Photoresist production waste gas and harmful gas absorption device

Abstract

The utility model discloses a photoresist production waste gas and harmful gas absorption device which comprises a tank body, the bottom end of the tank body is fixedly connected with a support, one side of the outer wall of the tank body is fixedly connected with a gas inlet pipeline, and a water supplementing pipe is arranged above the gas inlet pipeline. Through cooperation of a tank body, a support, a gas inlet pipeline, a water supplementing pipe, a gas outlet pipe, a U-shaped pipe, a spray head, a lifting pump, a gas-liquid two-phase contact component and a filtering unit, the lifting pump is powered on to operate, one end of a special-shaped pipe can generate suction force, alkali liquor in the tank body is partially sucked in, and an impeller and a round rod can provide rotation acting force; in the process, the two supporting rods revolve around the round rod as the center, the filtering holes are cleaned by the steel wire bristles, the blockage probability of the filtering holes is effectively reduced, the filtering holes are in a filtering state for a long time, large particle impurities in alkali liquor are filtered by the filtering holes, the blockage condition of a lifting pump and a spray head can be avoided, and the service life of the lifting pump and the spray head is prolonged. And stable operation of the device is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste treatment technical field especially relates to photoresist production waste gas harmful gas absorption device. BACKGROUND

[0002] NAS-5 is the important raw material of photoresist, for guaranteeing photoresist product quality and specific performance index, the production of NAS-5 usually occupies the important link in photoresist production line, NAS-5 usually needs dehydration treatment after reacting completely in reaction kettle, but in the dehydration process, acid tail gas will be produced, and direct emission will cause environmental pollution.

[0003] In the prior art, a photoresist production waste gas harmful gas absorption device is disclosed, and its technical points are as follows: the device is composed of a condensation separation unit, a water spraying unit, an alkali spraying unit and an activated carbon adsorption and filtration unit connected in sequence, which can effectively remove harmful gas, fully utilize the heat in the tail gas and effectively reduce the loss of NAS-5.

[0004] However, the device still has some deficiencies in actual use, for example, the water inlet port of the water delivery pipeline does not have a filter screen structure, and the particles in the water during operation of the device can easily cause blockage of the lifting pump or the spray head, which affects the stable performance of the device during operation. In addition, the bottom of the tank cannot be cleaned thoroughly and conveniently during subsequent regular maintenance and cleaning of the tank, and therefore, it is necessary to provide a photoresist production waste gas harmful gas absorption device to solve the above technical problems. UTILITY MODEL CONTENTS

[0005] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a photoresist production waste gas harmful gas absorption device, which can impart high endurance filtering performance to the water inlet end of the water delivery pipeline, prevent the lifting pump and the spray head from being blocked, and facilitate stable operation of the device.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme:

[0007] The utility model provides a photoresist production waste gas harmful gas absorption device, including: the bottom of jar body is fixedly connected with support, one side of the outer wall of jar body is fixedly connected with air inlet pipeline, the upper portion of air inlet pipeline is equipped with water supplement pipe, water supplement pipe is fixedly connected with jar body, the top of jar body is fixedly connected with air outlet pipe, the other side of the outer wall of jar body is fixedly connected with U type pipe, the top of U type pipe is fixedly connected with cavity board, the surface of cavity board is fixedly connected with a plurality of cross pipes from front to back one side away from U type pipe direction, the outer wall bottom of cross pipe is uniformly fixedly connected with a plurality of shower nozzles, the pipeline of U type pipe is installed with lifting pump, the lower portion of shower nozzle is equipped with gas-liquid two-phase indirect contact component, gas-liquid two-phase indirect contact component is fixedly connected with the inner wall of jar body, the bottom center of jar body is fixedly connected with butterfly valve, the bottom of U type pipe is equipped with filter unit, filter unit includes: profiled pipe, is fixedly connected in the bottom of U type pipe, and profiled pipe is fixedly connected with the contact surface of jar body, round plate, is fixedly connected in the end of profiled pipe away from the direction of U type pipe, filter hole, set up multiple, evenly open in the one side surface of round plate, round rod, transverse rotation is connected in the inner wall of round plate, support rod, set up two, respectively fixedly connected with one end on the upper and lower sides of the outer wall of round rod, steel wire brush hair, set up multiple, from top to bottom respectively fixedly connected with one side of the outer wall of two support rods, and steel wire brush hair is in surface with round plate The lobe wheel is fixedly connected with the other end of round rod.

