Novel durable anode ion source

Abstract

The utility model relates to the technical field of ion source auxiliary coating, in particular to a novel durable anode ion source which comprises a base, an anode is arranged on the base, a cooling structure matched with the anode is arranged on the base, an electricity leading part is arranged on the cooling structure, and the cooling structure is externally connected with a power supply device through the electricity leading part. An inner cathode and an outer cathode are arranged on the base, a gas distribution structure is further arranged on the base, the gas distribution structure is externally connected with a gas supply device, magnetic steel is arranged on the outer wall of the supporting part, and the magnetic mirror ratio of a discharge cavity magnetic field formed by the inner cathode, the outer cathode and the anode is high. According to the technical scheme, electrons can be effectively gathered at the open end of a discharge cavity formed by the inner cathode, the outer cathode and the anode, namely in an ion emitting channel, so that collision of ions on the side walls of the inner cathode and the outer cathode is effectively reduced, sputtering pollution is reduced, and powder and cut pollutants generated in the using process cannot be accumulated on the outer cathode and the anode.

Description

Technical Field

[0001] This utility model relates to the field of ion source-assisted coating technology, and in particular to a novel durable anodic ion source. Background Technology

[0002] An ion source is a device that ionizes neutral atoms or molecules and extracts an ion beam. It is an indispensable component of various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam injectors in controlled fusion devices. Vacuum coating uses a variety of ion sources, including: high-frequency ion sources, arc discharge ion sources, Kaufman ion sources, radio frequency ion sources, Hall ion sources, cold cathode ion sources, electron cyclotron ion sources, anode layer ion sources, and inductively coupled ion sources. There may be many other types of ion sources not mentioned. The Hall ion source ionizes the process gas under the cooperation of a strong axial magnetic field. The strong imbalance of this axial magnetic field separates the gas ions and forms an ion beam; it is also the most widely used ion source.

[0003] The existing Hall ion source works on the principle that the magnetic field lines and electric field lines are almost orthogonal near the anode of the ion source. The presence of this cross electromagnetic field captures electrons. These electrons rotate around the magnetic field lines and drift angularly in the region near the anode, forming a Hall current. This increases the probability of collisions between electrons and neutral gas molecules or atoms, thereby improving the ionization rate of the gas. For example, Chinese Patent Publication No. CN211208387U discloses a "novel durable anode layer ion source". By adding a gas equalization seat structure, the process gas needs to pass through the gas guide holes on the gas equalization seat before entering the working space. The multiple equally spaced gas guide holes are equivalent to uniformly dispersing the process gas, so that it enters the gap between the cathode and the anode more evenly, achieving uniform distribution of the process gas. This results in a balanced and stable plasma concentration when the ion source is working, making the coating quality more stable. Setting an anode cooling water channel at the anode and a cathode cooling water channel at the cathode can effectively achieve long-term operation without abnormalities caused by temperature rise.

[0004] However, in actual use, due to the complex structure of existing ion sources, a lot of time is required for assembly. Furthermore, the outer and inner cathodes of the ion source are easily corroded by electrons ionized by the electric field, producing powder and shavings-like contaminants, which can easily lead to short circuits between the cathode and anode, affecting the service life. Utility Model Content

[0005] The purpose of this invention is to solve the problems of existing ion sources having complex structures, and the outer and inner cathodes being easily corroded by electrons ionized by the electric field, producing powder and shavings-like contaminants, which can easily lead to short circuits between the cathode and anode and affect service life. Therefore, a new type of durable anode ion source is proposed.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A novel and durable anodic ion source is designed, comprising a base, an anode disposed on the base, a cooling structure that cooperates with the anode on the base, an electric induction part disposed on the cooling structure and connected to an external power supply device through the electric induction part, an inner cathode and an outer cathode disposed on the base, a gas distribution structure disposed on the base and connected to an external gas supply device, and a support part disposed on the base between the outer cathode and the base, the outer wall of the support part being provided with a magnet.

[0008] Furthermore, the cooling structure includes an inlet pipe and an outlet pipe, and the anode is provided with through holes that cooperate with the inlet pipe and the outlet pipe. The anode is also provided with drainage grooves that cooperate with the two through holes.

[0009] Furthermore, the drainage channel is provided with an installation groove, and a sealing element that cooperates with the drainage channel is fixedly installed in the installation groove.

[0010] Furthermore, there is a gap between the anode, the inner cathode, and the outer cathode for gas flow, and a gas guiding channel is formed between the inner cathode and the support. The output end of the gas distribution structure is connected to the gas guiding channel.

[0011] Furthermore, the air distribution structure includes a connecting pipe and an air guide pipe, and the base is provided with air distribution holes that cooperate with the air guide pipe.

[0012] Furthermore, an air distribution plate is provided at the lower end of the base, and an air guide groove is provided on the air distribution plate. There are multiple air distribution holes, all of which are connected to the air guide groove, and the air guide pipe is connected to the air guide groove.

