Vacuum adsorption platform and vacuum adsorption system

Abstract

The utility model relates to a vacuum adsorption platform and a vacuum adsorption system. The vacuum adsorption platform comprises a base plate, a vacuum adsorption assembly and a plurality of adjusting assemblies. The vacuum adsorption system comprises a plurality of vacuum generators, a plurality of pressure gauges and a vacuum adsorption platform. According to the adjusting assembly in the vacuum adsorption platform, through the combination of the fastener, the sleeve, the adjusting column and the gasket with the convex spherical surface, the adjusting assembly ensures that the base plate and the vacuum adsorption assembly are in surface contact, so that the levelness of the vacuum adsorption assembly is adjusted more stably, and when a to-be-machined part is placed on the vacuum adsorption assembly, the levelness of the to-be-machined part is adjusted more stably. And the levelness of the workpiece to be machined can be ensured.

Description

Technical Field

[0001] This application relates to the field of laser processing technology, and in particular to vacuum adsorption platforms and vacuum adsorption systems. Background Technology

[0002] Laser processing has the advantages of high processing speed, high precision, and high degree of intelligence, and is commonly used in the processing of glass, PCB panels, and other delicate parts.

[0003] However, if the fixture table on which the workpiece is placed cannot ensure that the workpiece is at the ideal level, it will affect the focusing process of laser processing, which can easily lead to a decrease in processing quality or even a decrease in yield.

[0004] Currently, to ensure the workpiece has an ideal level, it is typically placed on a fixture table. The fixture table is connected to a reference surface at the installation position via multiple threaded components, which are used to adjust the fixture table to the required level. However, this adjustment method still suffers from insufficient precision, resulting in the workpiece still not being perfectly level, thus affecting the quality of laser processing. Utility Model Content

[0005] Therefore, it is necessary to provide a vacuum adsorption platform and vacuum adsorption system to address the problem that insufficient level adjustment of the fixture table affects the processing quality of the workpiece by laser.

[0006] A vacuum adsorption platform, the vacuum adsorption platform comprising:

[0007] substrate;

[0008] A vacuum adsorption assembly is installed on one side of the substrate along its thickness direction;

[0009] Multiple adjustment components are inserted into and installed in the vacuum adsorption component and the substrate; each adjustment component includes: fasteners, sleeves, adjustment columns, and gaskets.

[0010] One end of the sleeve is connected to the vacuum adsorption assembly, and the adjusting column can move axially relative to the sleeve;

[0011] The adjustment column has a spherical groove at one end near the substrate;

[0012] The gasket is installed between the adjusting column and the base plate. One side of the gasket has a convex spherical surface that mates with the spherical groove. The convex spherical surface can rotate relative to the spherical groove.

[0013] The fasteners are inserted through the adjusting post, the gasket, and the base plate to fix the adjusting post and the base plate in place.

[0014] In actual use, the vacuum adsorption platform described above has the vacuum adsorption assembly installed on one side of the substrate along its thickness direction. Referring to Figures 1 and 2, the adjustment assembly includes: a fastener, a sleeve, an adjustment column, and a gasket. Mounting holes corresponding to each adjustment assembly are provided in the vacuum adsorption assembly and the substrate, and each adjustment assembly passes through these holes into the vacuum adsorption assembly and the substrate. One end of the sleeve is connected to the vacuum adsorption assembly, and the sleeve has an inner cavity. The outer diameter of the adjustment column matches the inner diameter of the inner cavity, allowing the adjustment column to move axially within the sleeve in the inner cavity. A spherical groove is provided at the end of the adjustment column near the substrate. A gasket is installed between the adjustment column and the substrate; one side of the gasket has a convex spherical surface that mates with the spherical groove, allowing the convex spherical surface to rotate relative to the spherical groove. The other side of the gasket is flat and fits against the substrate. Fasteners pass through the adjustment column, gasket, and substrate to connect the adjustment column to the substrate.

[0015] When there is a certain tilt angle between the vacuum adsorption component and the substrate, in order to adjust the vacuum adsorption component to a horizontal position, it is necessary to adjust the height positions of multiple adjusting columns to be different, and the adjusting columns will have a tilt angle relative to the substrate. In the embodiment of this application, during the axial movement of the adjusting column along the sleeve, the convex spherical surface of the gasket cooperates with the spherical groove, thereby allowing the adjusting column to adjust its tilt angle relative to the substrate, and the side of the gasket closest to the substrate can always contact the substrate surface. Subsequently, fasteners are inserted into the corresponding adjusting column, the corresponding gasket, and the substrate, thereby locking the vacuum adsorption component and the substrate, completing the horizontal adjustment and installation of the vacuum adsorption component at the installation position. This improves the horizontality of the vacuum adsorption component and enhances the quality of laser processing.