[0008] Preferably, the outer wall of the air inlet pipeline is fixedly connected with a cavity ball, which is located below the center of the interior of the tank, and a plurality of air outlets are uniformly provided on the outer wall of the cavity ball.

[0009] Preferably, a monitor is provided between the air inlet pipeline and the water supplement pipe, and the contact surface of the monitor is fixedly connected with the tank.

[0010] Preferably, the round rod is a transverse double-joint structure, and an auxiliary unit is provided between the double-joint round rods, the auxiliary unit comprising: a reduction gear box connected between the double-joint round rods; two sealing plates respectively located on the two sides of the reduction gear box and rotationally connected with the round rods through sealing bearings; a cover cylinder fixedly connected between the two sealing plates; two connecting rods respectively fixedly connected with the upper and lower ends of the outer wall of the cover cylinder, and the support rod is fixedly connected with the inner wall of the profiled pipe.

[0011] Preferably, an opening is provided below the front side of the outer wall of the tank, and a baffle is provided in front of the opening, the rear surface of the baffle is fixedly connected with an alkali-resistant sealing pad, the alkali-resistant sealing pad is tightly abutted with the outer wall of the tank, a plurality of bolts are inserted into the outer side of the front surface of the baffle, and the bolts are sequentially threaded into the tank through the baffle and the alkali-resistant sealing pad.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] (1) The utility model discloses a cooperation between the tank body, support, air inlet pipeline, water supplement pipe, air outlet pipe, U type pipe, shower nozzle, booster pump, gas -liquid two phase indirect contact component and filter unit, and the booster pump is electrified operation, can make the suction of one end of the special pipe, and the alkali solution inside tank body is inhaled in parts, and in turn through U type pipe, cavity board and horizontal pipe and scatters and sprays from the below of shower nozzle, and the alkali solution is inhaled in the one end of special pipe during the period, and the flow of alkali solution in the special pipe can produce impact force to impeller, can make the rotation of impeller and round bar, the two supporting rods can revolve around the round bar as the center in this process, and steel wire brush hair can clean filter hole, effectively reduce the jam probability of filter hole, make filter hole be in filtering state for a long time, and the larger particle impurities in alkali solution are filtered through filter hole, can avoid the jam of booster pump and shower nozzle, and the stable operation of device is convenient;

[0014] (2) The utility model discloses a cooperation between the tank body, support, air inlet pipeline, water supplement pipe, air outlet pipe, U type pipe, shower nozzle, booster pump, gas -liquid two phase indirect contact component, filter unit and auxiliary unit, and the round bar is horizontal double section structure, wherein the round bar connected with impeller and the output end of speed reducer gear box are fixedly connected, can reduce the force required for the rotation of impeller, so that the flow of alkali solution in the special pipe is small, and the brush hair still cleans filter hole.

[0015] (3) The utility model discloses a cooperation between the tank body, support, U type pipe, shower nozzle, booster pump, filter unit cavity board and horizontal pipe, and the horizontal pipe of cavity board far from the surface of U type pipe direction is provided with a plurality of from front to back, and a plurality of shower nozzles are installed on the outer wall bottom of each horizontal pipe, which can improve the spraying neutralization range of the rising waste in the tank body, and facilitate the omnidirectional treatment of the rising waste in the tank body.

