Flower basket cleaning equipment for silicon wafer flower basket production

Abstract

The utility model discloses flower basket cleaning equipment for silicon wafer flower basket production, and relates to the technical field of flower basket cleaning. A water tank is fixedly installed at the top end of the cleaning box, a water pump is fixedly installed at the bottom of the water tank, a high spraying pipe is fixedly connected to the driving end of the water pump, an air cylinder is fixedly installed on the inner side of the cleaning box, a connecting frame is fixedly connected to the driving end of the air cylinder, and a rotating shaft is rotationally installed at one end of the connecting frame. One end of the rotating shaft is fixedly connected with a placing frame, and uniformly distributed transverse grooves are formed in the outer side of the placing frame; through cooperation of a water pump, a water tank, a high spraying pipe, a transverse groove, a motor, a driving gear, a driven gear and other assemblies, the driven gear drives a rotating shaft and a containing frame to rotate, a flower basket rolls in the containing frame, an air cylinder is controlled to push a connecting frame in a reciprocating mode, and therefore the flower basket rolls and shakes under the high spraying pipe for cleaning and is matched with impact force of cleaning liquid; dirt is removed more efficiently, and the flower basket cleaning effect is further improved.

Description

Technical Field

[0001] This utility model relates to the field of flower basket cleaning technology, specifically a flower basket cleaning device for silicon wafer flower basket production. Background Technology

[0002] With the continuous advancement of technology and the continuous development of industry, silicon wafer baskets have been widely used in many fields. They play an important auxiliary tool in semiconductor manufacturing, photovoltaic industry, materials science and other fields, used to carry, transport and clean silicon wafers. They can ensure the safe, stable and efficient flow of silicon wafers in the manufacturing process. However, these baskets must be kept highly clean, because any particles or contaminants may damage the silicon wafers, thereby affecting the yield and chip quality.

[0003] However, existing flower basket cleaning equipment is not ideal in use. The reason is that during the cleaning process, the flower basket is usually fixed in one place and the dirt is cleaned by high-pressure spraying. However, the flower basket cannot be tumbled or shaken during cleaning, which may make it difficult to clean the dirt in some dead corners. Moreover, the inability to move makes it difficult for the dirt to be shaken off. This needs to be optimized. In order to solve the above problems, the inventor proposes a flower basket cleaning equipment for silicon wafer flower basket production. Utility Model Content

[0004] To solve the above technical problems, the present invention adopts the following technical solution: a flower basket cleaning device for silicon wafer flower basket production, comprising a cleaning box, a water tank fixedly installed at the top of the cleaning box, a water pump fixedly installed at the bottom of the water tank, a high-pressure spray pipe fixedly connected to the drive end of the water pump, a cylinder fixedly installed inside the cleaning box, a connecting frame fixedly connected to the drive end of the cylinder, a rotating shaft rotatably installed at one end of the connecting frame, a placement frame fixedly connected to one end of the rotating shaft, uniformly distributed transverse grooves opened on the outer side of the placement frame, a driven gear fixedly sleeved on the outer side of the rotating shaft, a motor fixedly installed at one end of the connecting frame, a driving gear fixedly connected to the drive end of the motor, and the driving gear meshing with the driven gear.

[0005] Preferably, a groove is provided on one side of the top of the placement frame, a sealing plate is slidably inserted into the inner side of the groove, and symmetrically distributed tension springs are fixedly installed on the top of the sealing plate, with the bottom end of the tension springs fixedly connected to the top of the placement frame.

[0006] Preferably, an mounting block is fixedly installed at the bottom of the connecting frame, and a pulley is fixedly connected to the bottom of the mounting block. A movable groove is provided on the inner side of the cleaning box, and one end of the pulley is slidably engaged with the inner side of the movable groove.

[0007] Preferably, a handle is fixedly installed at the top center of the sealing plate.

[0008] Preferably, a movable cover is movably installed on the top of the water tank.