[0016] In one embodiment, the adjustment component further includes a positioning pin;

[0017] The vacuum adsorption assembly has multiple first holes on the side near the substrate. The sleeve has a first convex ring on the outer periphery of the end near the substrate. The first convex ring has a first positioning hole along the axial direction of the first hole. The vacuum adsorption assembly has multiple first sinks on the side near the substrate. The multiple first sinks correspond one-to-one with the multiple first holes. The first sinks are connected to the first holes. The bottom wall of the first sink has a second positioning hole. The first convex ring is located in the first sink. The sleeve is located in the corresponding first hole. The positioning pin passes through the first positioning hole and the second positioning hole.

[0018] In one embodiment, the adjusting assembly further includes a locking member, the sleeve having a locking hole along its radial direction, the locking member being detachably inserted through the locking hole and abutting against the adjusting post.

[0019] In one embodiment, the substrate has a plurality of second holes, and the adjustment assembly further includes a plurality of adjustment pads connected to the inner walls of the corresponding second holes. The fastener passes through the adjustment pads, and the outer periphery of the adjustment pad near one end of the substrate has a protrusion. The substrate near the vacuum adsorption assembly has a plurality of second sinks, and the plurality of second sinks correspond one-to-one with the plurality of second holes. The second sinks communicate with the second holes, and the protrusion is located in the second sink and is adapted to the second sink.

[0020] In one embodiment, the vacuum adsorption assembly includes a stage housing and a stage panel. The stage housing has a vacuum cavity with an opening opposite to the substrate. The stage panel covers the opening of the vacuum cavity. The stage panel has a plurality of adsorption holes that communicate with the vacuum cavity.

[0021] The stage housing has a plurality of first holes on its bottom wall near the substrate, and the stage panel has a plurality of third holes. The plurality of first holes and the plurality of third holes correspond one-to-one. The fastener passes through the corresponding third hole and is inserted into the corresponding adjusting post, the corresponding gasket, and the substrate.

[0022] In one embodiment, the vacuum adsorption assembly further includes a plurality of positioning blocks, which are disposed on the side of the stage panel opposite to the substrate and are used for positioning the workpiece to be processed.

[0023] In one embodiment, the vacuum adsorption assembly includes two sets of positioning blocks. Two sets of positioning grooves are provided on the side of the stage panel away from the substrate. The two sets of positioning blocks are partially located in the two sets of positioning grooves in a one-to-one correspondence. The two sets of positioning grooves are arranged at intervals along a first direction and a second direction, respectively. The first direction is perpendicular to the second direction and parallel to the side of the stage panel away from the substrate.

[0024] In one embodiment, the vacuum adsorption assembly further includes a plurality of partition strips located within the vacuum cavity and dividing the vacuum cavity into a plurality of vacuum chambers.

[0025] In one embodiment, the plurality of the partition strips gradually expand outwards from a point on the bottom wall of the vacuum cavity along a first direction and a second direction, wherein the first direction and the second direction are not collinear, and the first direction is parallel to the side of the stage panel facing away from the substrate.

[0026] One embodiment of this application also provides a vacuum adsorption system, which includes: multiple vacuum generators, multiple pressure gauges, and the vacuum adsorption platform;

[0027] Multiple vacuum generators and multiple pressure gauges are disposed on the outside of the vacuum adsorption assembly. The multiple vacuum generators are connected to the inside of the vacuum adsorption assembly and are used to evacuate the inside of the vacuum adsorption assembly.

[0028] Multiple pressure gauges are connected to the interior of the vacuum adsorption assembly to detect the vacuum level inside the vacuum adsorption assembly.

[0029] In practical use, the vacuum adsorption platform described above has the vacuum adsorption assembly mounted on one side of the substrate along its thickness direction. The adjustment components include fasteners, sleeves, adjustment columns, and gaskets. Mounting holes corresponding to each adjustment component are provided in both the vacuum adsorption assembly and the substrate, and each adjustment component passes through these holes into the vacuum adsorption assembly and the substrate. A vacuum generator is used to evacuate the interior of the vacuum adsorption assembly. A pressure gauge is used to detect the vacuum level inside the vacuum adsorption assembly.

