Rapid cooling device of vacuum coating machine

Abstract

The utility model discloses a rapid cooling device of a vacuum coating machine, and relates to the technical field of vacuum coating cooling. The device comprises a base, supporting legs and a bidirectional lifting assembly are fixedly installed on the top face of the base, and a bottom plate is fixedly installed on the top faces of the supporting legs. The two-way lifting assembly drives the movable connecting pieces on the upper side and the lower side to be inserted into the sealing door in a sliding mode, air in the closed space and air in the sealing door are circularly exchanged in cooperation with the movable connecting pieces, and therefore the temperature of the air in the sealing door and the temperature of the air in the closed space are kept at the high homogenization degree. Therefore, heat emitted by the vacuum coating box can be absorbed by air from the front side and finally conducted to the liquid cooling wall for further cooling, heat generated by the vacuum coating box can be absorbed uniformly in all directions, the vacuum coating box can be cooled uniformly in all directions, the cooling effect and the cooling efficiency are improved, and the service life of the vacuum coating box is prolonged. And the vacuum coating quality is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating cooling technical field, concretely relates to a kind of vacuum coating machine rapid cooling device. BACKGROUND

[0002] Vacuum coating machine is a kind of equipment for coating on material surface under higher vacuum degree, which is based on physical vapor deposition (PVD) principle, uses evaporation and sputtering two basic ways, can prepare high-purity metal film, compound film and other film body under vacuum condition, vacuum coating needs to be carried out in high vacuum environment, to reduce the collision interference of air molecules to vapor molecules or sputtering atoms, if coating machine temperature is too high, it will affect the stability of vacuum degree, thereby affecting coating quality, and it will lead to uneven evaporation speed of film material, and further affect the uniformity of film layer, therefore, it is necessary to use cooling device to cool vacuum coating machine in time and effectively.

[0003] The existing cooling device is arranged around the cavity wall of coating cavity, and is cooled by air cooling or liquid cooling method, but the cooling structure does not cover the door body part installed in front side of coating cavity, so that the coating cavity cannot be cooled in all directions, the uniformity of cooling is poor, and the effect of vacuum coating is affected, and the cooling efficiency needs to be improved.

[0004] Therefore, a vacuum coating machine rapid cooling device is provided. UTILITY MODEL CONTENTS

[0005] The utility model aims at: in order to solve the problem mentioned in the above background art, the utility model provides a kind of vacuum coating machine rapid cooling device.

[0006] The utility model discloses the following technical scheme in order to realize the above-mentioned purpose:

[0007] The utility model provides a kind of vacuum coater rapid cooling device, including base, the top surface of the base is fixedly installed with support leg and bidirectional lifting assembly, the top surface of the support leg is fixedly installed with bottom plate, the top surface of the bottom plate is fixedly installed with liquid cooling wall and support, the top surface of the liquid cooling wall is fixedly installed with top plate, the top surface of the support is fixedly installed with vacuum coater box, the vacuum coater box is located between bottom plate and top plate and the left side, right side and rear side of vacuum coater box are surrounded by liquid cooling wall, the front of the liquid cooling wall is hinged with sealing door, the surface of bottom plate and top plate is equipped with air flow promoting mechanism, the surface of the air flow promoting mechanism is slidably installed with movable connector, the surface of the movable connector is slidably inserted in sealing door, the bidirectional lifting assembly is used to drive two movable connectors synchronous and moves towards or reversely, the air flow promoting mechanism includes mounting hole, fan and installation pipe, the mounting hole is formed in the surface of top plate and bottom plate, the fan is fixedly installed on the inner wall surface of mounting hole, two installation pipes are fixedly installed on the bottom surface of bottom plate and the top surface of top plate respectively, the inside of installation pipe is communicated with the inside of mounting hole, and the movable connector is slidably installed on the surface of installation pipe.

