Expansion connection type air floating main shaft

Abstract

The utility model discloses an expansion connection type air floating spindle which comprises a shell, the shell is provided with a fluid connector, and the fluid connector comprises a water inlet, a water outlet, an air inlet and an air outlet; the expansion connection type air floating spindle further comprises an expansion connector, one end of the expansion connector is connected with the fluid connector in a sealed mode, and the other end of the expansion connector is connected with a fluid pipeline. The fluid pipeline comprises a water inlet pipe communicated with the water inlet, a water outlet pipe communicated with the water outlet, an air inlet pipe communicated with the air inlet and an air outlet pipe communicated with the air outlet; the expansion joint extrudes the first sealing ring between the fluid interface and the fluid pipeline after the expansion body deforms through mutual extrusion of the expansion body and the circular truncated cone cylinder. According to the utility model, the expansion body and the circular truncated cone cylinder are extruded, so that the expansion body deforms, and the connection reliability and stability of a fluid pipeline and a fluid interface are improved by means of the principle of an expansion bolt.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor wafer manufacturing, especially relates to a kind of expansion connection type air bearing spindle for wafer thinning process. BACKGROUND

[0002] Semiconductor wafer's thinning process needs to be thinned by air bearing spindle. Air bearing spindle is a kind of high-precision processing equipment, and the contact area between spindle and bearing is reduced to a minimum value by the gas film support force generated by gas flow, so as to realize high-precision positioning and stability control.

[0003] The working principle of air bearing spindle mainly depends on gas supply system and gas film support structure. In the processing process, gas supply system will provide compressed air with certain pressure and flow to bearing part. These air is controlled by adjusting valve and filter to ensure its stability and precision. When compressed air enters bearing part, it will form a high-speed rotating thin layer of gas film in the rotating process, and the gas film will generate an upward supporting force, so that the spindle can be suspended above it and can rotate freely. In order to realize high-precision positioning, sensor and electronic controller will monitor the position of spindle in real time, and adjust the pressure and flow of gas supply system as needed to maintain the stability of spindle.

[0004] Air bearing spindle needs to be connected with air inlet pipe and air outlet pipe to carry out air intake and exhaust, and also needs to be connected with water inlet pipe and water outlet pipe to cool and heat the motor of air bearing spindle. However, in order to enable air bearing spindle to adapt to larger water pressure and air pressure, the waterway and airway of air bearing spindle are usually directly welded with pipeline. This makes it extremely complex and slow to replace pipeline.

[0005] That is, the connection between air bearing spindle and pipeline not only has the requirement of sealing, but also has the requirement of connection stability and reliability. In industrial construction, people use expansion bolts to fix in order to ensure the requirement of connection stability and reliability. For example, the shelf and wall of air conditioner outdoor unit are fixed by expansion bolts. This can realize more reliable fixed connection due to the mechanical deformation of expansion bolts.

[0006] Therefore, there is an urgent need for an air bearing spindle that can ensure sealing, stability, long service life and convenient disassembly and assembly. UTILITY MODEL CONTENTS

[0007] In order to solve the above problems, the utility model provides an expansion connection type air bearing spindle, which can ensure sealing, stability, long service life and convenient disassembly and assembly.

[0008] In order to achieve the above purpose, the utility model provides the following technical scheme:

[0009] An inflation connection type air floatation spindle comprises a shell, which is configured with a fluid interface comprising a water inlet, a water outlet, an air inlet and an air outlet; the inflation connection type air floatation spindle further comprises an inflation joint, one end of which is in sealing connection with the fluid interface, and the other end is connected with a fluid pipeline; the fluid pipeline comprises a water inlet pipe in communication with the water inlet, a water outlet pipe in communication with the water outlet, an air inlet pipe in communication with the air inlet and an air outlet pipe in communication with the air outlet; the inflation joint is in mutual extrusion with a circular truncated cone cylinder through an inflation body, so that the inflation body is deformed to extrude a first sealing ring between the fluid interface and the fluid pipeline.

[0010] According to one embodiment of the present application, the inflation joint comprises a joint pipe, a sleeve pipe, a blind hole groove, a fixing nut, a circular truncated cone cylinder, an inflation body, a pipeline pipe, a first sealing ring and a sealing groove; the fluid interface is provided with the joint pipe, an outer circumferential surface of the joint pipe is in threaded connection with an inner circumferential surface of one side of the sleeve pipe, a blind hole groove is coaxially formed in the other end of the sleeve pipe, the fixing nut is sleeved in the blind hole groove, an inner circumferential surface of the fixing nut is in threaded connection with an outer circumferential surface of the joint pipe, the fixing nut is in limiting clamping connection with a bottom surface of the sleeve pipe, the circular truncated cone cylinder is coaxially fixed on the fixing nut, the circular truncated cone cylinder can abut against the inflation body to make the inflation body expand and deform, the inflation body is coaxially fixed on the pipeline pipe, an outer circumferential surface of the pipeline pipe is in threaded connection with an inner circumferential surface of the blind hole groove of the sleeve pipe, and the pipeline pipe is arranged on the fluid pipeline.