[0030] One end of the sleeve is connected to the vacuum adsorption assembly, and the sleeve has an inner cavity; the outer diameter of the adjusting column is adapted to the inner diameter of the inner cavity, and the adjusting column can move along the axial direction of the sleeve in the inner cavity; a spherical groove is opened at the end of the adjusting column near the substrate; a gasket is installed between the adjusting column and the substrate, one side of the gasket has a convex spherical surface that matches the spherical groove, and the convex spherical surface can rotate relative to the spherical groove, and the other side of the gasket is a flat surface that fits against the substrate; fasteners are inserted through the adjusting column, the gasket and the substrate to connect the adjusting column and the substrate.

[0031] When there is a certain tilt angle between the vacuum adsorption component and the substrate, in order to adjust the vacuum adsorption component to a horizontal position, it is necessary to adjust the height positions of multiple adjusting columns to be different, and the adjusting columns will have a tilt angle relative to the substrate. In the embodiment of this application, during the axial movement of the adjusting column along the sleeve, the convex spherical surface of the gasket cooperates with the spherical groove, thereby allowing the adjusting column to adjust its tilt angle relative to the substrate, and the side of the gasket closest to the substrate can always contact the substrate surface. Subsequently, fasteners are inserted into the corresponding adjusting column, the corresponding gasket, and the substrate, thereby locking the vacuum adsorption component and the substrate, completing the horizontal adjustment and installation of the vacuum adsorption component at the installation position. This improves the horizontality of the vacuum adsorption component and enhances the quality of laser processing. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of a vacuum adsorption platform according to one embodiment.

[0033] Figure 2 for Figure 1 An exploded view from a one-way perspective.

[0034] Figure 3 for Figure 1 An exploded view from another perspective.

[0035] Figure 4 for Figure 2 Enlarged view of point A in the middle.

[0036] Figure 5 for Figure 1 A sectional view of the side view.

[0037] Figure 6 for Figure 5 Enlarged view of point C in the middle.

[0038] Figure 7 for Figure 3 Enlarged view of point B in the middle.

[0039] Figure 8 for Figure 1 Top view.

[0040] Figure 9 for Figure 8 Enlarged view of point D in the middle.

[0041] Explanation of icon numbers:

[0042] 100-Vacuum adsorption platform;

[0043] 110 - Substrate; 111 - Second hole; 112 - Second sink;

[0044] 120 - Vacuum adsorption assembly; 121 - First hole; 122 - Adsorption hole; 123 - Stage housing; 124 - Stage panel; 125 - Vacuum chamber; 126 - Opening; 127 - Third hole; 128 - Sealing strip; 129 - Strip groove;

[0045] 130 - Adjusting component; 131 - Fastener; 131a - Threaded part; 131b - Head; 132 - Sleeve; 133 - Adjusting pin; 134 - Washer; 135 - First through hole; 136 - Second through hole; 137 - Spherical groove; 138 - Convex spherical surface;

[0046] 140 - Locating pin; 141 - First convex ring; 142 - First locating hole; 143 - First countersunk groove; 144 - Second locating hole;

[0047] 151-Locking hole; 152-Adjusting shim; 153-Shim hole; 154-Protrusion;

[0048] 160 - Cover plate; 161 - Third settling groove; 162 - Second convex ring;

[0049] 170 - Positioning block; 171 - Positioning groove; 172 - Separator strip; 173 - Vacuum chamber; 174 - Vacuum generator; 175 - Pressure gauge;

[0050] 182 - Fourth settling tank;

[0051] OX - First direction; OY - Second direction. Detailed Implementation

[0052] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0053] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0054] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0055] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0056] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0057] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0058] Currently, in order to ensure that the workpiece has the ideal levelness, it is usually placed on a fixture table. The fixture table is movably connected to the reference surface located at the installation position by multiple fasteners, and the fixture table is adjusted to the required levelness by using multiple fasteners.

[0059] However, while threaded components can change the levelness of the fixture table, if the distances between multiple threaded components and the reference surface are different, the end faces of the threaded components will inevitably fail to make contact with the surface of the fixture table. Therefore, the above-mentioned adjustment method still lacks precision, resulting in the workpiece still having unsatisfactory levelness, thus affecting the processing quality of the laser. Therefore, this application provides a vacuum adsorption platform 100 in one embodiment.

[0060] See Figure 1 , Figure 1 A schematic diagram of the structure of a vacuum adsorption platform 100 according to an embodiment of this application is shown. (See attached diagram.) Figures 1-3 The vacuum adsorption platform 100 provided in one embodiment of this application includes: a substrate 110, a vacuum adsorption component 120, and a plurality of adjustment components 130.

