high-rigidity supporting panel, the self weight can be reduced, the requirement for high rigidity of equipment bearing can be met, the high-rigidity supporting panel is simple in structure, easy to achieve and low in manufacturing cost, the load requirement for a shock absorber can be lowered, the requirement for high rigidity of a vibration isolation foundation base can be met, and meanwhile the manufacturing cost of the vibration isolation foundation base can be remarkably reduced.

Description

Technical Field

[0001] This utility model relates to a high-rigidity support panel for vibration isolation foundations, belonging to the technical field of precision instrument bases. Background Technology

[0002] In the semiconductor industry, some precision electronic devices have higher requirements for environmental vibration and load-bearing stiffness than usual. Excessive environmental vibration and insufficient support stiffness can directly affect the manufacturing process and yield of precision electronic products.

[0003] Vibration isolation bases are commonly used support foundations and mounting platforms for precision instruments (such as lithography machines), and their support stiffness directly affects the manufacturing process and yield of precision electronic products. Currently, the support panels of vibration isolation bases are conventionally made of 104mm solid stainless steel plates. These solid stainless steel plates are heavy, resulting in relatively large vibrations. To reduce environmental vibrations, it is necessary to select vibration isolators with a large load capacity to meet the load-bearing requirements of the equipment. However, vibration isolators with a large load capacity are very expensive, which increases the cost of the equipment.

[0004] In response to the above situation, the applicant previously disclosed a high-rigidity stainless steel plate that can be used as a supporting top plate for an active foundation in utility model patent CN202322668523.0. This high-rigidity stainless steel plate has stainless steel honeycomb reinforcing ribs, within which several stainless steel embedded blocks are pre-embedded. While this patent improved the internal structure of the steel plate serving as the foundation support top plate to a certain extent, the honeycomb-shaped thin ribs of the steel plate in this patent make it prone to deformation under stress, resulting in the load-bearing stiffness of the foundation support top plate not adequately meeting the usage requirements. Utility Model Content

[0005] In view of the above-mentioned problems in the existing technology, the purpose of this utility model is to provide a high-rigidity support panel for vibration isolation foundation.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-rigidity support panel for vibration isolation foundation includes a top plate and side plates fixed around the top plate. The top plate and side plates form an open rectangular box. The open rectangular box contains interlocking reinforcing ribs. Each interlocking reinforcing rib is a rectangular body-shaped reinforcing rib with several through-hole grids formed by orthogonally splicing several reinforcing ribs A and several reinforcing ribs B. The top surface of the interlocking reinforcing ribs is fixedly connected to the bottom surface of the top plate, and the four sides of the interlocking reinforcing ribs are respectively fixedly connected to the inner wall surface of the corresponding side plate of the open rectangular box.

[0008] In one embodiment, the top plate, side plate, and reinforcing ribs A and B are all made of steel. The side plates are fixed to the top plate and to each other by welding. The interlocking reinforcing ribs are fixed to the top plate and side plates by welding.

[0009] In one embodiment, the reinforcing rib A has a plurality of upward-opening slots A along its extension direction, and the reinforcing rib B has a plurality of downward-opening slots B along its extension direction. The reinforcing ribs A and B are connected and welded together through slots A and slots B to form an orthogonally spliced ​​overall structure.

[0010] In one embodiment, the number of reinforcing ribs A is equal to the number of slots B provided in each reinforcing rib B, and the number of reinforcing ribs B is equal to the number of slots A provided in each reinforcing rib A.

[0011] In a preferred embodiment, the number of slots A provided in each reinforcing rib A is equal to the number of slots B provided in each reinforcing rib B.

[0012] In a further optimized scheme, the spacing of slot A is equal to the spacing of slot B.

[0013] In one embodiment, the outer sides of the first and last slots A of each reinforcing rib A are respectively provided with reinforcing grooves A, and the distance between slot A and its adjacent reinforcing groove A is less than the distance between two adjacent slots A; the outer sides of the first and last slots B of each reinforcing rib B are respectively provided with reinforcing grooves B, and the distance between slot B and its adjacent reinforcing groove B is less than the distance between two adjacent slots B.

[0014] In one embodiment, the high-rigidity support panel further includes a base plate for sealing the open rectangular box, wherein the bottom surface of the interlocking reinforcing rib is fixedly connected to the top surface of the base plate.

