Integrated gas path valve group and dilution refrigerator equipment

Abstract

The utility model relates to the technical field of refrigeration equipment, and provides an integrated gas path valve group and dilution refrigerator equipment, the integrated gas path valve group comprises a main body seat and a plurality of angle valve seats which are integrally arranged, a plurality of communicated gas path channels are formed in the main body seat, and the plurality of gas path channels are provided with at least one vacuum valve; the vacuum valve is used for controlling the on-off of the gas channel, and a plurality of connecting ports communicated with the gas channel are formed in the side edge of the main body seat; each corner valve seat is arranged on one connector, the connectors comprise an air inlet and an air outlet, the air inlets are used for being connected with an air tank, and the air outlets are used for being connected with a dilution refrigerator. The main body seat is integrally arranged, so that a circulating gas path is prevented from being formed by welding a clamping sleeve or a vacuum tube, a gas path system is simplified, the occupied area is reduced, and meanwhile, the risk of helium leakage is reduced.

Description

Technical Field

[0001] This utility model relates to the field of refrigeration equipment technology, and in particular to integrated gas valve assembly and dilution refrigeration equipment. Background Technology

[0002] A dilution refrigerator is a high-end scientific instrument that can provide an environment close to absolute zero. It is widely used in scientific research fields such as condensed matter physics, particle physics, and quantum computing.

[0003] In related technologies, the gas delivery circuit of dilution refrigerators often uses compression fittings or welded vacuum tubes to reduce connection points and gas circuit volume. This offers advantages such as easy installation, low cost, and good sealing, making it suitable for most industrial gas circuit systems operating in medium to low pressure and normal temperature environments. However, its pressure resistance is limited, installation requirements are high, and it performs poorly under vibration or extreme temperature conditions. Furthermore, the compression fittings may leak during repeated disassembly and assembly, resulting in the loss of helium-3 gas.

[0004] Currently, the commonly used gas connection method requires adjusting the angle of the steel pipe during installation, and the entire gas system occupies a large area, which is not conducive to saving space. The gas system uses multiple clamp connections, which poses a risk of leakage. Utility Model Content

[0005] This invention aims to solve at least one of the technical problems existing in related technologies. To this end, this invention proposes an integrated pneumatic valve assembly, designed to simplify the pneumatic system and effectively reduce the risk of leakage.

[0006] This utility model also proposes a dilution refrigeration machine.

[0007] The integrated pneumatic valve assembly according to a first aspect of the present invention includes:

[0008] The main body is integrally formed, and multiple interconnected air passages are formed inside the main body. Each air passage is equipped with at least one vacuum valve, which is used to control the opening and closing of the air passages. Multiple connection ports connecting the air passages are opened on the side of the main body.

[0009] Multiple angle valve seats are provided, each of which is installed at one of the connection ports. The multiple connection ports include an air inlet and an air outlet. The air inlet is used to connect to a gas tank, and the air outlet is used to connect to a dilution refrigeration unit.

[0010] The integrated gas valve assembly according to this utility model embodiment forms a gas passage within the main body for transporting helium. An angle valve seat seals the connection port on the main body and connects to external components, thus forming a gas circulation system for use by the dilution refrigeration unit. The integrated main body avoids the need for ferrule tubes or vacuum tube welding to form the circulating gas path, simplifying the gas system, reducing the footprint, and minimizing the risk of helium leakage.

[0011] According to one embodiment of the present invention, a plurality of interconnected gas passages constitute a main circulation gas passage and a service gas passage. A vacuum valve is provided between the main circulation gas passage and the service gas passage. The inlet of the main circulation gas passage is connected to the inlet valve, and the outlet is connected to the outlet valve. The service gas passage is connected to the vacuum tank of the dilution refrigeration machine, and the service gas passage is used to evacuate the vacuum tank of the dilution refrigeration machine.

[0012] According to one embodiment of the present invention, the plurality of interconnected air passages include a pump front section and a pump rear section. The main body has a pump front hole and a pump rear hole. One end of the pump front section is connected to the air inlet valve, and the other end is connected to the pump front hole. One end of the pump rear section is connected to the pump rear hole, and the other end is connected to the air outlet valve. The integrated air passage valve group includes a booster pump, which is located outside the main body and is connected to the pump front hole and the pump rear hole respectively.