[0016] (4) The utility model discloses a cooperation between the tank body, support, U type pipe, shower nozzle, booster pump, butterfly valve, baffle, bolt and alkali -resistant sealing pad, when the alkali concentration in the tank body is insufficient or the impurities are more accumulated at the bottom of the tank body, the staff stops injecting waste into the tank body, and the waste storage container is placed below the butterfly valve, the butterfly valve is opened and closed, the impurities and insufficient alkali in the tank body are discharged and properly handled, then the bolt is counterclockwise rotated, the baffle and alkali -resistant sealing pad are taken off from the front side of the tank body, and the opening below the front side of the tank body is in an open state, which can facilitate the staff to clean the bottom of the tank body thoroughly. DRAWINGS

[0017] Figure 1 It is the structural diagram of the utility model;

[0018] Figure 2 It is the front view of the partial section of Figure 1 ;

[0019] Figure 3 is Figure 2 enlarged view of A in the middle;

[0020] Figure 4 is Figure 3 enlarged view of B in the middle;

[0021] Figure 5 is Figure 1 top view of baffle plate 23 and bolt;

[0022] Figure 6 is Figure 2 side view of cross pipe, spray head and cavity plate.

[0023] Wherein, the corresponding name of the reference signs is: 1 - tank body, 2 - support, 3 - air inlet pipeline, 4 - water supplement pipe, 5 - air outlet pipe, 6 - U-shaped pipe, 7 - cavity plate, 8 - cross pipe, 9 - spray head, 10 - lifting pump, 11 - air-liquid two-phase contact component, 12 - special-shaped pipe, 13 - round plate, 14 - filter hole, 15 - round rod, 16 - supporting rod, 17 - steel wire brush, 18 - impeller, 19 - speed reduction gear box, 20 - sealing plate, 21 - cover cylinder, 22 - connecting rod, 23 - baffle plate, 24 - bolt, 25 - alkali-resistant sealing gasket, 26 - butterfly valve, 27 - cavity ball, 28 - air outlet hole, 29 - monitor. DETAILED DESCRIPTION

[0024] The utility model will be further explained in combination with the drawings and examples, and the mode of the utility model includes but is not limited to the following examples.

[0025] Example one: as Figures 1-6The utility model provides a photoresist production waste gas harmful gas absorption device, including: the jar body 1, the bottom of jar body 1 is fixedly connected with support 2, the outer wall one side of jar body 1 is fixedly connected with intake pipeline 3, the other end of intake pipeline 3 is opposite with waste discharge pipeline, the top of intake pipeline 3 is equipped with water supply pipe 4, water supply pipe 4 is fixedly connected with jar body 1, the other end of water supply pipe 4 is connected with the liquid discharge pipe of external lye supply device, and water supply pipe 4 and the pipeline top of intake pipeline 3 are all installed with control valve, the top of jar body 1 is fixedly connected with gas outlet pipe 5, and gas outlet pipe 5, intake pipeline 3 and water supply pipe 4 all with the inside of jar body 1 are intercommunication, and gas outlet pipe 5 is opposite with the gas intake pipeline of other processing device of external, and other processing device includes but is not limited to activated carbon filter device, can also be other waste processing device, the outer wall other side of jar body 1 is fixedly connected with U type pipe 6, and the top of U type pipe 6 is fixedly connected with cavity plate 7, and the surface of cavity plate 7 away from the direction of U type pipe 6 is fixedly connected with multiple horizontal tubes 8 from front to back one side, and the inside of cavity plate 7 all with U type pipe 6 and horizontal tube 8 are intercommunication, and the bottom of the outer wall of horizontal tube 8 is evenly fixedly connected with multiple spray heads 9, and the pipeline of U type pipe 6 is installed with booster pump 10, and the power cord of booster pump 10 is opposite with external power supply device, can provide required electric energy for its operation, can make the inside liquid of U type pipe 6 flow from bottom to top when operating, and the below of spray head 9 is equipped with gas-liquid two-phase indirect contact component 11, and gas-liquid two-phase indirect contact component 11 is fixedly connected with the inner wall of jar body 1, and gas-liquid two-phase indirect contact component 11 refers to in gas-liquid two-phase system, for promoting gas-liquid two-phase contact and mass transfer equipment or assembly, the main function of these components is to increase the contact area and contact time of gas-liquid two-phase, thereby improving mass transfer efficiency, the bottom center of jar body 1 is fixedly connected with butterfly valve 26, and butterfly valve 26 is one kind of powder particle butterfly valve, and the specific model is not limited, can satisfy the required use, is suitable for various strong abrasion powder and granular material, and the bottom of U type pipe 6 is equipped with filter unit, and the filter unit includes: profiled pipe 12, is fixedly connected in the bottom of U type pipe 6, and the contact surface of profiled pipe 12 and jar body 1 is fixedly connected;Round plate 13, is fixedly connected in the end of profiled pipe 12 away from the direction of U type pipe 6, and the contact surface of profiled pipe 12 and jar body 1 is fixedly connected, and profiled pipe 12 and the inside of U type pipe 6 are intercommunication;Filter hole 14, is set multiple, is evenly set in one side surface of round plate 13, filter hole 14 completely penetrates round plate 13, can filter the liquid of passage, and the inner diameter of filter hole 14 is less than the liquid outlet inner diameter of spray head 9 and the inner diameter of multiple liquid inlet holes at the input end of booster pump 10;Round bar 15, is horizontally rotatably connected in the inner wall of round plate 13, and round bar 15 is rotatably connected with round plate 13 through sealing bearing;Supporting rod 16, is set two, and is fixedly connected in one end on the upper and lower sides of the outer wall of round bar 15;Steel wire brush 17, is set multiple, is fixedly connected in one side of the outer wall of two supporting rods 16 from top to bottom, and steel wire brush 17 is in close contact with the surface of round bar 15;Impeller 18, is fixedly connected in the other end of round bar 15.

