Single crystal furnace heater

Abstract

The utility model provides a single crystal furnace heater which comprises a heating petal and a foot plate, the heating petal specifically comprises a heating petal body and a connecting plate, and the heating petal body and the connecting plate are connected into a whole. Wherein a first connecting part is arranged on the foot plate, a second connecting part and a third connecting part are arranged at the top end and the bottom end of the connecting plate respectively, the heating petals can be turned over, and the first connecting part can be connected with the second connecting part or the third connecting part arranged at the top end of the connecting plate. When the single crystal furnace heater is used for heating, the first connecting part of the foot plate is firstly connected with the second connecting part arranged at the top end of the connecting plate, then current is switched on to enable the heating petals to start heating, and when the second connecting part of the connecting plate is abraded or cracked after the single crystal furnace heater is used for a period of time, the heating petals can be turned over by 180 degrees to enable the heating petals to start heating. And the first connecting part of the foot plate is connected with the third connecting part arranged at the top end of the connecting plate to enable the heating petals to continue working, so that the service life of the crystalline silicon heater can be effectively prolonged, and the cost is reduced.

Description

Technical Field

[0001] This utility model belongs to the technical field of monocrystalline silicon production and processing equipment, and specifically relates to a monocrystalline furnace heater. Background Technology

[0002] As an essential auxiliary material in the Czochralski method for producing single crystals, the single crystal furnace heater mainly consists of a heating element and a foot plate. The heating element, as the core component, heats the silicon material, while the foot plate serves to limit and support weight. During the single crystal silicon pulling process, the heater continuously generates heat, and the connection between the heating element and the foot plate is prone to wear and even cracks. This results in a short service life for the single crystal furnace heater, which is detrimental to cost control.

[0003] Therefore, how to overcome the above-mentioned technical defects is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, the purpose of this utility model is to provide a single crystal furnace heater that can effectively extend the service life of the single crystal furnace heater and reduce costs.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A single crystal furnace heater includes a heating petal and a foot plate. The heating petal includes a heating petal body and a connecting plate, and the heating petal body and the connecting plate are connected as one piece.

[0007] The foot plate is provided with a first connecting part, and the top and bottom ends of the connecting plate are respectively provided with a second connecting part and a third connecting part. The heating petal can be rotated 180°, and the first connecting part can be connected to the second connecting part or the third connecting part located at the top of the connecting plate.

[0008] Optionally, the foot plate includes a base and a support plate, wherein the base and the support plate are integrally formed.

[0009] Optionally, a protective cover may also be included, which can be placed over the second connecting portion or the third connecting portion located at the bottom end of the connecting plate to protect the second connecting portion or the third connecting portion.

[0010] Optionally, the protective cover is a strip structure and is installed on the outer side of the support plate. The protective cover extends upward from the bottom of the support plate to a position that can cover the second connecting part or the third connecting part located at the bottom of the connecting plate.

[0011] Optionally, the support plate includes a support plate body and a protective cover, the first connecting portion is disposed on the support plate body, and the protective cover is disposed on the outside of the support plate body to cover the second connecting portion or the third connecting portion disposed at the bottom end of the connecting plate.

[0012] Optionally, the height of the heating valve is 230-320mm.

[0013] Optionally, the first connecting part is provided with a first connecting hole, the second connecting part is provided with a second connecting hole corresponding to the first connecting hole, and the third connecting part is provided with a third connecting hole corresponding to the first connecting hole.

[0014] Optionally, there are at least two of each of the first connecting hole, the second connecting hole, and the third connecting hole.

[0015] Optionally, the heating valve body includes at least a first half-heating valve and a second half-heating valve, both of which are semi-annular structures, and are connected in an annular structure by the connecting plate.

[0016] Optionally, the connecting plate includes a first connecting plate and a second connecting plate. The first connecting plate connects one end of the first half-heating petal and one end of the second half-heating petal, and the second connecting plate connects the other end of the first half-heating petal and the other end of the second half-heating petal. The first connecting plate and the second connecting plate are arranged opposite to each other.