[0013] According to one embodiment of the present invention, a first valve seat and a second valve seat are connected in the pump rear section. The first valve seat is used to connect to the outlet cold trap, and the second valve seat is used to connect to the inlet cold trap. The first valve seat is connected to the outlet valve, and the second valve seat is connected to the pump rear hole.

[0014] According to one embodiment of the present invention, the plurality of air passages include an air intake passage connected to the air intake valve. The main body has a pinhole that communicates with the air intake passage. The integrated air valve group includes a needle valve located outside the main body. The needle valve is connected to the air intake passage through the pinhole and is used to control the air intake volume of the air intake passage.

[0015] According to one embodiment of the present invention, the main body seat has a safety hole that connects to the air passage, and the integrated air passage valve group includes a back pressure valve, which is located outside the main body seat and connects to the air passage through the safety hole.

[0016] According to one embodiment of the present invention, the main body seat is provided with a plurality of safety holes, and the integrated air circuit valve group includes at least two back pressure valves, each of which is connected to the air circuit channel through the safety holes.

[0017] According to one embodiment of the present invention, a flow meter is provided in the gas passage near the gas outlet valve.

[0018] According to one embodiment of the present invention, the main body is made of metal or polymer plastic.

[0019] According to a second aspect of the present invention, a dilution refrigeration device includes a dilution refrigeration unit and the aforementioned integrated gas path valve assembly, wherein the integrated gas path valve assembly is connected to the dilution refrigeration unit.

[0020] The dilution refrigeration equipment according to the embodiment of this utility model includes the above-mentioned integrated gas circuit valve group, and therefore has all the technical effects of the above-mentioned integrated gas circuit valve group, which will not be repeated here.

[0021] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the integrated pneumatic valve assembly provided in an embodiment of the present invention.

[0024] Figure 2 This is a schematic diagram of the air path of the integrated air path valve assembly provided in this embodiment of the utility model.

[0025] Figure 3 This is a schematic diagram of the gas path during vacuuming of the integrated gas valve assembly provided in this embodiment of the utility model.

[0026] Figure label:

[0027] 1. Main body seat; 11. Pump front hole; 12. Pump rear hole; 13. Pin hole; 14. Safety hole; 2. Angle valve seat; 3. Flow meter; 4. Needle valve; 5. Back pressure valve. Detailed Implementation

[0028] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0029] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0031] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0033] like Figure 1As shown, the integrated gas valve assembly according to the first aspect of the present invention includes an integrally formed main body 1 and multiple angle valve seats 2. Multiple interconnected gas passages are formed in the main body 1. At least one vacuum valve is provided in each of the multiple gas passages. The vacuum valve is used to control the opening and closing of the gas passages. Multiple connection ports for connecting the gas passages are opened on the side of the main body 1. Each angle valve seat 2 is installed in one connection port. The multiple angle valve seats 2 include an inlet valve and an outlet valve. The inlet valve is used to connect to a gas tank, and the outlet valve is used to connect to a dilution refrigeration unit.

[0034] According to the integrated gas valve assembly of this utility model embodiment, a gas passage is formed within the main body 1 for transporting helium. An angle valve seat 2 seals the connection port on the main body 1 and connects to external components, forming a gas circulation system for use by the dilution refrigerator. The integrally designed main body 1 avoids the need for ferrule tubes or vacuum tube welding to form the circulating gas path, simplifying the gas system, reducing the footprint, and minimizing the risk of helium leakage. The integrated gas valve assembly offers significant advantages in low-temperature performance, vacuum compatibility, thermal conductivity, lightweight design, corrosion resistance, and low magnetic susceptibility, making it suitable for cryogenic experiments, quantum computing, and high-precision scientific research. Its high reliability and customized design make it an ideal choice in the field of cryogenic equipment.

[0035] Optionally, the main body 1 is made of aluminum alloy. It is understood that the integrated gas valve group of this utility model simplifies the entire gas system into an aluminum alloy valve group. By drilling holes in the aluminum alloy, multiple interconnected gas channels are formed to achieve the connection and interconnection of the gas channels. The gas is transported only inside the aluminum alloy valve group, and there are no installation, welding or other processes at the connection points.