[0026] In the embodiment two, the outer wall of the air inlet pipeline 3 is fixedly connected with a cavity ball 27, the cavity ball 27 is located below the center of the inside of the tank body 1, the outer wall of the cavity ball 27 is uniformly provided with a plurality of air outlet holes 28, which can make the air inlet pipeline 3 discharge into the waste below the inside of the tank body 1, and more fully contact with the lye below the inside of the tank body 1, so as to improve the preliminary neutralization treatment effect of the waste gas.

[0027] In the embodiment three, the monitor 29 is arranged between the air inlet pipeline 3 and the water supplement pipeline 4, the monitor 29 is fixedly connected with the contact surface of the tank body 1, the monitor 29 is a pH value monitor, the specific model is not limited, and the monitor 29 can meet the use requirement. The detection probe of the monitor 29 is in contact with the lye inside the tank body 1. When the monitor 29 operates, the pH value of the lye inside the tank body 1 can be monitored in real time, and the monitoring result can be fed back to the signal receiving device outside through the transmission line, so that the staff can know the concentration of the lye inside the tank body 1.

[0028] In the embodiment four, the round rod 15 is a transverse double-section structure, and an auxiliary unit is arranged between the double-section round rods 15. The auxiliary unit comprises: a reduction gear box 19 connected between the double-section round rods 15. The reduction gear box 19 is a device for reducing the speed of mechanical movement, which mainly comprises gears, bearings and a lubrication system, etc. The double-section round rods 15 are fixedly connected with the output end and the input end of the reduction gear box 19, respectively. The round rod 15 with the impeller 18 is fixedly connected with the output end of the reduction gear box 19. The speed of the output end of the reduction gear box 19 can save power, which can reduce the force required for the rotation of the impeller 18, so that the silk brush 17 can still clean the filter hole 14 when the flow force of the lye inside the special-shaped pipe 12 is small. Two sealing plates 20 are arranged on the two sides of the reduction gear box 19, and the sealing plates 20 are rotatably connected with the round rod 15 through sealing bearings. A cover cylinder 21 is fixedly connected between the two sealing plates 20. The cover cylinder 21 and the sealing plates 20 can improve the sealing performance of the internal structure of the reduction gear box 19 to prevent liquid from entering the inside of the reduction gear box 19. Two connecting rods 22 are fixedly connected with the outer wall of the cover cylinder 21 at the upper and lower ends, and the supporting rod 16 is fixedly connected with the inner wall of the special-shaped pipe 12.