[0013] Furthermore, the air guide groove is provided with an air intake groove that communicates with the air guide groove, and there are two air guide pipes, which are provided on both sides of the air intake groove and communicate with the air intake groove.

[0014] The novel durable anodic ion source proposed in this invention has the following advantages:

[0015] In this invention, due to the high magnetic mirror ratio of the discharge cavity magnetic field formed by the inner cathode, outer cathode and anode, electrons can be effectively concentrated at the beginning of the discharge cavity formed by the inner cathode, outer cathode and anode, i.e. in the ion emission channel, thereby effectively reducing the collision of ions with the sidewalls of the inner cathode and outer cathode, reducing sputtering pollution, and preventing the accumulation of powder and shavings of pollutants generated during use on the outer cathode and anode, thus extending the maintenance time of the anode layer ion source.

[0016] Secondly, in this invention, the gas discharged from the gas distribution holes of the gas distribution structure flows from bottom to top, which can blow out the powder and shavings generated during use from the ion source, avoiding the accumulation of powder and shavings in the ion source. In addition, the structure is simple, the assembly efficiency is higher, and it is convenient to maintain and replace the internal parts of the ion source. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the novel durable anodic ion source proposed in this utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the anode of this utility model;

[0019] Figure 3 This is a schematic diagram of the air distribution hole structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the air intake groove of this utility model;

[0021] Figure 5 This is an enlarged structural diagram of area A of this utility model.

[0022] In the diagram: 1. Base; 11. Support; 2. Anode; 3. Cooling structure; 31. Water inlet pipe; 32. Water outlet pipe; 33. Through hole; 34. Drainage groove; 35. Mounting groove; 36. Sealing element; 4. Electric current inlet; 5. Inner cathode; 51. Air guide channel; 6. Outer cathode; 7. Air distribution structure; 71. Connecting pipe; 72. Air guide pipe; 73. Air distribution hole; 74. Air distribution plate; 75. Air guide groove; 76. Air inlet groove; 8. Magnet. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0024] Reference Figure 1-5A novel and durable anodic ion source includes a base 1, an anode 2 disposed on the base 1, a cooling structure 3 disposed on the base 1 in conjunction with the anode 2, an electric induction part 4 disposed on the cooling structure 3 and connected to an external power supply device through the electric induction part 4, an inner cathode 5 and an outer cathode 6 disposed on the base 1, a gas distribution structure 7 disposed on the base 1 and connected to an external gas supply device, and a support part 11 disposed on the base 1 between the outer cathode 6 and the base 1, and a magnet 8 disposed on the outer wall of the support part 11.

[0025] In this invention, the magnetic field of the discharge cavity formed by the inner cathode 5, the outer cathode 6, and the anode 2 has a high magnetic mirror ratio, which can effectively concentrate electrons at the beginning of the discharge cavity formed by the inner cathode 5, the outer cathode 6, and the anode 2, i.e., in the ion emission channel. This effectively reduces the collision of ions with the sidewalls of the inner cathode 5 and the outer cathode 6, reduces sputtering pollution, and prevents powder and shavings generated during use from accumulating on the outer cathode 6 and the anode 2, thus extending the maintenance time of the anode layer ion source.

[0026] Furthermore, in this embodiment, the cooling structure 3 includes an inlet pipe 31 and an outlet pipe 32. The anode 2 is provided with through holes 33 that cooperate with the inlet pipe 31 and the outlet pipe 32. The anode 2 is also provided with flow channels 34 that cooperate with the two through holes 33. The inlet pipe 31 and the outlet pipe 32 cooperate with the flow channels 34 to form a water flow structure to cool the anode. This allows the ion source to work effectively for a long time without causing abnormalities due to temperature rise.

[0027] Furthermore, in this embodiment, an installation groove 35 is provided on the diversion groove 34, and a sealing element 36 that cooperates with the diversion groove 34 is fixedly installed in the installation groove 35. By setting the sealing element 36, water flow out of the diversion groove 34 and short circuit is prevented, which is safer.

[0028] It should be noted that in this embodiment, there are gaps for gas flow between the anode 2, the inner cathode 5, and the outer cathode 6. A gas guiding channel 51 is formed between the inner cathode 5 and the support 11. The output end of the gas distribution structure 7 is connected to the gas guiding channel 51. The magnetic field of the discharge cavity formed by the inner cathode 5, the outer cathode 6, and the anode 2 has a high magnetic mirror ratio, which can effectively concentrate electrons at the beginning of the discharge cavity formed by the inner cathode 5, the outer cathode 6, and the anode 2, i.e., in the ion emission channel. This effectively reduces the collision of ions with the sidewalls of the inner cathode 5 and the outer cathode 6, reduces sputtering contamination, and prevents powder and shavings generated during use from accumulating on the outer cathode 6 and the anode 2, thus extending the maintenance time of the anode layer ion source. At the same time, the airflow blown out of the gas guiding channel 51 also blows out the powder and shavings generated during use from the ion source, preventing the accumulation of powder and shavings in the ion source.