[0011] When the inflation body is deformed by the circular truncated cone cylinder, an outer edge of the inflation body abuts against an inner circumferential surface of the first sealing ring, and the first sealing ring is arranged in the sealing groove which is annularly formed in the inner circumferential surface of the blind hole groove of the sleeve pipe.

[0012] According to one embodiment of the present application, an outer side of an outer surface of the inflation body is provided with a second sealing ring, and the second sealing ring is fixed on an end surface of the pipeline pipe.

[0013] According to one embodiment of the present application, the inflation body is a plurality of inflation leaves arranged in a circumferential direction.

[0014] According to one embodiment of the present application, the inflation body is a hollow circular truncated cone body with expandable elasticity.

[0015] According to one embodiment of the present application, the inflation body is a hollow circular truncated cone body with corrugation in a circumferential direction.

[0016] According to one embodiment of the present application, the inflation body is made of rubber, latex, resin, plastic or metal.

[0017] According to one embodiment of the present application, a minimum width of an outer edge of the inflation body before expansion is greater than a minimum width of an outer circumferential surface of the circular truncated cone cylinder.

[0018] According to one embodiment of the present application, the fluid interface and the end of the interface pipe are welded or integrally formed.

[0019] According to one embodiment of the present application, the pipe of the pipeline and the end of the fluid pipeline are welded or integrally formed.

[0020] The present application has the following beneficial effects:

[0021] The inflation connection type air floating spindle provided by the present application can deform the inflation body through extrusion of the inflation body and the circular table cylinder, thereby increasing the reliability and stability of the connection between the fluid pipeline and the fluid interface by means of the principle of the inflation bolt. Moreover, the inflation body extrudes the first sealing ring between the fluid interface and the fluid pipeline, thereby further increasing the sealing performance of the first sealing ring, achieving two goals at once. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a front view of the inflation connection type air floating spindle in a sealed state according to the present application;

[0023] Figure 2 is a front view of the inflation connection type air floating spindle in an unsealed state according to the present application;

[0024] Figure 3 is Figure 1 a local enlarged view of

[0025] Figure 4 is Figure 2 a local enlarged view of DETAILED DESCRIPTION

[0026] The present application will be further described in detail below with reference to the accompanying drawings. It should be understood that the following examples are only illustrative and explanatory of the present application, and should not be interpreted as limiting the scope of protection of the present application. Any technology realized based on the above description of the present application is included in the scope of protection intended by the present application.

[0027] As Figures 1-4As shown, the inflation connection type air floatation spindle comprises a shell 1, a fluid interface 2 is arranged on the shell 1, the fluid interface 2 comprises a water inlet 3, a water outlet 4, an air inlet 5, and an air outlet 6. The inflation connection type air floatation spindle further comprises an inflation joint 7, one end of the inflation joint 7 is in sealing connection with the fluid interface 2, and the other end is connected with a fluid pipeline 8, the fluid pipeline 8 comprises a water inlet pipe 9 in communication with the water inlet 3, a water outlet pipe 10 in communication with the water outlet 4, an air inlet pipe 11 in communication with the air inlet 5, and an air outlet pipe 12 in communication with the air outlet 6. The inflation joint 7 is extruded with the circular truncated cone cylinder 25 through an inflation body 26, so that the inflation body 26 is deformed to extrude a first sealing ring 28 between the fluid interface 2 and the fluid pipeline 8.

[0028] The inflation body 26 is extruded with the circular truncated cone cylinder 25, so that the inflation body 26 is deformed, thereby increasing the reliability and stability of the connection between the fluid pipeline 8 and the fluid interface 2 by means of the principle of the expansion bolt. Moreover, the inflation body 26 extrudes the first sealing ring 28 between the fluid interface 2 and the fluid pipeline 8, thereby further increasing the sealing performance of the first sealing ring, achieving two goals at once.

[0029] It should be noted that the inflation body 26 can be a plurality of inflation leaves arranged in a circumferential array, or a hollow circular truncated cone body with expandable elasticity. The inflation leaves can be made of metal, such as iron, copper, stainless steel, etc. The hollow circular truncated cone body can be made of rubber, latex, resin, plastic, etc.

[0030] The above difference lies in that the inflation leaves are clamped by deformation after extrusion of a single inflation leaf, and the clamping force of the inflation leaves arranged in a circumferential array is more balanced. The disadvantage is that the gap between the plurality of inflation leaves causes a channel effect of the first sealing ring to some extent, thereby increasing the possibility of leakage of the first sealing ring.