[0009] Preferably, the bottom surface of the cleaning box is fixedly equipped with an array of foot pads.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0011] 1. Through the cooperation of components such as water pump, water tank, high spray pipe, horizontal groove, motor, drive gear, and driven gear, the driven gear drives the rotating shaft and placement frame to rotate, tumbling the flower basket in the placement frame. Then, the cylinder is controlled to push the connecting frame back and forth, so that the flower basket is tumbling and shaking under the high spray pipe for cleaning. Combined with the impact of the cleaning liquid, it removes dirt more efficiently and further improves the cleaning effect of the flower basket.

[0012] 2. The sealing plate slides in the groove to block the placement opening of the basket. When the sealing plate is opened by the tension spring, the basket can be placed or removed. After the basket is placed or removed, the sealing plate can be reset to the blocked state. The structure is simple and ingenious, making the basket placement and removal more convenient. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Figure 2 This is a structural breakdown diagram of the water pump and other components of this utility model.

[0016] Figure 3 This is a structural breakdown diagram of the components such as the placement frame of this utility model.

[0017] In the diagram: 1. Cleaning box; 11. Water tank; 12. Water pump; 13. High-pressure spray pipe; 14. Cylinder; 15. Connecting frame; 16. Rotating shaft; 17. Placement frame; 18. Horizontal groove; 19. Driven gear; 20. Motor; 21. Drive gear; 22. Slide groove; 23. Sealing plate; 24. Tension spring; 25. Add-on block; 26. Pulley; 27. Movable groove; 28. Handle; 29. ​​Movable cover; 30. Foot pad. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Example: Figure 1-3 As shown, this utility model provides a technical solution: a basket cleaning device for silicon wafer basket production, including a cleaning box 1, a water tank 11 fixedly installed at the top of the cleaning box 1, a water pump 12 fixedly installed at the bottom of the water tank 11, a high-pressure spray pipe 13 fixedly connected to the drive end of the water pump 12, a cylinder 14 fixedly installed inside the cleaning box 1, a connecting frame 15 fixedly connected to the drive end of the cylinder 14, a rotating shaft 16 rotatably installed at one end of the connecting frame 15, a placement frame 17 fixedly connected to one end of the rotating shaft 16, uniformly distributed transverse grooves 18 opened on the outer side of the placement frame 17, a driven gear 19 fixedly sleeved on the outer side of the rotating shaft 16, a motor 20 fixedly installed at one end of the connecting frame 15, a driving gear 21 fixedly connected to the drive end of the motor 20, and the driving gear 21 meshing with the driven gear 19.

[0020] By adopting the above technical solution, the water tank 11 is equipped with a booster pump to work with the water pump 12 and the high-pressure spray pipe 13 to increase the spray intensity of the cleaning liquid.

[0021] A groove 22 is provided on one side of the top of the placement frame 17. A sealing plate 23 is slidably inserted into the inner side of the groove 22. A tension spring 24 is fixedly installed on the top of the sealing plate 23. The bottom end of the tension spring 24 is fixedly connected to the top of the placement frame 17.

[0022] By adopting the above technical solution, the sealing plate 23 slides in the slide groove 22 to block the placement opening of the placement frame 17. When the sealing plate 23 is opened by the tension spring 24, the flower basket can be taken out and placed back to the blocking state. The structure is simple and ingenious, and the operation of taking out and placing the flower basket is more convenient.

[0023] An add-on block 25 is fixedly installed at the bottom of the connecting frame 15, and a pulley 26 is fixedly connected to the bottom of the add-on block 25. An movable groove 27 is opened on the inner side of the cleaning box 1, and one end of the pulley 26 is slidably engaged with the inner side of the movable groove 27.

[0024] By adopting the above technical solution, the movement stability of the connecting frame 15 and the placement frame 17 is effectively strengthened by setting the mounting block 25 to drive the pulley 26 to slide in the movable groove 27.