[0029] Furthermore, in this embodiment, the air distribution structure 7 includes a connecting pipe 71 and an air guide pipe 72. The base 1 is provided with an air distribution hole 73 that cooperates with the air guide pipe 72. The connecting pipe 71 is connected to an external air supply device, and the airflow is blown into the air guide channel 51 from bottom to top along the air guide pipe 72 and the air distribution hole 73.

[0030] In detail, in this embodiment, an air distribution plate 74 is provided at the lower end of the base 1. An air guide groove 75 is provided on the air distribution plate 74. There are multiple air distribution holes 73, all of which are connected to the air guide groove 75. An air guide pipe 72 is connected to the air guide groove 75. By setting the air distribution plate 74 and the air guide groove 75 to cooperate, the airflow introduced by the air guide pipe 72 is distributed to each air distribution hole 73, so as to supply air to multiple air distribution holes 73 at the same time. A sealing ring is provided between the air distribution plate 74 and the base 1 to prevent air leakage.

[0031] More specifically, in this embodiment, an air intake groove 76 is provided inside the air guide groove 75 and communicates with the air guide groove 75. There are two air guide pipes 72, which are provided on both sides of the air intake groove 76 and communicate with the air intake groove 76. The airflow blown in by the air guide pipes 72 first enters the air intake groove 76 and collides with the base 1, reducing the flow rate of the airflow. This makes the airflow evenly distributed when it flows into the air guide groove 75, so that the airflow blown out by the air distribution hole 73 is the same. This allows the gas to enter the gap between the cathode and the anode more evenly, achieving uniform gas distribution. When the ion source is working, the plasma concentration is balanced and stable, resulting in stable coating quality.

[0032] Operating mode: During operation, the magnetic field of the discharge cavity formed by the inner cathode 5, outer cathode 6, and anode 2 has a high magnetic mirror ratio, which can effectively concentrate electrons at the beginning of the discharge cavity formed by the inner cathode 5, outer cathode 6, and anode 2, i.e., in the ion emission channel. This effectively reduces the collision of ions with the sidewalls of the inner cathode 5 and outer cathode 6, reduces sputtering contamination, and prevents powder and shavings generated during use from accumulating on the outer cathode 6 and anode 2, thus extending the maintenance time of the anode layer ion source. The airflow blown in by the gas guide pipe 72 first enters the gas inlet groove 76 and collides with the base 1. Then the airflow flows into the gas inlet groove 76 and is blown into the gas guide channel 51 from bottom to top along the gas distribution hole 73, so that the gas enters the gap between the cathode and anode more evenly, achieving uniform gas distribution. When the ion source is working, the plasma concentration is balanced and stable, resulting in stable coating quality.

[0033] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A new durable anode ion source comprising a base (1) characterised in that: The base (1) is provided with an anode (2), the base (1) is provided with a cooling structure (3) matched with the anode (2), the cooling structure (3) is provided with an electricity leading part (4) and is externally connected with a power supply device through the electricity leading part (4), the base (1) is provided with an inner cathode (5) and an outer cathode (6), the base (1) is further provided with a gas distribution structure (7), the gas distribution structure (7) is externally connected with a gas supply device, the base (1) is provided with a supporting part (11), the supporting part (11) is arranged between the outer cathode (6) and the base (1), and the outer wall of the supporting part (11) is provided with a magnetic steel (8); The anode (2), the inner cathode (5) and the outer cathode (6) are all provided with a spacing for gas flow, the inner cathode (5) and the supporting part (11) form a gas guide channel (51), and the output end of the gas distribution structure (7) is communicated with the gas guide channel (51); The gas distribution structure (7) comprises a connecting pipe (71) and a gas guide pipe (72), and the base (1) is provided with a gas distribution hole (73) matched with the gas guide pipe (72); The gas distribution hole (73) of the gas distribution structure (7) discharges gas flowing from bottom to top.

2. The novel, durable anode ion source of claim 1, characterized by: The cooling structure (3) comprises an inlet pipe (31) and an outlet pipe (32), the anode (2) is provided with a through hole (33) matched with the inlet pipe (31) and the outlet pipe (32), and the anode (2) is further provided with a drainage groove (34) matched with the two through holes (33).

3. The novel, durable anode ion source of claim 2, characterized by: The drainage groove (34) is provided with a mounting groove (35), and the mounting groove (35) is fixedly provided with a sealing element (36) matched with the drainage groove (34).

4. The novel, durable anode ion source of claim 1, wherein: The lower end of the base (1) is provided with a gas distribution plate (74), the gas distribution plate (74) is provided with a gas guide groove (75), the gas distribution hole (73) has a plurality of gas distribution holes and is communicated with the gas guide groove (75), and the gas guide pipe (72) is communicated with the gas guide groove (75).

5. The novel, durable anode ion source of claim 4, wherein: The gas guide groove (75) is provided with a gas guide groove (76) communicated with the gas guide groove (75), and the gas guide pipe (72) is two, arranged on the two sides of the gas guide groove (76) and communicated with the gas guide groove (76).

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