[0029] The outer wall of the tank body 1 is provided with an opening below the front side, and the front of the opening is provided with a baffle plate 23. The rear surface of the baffle plate 23 is fixedly connected with an alkali-resistant sealing pad 25. Common materials of the alkali-resistant sealing pad include FPM fluororubber, polytetrafluoroethylene (PTFE), and rubber composite material. The alkali-resistant sealing pad 25 in the application can be one of the above. The alkali-resistant sealing pad 25 is tightly abutted with the outer wall of the tank body 1. A plurality of bolts 24 are inserted outside the front surface of the baffle plate 23. The bolts 24 are sequentially threaded through the baffle plate 23 and the alkali-resistant sealing pad 25 and are connected with the tank body 1 in a threaded manner. When the concentration of the lye inside the tank body 1 is insufficient or the impurities accumulated at the bottom end of the tank body 1 are relatively large, the workers stop injecting waste into the inside of the tank body 1, place the waste storage container below the butterfly valve 26, open and close the butterfly valve 26 to discharge the impurities and the lye with insufficient concentration in the inside of the tank body 1 for proper treatment, then rotate the bolts 24 counterclockwise, take down the baffle plate 23 and the alkali-resistant sealing pad 25 from the front side of the tank body 1, and the opening below the front side of the tank body 1 is in an open state, which can facilitate the workers to thoroughly clean the bottom end of the tank body 1.

[0030] In use, during injection of waste gas into the interior of the tank 1 through the air inlet pipeline 3, the waste gas is directly contacted with the alkali liquor at the lower part of the tank 1 for preliminary neutralization treatment, and after passing through the alkali liquor, the waste gas reaches the lower part of the spray head 9 through the gas-liquid two-phase contact member 11, and the lifting pump 10 is powered to operate, so that the one end of the special-shaped pipe 12 generates suction to suck part of the alkali liquor in the interior of the tank 1, and the alkali liquor is sequentially sprayed and sprayed out from the lower part of the spray head 9 through the U-shaped pipe 6, the cavity plate 7 and the horizontal pipe 8, so as to perform secondary neutralization treatment on the waste gas, and during the treatment, the horizontal pipe 8 is arranged in multiple numbers from front to back on the surface of the cavity plate 7 away from the U-shaped pipe 6, and a plurality of spray heads 9 are installed on the outer wall of each horizontal pipe 8, so as to improve the spraying and neutralization range of the waste gas rising in the interior of the tank 1, and after the waste gas is neutralized on both sides, the waste gas is discharged to other waste gas treatment devices through the air outlet pipe 5, and during the suction of the alkali liquor into the one end of the special-shaped pipe 12, the flow of the alkali liquor in the special-shaped pipe 12 will generate an impact force on the impeller 18, so as to provide a rotating force for the impeller 18 and the circular rod 15, and during the process, the two supporting rods 16 will revolve around the circular rod 15 as the center, and the steel wire brush 17 will clean the filter hole 14, so as to effectively reduce the plugging probability of the filter hole 14, so that the filter hole 14 is in a filtering state for a long time, and the larger particle impurities in the alkali liquor are filtered through the filter hole 14, so as to avoid the plugging of the lifting pump 10 and the spray head 9, facilitate stable operation of the device, and when the concentration of the alkali liquor in the interior of the tank 1 is insufficient or the impurities are accumulated at the bottom end of the tank 1 after long-term use, the staff stops injecting waste into the interior of the tank 1, places the waste storage container below the butterfly valve 26, opens and closes the butterfly valve 26 to discharge the impurities and the alkali liquor with insufficient concentration in the interior of the tank 1 for proper treatment, then rotates the bolt 24 counterclockwise, removes the baffle 23 and the alkali-resistant sealing gasket 25 from the front side of the tank 1, and the opening at the lower part of the front side of the tank 1 is in an open state, so as to facilitate the staff to thoroughly clean the bottom end of the tank 1, after the cleaning operation is completed, the butterfly valve 26 is closed, the alkali-resistant sealing gasket 25, the baffle 23 and the bolt 24 are reset, then the tank 1 is re-injected with an appropriate amount of alkali liquor through the water supplement pipe 4, and then the injection of waste into the interior of the tank 1 through the air inlet pipeline 3 can be continued for treatment operation.

[0031] The above embodiment is only one of the preferred embodiments of the present application, and should not be used to limit the protection scope of the present application, but any modification or polishing without substantial meaning made on the basis of the main design idea and spirit of the present application, and the technical problems solved by the modification or polishing are still consistent with the present application, and should be included in the protection scope of the present application.