[0061] In the aforementioned vacuum adsorption platform 100, the vacuum adsorption assembly 120 is mounted on one side of the substrate 110 along its thickness direction. (See reference...) Figure 4 and Figure 6The adjustment component 130 includes a fastener 131, a sleeve 132, an adjustment column 133, and a gasket 134. Mounting holes corresponding to each adjustment component 130 are provided in the vacuum adsorption component 120 and the substrate 110, and each adjustment component 130 passes through the mounting holes in the vacuum adsorption component 120 and the substrate 110.

[0062] One end of the sleeve 132 is connected to the vacuum adsorption assembly 120, and the sleeve 132 has an inner cavity; the outer diameter of the adjusting column 133 is adapted to the inner diameter of the inner cavity, and the adjusting column 133 can move axially along the sleeve 132 in the inner cavity; a spherical groove 137 is provided at one end of the adjusting column 133 near the substrate 110. A gasket 134 is installed between the adjusting column 133 and the substrate 110. One side of the gasket 134 has a convex spherical surface 138 that mates with the spherical groove 137. The convex spherical surface 138 can rotate relative to the spherical groove 137. The other side of the gasket 134 is a flat surface and fits against the substrate 110; a fastener 131 passes through the adjusting column 133, the gasket 134 and the substrate 110 to connect the adjusting column 133 and the substrate 110.

[0063] When there is a certain tilt angle between the vacuum adsorption assembly 120 and the substrate 110, in order to adjust the vacuum adsorption assembly 120 to a horizontal position, it is necessary to adjust the height positions of multiple adjusting columns 133 to be different from each other, and the adjusting columns 133 will have a tilt angle relative to the substrate 110. In this embodiment, during the axial movement of the adjusting column 133 along the sleeve 132, the convex spherical surface 138 of the gasket 134 cooperates with the spherical groove 137, thereby allowing the adjusting column 133 to adjust its tilt angle relative to the substrate 110, and the side of the gasket 134 near the substrate 110 can always contact the surface of the substrate 110. Subsequently, the fastener 131 is passed through the corresponding adjusting column 133, the corresponding gasket 134, and the substrate 110, thereby locking the vacuum adsorption assembly 120 and the substrate 110, completing the horizontal adjustment and installation of the vacuum adsorption assembly 120 at the installation position. This improves the horizontality of the vacuum adsorption assembly 120 and enhances the quality of laser processing.

[0064] For example, the inner wall of the inner cavity of the sleeve 132 is provided with threads, and the outer wall of the adjusting column 133 is provided with corresponding threads. The outer wall of the adjusting column 133 is threadedly engaged with the inner wall of the inner cavity of the sleeve 132. Furthermore, by rotating and adjusting, the adjusting column 133 can move along the axial direction of the sleeve 132.

[0065] In other embodiments, the inner wall of the inner cavity of the sleeve 132 and the outer wall of the adjusting column 133 are rubbed and slid together, or a hydraulic cylinder structure or a telescopic rod structure is formed to adjust the positional relationship between the sleeve 132 and the adjusting column 133, so as to adjust the distance of the adjusting component 130 along the axial direction of the sleeve 132. The specific cooperation method between the sleeve 132 and the adjusting column 133 is not limited here, as long as it can adjust the length of the adjusting component 130 along the axial direction of the sleeve 132.

[0066] See Figure 2 and Figure 3 The connection relationship between the vacuum adsorption component 120, the substrate 110 and the multiple adjustment components 130 is described below.

[0067] The vacuum adsorption assembly 120 is disposed opposite to the substrate 110. The vacuum adsorption assembly 120 has a plurality of first holes 121 on the side closest to the substrate 110; the substrate 110 has a plurality of second holes 111. A plurality of adjustment components 130, a plurality of second holes 111, and a plurality of first holes 121 correspond one-to-one, with each adjustment component 130 passing through a corresponding first hole 121 and second hole 111 in the vacuum adsorption assembly 120 and the substrate 110.

[0068] The adjusting assembly 130 includes a fastener 131, a sleeve 132, an adjusting post 133, and a washer 134. The sleeve 132 has a first through hole 135, which connects to the inner wall of the first hole 121. The outer wall of the adjusting post 133 is threaded into the inner wall of the first through hole 135. The adjusting post 133 has a second through hole 136 along its axial direction. The fastener 131 passes through the corresponding second through hole 136, the corresponding washer 134, and the corresponding second hole 111, and is threaded into both the inner walls of the second through hole 136 and the inner walls of the second hole 111. The end face of the adjusting post 133 near the base plate 110 has a spherical groove 137 communicating with the second through hole 136. The side of the washer 134 near the base plate 110 is flat and abuts against the base plate 110. The surface of the washer 134 opposite the second hole 111 is a convex spherical surface 138 that matches the spherical groove 137.