[0036] For example, the main body 1 is a rectangular block structure with holes drilled into its sides to form gas passages. Multiple holes are drilled on multiple sides to allow these gas passages to connect and combine to form a gas passage for transporting helium. Understandably, multiple vacuum valves can be installed within the gas passages to control the opening and closing of different gas passages, allowing helium to be transported in a specified direction. Thus, helium output from the gas tank can be transported through the inlet valve to the gas passage within the main body 1, and then through the outlet valve to the dilution refrigerator.

[0037] In one embodiment, the angle valve seat 2 and the main body seat 1 are sealed with a sealing ring, which effectively reduces the risk of leakage under low pressure. At the same time, the angle valve seat 2 adopts a commercially available and mature vacuum angle valve, retaining only the valve seat and integrating the valve body (metal pipe flange, interface) onto the main body seat 1, which can reduce the size of the angle valve seat and facilitate installation.

[0038] The specific implementation method of the integrated air circuit valve group is as follows: According to the air circuit design schematic diagram and the size of the commercial angle valve seat 2 to be used, a hole is drilled inside a whole metal part to realize the interconnection of the air circuit channels, thereby forming the main body seat 1. Then, the valve seat mounting structure is processed and the corresponding angle valve seat 2 is installed. The angle valve seat 2 can be pneumatic, electromagnetic, or manual. When it is necessary to connect the air circuit, controlling the angle valve seat 2 can realize the overall conduction of the air circuit channels.

[0039] Understandably, multiple air passages within the main body 1 can be formed by straight openings, with the intersections of two air passages interconnected, facilitating production. In other words, multiple air passages can be perpendicular or parallel to each other, resulting in a neat structure and ease of production. Thus, the depth of the openings controls whether different air passages are interconnected, thereby controlling the airflow path.

[0040] Please refer to the reference. Figures 1 to 3 According to one embodiment of the present invention, multiple interconnected gas passages constitute a main circulation gas passage and a service gas passage. A vacuum valve is provided between the main circulation gas passage and the service gas passage. The inlet of the main circulation gas passage is connected to an inlet valve, and the outlet is connected to an outlet valve. The service gas passage is connected to the vacuum tank of the dilution refrigeration machine and is used to evacuate the vacuum tank of the dilution refrigeration machine.

[0041] Understandably, in different operating modes, the main circulation gas path and the service gas path can be connected or disconnected via vacuum valves. That is, some gas passages within the main body 1 can be used for both helium and vacuum circuits at different times during system operation. Thus, the main circulation gas path transports the gas required for cryogenic refrigeration through the circulation system. When the main circulation gas path is operating, the service gas path is not involved; it can be used to extract air from the vacuum tank of the refrigeration unit before dilution. Optionally, the service gas path is connected to a leak detection valve seat for connecting an external leak detector. Since helium is easily detected by a helium leak detector, some angle valve seats 2 can be closed, and the leak detection valve seat connected to the leak detector can then detect leaks in the integrated gas path valve assembly. In this way, the main circulation gas path and the service gas path are integrated together in this main body 1, reducing size and creating a cleaner design.

[0042] According to one embodiment of the present invention, multiple interconnected air passages include a pump front section and a pump rear section. The main body 1 has a pump front hole 11 and a pump rear hole 12. One end of the pump front section is connected to an air inlet valve, and the other end is connected to the pump front hole 11. One end of the pump rear section is connected to the pump rear hole 12, and the other end is connected to an air outlet valve. The integrated air passage valve group includes a booster pump, which is located outside the main body 1 and is connected to the pump front hole 11 and the pump rear hole 12 respectively.

[0043] As can be understood, the "pump front section" refers to the section along the gas passage from the inlet valve to the pump front port 11 in the gas delivery direction, while the "pump rear section" refers to the section along the gas passage from the pump rear port 12 to the outlet valve in the gas delivery direction. The helium gas enters the booster pump from the pump front port 11, is pressurized by the booster pump, and then delivered to the pump rear port 12. The pressurization of the helium gas facilitates its liquefaction, allowing the liquid helium to evaporate during subsequent dilution and refrigeration to achieve low temperatures. The booster pump is positioned outside the main body 1 for easy installation and to avoid occupying internal space within the main body 1.

[0044] According to one embodiment of the present invention, a first valve seat and a second valve seat are connected in the pump rear section. The first valve seat is used to connect to the outlet cold trap, and the second valve seat is used to connect to the inlet cold trap. The first valve seat is connected to the outlet valve, and the second valve seat is connected to the pump rear hole 12.