[0008] Further, the liquid cooling wall includes a surrounding wall, which is fixedly installed between the top surface of the bottom plate and the bottom surface of the top plate, the inner side surface of the surrounding wall is fixedly installed with inner vanes, the outer side surface of the surrounding wall is fixedly installed with outer vanes, the number of the inner vanes and the outer vanes is several and they are uniformly distributed in the form of annular array on the surface of the surrounding wall, the inner vanes and the outer vanes are communicated with the inside of the surrounding wall, the side wall of the surrounding wall is fixedly installed with a liquid inlet pipe and a liquid outlet pipe, the liquid inlet pipe is arranged above the liquid outlet pipe, and the surface of the liquid inlet pipe and the liquid outlet pipe is provided with a valve.

[0009] Further, the sealing door is a hollow structure, the middle part of the front and rear side walls of the sealing door is fixedly installed with an observation window, the observation window is made of coated tempered glass, the top surface and the bottom surface of the sealing door is provided with a buckle, and the two buckles are respectively connected with the surface of the bottom plate and the top plate.

[0010] Further, the movable connector includes a limiting sliding slot, the limiting sliding slot is formed in the inner wall surface of the installation pipe, the limiting ring is slidably installed on the inner wall surface of the limiting sliding slot, the inner side surface of the limiting ring is fixedly installed with a connecting pipe, the connecting pipe is longitudinally slidably inserted into the surface of the installation pipe, one end of the connecting pipe away from the installation pipe is longitudinally slidably inserted into the surface of the sealing door, the surface of one end of the connecting pipe away from the installation pipe is fixedly installed with a sealing ring, the sealing ring is arranged in close contact with the surface of the sealing door, and the bidirectional lifting assembly is used to drive the connecting pipe to lift.

[0011] Further, the bidirectional lifting assembly comprises a mounting rod and a motor, the mounting rod is fixedly installed on the top surface of the base, a lifting groove is formed in the side surface of the liquid cooling wall close to the mounting rod, the two lifting grooves are symmetrically arranged, a lifting plate is slidably installed on the inner wall surface of the lifting groove, the lifting plate is fixedly installed on the surface of the connecting pipe, the motor is fixedly installed on the top surface of the mounting rod, a double-headed threaded rod is fixedly connected to the output end of the motor, and the double-headed threaded rod is rotatably installed on the inner wall surface of the lifting groove.

[0012] The utility model discloses the beneficial effect is as follows:

[0013] Through the bidirectional lifting assembly, the movable connecting piece on the two sides is slidably inserted into the sealing door, the movable connecting piece is used for circulating exchange of the air in the closed space and the air in the sealing door, the air temperature in the sealing door and the air temperature in the closed space are kept high and uniform, the heat of the vacuum coating box can be absorbed by the air from the front side and finally conducted to the liquid cooling wall for further cooling, and the heat generated by the vacuum coating box can be uniformly and omnidirectionally absorbed, so that the vacuum coating box can be omnidirectionally and uniformly cooled, the cooling effect and the cooling efficiency are improved, and the vacuum coating quality is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is the utility model three -dimensional structure isometric drawing;

[0015] Fig. 2 It is the utility model three -dimensional structure isometric drawing;

[0016] Fig. 3 It is the utility model three -dimensional structure isometric drawing;

[0017] Fig. 4 It is the utility model three -dimensional structure isometric drawing;

[0018] The drawings show that 1, base;2, support leg;3, bottom plate;4, liquid cooling wall;401, surrounding wall;402, inner blade;403, outer blade;404, liquid inlet pipe;405, liquid outlet pipe;406, valve;5, top plate;6, vacuum coating box;7, support;8, sealing door;9, observation window;10, buckle;11, air flow promoting mechanism;111, mounting hole;112, fan;113, mounting pipe;12, movable connecting piece;121, limit sliding slot;122, limit ring;123, connecting pipe;124, sealing ring;13, bidirectional lifting assembly;131, mounting rod;132, lifting groove;133, lifting plate;134, motor;135, double-headed threaded rod. DETAILED DESCRIPTION

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] All electrical components mentioned in this article are connected to an external main controller and 220V AC mains power, and the main controller can be a conventional known device such as a computer that can control it.