[0069] See Figure 4 , Figure 5 as well as Figure 6During operation, the aforementioned vacuum adsorption platform 100 first places the substrate 110 in the installation position, then connects the sleeve 132 to the inner wall of the first hole 121, and then threads the adjusting column 133 into the inner wall of the first through hole 135. A shim 134 is placed between the adjusting column 133 and the substrate 110. The relative positions of the multiple adjusting columns 133 and the first through hole 135 are adjusted through the threaded connection, thereby ensuring that the vacuum adsorption assembly 120 is level. During adjustment, if the substrate 110 placed in the installation position is not level, and it is necessary to ensure that the vacuum adsorption assembly 120 is level, there will be a certain tilt angle between the vacuum adsorption assembly 120 and the substrate 110 after adjustment. Therefore, the height positions of the multiple adjusting columns 133 need to be adjusted to be different from each other, and the adjusting columns 133 will have a tilt angle relative to the substrate 110. Because the convex spherical surface 138 of the gasket 134 faces away from the second hole 111 and spherically engages with the spherical groove 137, the tilt angle of the adjusting column 133 relative to the substrate 110 can be adjusted, and the side of the gasket 134 near the substrate 110 can always contact the surface of the substrate 110. Subsequently, the fastener 131 is inserted into the corresponding second through hole 136, the corresponding gasket 134, and the corresponding second hole 111. The fastener 131 is threaded into the inner wall of the second through hole 136 and the inner wall of the second hole 111, thereby locking the vacuum adsorption assembly 120 to the substrate 110, thus completing the horizontal adjustment and installation of the vacuum adsorption assembly 120 in the installation position.

[0070] See Figure 2 and Figure 3 In one embodiment, there are three adjustment components 130, which form an equilateral triangle around the axis of the vacuum adsorption component 120. There can also be four, five, or more adjustment components, as long as the multiple adjustment components 130 form a polygon with equal sides around the axis of the vacuum adsorption component 120. This ensures that the supporting force of the multiple adjustment components 130 on the vacuum adsorption component 120 is evenly distributed, thus stably maintaining the levelness of the vacuum adsorption component 120.

[0071] See Figure 4 and Figure 6In one embodiment, the adjusting assembly 130 further includes a positioning pin 140. A first protruding ring 141 is provided on the outer periphery of the sleeve 132 near the substrate 110. The first protruding ring 141 has a first positioning hole 142 along the axial direction of the first hole 121. The vacuum adsorption assembly 120 has a plurality of first recesses 143 on the side near the substrate 110. The plurality of first recesses 143 correspond one-to-one with the plurality of first holes 121. The first recesses 143 communicate with the first holes 121. A second positioning hole 144 is provided on the bottom wall of the first recesses 143. The first protruding ring 141 is located in the first recesses 143. The positioning pin 140 passes through the first positioning hole 142 and the second positioning hole 144.

[0072] See Figure 4 and Figure 6 In this embodiment, by opening a first positioning hole 142 on the first protruding ring 141 and a second positioning hole in the first recess 143, the positioning pin 140 can pass through the first positioning hole 142 and the second positioning hole 144 to fix the sleeve 132 relative to the first hole 121 of the vacuum adsorption assembly 120. This prevents the sleeve 132 from rotating in the first hole 121 during the rotation of the adjusting column 133 or the fastener 131, ensuring the stability of the installation and adjustment. At the same time, the first recess 143 accommodates the first protruding ring 141, making the distance between the substrate 110 and the vacuum adsorption assembly 120 as small as possible. This avoids the fastener 131 from having an excessively large offset after passing through the first hole 121, which would cause the offset to increase at the same offset angle, resulting in the fastener 131 being unable to thread into the second hole 111.

[0073] See Figure 4 and Figure 6 In one embodiment, the adjusting assembly 130 further includes a locking member. The sleeve 132 has a locking hole 151 along its radial direction. The locking member is detachably inserted through the locking hole 151 and abuts against the adjusting column 133. Thus, after the relative position between the adjusting column 133 and the sleeve 132 is adjusted, the locking member, inserted through the locking hole 151, abuts against the adjusting column 133 to lock the relative position between the adjusting column 133 and the sleeve 132. Subsequently, the fastener 131 is inserted through the corresponding second through hole 136, the corresponding washer 134, and the corresponding second hole 111. During the installation of the fastener 131, the threaded engagement between the fastener 131 and the inner wall of the second through hole 136 will not cause the adjusting column 133 to rotate, ensuring the relative stability of the position between the adjusting column 133 and the sleeve 132.