[0031] The corrugated hollow circular truncated cone body, similar to the corrugated paper hollow circular truncated cone body of the filter element in the air purifier, connects the fluid interface 2 and the fluid pipeline 8 in a relatively uniform and reliable manner while ensuring its expandable deformation. That is, the connection reliability of this structure and the sealing performance after extrusion of the first sealing ring 28 are relatively moderate, which belongs to a relatively moderate solution. Therefore, the inflation body needs to be adapted and selected according to specific sealing requirements and connection stability.

[0032] As a further explanation of the present embodiment, refer to Figure 3 and Figure 4, the expansion joint 7 comprises an interface pipe 21, a sleeve pipe 22, a blind hole groove 23, a fixing nut 24, a circular truncated cone cylinder 25, an expansion body 26, a pipeline pipe 27, a first sealing ring 28 and a sealing groove 29. The fluid interface 2 is provided with the interface pipe 21, the outer circumferential surface of the interface pipe 21 is threadedly connected with the inner circumferential surface of one side of the sleeve pipe 22, the other end of the sleeve pipe 22 is coaxially provided with the blind hole groove 23, the blind hole groove 23 is sleeved with the fixing nut 24, the inner circumferential surface of the fixing nut 24 is threadedly connected with the outer circumferential surface of the interface pipe 21, the fixing nut 24 is limitingly connected with the bottom surface of the sleeve pipe 22, the fixing nut 24 is coaxially fixed with the circular truncated cone cylinder 25, the circular truncated cone cylinder 25 can abut against the expansion body 26 to make the expansion body 26 expand and deform, the expansion body 26 is coaxially fixed with the pipeline pipe 27, the outer circumferential surface of the pipeline pipe 27 is threadedly connected with the inner circumferential surface of the blind hole groove 23 of the sleeve pipe 22, and the pipeline pipe 27 is arranged on the fluid pipeline 8.

[0033] When the expansion body 26 is expanded and deformed by the abutting of the circular truncated cone cylinder 25, the outer edge of the expansion body 26 abuts against the inner circumferential surface of the first sealing ring 28, and the first sealing ring 28 is arranged in the sealing groove 29 which is annularly formed in the inner circumferential surface of the blind hole groove 23 of the sleeve pipe 22.

[0034] The utility model discloses a threaded connection of the sleeve pipe 22 two ends as the basis of connecting the interface pipe 21 and the pipeline pipe 27, and utilizes expansion bolt principle, and through the mutual abutting of the expansion body 26 and the circular truncated cone cylinder 25, realizes the expansion deformation of the expansion body 26 to extrude the first sealing ring 28, thereby increase the sealing property of the first sealing ring 28, thereby make the first sealing ring 28 fully seal the interface pipe 21 and the pipeline pipe 27, and also guarantee the reliability of its connection through the expansion deformation of the expansion body 26, one fell two.

[0035] It needs to be explained that the expansion deformation characteristics of the expansion body 26 can also increase the self-locking effect of two threads, thereby further increasing the stability and reliability of the connection.

[0036] As further explanation of the embodiment, referring to Figure 3 and Figure 4 , the outer surface of the expansion body 26 is provided with a second sealing ring 30, and the second sealing ring 30 is fixed with the end surface of the pipeline pipe 27.

[0037] In use, when the expansion body 26 is expanded and deformed by extrusion, the second sealing ring 30 is extruded to the inner circumferential surface or the thread of the circumferential surface of the blind hole groove 23 of the sleeve pipe 22, thereby realizing better sealing property and reliability of the pipeline pipe 27 and the interface pipe 21.

[0038] That is, due to the second sealing ring 30 and the thread of the blind hole groove 23, the deformation of the second sealing ring 30 after being extruded can be filled into the gap of the thread, increasing the reliability and sealing of the connection.

[0039] As shown in Figure 3 and Figure 4 , the expansion body 26 can be a plurality of expansion leaves along a circumferential array. The expansion leaves are clamped by the deformation of a single expansion leaf after being extruded, and the circumferential array of the expansion leaves clamps the force more evenly. The disadvantage is that the gap between the plurality of expansion leaves will to some extent cause the first sealing ring 28 to have a channel effect, increasing the possibility of leakage of the first sealing ring 28 and the expansion leaves. However, the sealing of the second sealing ring 30 will increase instead.

[0040] Preferably, the expansion body 26 can be a hollow circular truncated cone with expandable elasticity, and preferably the expansion body 26 is a hollow circular truncated cone with circumferential corrugations. The expansion body can be made of rubber, latex, resin, plastic or metal.