[0023] In the description of the embodiments of this utility model, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] like Figs. 1 to 4 As shown, a rapid cooling device for a vacuum coating machine includes a base 1. A support leg 2 and a bidirectional lifting assembly 13 are fixedly installed on the top surface of the base 1. A base plate 3 is fixedly installed on the top surface of the support leg 2. A liquid-cooled wall 4 and a bracket 7 are fixedly installed on the top surface of the base plate 3. A top plate 5 is fixedly installed on the top surface of the liquid-cooled wall 4. A vacuum coating box 6 is fixedly installed on the top surface of the bracket 7. The vacuum coating box 6 is located between the base plate 3 and the top plate 5, and its left, right, and rear sides are surrounded by the liquid-cooled wall 4. A sealing door 8 is hinged to the front of the liquid-cooled wall 4. An airflow mechanism 11 is provided on the surface of both the base plate 3 and the top plate 5. A movable connector 12 is slidably installed on the surface of the airflow mechanism 11. The movable connector 12 is slidably inserted into the surface of the sealing door 8. The bidirectional lifting assembly 13 is used to drive the two movable connectors 12 to move synchronously in opposite directions.

[0025] More specifically, the heat emitted by the vacuum coating box 6 is absorbed by the liquid cooling wall 4, the bottom plate 3, the liquid cooling wall 4 and the top plate 5 cooperate to form a closed space, the left and right sides and the back side of the vacuum coating box 6 are wrapped, and the vacuum coating box 6 is lifted by the support 7, so that the vacuum coating box 6 is in a suspended state, and the heat emitted from the back side, the left and right sides and the upper and lower sides of the vacuum coating box 6 is exchanged with the air. When the sealing door 8 is closed, the upper and lower sides of the movable connecting piece 12 are slid into the sealing door 8 by the bidirectional lifting assembly 13, and the air inside the closed space is circulated and exchanged with the air inside the sealing door 8 by the movable connecting piece 12, so that the air temperature in the sealing door 8 and the air temperature in the closed space are kept at a high uniformization degree, so that the heat emitted by the vacuum coating box 6 can be absorbed by the air from the front side and finally conducted to the liquid cooling wall 4 for further cooling, thereby the heat generated by the vacuum coating box 6 can be uniformly and omnidirectionally absorbed, and the vacuum coating box 6 can be uniformly and omnidirectionally cooled, thereby improving the cooling effect and cooling efficiency, and further improving the vacuum coating quality.

[0026] The liquid cooling wall 4 includes a surrounding wall 401 fixedly installed between the top surface of the bottom plate 3 and the bottom surface of the top plate 5, an inner blade 402 fixedly installed on the inner side surface of the surrounding wall 401, and an outer blade 403 fixedly installed on the outer side surface of the surrounding wall 401. The number of the inner blade 402 and the outer blade 403 is several and they are uniformly distributed in a circular array on the surface of the surrounding wall 401. The inner blade 402 and the outer blade 403 are both communicated with the inside of the surrounding wall 401. The surrounding wall 401 is fixedly installed with a liquid inlet pipe 404 and a liquid outlet pipe 405, and the liquid inlet pipe 404 is arranged above the liquid outlet pipe 405. The surface of the liquid inlet pipe 404 and the liquid outlet pipe 405 is provided with a valve 406.

[0027] Specifically, the cooling liquid is filled into the surrounding wall 401, the inner blade 402 and the outer blade 403 through the liquid inlet pipe 404, and the cooling liquid whose temperature has risen to a set value is discharged through the liquid outlet pipe 405. By controlling the opening and closing of the two valves 406, the replacement and circulation of the cooling liquid can be controlled. The inner blade 402 and the outer blade 403 increase the contact area between the liquid cooling wall 4 and the air, so that the inner blade 402 filled with cooling liquid can better absorb the heat generated by the vacuum coating box 6, and the outer blade 403 can exchange heat with the outside air to dissipate the heat of the cooling liquid, slow down the temperature rise of the cooling liquid, and further reduce the circulation frequency and replacement frequency of the cooling liquid. While improving the cooling efficiency, it is also more environmentally friendly.