[0074] See Figure 4 and Figure 6In one embodiment, the adjustment assembly 130 further includes an adjustment pad 152, which is connected to the inner wall of the second hole 111. The adjustment pad 152 has a pad hole 153 along the axial direction of the second hole 111. A fastener 131 passes through the pad hole 153 and is threaded into the pad hole 153. A shim 134 is planar on the side near the substrate 110 and abuts against the adjustment pad 152. Through the abutment between the shim 134 and the adjustment pad 152, the abutment force between the shim 134 and the substrate 110 is transmitted through the adjustment pad 152. The fastener 131 is threaded into the inner wall of the pad hole 153, allowing the fastener 131 to indirectly engage with the substrate 110 through the adjustment pad 152, thereby locking the substrate 110 and the vacuum adsorption assembly 120 together.

[0075] See Figure 4 and Figure 6 In one embodiment, a protrusion 154 is provided on the outer periphery of the adjusting pad 152 near the end of the substrate 110. A plurality of second sinks 112 are provided on the side of the substrate 110 near the vacuum adsorption assembly 120. The plurality of second sinks 112 correspond one-to-one with a plurality of second holes 111. The second sinks 112 communicate with the second holes 111. The protrusion 154 is located in the second sinks 112 and is adapted to the second sinks 112.

[0076] In this embodiment, similarly, the distance between the substrate 110 and the vacuum adsorption assembly 120 is reduced by the protrusion 154 sinking into the second sink 112. The cross-section of the second sink 112 is one of polygonal, elliptical, or irregular shape, that is, the cross-section of the second sink 112 and the outer contour of the protrusion 154 are both non-circular, so that the protrusion 154 cannot rotate after sinking into the second sink 112. That is, the adjusting pad 152 cannot rotate after being installed with the substrate 110, so that the fastener 131 can stably engage with the pad hole 153 to lock the substrate 110 and the vacuum adsorption assembly 120.

[0077] See Figure 2 and Figure 3In one embodiment, the vacuum adsorption assembly 120 includes a stage housing 123 and a stage panel 124. The stage housing 123 has an opening 126 and a vacuum chamber 125. The stage panel 124 covers the opening 126 of the vacuum chamber 125 and is connected to the stage housing 123. The stage panel 124 has a plurality of adsorption holes 122, which are in fluid communication with the vacuum chamber 125. The stage housing 123 has a plurality of first holes 121 near the bottom wall of the substrate 110, and the stage panel 124 has a plurality of third holes 127. The plurality of first holes 121 and the plurality of third holes 127 correspond one-to-one. Fasteners 131 pass through the corresponding third holes 127 and are disposed in the corresponding second through holes 136, the corresponding gaskets 134, and the corresponding second holes 111.

[0078] In this embodiment, after the adjusting column 133 and the sleeve 132 have completed the relative position adjustment, the fastener 131 is passed through the corresponding third hole 127 so that the fastener 131 can be inserted into the corresponding second through hole 136, the corresponding gasket 134 and the corresponding second hole 111. Then, the wrench is passed through the third hole 127 to tighten the fastener 131 so as to lock the substrate 110 and the vacuum adsorption assembly 120.

[0079] The vacuum adsorption assembly 120 and the substrate 110 are provided with mounting holes corresponding to each adjustment assembly 130. Each adjustment assembly 130 passes through the mounting hole in the vacuum adsorption assembly 120 and the substrate 110, wherein the mounting hole is the first hole 121 and the second hole 111.

[0080] See Figure 3 , Figure 6 as well as Figure 8 In one embodiment, the vacuum adsorption platform 100 further includes a cover plate 160. A plurality of third recesses 161 are formed on the side of the stage panel 124 facing away from the substrate 110. Each of the third recesses 161 corresponds to and communicates with a plurality of third holes 127. A second protruding ring 162 is provided on the outer periphery of the end of the cover plate 160 facing away from the substrate 110. The second protruding ring 162 is located within the corresponding third recess 161. The cover plate 160 is detachably located within the third hole 127. After the fastener 131 passes through the corresponding second through hole 136, the corresponding gasket 134, and the corresponding second hole 111, and locks the substrate 110 and the vacuum adsorption assembly 120, the cover plate 160 is placed over the third hole 127, with the second protruding ring 162 located within the third recess 161, ensuring that the workpiece can be flatly attached to the side of the stage panel 124 facing away from the stage housing 123.