[0025] A handle 28 is fixedly installed at the top center of the sealing plate 23.

[0026] By adopting the above technical solution, the sealing plate 23 can be easily pulled and slid by using the handle 28.

[0027] A movable cover 29 is movably installed on the top of the water tank 11.

[0028] By adopting the above technical solution, the water tank 11 is sealed by setting a movable cover 29.

[0029] The bottom surface of the cleaning box 1 is fixedly equipped with an array of foot pads 30.

[0030] By adopting the above technical solution, the support stability of the cleaning box 1 is enhanced by setting foot pads 30.

[0031] Working principle: First, pull the sealing plate 23 to place the flower basket into the placement frame 17. When the sealing plate 23 is opened by the tension spring 24, the flower basket can be taken out and put in. After the sealing plate 23 is opened, the sealing plate 23 can be reset to the sealed state. The structure is simple and ingenious, and the operation of taking out and putting in the flower basket is more convenient. Then, the water pump 12 is started to draw the cleaning liquid from the water tank 11 and spray it out through the high spray pipe 13. The cleaning liquid sprays through the horizontal groove 18 to clean the flower basket. At the same time, the motor 20 is started to rotate the drive gear 21. The drive gear 21 drives the driven gear 19 to rotate. The driven gear 19 drives the rotating shaft 16 and the placement frame 17 to rotate, making the flower basket roll in the placement frame 17. Then, the cylinder 14 is controlled to push the connecting frame 15 back and forth, so that the flower basket is rolled and shaken under the high spray pipe 13 for cleaning. Combined with the impact of the cleaning liquid, the dirt is removed more efficiently, and the cleaning effect of the flower basket is further improved.

[0032] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A wafer basket cleaning device for producing a silicon wafer basket, comprising a cleaning tank (1), characterized in that: The top end of the cleaning box (1) is fixedly installed with a water tank (11), the bottom of the water tank (11) is fixedly installed with a water pump (12), the driving end of the water pump (12) is fixedly connected with a high spray pipe (13), the inner side of the cleaning box (1) is fixedly installed with a cylinder (14), the driving end of the cylinder (14) is fixedly connected with a connecting frame (15), one end of the connecting frame (15) is rotatably installed with a rotating shaft (16), one end of the rotating shaft (16) is fixedly connected with a placing frame (17), the outer side of the placing frame (17) is provided with uniformly distributed transverse grooves (18), the outer side of the rotating shaft (16) is fixedly sleeved with a driven gear (19), one end of the connecting frame (15) is fixedly installed with a motor (20), the driving end of the motor (20) is fixedly connected with a driving gear (21), and the driving gear (21) is meshedly connected with the driven gear (19).

2. The wafer basket cleaning apparatus for producing a wafer basket according to claim 1, wherein The top side of the placing frame (17) is provided with a sliding groove (22), the inner side of the sliding groove (22) is slidably inserted with a sealing plate (23), the top of the sealing plate (23) is fixedly installed with symmetrically distributed tension springs (24), and the bottom end of the tension spring (24) is fixedly connected with the top end of the placing frame (17).

3. The wafer basket cleaning apparatus for producing a wafer basket according to claim 1, wherein The bottom end of the connecting frame (15) is fixedly installed with an added block (25), the bottom end of the added block (25) is fixedly connected with a pulley (26), the inner side of the cleaning box (1) is provided with a movable groove (27), and one end of the pulley (26) is slidably clamped on the inner side of the movable groove (27).

4. The wafer basket cleaning apparatus for producing a wafer basket according to claim 2, wherein The top end of the sealing plate (23) is fixedly installed with a handle (28).

5. The wafer basket cleaning apparatus for producing a wafer basket according to claim 1, wherein The top end of the water tank (11) is movably installed with a movable cover (29).

6. The wafer basket cleaning apparatus for producing a wafer basket according to claim 1, wherein The bottom surface of the cleaning box (1) is fixedly installed with array-distributed foot pads (30).

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