[0028] The sealing door 8 is a hollow structure, and observation windows 9 are fixedly installed in the middle of the front and rear sidewalls of the sealing door 8, the observation windows 9 are made of coated tempered glass, and buckles 10 are arranged on the top surface and the bottom surface of the sealing door 8 and are respectively connected with the surface of the bottom plate 3 and the top plate 5.

[0029] Specifically, the closed space is connected with the inside of the sealing door 8 through the air flow promoting mechanism 11 and the movable connecting piece 12, and the air flow between the two is circulated quickly, so that the air temperature is quickly homogenized, the all-around cooling efficiency of the vacuum coating box 6 is ensured to be consistent, and the coating effect is improved. The coating condition of the product in the vacuum coating box 6 can be observed through the buckles 10. When the buckles 10 are connected with the top plate 5 and the bottom plate 3, the sealing door 8 is fixed, and at this time, the movable connecting piece 12 can be smoothly inserted into the surface of the sealing door 8 under the driving of the bidirectional lifting assembly 13. When the buckles 10 are not connected with the top plate 5 and the bottom plate 3, the movable connecting piece 12 is driven by the bidirectional lifting assembly 13 to move away from the surface of the sealing door 8, and at this time, the sealing door 8 can be rotated and opened, so that the product for coating processing can be taken out or put in.

[0030] The air flow promoting mechanism 11 comprises mounting holes 111, fans 112 and mounting pipes 113. The mounting holes 111 are arranged on the surface of the top plate 5 and the bottom plate 3, the fans 112 are fixedly installed on the inner wall surface of the mounting holes 111, and the two mounting pipes 113 are respectively fixedly installed on the bottom surface of the bottom plate 3 and the top surface of the top plate 5. The mounting pipes 113 are in communication with the inside of the mounting holes 111, and the movable connecting piece 12 is slidably installed on the surface of the mounting pipe 113.

[0031] Specifically, the closed space formed by the bottom plate 3, the liquid cooling wall 4 and the top plate 5 can be connected with the movable connecting piece 12 through the mounting holes 111 and the mounting pipes 113, and then can be connected with the inside of the sealing door 8. When the fans 112 are turned on, the air in the closed space and the air in the inside of the sealing door 8 can be circulated quickly, the air around the vacuum coating box 6 can be circulated and homogenized in all directions, and then the heat dissipation efficiency of the vacuum coating box 6 can be ensured to be highly consistent, and the vacuum coating effect can be improved.

[0032] The movable connecting piece 12 comprises a limiting sliding groove 121, the limiting sliding groove 121 is arranged on the inner wall surface of the mounting pipe 113, a limiting ring 122 is slidably installed on the inner wall surface of the limiting sliding groove 121, a connecting pipe 123 is fixedly installed on the inner side surface of the limiting ring 122, the connecting pipe 123 is longitudinally and slidably inserted into the surface of the mounting pipe 113, one end of the connecting pipe 123 away from the mounting pipe 113 is longitudinally and slidably inserted into the surface of the sealing door 8, a sealing ring 124 is fixedly installed on the surface of the one end of the connecting pipe 123 away from the mounting pipe 113, the sealing ring 124 is arranged in abutment with the surface of the sealing door 8, and the bidirectional lifting assembly 13 is used for driving the connecting pipe 123 to lift.