[0045] Understandably, the cold trap is primarily used to pre-treat the gas entering the system. Through low-temperature condensation, impurities in the gas (such as water vapor and oil vapor) are condensed and solidified, thereby reducing their impact on the refrigeration cycle. The cold trap also prevents high-temperature gas from directly flowing back into the refrigerator, thus reducing reverse heat transfer and maintaining the refrigerator's low-temperature environment. Furthermore, the cold trap also has filtration and adsorption functions, further removing impurities from the gas to ensure the purity of the gas returning to the refrigerator and improve refrigeration efficiency.

[0046] According to one embodiment of this utility model, multiple gas passages include an air inlet passage connected to an air inlet valve. The main body 1 has a pinhole 13 communicating with the air inlet passage. The integrated gas valve assembly includes a needle valve 4, which is located outside the main body 1 and connected to the air inlet passage through the pinhole 13. The needle valve 4 is used to control the air intake volume of the air inlet passage. It is understood that the needle valve 4 being located outside the main body 1 facilitates external adjustment of the gas volume from the gas tank to the main body 1.

[0047] According to one embodiment of this utility model, the main body 1 has a safety hole 14 for connecting to the air passage. The integrated air passage valve group includes a back pressure valve 5, which is located outside the main body 1 and connects to the air passage through the safety hole 14. It is understood that by positioning the back pressure valve 5 outside the main body 1, when the pressure in the air passage inside the main body 1 is too high, pressure will be released through the back pressure valve 5, thereby improving safety.

[0048] According to one embodiment of this utility model, the main body 1 has multiple safety holes 14, and the integrated air circuit valve group includes at least two back pressure valves 5, each of which is connected to an air circuit channel through a safety hole 14. It is understood that providing multiple back pressure valves 5 allows them to be connected to different air circuit channels, thereby further improving safety.

[0049] According to one embodiment of this utility model, a flow meter 3 is provided near the outlet valve in the gas passage. It is understood that the flow meter 3 is used to calculate the gas flow rate circulating within the main body 1, facilitating the detection of relevant data and ensuring normal system operation.

[0050] According to one embodiment of this utility model, the main body 1 is made of metal or polymer plastic. For example, the main body 1 is made of aluminum alloy, stainless steel, brass, or other metal materials suitable for gas transportation, or other polymer plastic materials, to reduce weight.

[0051] The following is combined with Figure 2 and Figure 3 Here is an embodiment of the present invention:

[0052] Based on the gas path design schematic and the dimensions of the planned commercial angle valve seat 2, holes are drilled inside a single metal part to achieve interconnection of the gas path channels. For example, the main body 1 includes a first sidewall, a second sidewall, a third sidewall, and a fourth sidewall connected sequentially. The first sidewall has five connection ports, each with an angle valve seat 2, designated V1, V2, V3, V4, and V5. The second sidewall has four connection ports, each with an angle valve seat 2, designated V6, V7, V8, and V9. The third sidewall has two connection ports, each with an angle valve seat 2, designated V10 and V11. The fourth sidewall has three connection ports, each with an angle valve seat 2, designated V12, V13, and V14.

[0053] V4 is the inlet valve, V13 can be used as the outlet valve, and V11 can be used as a leak detection valve seat. A pump pre-port 11 is located at the junction of V5 and V6, and a pump post-port 12 connects to the corresponding gas path channel of V14. V1 connects to the outlet cold trap, and V2 connects to the inlet cold trap. That is, the gas in the gas tank enters the main body 1 from V4, then is transported upwards, passes through the pump pre-port 11 into the booster pump, and is then transported by the booster pump to the pump post-port 12. The gas at the pump post-port 12 flows towards the inlet cold trap, then exits from the outlet cold trap, and is transported to the dilution refrigerator after passing through the flow meter 3. It is understandable that when the gas passes through the branch of two interconnected gas paths, a vacuum valve is installed on the corresponding gas path channel to prevent the gas from flowing to an unspecified location, ensuring that the gas is transported along the designated path. For example, in... Figure 2 A vacuum valve is installed in the passage between V3 and V4 so that the gas in V4 flows only towards V5 and not towards V3.