[0015] In one embodiment, the bottom surface of the interlocking reinforcing rib is fixedly connected to the top surface of the base plate by a cast epoxy resin layer.

[0016] In a preferred embodiment, the base plate is made of steel and is welded and fixed to the side plates on all four sides.

[0017] In one embodiment, the top plate is provided with an epoxy resin injection hole for injecting epoxy resin.

[0018] In a preferred embodiment, an epoxy resin injection hole is provided at each of the four corners of the top plate.

[0019] In one embodiment, the top plate and the bottom plate are provided with a plurality of threaded holes arranged in a matrix, the threaded holes being connected to the through-hole grid in the interlocking reinforcing ribs, and each threaded hole being threadedly connected with a threaded bushing.

[0020] Compared with the prior art, the beneficial technical effects of this utility model are as follows:

[0021] The high-rigidity support panel for vibration isolation foundations provided by this utility model, due to the interlocking reinforcing ribs inside, not only reduces its own weight but also meets the high rigidity requirements of equipment load-bearing compared to the prior art. Furthermore, it has a simple structure, is easy to implement, has low manufacturing costs, and can reduce the load requirements on the vibration isolators. While meeting the high rigidity requirements of the vibration isolation foundation, it can also significantly reduce the manufacturing cost of the vibration isolation foundation. Therefore, this utility model has significant progress and industrial application value compared to the prior art. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a high-rigidity support panel for a vibration isolation foundation provided in the embodiment;

[0023] Figure 2 This is a schematic diagram illustrating the connection structure between the interlocking reinforcing ribs and the top and side plates as described in the embodiment;

[0024] Figure 3 yes Figure 2 A magnified view of the local structure;

[0025] Figure 4 This is a schematic diagram of the interlocking reinforcing ribs described in the embodiment;

[0026] Figure 5 yes Figure 4 A magnified view of the local structure;

[0027] Figure 6 This is a schematic diagram of the structure of a single reinforcing rib A as described in the embodiment;

[0028] Figure 7 This is a schematic diagram of the structure of a single reinforcing rib B as described in the embodiment;

[0029] Figure 8 This is a cross-sectional view of the high-rigidity support panel for vibration isolation foundation provided in the embodiment;

[0030] Figure 9 This is a schematic diagram illustrating the connection structure between the interlocking reinforcing ribs and the base plate as described in the embodiment;

[0031] Figure 10 This is a schematic diagram of the top plate structure described in the embodiment;

[0032] Figure 11 This is a schematic diagram of the structure of the base plate described in the embodiment;

[0033] Figure 12This is a schematic diagram of the structure of a high-rigidity support panel for a vibration isolation foundation provided in the embodiment, viewed from another perspective;

[0034] The labels in the diagram are as follows:

[0035] 1. Top plate; 1-1. Epoxy resin injection hole; 1-2. Threaded hole on top plate 1; 2. Side plate; 3. Interlocking reinforcing ribs; 3-1. Reinforcing rib A; 3-11. Slot A; 3-12. Reinforcing groove A; 3-2. Reinforcing rib B; 3-21. Slot B; 3-22. Reinforcing groove B; 3-3. Through-hole grid; 4. Bottom plate; 4-1. Threaded hole on bottom plate 4; 5. Epoxy resin layer; 6. Threaded bushing. Detailed Implementation

[0036] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Furthermore, it should be noted that the terminology used in this utility model is for the purpose of describing specific embodiments only and is not intended to limit the utility model. Unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by those skilled in the art. Terms such as "inner," "outer," "upper," "lower," "top," "bottom," "front," "rear," "left," and "right," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device referred to must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. In addition, terms such as "set," "install," "connect," "link," and "fix" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0037] Example

[0038] Please combine Figures 1 to 3As shown in the figure, this embodiment provides a high-rigidity support panel for a vibration isolation foundation, including a top plate 1 and side plates 2 fixed around the top plate 1. The top plate 1 and the side plates 2 form an open rectangular box. The open rectangular box contains interlocking reinforcing ribs 3. Each interlocking reinforcing rib 3 is formed by orthogonally splicing several reinforcing ribs A 3-1 and several reinforcing ribs B 3-2 to form a rectangular reinforcing rib with several through-hole grids 3-3. The top surface of the interlocking reinforcing rib 3 is fixedly connected to the bottom surface of the top plate 1, and the four sides of the interlocking reinforcing rib 3 are respectively fixedly connected to the inner wall surface of the corresponding side plate 2 of the open rectangular box. Specifically, in this embodiment, the top plate 1, side plates 2, and reinforcing ribs A 3-1 and B 3-2 are all made of steel (e.g., carbon steel). The side plates 2 are welded to the top plate 1 and to each other, and the interlocking reinforcing ribs 3 are welded to both the top plate 1 and the side plates 2.