[0033] Specifically, when the bidirectional lifting assembly 13 drives the connecting pipe 123 to lift, the connecting pipe 123 drives the limiting ring 122 to slide up and down on the inner wall surface of the limiting sliding groove 121. Through the cooperation of the limiting ring 122 and the limiting sliding groove 121, the excessive movement of the connecting pipe 123 is avoided. By controlling the lifting of the connecting pipe 123, the sliding insertion of the connecting pipe 123 into the surface of the sealing door 8 or the departure of the connecting pipe 123 from the surface of the sealing door 8 is controlled. When the connecting pipe 123 slides and inserts into the surface of the sealing door 8, the closed space is in communication with the sealing door 8 through the connection of the air flow promoting mechanism 11 and the movable connecting piece 12. When the connecting pipe 123 slides away from the surface of the sealing door 8, the sealing door 8 can be smoothly opened. When the connecting pipe 123 slides and inserts into the surface of the sealing door 8, the sealing ring 124 tightly abuts against the surface of the sealing door 8 to effectively seal.

[0034] The bidirectional lifting assembly 13 includes a mounting rod 131 and a motor 134. The mounting rod 131 is fixedly installed on the top surface of the base 1. The mounting rod 131 is provided with lifting grooves 132 on one side surface close to the liquid cooling wall 4. The number of the lifting grooves 132 is two and they are symmetrically arranged. Lifting plates 133 are slidably installed on the inner wall surface of the lifting grooves 132. The lifting plates 133 are fixedly installed on the surface of the connecting pipe 123. The motor 134 is fixedly installed on the top surface of the mounting rod 131. The output end of the motor 134 is fixedly connected with a double-headed threaded rod 135. The double-headed threaded rod 135 is rotatably installed on the inner wall surface of the lifting grooves 132. The two lifting plates 133 symmetrically installed on the surface of the double-headed threaded rod 135 are screwedly installed.

[0035] Specifically, the output end of the motor 134 drives the double-headed threaded rod 135 to rotate, so that the two lifting plates 133 symmetrically screwedly installed on the surface of the double-headed threaded rod 135 and slidably installed on the inner wall surface of the lifting grooves 132 move synchronously in the same direction or in the opposite direction. When the two lifting plates 133 move in the opposite direction, the two connecting pipes 123 move in the opposite direction. When the two lifting plates 133 move in the same direction, the two connecting pipes 123 synchronously slide and insert into the surface of the sealing door 8.

[0036] In summary, the two movable connecting pieces 12 on the upper and lower sides are driven by the bidirectional lifting assembly 13 to slide and insert into the sealing door 8. The air in the closed space and the air in the sealing door 8 are circulated and exchanged by the movable connecting piece 12, so that the air temperature in the sealing door 8 and the air temperature in the closed space maintain a high degree of uniformity. Thus, the heat emitted by the vacuum coating box 6 can also be absorbed from the front side by the air and finally conducted to the liquid cooling wall 4 for further cooling. Therefore, the heat generated by the vacuum coating box 6 can be uniformly and omnidirectionally absorbed, so that the vacuum coating box 6 can be cooled omnidirectionally and uniformly, and the cooling effect and the cooling efficiency are improved, thereby improving the vacuum coating quality.

[0037] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection required by the present application is defined by the appended claims and their equivalents.

Claims

1. A rapid cooling device for a vacuum coating machine, characterized in that, Including base (1), the top surface of the base (1) is fixedly installed with support leg (2) and two-way lifting assembly (13), the top surface of the support leg (2) is fixedly installed with bottom plate (3), the top surface of the bottom plate (3) is fixedly installed with liquid cooling wall (4) and support (7), the top surface of the liquid cooling wall (4) is fixedly installed with top plate (5), the top surface of the support (7) is fixedly installed with vacuum coating box (6), the vacuum coating box (6) is located between the bottom plate (3) and the top plate (5) and the left side, the right side and the back side of the vacuum coating box (6) are surrounded by the liquid cooling wall (4), the front of the liquid cooling wall (4) is hingedly connected with sealing door (8), the surfaces of the bottom plate (3) and the top plate (5) are each provided with air flow promoting mechanism (11), the surface of the air flow promoting mechanism (11) is slidably installed with movable connecting piece (12), the surface of the movable connecting piece (12) is slidably inserted into the surface of the sealing door (8), the two-way lifting assembly (13) is used to drive two movable connecting pieces (12) to move synchronously towards or reversely, the air flow promoting mechanism (11) includes mounting hole (111), fan (112) and mounting pipe (113), the mounting hole (111) is formed in the surface of the top plate (5) and the bottom plate (3), the fan (112) is fixedly installed on the inner wall surface of the mounting hole (111), two mounting pipes (113) are respectively fixedly installed on the bottom surface of the bottom plate (3) and the top surface of the top plate (5), the inside of the mounting pipe (113) is in communication with the inside of the mounting hole (111), and the movable connecting piece (12) is slidably installed on the surface of the mounting pipe (113).