[0017] As can be seen from the above technical solution, when the single crystal furnace heater is heating, the first connecting part of the foot plate is first connected to the second connecting part located at the top of the connecting plate, and then the current is turned on to make the heating petal start heating. When the second connecting part of the connecting plate wears or cracks after a period of use, the heating petal can be rotated 180° and then the first connecting part of the foot plate is connected to the third connecting part located at the top of the connecting plate to make the heating petal continue to work. With this setting, the service life of the crystalline silicon heater can be effectively extended and the cost reduced by connecting the two ends of the connecting plate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 This is a perspective view of the single crystal furnace heater disclosed in the embodiments of this utility model;

[0020] Figure 2 This is a front view of the single crystal furnace heater disclosed in the embodiments of this utility model;

[0021] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0022] Figure 4 This is a side view of the single crystal furnace heater disclosed in the embodiment of this utility model;

[0023] Figure 5 This is a top view of the single crystal furnace heater disclosed in the embodiment of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 100. Heating valve body; 200. Connecting plate; 201. Second connecting part; 2011. Second connecting hole; 202. Third connecting part; 2021. Third connecting hole; 300. Foot plate; 301. Base; 302. Support plate; 400. Protective cover. Detailed Implementation

[0026] In view of this, the core of this utility model is to provide a single crystal furnace heater that can effectively extend the service life of crystalline silicon heaters and reduce costs.

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model. Please refer to... Figures 1 to 5 .

[0028] Please combine Figures 1 to 3 Understandably, the single crystal furnace heater disclosed in this embodiment of the present invention includes a heating petal and a foot plate 300. The heating petal specifically includes a heating petal body 100 and a connecting plate 200, and the heating petal body 100 and the connecting plate 200 are connected as one unit.

[0029] The foot plate 300 is provided with a first connecting part, and the top and bottom ends of the connecting plate 200 are respectively provided with a second connecting part 201 and a third connecting part 202. The heating petals can be flipped, and the first connecting part can be connected to the second connecting part 201 or the third connecting part 202 located at the top of the connecting plate 200.

[0030] When the single crystal furnace heater is heating, the first connecting part of the foot plate 300 is first connected to the second connecting part 201 located at the top of the connecting plate 200. Then, the current is turned on to make the heating petal start heating. When the second connecting part 201 of the connecting plate 200 wears or cracks after a period of use, the heating petal can be rotated 180° and then the first connecting part of the foot plate 300 is connected to the third connecting part 202 located at the top of the connecting plate 200 so that the heating petal can continue to work. With this setting, the service life of the crystalline silicon heater can be effectively extended and the cost reduced by connecting the two ends of the connecting plate 200.

[0031] Of course, the first connecting part of the foot plate 300 can also be connected to the third connecting part 202 located at the top of the connecting plate 200, and then the current can be turned on to make the heating petal start to heat up. When the third connecting part 202 of the connecting plate 200 is worn or cracked after a period of use, the heating petal can be rotated 180° and then the first connecting part of the foot plate 300 can be connected to the second connecting part 201 located at the top of the connecting plate 200 to continue to make the heating petal continue to work.

[0032] The specific structure of the foot plate 300 is not limited in this embodiment of the utility model. The foot plate 300 can be a spliced ​​structure or a one-piece molded structure. As long as the structure meets the usage requirements of this utility model, it is within the protection scope of this utility model.

[0033] In a preferred embodiment, the footplate 300 disclosed in this utility model includes a base 301 and a support plate 302, wherein the base 301 and the support plate 302 are integrally formed. This arrangement can improve the stability of the entire footplate 300.

[0034] In order to protect the second connecting part 201 or the third connecting part 202 that is not connected to the first connecting part during the heating process of the single crystal furnace heater, the single crystal furnace heater disclosed in this embodiment of the present invention also includes a protective cover 400, wherein the protective cover 400 can be covered on the second connecting part 201 or the third connecting part 202 located at the lower part of the connecting plate 200, so as to achieve protection for the second connecting part 201 or the third connecting part 202.

[0035] This utility model embodiment does not limit the specific structure of the protective cover 400. Any structure that meets the usage requirements of this utility model is within the protection scope of this utility model.

[0036] As one specific embodiment, the protective cover 400 disclosed in this utility model embodiment has a strip structure and is installed on the outer side of the support plate 302. The protective cover 400 extends upward from the bottom of the support plate 302 to a position that can cover the second connecting part 201 or the third connecting part 202 located at the lower part of the connecting plate 200.

[0037] Of course, the protective cover 400 can also extend upward from any part of the middle of the support plate 302 to a position that can cover the second connecting part 201 or the third connecting part 202 located at the lower part of the connecting plate 200.

[0038] In another specific embodiment, the protective cover 400 disclosed in this utility model embodiment can be part of the support plate 302. Specifically, the support plate 302 includes a support plate body and a protective cover 400. A first connecting portion is disposed on the support plate body, and the protective cover 400 is disposed on the outside of the support plate body to cover the second connecting portion 201 or the third connecting portion 202 disposed at the bottom end of the connecting plate 200. With this configuration, no additional materials are required; it can be formed simply by processing the support plate 302, greatly saving materials.

[0039] It should be noted that the height of the heating petal disclosed in this embodiment of the invention is 230 mm - 320 mm. This setting ensures that the crucible is neither overheated nor lacking in heat.