[0039] Please combine Figures 4 to 7 As shown, in this embodiment, the reinforcing rib A 3-1 has multiple upward-opening slots A 3-11 along its extension direction, and the reinforcing rib B 3-2 has multiple downward-opening slots B 3-21 along its extension direction. The reinforcing ribs A 3-1 and B 3-2 are connected and welded together through slots A 3-11 and slots B 3-21 to form an orthogonally spliced ​​overall structure. The number of reinforcing ribs A 3-1 is equal to the number of slots B 3-21 provided in each reinforcing rib B 3-2, and the number of reinforcing ribs B 3-2 is equal to the number of slots A 3-11 provided in each reinforcing rib A 3-1. As a preferred embodiment, the number of slots A 3-11 provided in each reinforcing rib A 3-1 is equal to the number of slots B 3-21 provided in each reinforcing rib B 3-2, and the spacing between slots A 3-11 is equal to the spacing between slots B 3-21. This forms a cubic interlocking reinforcing rib 3 with a matrix arrangement of through-hole grid 3-3, which ensures uniform stress distribution and further improves load-bearing stiffness.

[0040] In addition, in this embodiment, each reinforcing rib A 3-1 has a reinforcing groove A3-12 on the outer side of its first and last slots A 3-11, and the distance between slot A 3-11 and its adjacent reinforcing groove A 3-12 is smaller than the distance between two adjacent slots A 3-11; each reinforcing rib B 3-2 has a reinforcing groove B 3-22 on the outer side of its first and last slots B 3-21, and the distance between slot B 3-21 and its adjacent reinforcing groove B 3-22 is smaller than the distance between two adjacent slots B 3-22. This design allows the interlocking reinforcing ribs 4 to have better load-bearing strength around their perimeter.

[0041] Please see Figure 8 and Figure 9 As shown, in this embodiment, the high-rigidity support panel further includes a base plate 4 for sealing the open rectangular box. The bottom surface of the interlocking reinforcing rib 3 is fixedly connected to the top surface of the base plate 4. Specifically, in this embodiment, the bottom surface of the interlocking reinforcing rib 3 and the top surface of the base plate 4 are connected by a cast epoxy resin layer 5. As a preferred embodiment, the base plate 4 is made of steel (e.g., carbon steel), and the base plate 4 is welded and fixed to the side plates 2 on all four sides.

[0042] Please combine Figure 1 and Figure 10 As shown, in this embodiment, the top plate 1 is provided with epoxy resin injection holes 1-1 for injecting epoxy resin. As a preferred embodiment, an epoxy resin injection hole 1-1 is provided at each of the four corners of the top plate 1. This not only improves the injection efficiency of epoxy resin, but also ensures that the injected epoxy resin is evenly distributed.

[0043] Please combine Figure 1 , Figure 8 and Figures 10 to 12 As shown, in this embodiment, the top plate 1 is provided with a plurality of threaded holes 1-2 arranged in a matrix, and the bottom plate 4 is also provided with a plurality of threaded holes 4-1 arranged in a matrix. The threaded holes 1-2 and 4-1 are connected to the through-hole grid 3-3 in the interlocking reinforcing ribs. Threaded bushings 6 are threadedly connected to the threaded holes 1-2 and 4-1.

[0044] This utility model, by setting threaded bushings 6 in a matrix distribution on the top plate 1 and the bottom plate 4, has higher application versatility and convenience compared with the design of pre-embedded steel blocks in the prior art. It can not only realize the flexibility of its own installation and fixation, but also improve the convenience and applicability of the installation and fixation of the load-bearing equipment.