[0081] Preferably, the fastener 131 is a screw, which includes a threaded portion 131a and a head 131b. The adjusting post 133 has a fourth recess 182 on one end face away from the base plate 110. The fourth recess 182 communicates with the second through hole 136, and the head 131b is located in the fourth recess 182.

[0082] In other embodiments, the fastener 131 may also be a pin, rivet, or elastic snap-fit, as described in the prior art. However, the above-mentioned method of disassembly and installation by snap-fit ​​expansion is rather cumbersome, so the threaded fit embodiment is preferred.

[0083] See Figure 2 , Figure 3 as well as Figure 7 In one embodiment, the vacuum adsorption assembly 120 further includes a sealing strip 128. A strip groove 129 is provided at the opening 126 of the stage housing 123. The strip groove 129 surrounds the outer periphery of the opening 126. The sealing strip 128 is partially located inside the strip groove 129 and abuts against the stage panel 124. This ensures that after the stage panel 124 covers the opening 126 of the stage housing 123, the gap between the stage panel 124 and the stage housing 123 can be sealed by the sealing strip 128. The workpiece to be processed is flatly attached to the side of the stage panel 124 away from the stage housing 123. When the cavity is in a vacuum state, the workpiece to be processed is flatly adsorbed onto the side of the stage panel 124 away from the stage housing 123 through the adsorption holes 122, thereby ensuring the levelness of the workpiece and making subsequent processing more stable.

[0084] See Figure 3 , Figure 8 as well as Figure 9 In one embodiment, the vacuum adsorption assembly 120 further includes two sets of positioning blocks 170. Two sets of positioning grooves 171 are formed on the side of the stage panel 124 facing away from the substrate 110. The two sets of positioning blocks 170 are partially located within the two sets of positioning grooves 171, with each positioning block 170 protruding from the positioning groove 171. The two sets of positioning grooves 171 are arranged at intervals along a first direction OX and a second direction OY, respectively. The first direction OX is perpendicular to the second direction OY, and the first direction OX is parallel to the side of the stage panel 124 facing away from the substrate 110. During operation, when a workpiece (e.g., a PCB board or a glass substrate) is placed on the side of the stage panel 124 facing away from the substrate 110, the two sets of positioning blocks 170 arranged at intervals along the first direction OX and the second direction OY position a corner of the workpiece, thereby enabling the workpiece to be quickly positioned on the side of the stage panel 124 facing away from the substrate 110 during placement.

[0085] See Figure 3 , Figure 5 as well as Figure 7In one embodiment, the vacuum adsorption assembly 120 further includes one or more partition bars 172 located within the vacuum cavity 125 and dividing the vacuum cavity 125 into multiple vacuum chambers 173, thereby enabling different vacuum chambers 173 to be used for workpieces of different sizes, and selectively adsorbing the workpieces, thereby saving energy for generating a vacuum in the vacuum chambers 173.

[0086] In one embodiment, a plurality of partition bars 172 are centered on a point on the bottom wall of the vacuum cavity 125 and gradually expand outward along the first direction OX and the second direction OY.

[0087] In one embodiment, multiple partition bars 172 are arranged around the axis of the vacuum cavity 125 and gradually expand.

[0088] See Figure 8 In another embodiment, a plurality of partition strips 172 gradually expand into the vacuum cavity 125 from a point on the edge of the vacuum cavity 125. Preferably, the vacuum cavity 125 is a cuboid, and the plurality of partition strips 172 gradually expand into the vacuum cavity 125 from a corner of the vacuum cavity 125.

[0089] Preferably, the spacing between the multiple partition bars 172 is the same. The above embodiment is only an example, and there may be other distributions of partition bars 172, which will not be described in detail here. It is sufficient that the multiple partition bars 172 divide the vacuum cavity 125 into multiple vacuum chambers 173.

[0090] Preferably, the separator 172 has a strip groove on the side opposite to the substrate 110, and a sealing strip is provided in the strip groove.

[0091] See Figure 9 Preferably, the stage panel 124 has scale lines along the first direction OX and the second direction OY on the side opposite to the substrate 110, for measuring the side length of the workpiece to be processed.