[0054] When using the service gas line for vacuuming operations, such as Figure 3 As shown, V6, V13, V12, V11, and V10 are all closed, and the gas in the vacuum tank of the dilution refrigerator is drawn away by the connected vacuum pump through the VC port of V9.

[0055] It should be noted that, Figure 2 and Figure 3 In the diagram, P represents connection to a pressure gauge; T1 represents connection to a vortex pump; SL2 represents connection to a circulation pump; VC represents connection to a vacuum tank; V10 and V11 can be used as auxiliary interfaces for leak detection and vacuuming operations.

[0056] According to a second aspect of the present invention, the dilution refrigeration equipment includes a dilution refrigeration unit and the aforementioned integrated gas path valve assembly, wherein the integrated gas path valve assembly is connected to the dilution refrigeration unit.

[0057] The dilution refrigeration equipment according to the embodiment of this utility model includes the above-mentioned integrated gas circuit valve group, and therefore has all the technical effects of the above-mentioned integrated gas circuit valve group, which will not be repeated here.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, those skilled in the art should understand that various combinations, modifications, or equivalent substitutions of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention and should be covered within the scope of the claims of the present invention.

Claims

1. An integrated pneumatic valve assembly, characterized in that, include: The main body is integrally formed, and multiple interconnected air passages are formed inside the main body. Each air passage is equipped with at least one vacuum valve, which is used to control the opening and closing of the air passages. Multiple connection ports connecting the air passages are opened on the side of the main body. Multiple angle valve seats are provided, each of which is installed at one of the connection ports. The multiple connection ports include an air inlet and an air outlet. The air inlet is used to connect to a gas tank, and the air outlet is used to connect to a dilution refrigeration unit.

2. The integrated pneumatic valve assembly according to claim 1, characterized in that, Multiple interconnected gas passages form a main circulation gas passage and a service gas passage. A vacuum valve is provided between the main circulation gas passage and the service gas passage. The inlet of the main circulation gas passage is connected to the inlet valve, and the outlet is connected to the outlet valve. The service gas passage is connected to the vacuum tank of the dilution refrigeration machine and is used to evacuate the vacuum tank of the dilution refrigeration machine.

3. The integrated pneumatic valve assembly according to claim 1, characterized in that, The multiple interconnected air passages include a pump front section and a pump rear section. The main body has a pump front hole and a pump rear hole. One end of the pump front section is connected to the air inlet valve, and the other end is connected to the pump front hole. One end of the pump rear section is connected to the pump rear hole, and the other end is connected to the air outlet valve. The integrated air passage valve group includes a booster pump, which is located outside the main body and is connected to the pump front hole and the pump rear hole respectively.

4. The integrated pneumatic valve assembly according to claim 3, characterized in that, The pump's downstream section is connected to a first valve seat and a second valve seat. The first valve seat is used to connect to the outlet cold trap, and the second valve seat is used to connect to the inlet cold trap. The first valve seat is connected to the outlet valve, and the second valve seat is connected to the pump's downstream port.

5. The integrated pneumatic valve assembly according to claim 1, characterized in that, The plurality of air passages include an air intake passage connected to the air intake valve. The main body has a pinhole that communicates with the air intake passage. The integrated air valve assembly includes a needle valve located outside the main body. The needle valve is connected to the air intake passage through the pinhole and is used to control the air intake volume of the air intake passage.

6. The integrated pneumatic valve assembly according to claim 1, characterized in that, The main body has a safety hole that connects to the air passage. The integrated air valve group includes a back pressure valve, which is located outside the main body and connects to the air passage through the safety hole.

7. The integrated pneumatic valve assembly according to claim 6, characterized in that, The main body has multiple safety holes, and the integrated air valve group includes at least two back pressure valves, each of which is connected to the air passage through the safety hole.

8. The integrated pneumatic valve assembly according to claim 1, characterized in that, A flow meter is installed in the gas passage near the gas outlet valve.

9. The integrated pneumatic valve assembly according to any one of claims 1 to 8, characterized in that, The main body is made of metal or polymer plastic.

10. A dilution refrigeration machine, characterized in that, It includes a dilution refrigerator and an integrated gas valve assembly as described in any one of claims 1 to 9, wherein the integrated gas valve assembly is connected to the dilution refrigerator.

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