[0045] The manufacturing method of the high-rigidity support panel for vibration isolation foundation described in this utility model is as follows:

[0046] First, place the top plate 1 upside down on a relatively flat platform and fix it. Then, weld the top surface of the interlocking reinforcing ribs 3, which are orthogonally spliced ​​to form an integral structure, to the bottom surface of the top plate 1. Next, weld the side plates 2 to the top plate and the four sides of the interlocking reinforcing ribs 3. Then, weld the bottom plate 4 to the side plates 2 on all four sides to form a closed rectangular box-shaped panel. Then, screw the threaded bushing 6 into the threaded hole 4-1 on the bottom plate 4, ensuring that the bottom surface of the threaded bushing 6 is flush with the bottom surface of the bottom plate 4. Then, turn the top plate 1 upside down onto the bottom surface of the top plate 1. Place the rectangular box-shaped panel as described above on top, and screw the threaded bushing 6 into the threaded holes 1-2 on the top plate 1, ensuring that the top surface of the threaded bushing 6 is flush with the top surface of the top plate 1. Then, inject epoxy resin through the epoxy resin injection hole 1-1 on the top plate 1 to form an epoxy resin layer 5 on the top surface of the bottom plate 4, so that the bottom surface of the interlocking reinforcing rib 3 is solidified and connected to the top surface of the bottom plate 4. Finally, perform rust prevention treatment on the surface of the obtained support panel to complete the entire manufacturing process of the high rigidity support panel for vibration isolation foundation described in this utility model.

[0047] Finally, it should be pointed out that the above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-rigidity support panel for vibration isolation foundations, characterized in that: The device includes a top plate and side plates fixed around the top plate. The top plate and side plates form an open rectangular box. The open rectangular box contains interlocking reinforcing ribs. Each interlocking reinforcing rib is a rectangular reinforcing rib with a grid of through holes formed by orthogonally splicing several reinforcing ribs A and several reinforcing ribs B. The top surface of the interlocking reinforcing ribs is fixedly connected to the bottom surface of the top plate, and the four sides of the interlocking reinforcing ribs are respectively fixedly connected to the inner wall surface of the corresponding side plate of the open rectangular box.

2. The high-rigidity support panel for vibration isolation foundation as described in claim 1, characterized in that: The top plate, side plates, and reinforcing ribs A and B are all made of steel. The side plates are fixed to the top plate and to each other by welding. The interlocking reinforcing ribs are fixed to the top plate and side plates by welding.

3. The high-rigidity support panel for vibration isolation foundation as described in claim 1 or 2, characterized in that: The reinforcing rib A has multiple upward-facing slots A along its extension direction, and the reinforcing rib B has multiple downward-facing slots B along its extension direction. Several reinforcing ribs A and several reinforcing ribs B are connected and welded together through slots A and slots B to form an orthogonally spliced ​​overall structure.

4. The high-rigidity support panel for vibration isolation foundation according to claim 3, characterized in that: The number of reinforcing ribs A is equal to the number of slots B provided for each reinforcing rib B, and the number of reinforcing ribs B is equal to the number of slots A provided for each reinforcing rib A.

5. The high-rigidity support panel for vibration isolation foundation according to claim 4, characterized in that: The number of slots A in each reinforcing rib A is the same as the number of slots B in each reinforcing rib B, and the spacing between slots A and slots B is the same.

6. The high-rigidity support panel for vibration isolation foundation according to claim 1, characterized in that: Each reinforcing rib A has a reinforcing groove A on the outer side of its first and last slots A, and the distance between slot A and its adjacent reinforcing groove A is less than the distance between two adjacent slots A; each reinforcing rib B has a reinforcing groove B on the outer side of its first and last slots B, and the distance between slot B and its adjacent reinforcing groove B is less than the distance between two adjacent slots B.

7. The high-rigidity support panel for vibration isolation foundation according to claim 1, characterized in that: The high-rigidity support panel also includes a base plate for sealing the open rectangular box. The base plate is made of steel and is welded and fixed to the side plates on all four sides. The bottom surface of the interlocking reinforcing rib is fixedly connected to the top surface of the base plate.

8. The high-rigidity support panel for vibration isolation foundation according to claim 7, characterized in that: The bottom surface of the interlocking reinforcing rib is fixedly connected to the top surface of the base plate through a cast epoxy resin layer.

9. The high-rigidity support panel for vibration isolation foundation according to claim 1, characterized in that: The top plate is provided with epoxy resin injection holes for injecting epoxy resin.

10. The high-rigidity support panel for vibration isolation foundation according to claim 7, characterized in that: Both the top and bottom plates are provided with multiple threaded holes arranged in a matrix. The threaded holes are connected to the through-hole grid in the interlocking reinforcing ribs, and each threaded hole is threaded with a threaded bushing.

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