2. The rapid cooling device of a vacuum coating machine according to claim 1, wherein, The liquid cooling wall (4) includes surrounding wall (401), the surrounding wall (401) is fixedly installed between the top surface of the bottom plate (3) and the bottom surface of the top plate (5), the inner side surface of the surrounding wall (401) is fixedly installed with inner blade (402), the outer side surface of the surrounding wall (401) is fixedly installed with outer blade (403), the number of the inner blade (402) and the outer blade (403) is several and they are evenly distributed in the surface of the surrounding wall (401) in annular array, the inner blade (402) and the outer blade (403) are in communication with the inside of the surrounding wall (401), the side wall of the surrounding wall (401) is fixedly installed with liquid inlet pipe (404) and liquid outlet pipe (405), the liquid inlet pipe (404) is arranged above the liquid outlet pipe (405), and the surfaces of the liquid inlet pipe (404) and the liquid outlet pipe (405) are each provided with valve (406).

3. The rapid cooling device of a vacuum coating machine according to claim 1, wherein, The sealing door (8) is a hollow structure, the middle portions of the front and back side walls of the sealing door (8) are each fixedly installed with observation window (9), the observation window (9) is made of coated tempered glass, the top surface and the bottom surface of the sealing door (8) are each provided with buckle (10), and two buckles (10) are respectively connected with the surfaces of the bottom plate (3) and the top plate (5).

4. The rapid cooling device of a vacuum coating machine according to claim 1, wherein, The movable connecting piece (12) comprises a limiting sliding groove (121) which is arranged on the inner wall surface of the mounting pipe (113), the inner wall surface of the limiting sliding groove (121) is slidably connected with a limiting ring (122), the inner side surface of the limiting ring (122) is fixedly connected with a connecting pipe (123), the connecting pipe (123) is longitudinally and slidably inserted into the surface of the mounting pipe (113), the end of the connecting pipe (123) away from the mounting pipe (113) is longitudinally and slidably inserted into the surface of the sealing door (8), the surface of the end of the connecting pipe (123) away from the mounting pipe (113) is fixedly connected with a sealing ring (124), the sealing ring (124) is arranged on the surface of the sealing door (8), and the bidirectional lifting assembly (13) is used for driving the lifting of the connecting pipe (123).

5. The rapid cooling device of a vacuum coating machine according to claim 4, wherein, The bidirectional lifting assembly (13) comprises a mounting rod (131) and a motor (134), the mounting rod (131) is fixedly connected to the top surface of the base (1), the side surface of the mounting rod (131) close to the liquid cooling wall (4) is provided with a lifting groove (132), the number of the lifting grooves (132) is two and they are symmetrically arranged, the inner wall surface of the lifting groove (132) is slidably connected with a lifting plate (133), the lifting plate (133) is fixedly connected to the surface of the connecting pipe (123), the motor (134) is fixedly connected to the top surface of the mounting rod (131), the output end of the motor (134) is fixedly connected with a double-headed threaded rod (135), the double-headed threaded rod (135) is rotatably connected to the inner wall surface of the lifting groove (132), and the two lifting plates (133) are symmetrically and threadedly connected to the surface of the double-headed threaded rod (135).

Images