Claims

1. A harmful gas absorbing apparatus for photoresist manufacturing exhaust gas, characterized by comprising: Include: The tank body (1), the bottom end of the tank body (1) is fixedly connected with a support (2), one side of the outer wall of the tank body (1) is fixedly connected with an air inlet pipeline (3), the upper side of the air inlet pipeline (3) is provided with a water supplement pipe (4), the water supplement pipe (4) is fixedly connected with the tank body (1), the top end of the tank body (1) is fixedly connected with an air outlet pipe (5), the other side of the outer wall of the tank body (1) is fixedly connected with a U-shaped pipe (6), the top end of the U-shaped pipe (6) is fixedly connected with a cavity plate (7), the surface of the cavity plate (7) away from the U-shaped pipe (6) direction is fixedly connected with a plurality of horizontal pipes (8) from front to back, the outer wall bottom end of the horizontal pipe (8) is uniformly fixedly connected with a plurality of nozzles (9), the pipeline of the U-shaped pipe (6) is provided with a lifting pump (10), the lower side of the nozzle (9) is provided with a gas-liquid two-phase indirect contact component (11), the gas-liquid two-phase indirect contact component (11) is fixedly connected with the inner wall of the tank body (1), the bottom center of the tank body (1) is fixedly connected with a butterfly valve (26), the bottom end of the U-shaped pipe (6) is provided with a filter unit, the filter unit comprises: The profiled pipe (12) is fixedly connected at the bottom end of the U-shaped pipe (6), and the profiled pipe (12) is fixedly connected with the contact surface of the tank body (1); The circular plate (13) is fixedly connected at the end of the profiled pipe (12) away from the U-shaped pipe (6); A plurality of filter holes (14) are uniformly provided on one side surface of the circular plate (13); The circular rod (15) is transversely rotatably connected to the inner wall of the circular plate (13); Two support rods (16) are fixedly connected at one end of the upper and lower sides of the outer wall of the circular rod (15); A plurality of steel wire bristles (17) are fixedly connected from top to bottom on one side of the outer wall of the two support rods (16), and the steel wire bristles (17) are in close contact with the surface of the circular rod (15); The impeller (18) is fixedly connected to the other end of the circular rod (15).

2. The photoresist production exhaust gas noxious gas absorbing apparatus according to claim 1, wherein The outer wall of the air inlet pipeline (3) is fixedly connected with a cavity ball (27), the cavity ball (27) is located below the center inside the tank body (1), and a plurality of air outlets (28) are uniformly provided on the outer wall of the cavity ball (27).

3. The photoresist manufacturing exhaust gas noxious gas absorbing apparatus according to claim 1, wherein The monitor (29) is fixedly connected with the contact surface of the tank body (1) between the air inlet pipeline (3) and the water supplement pipe (4).

4. The photoresist manufacturing exhaust gas noxious gas absorbing apparatus according to claim 1, wherein The circular rod (15) is a transverse double-joint structure, and an auxiliary unit is arranged between the double-joint circular rod (15), the auxiliary unit comprises: The reduction gear box (19) is connected between the double-joint circular rod (15); Two sealing plates (20) are arranged on the two sides of the reduction gear box (19), and the sealing plates (20) are rotatably connected with the circular rod (15) through sealing bearings; The cover cylinder (21) is fixedly connected between the two sealing plates (20); Two connecting rods (22) are fixedly connected at the upper and lower ends of the outer wall of the cover cylinder (21), and the support rods (16) are fixedly connected with the inner wall of the profiled pipe (12).

5. The photoresist manufacturing exhaust gas noxious gas absorbing apparatus according to claim 1, wherein The outer wall of the tank body (1) is provided with an opening below the front side, and the front of the opening is provided with a baffle (23), the rear surface of the baffle (23) is fixedly connected with an alkali-resistant sealing gasket (25), the alkali-resistant sealing gasket (25) is tightly abutted with the outer wall of the tank body (1), and a plurality of bolts (24) are inserted into the outer side of the front surface of the baffle (23), the bolts (24) are sequentially threaded through the baffle (23) and the alkali-resistant sealing gasket (25) and are connected with the tank body (1) in a threaded manner.

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