[0041] The hollow circular truncated cone made of rubber, latex, resin, plastic can more evenly extrude the first sealing ring 28 due to its own material characteristics of expanding after being extruded, achieving better sealing effect. However, it is also due to its good elasticity that the extrusion deformation makes the connection reliability between the fluid interface 2 and the fluid pipeline 8 not as good as the expansion leaves.

[0042] Preferably, the minimum width of the outer edge of the expansion body 26 before expansion is greater than the minimum width of the outer circumferential surface of the circular truncated cone 25. Referring to Figure 4 , the cooperation of the above-mentioned dimensions facilitates the smooth insertion of the expansion body 26 into the circular truncated cone 25.

[0043] Preferably, the fluid interface 2 and the end of the interface pipe 21 are welded or integrally formed.

[0044] As a further explanation of the present embodiment, referring to Figure 3 and Figure 4 , the pipeline pipe 27 and the end of the fluid pipeline 8 are welded or integrally formed.

[0045] The above-described embodiments are only to describe the preferred embodiments of the present application, and not to limit the scope of the present application. Without departing from the design spirit of the present application, various modifications and improvements to the technical solutions of the present application made by those skilled in the art shall fall within the protection scope determined by the claims of the present application.

Claims

1. An inflation connection type air floating spindle comprising a housing (1) which is provided with fluid interfaces (2) including a water inlet (3), a water outlet (4), an air inlet (5), and an air outlet (6); characterized in that, An expansion joint (7) is further included, one end of which is sealingly connected with the fluid interface (2) and the other end of which is connected with a fluid pipeline (8); The fluid pipeline (8) comprises a water inlet pipe (9) communicated with the water inlet (3), a water outlet pipe (10) communicated with the water outlet (4), an air inlet pipe (11) communicated with the air inlet (5), and an air outlet pipe (12) communicated with the air outlet (6); the expansion joint (7) is extruded by the mutual extrusion of the expansion body (26) and the circular truncated cone cylinder (25), so that the expansion body (26) is deformed to extrude the first sealing ring (28) between the fluid interface (2) and the fluid pipeline (8).

2. The live connection air bearing spindle of claim 1 wherein, The expansion joint (7) comprises an interface pipe (21), a sleeve pipe (22), a blind hole groove (23), a fixing nut (24), a circular truncated cone cylinder (25), an expansion body (26), a pipeline pipe (27), a first sealing ring (28), and a sealing groove (29); the fluid interface (2) is provided with the interface pipe (21), the outer circumferential surface of the interface pipe (21) is threadedly connected with the inner circumferential surface of one side of the sleeve pipe (22), the other end of the sleeve pipe (22) is coaxially provided with the blind hole groove (23), the blind hole groove (23) is sleeved with the fixing nut (24), the inner circumferential surface of the fixing nut (24) is threadedly connected with the outer circumferential surface of the interface pipe (21), the fixing nut (24) is limitingly connected with the bottom surface of the sleeve pipe (22), the fixing nut (24) is coaxially fixed with the circular truncated cone cylinder (25), the circular truncated cone cylinder (25) can abut against the expansion body (26) to make the expansion body (26) expand and deform, the expansion body (26) is coaxially fixed with the pipeline pipe (27), the outer circumferential surface of the pipeline pipe (27) is threadedly connected with the inner circumferential surface of the blind hole groove (23) of the sleeve pipe (22), and the pipeline pipe (27) is arranged on the fluid pipeline (8); When the expansion body (26) is deformed by the abutment of the circular truncated cone cylinder (25), the outer edge of the expansion body (26) abuts against the inner circumferential surface of the first sealing ring (28), and the first sealing ring (28) is arranged in the sealing groove (29) annularly formed in the inner circumferential surface of the blind hole groove (23) of the sleeve pipe (22).

3. The live connection air bearing spindle of claim 2, wherein, The outer side of the outer surface of the expansion body (26) is provided with a second sealing ring (30), and the second sealing ring (30) is fixed with the end surface of the pipeline pipe (27).

4. The live connection air bearing spindle of claim 1 wherein, The expansion body (26) is a plurality of expansion leaves arranged in the circumferential direction.

5. The live connection air bearing spindle of claim 1 wherein, The expansion body (26) is a hollow circular truncated cone body with expandable elasticity.

6. The live connection air bearing spindle of claim 1 wherein, The expansion body (26) is a hollow circular truncated cone body with corrugation in the circumferential direction.

7. The live connection air bearing spindle of claim 1 wherein, The minimum width of the outer edge of the expansion body (26) before expansion is greater than the minimum width of the outer circumferential surface of the circular truncated cone cylinder (25).

8. The live connection air bearing spindle of claim 2 wherein, The fluid interface (2) is welded or integrally formed with the end of the interface pipe (21).

9. The live connection air bearing spindle of claim 2 wherein, The pipeline pipe (27) is welded or integrally formed with the end of the fluid pipeline (8).

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