[0040] As a further embodiment, please refer to Figure 3 The first connecting part disclosed in this embodiment of the utility model is provided with a first connecting hole, the second connecting part 201 is provided with a second connecting hole 2011 corresponding to the first connecting hole, and the third connecting part 202 is provided with a third connecting hole 2021 corresponding to the first connecting hole.

[0041] The first connecting hole, the second connecting hole 2011, and the third connecting hole 2021 are configured in the same way, so that the first connecting hole can be connected to both the second connecting hole 2011 and the third connecting hole 2021.

[0042] To improve the stability of the connection, the first connection hole, the second connection hole 2011 and the third connection hole 2021 disclosed in this embodiment of the present invention are all at least two.

[0043] As a specific embodiment, the first connecting hole, the second connecting hole 2011 and the third connecting hole 2021 disclosed in this utility model embodiment may be three, four or more.

[0044] This utility model embodiment does not limit the specific shape and structure of the heating petal body 100. The heating petal body 100 may be composed of two half heating petals, or three, four or more half heating petals. This utility model embodiment does not specifically limit it. As long as the structure meets the usage requirements of this utility model, it is within the protection scope of this utility model.

[0045] For a specific embodiment, please refer to Figure 1 and Figure 5The heating valve body 100 disclosed in this embodiment of the present invention includes at least a first half-heating valve and a second half-heating valve, wherein both the first half-heating valve and the second half-heating valve are semi-annular structures, and the first half-heating valve and the second half-heating valve are connected to form an annular structure by a connecting plate 200.

[0046] The present invention does not limit the specific number of connecting plates 200. There may be one, two, three or more connecting plates 200. Any structure that meets the requirements of the present invention is within the protection scope of the present invention.

[0047] As a specific embodiment of this utility model, the connecting plate 200 disclosed in this embodiment includes a first connecting plate and a second connecting plate. The first connecting plate connects one end of the first half-heating petal and one end of the second half-heating petal, and the second connecting plate connects the other ends of the first half-heating petal and the other ends of the second half-heating petal. The first connecting plate and the second connecting plate are arranged opposite to each other. This arrangement can save costs and provide stable support for the heating petal.

[0048] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0049] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0050] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single crystal furnace heater characterized by, The heating panel comprises a heating panel body and a connecting plate, and the heating panel body is connected with the connecting plate as a whole. The first connecting part is arranged on the foot plate, the top end and the bottom end of the connecting plate are respectively provided with the second connecting part and the third connecting part, the heating panel can be turned over by 180°, and the first connecting part can be connected with the second connecting part or the third connecting part arranged at the top end of the connecting plate.

2. The single crystal furnace heater of claim 1, wherein, The foot plate comprises a base and a supporting plate, and the base and the supporting plate are integrally formed.

3. The single crystal furnace heater of claim 2, wherein, The protective cover is arranged on the second connecting part or the third connecting part arranged at the bottom end of the connecting plate to realize protection of the second connecting part or the third connecting part.

4. The single crystal furnace heater of claim 3, wherein, The protective cover is in a strip-shaped structure and is arranged on the outer side of the supporting plate, and the protective cover extends upward from the bottom of the supporting plate to a position capable of covering the second connecting part or the third connecting part arranged at the bottom end of the connecting plate.

5. The single crystal furnace heater of claim 3, wherein, The supporting plate comprises a supporting plate body and the protective cover, the first connecting part is arranged on the supporting plate body, and the protective cover is arranged on the outer side of the supporting plate body to cover the second connecting part or the third connecting part arranged at the bottom end of the connecting plate.

6. The single crystal furnace heater of claim 1, wherein, The height of the heating panel is 230-320 mm.

7. The single crystal furnace heater of claim 1, wherein, The first connecting hole is arranged on the first connecting part, the second connecting hole corresponding to the first connecting hole is arranged on the second connecting part, and the third connecting hole corresponding to the first connecting hole is arranged on the third connecting part.

8. The single crystal furnace heater of claim 7, wherein, The first connecting hole, the second connecting hole and the third connecting hole are at least two.

9. The single crystal furnace heater of claim 1, wherein, The heating panel body comprises at least a first half heating panel and a second half heating panel, the first half heating panel and the second half heating panel are both in a semi-ring structure, and the first half heating panel and the second half heating panel are connected as a ring structure through the connecting plate.

10. The single crystal furnace heater of claim 9, wherein, The connecting plate comprises a first connecting plate and a second connecting plate, the first connecting plate connects one end of the first half heating panel and one end of the second half heating panel, the second connecting plate connects the other end of the first half heating panel and the other end of the second half heating panel, and the first connecting plate and the second connecting plate are arranged oppositely.

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