[0092] An embodiment of this application also provides a vacuum adsorption system, which includes: a plurality of vacuum generators 174, a plurality of pressure gauges 175 and a vacuum adsorption platform 100.

[0093] Multiple vacuum generators 174 and multiple pressure gauges 175 are disposed outside the vacuum chamber 125. The multiple vacuum generators 174 are connected to the interior of the vacuum adsorption assembly 120 and are used to evacuate the interior of the vacuum adsorption assembly 120.

[0094] Multiple pressure gauges 175 are connected to the interior of the vacuum adsorption assembly 120 to detect the vacuum level inside the vacuum adsorption assembly 120.

[0095] In actual use, the vacuum adsorption platform 100 described above has the vacuum adsorption component 120 mounted on one side of the substrate 110 along its thickness direction. (See reference...) Figure 4 and Figure 6 The adjusting assembly 130 includes a fastener 131, a sleeve 132, an adjusting column 133, and a gasket 134. Mounting holes corresponding to each adjusting assembly 130 are provided in the vacuum adsorption assembly 120 and the substrate 110, and each adjusting assembly 130 passes through the mounting holes in the vacuum adsorption assembly 120 and the substrate 110. A vacuum generator 174 is used to evacuate the interior of the vacuum adsorption assembly 120. A pressure gauge 175 is used to detect the vacuum level inside the vacuum adsorption assembly 120.

[0096] One end of the sleeve 132 is connected to the vacuum adsorption assembly 120, and the sleeve 132 has an inner cavity; the outer diameter of the adjusting column 133 is adapted to the inner diameter of the inner cavity, and the adjusting column 133 can move along the axial direction of the sleeve 132 in the inner cavity; a spherical groove 137 is provided at one end of the adjusting column 133 near the substrate 110; a gasket 134 is installed between the adjusting column 133 and the substrate 110, and one side of the gasket 134 has a convex spherical surface 138 that cooperates with the spherical groove 137. The convex spherical surface 138 can rotate relative to the spherical groove 137, and the other side of the gasket 134 is a plane and fits against the substrate 110; a fastener 131 passes through the adjusting column 133, the gasket 134 and the substrate 110 to connect the adjusting column 133 and the substrate 110.

[0097] When there is a certain tilt angle between the vacuum adsorption assembly 120 and the substrate 110, in order to adjust the vacuum adsorption assembly 120 to a horizontal position, it is necessary to adjust the height positions of multiple adjusting columns 133 to be different from each other, and the adjusting columns 133 will have a tilt angle relative to the substrate 110. In this embodiment, during the axial movement of the adjusting column 133 along the sleeve 132, the convex spherical surface 138 of the gasket 134 cooperates with the spherical groove 137, thereby allowing the adjusting column 133 to adjust its tilt angle relative to the substrate 110, and the side of the gasket 134 near the substrate 110 can always contact the surface of the substrate 110. Subsequently, the fastener 131 is passed through the corresponding adjusting column 133, the corresponding gasket 134, and the substrate 110, thereby locking the vacuum adsorption assembly 120 and the substrate 110, completing the horizontal adjustment and installation of the vacuum adsorption assembly 120 at the installation position. This improves the horizontality of the vacuum adsorption assembly 120 and enhances the quality of laser processing.

[0098] Preferably, see Figure 1 , Figure 2 as well as Figure 3In one embodiment, the vacuum adsorption platform 100 further includes a plurality of vacuum generators 174 and a plurality of pressure gauges 175. The plurality of vacuum generators 174 and pressure gauges 175 are disposed outside the vacuum chamber 125. The plurality of vacuum generators correspond one-to-one with and are connected to a plurality of vacuum chambers 173, and are used to evacuate the corresponding vacuum chambers 173. The plurality of pressure gauges 175 correspond one-to-one with and are connected to the plurality of vacuum chambers 173, and are used to detect the vacuum level of the corresponding vacuum chambers 173.

[0099] Therefore, different vacuum generators 174 can be used for workpieces of different sizes, so that different vacuum chambers 173 have a vacuum degree to adsorb the workpieces. The vacuum degree of the corresponding vacuum chamber 173 is detected by the corresponding pressure gauge 175, and the workpieces are adsorbed in a targeted manner, thereby saving energy for vacuum chamber 173 to generate vacuum, and can be flexibly adjusted according to workpieces of different sizes.

[0100] Specifically, there are three partition bars 172, dividing the vacuum chamber 125 into four vacuum chambers 173; four vacuum generators 174; and four pressure gauges 175. The four pressure gauges 175, four vacuum generators 174, and four vacuum chambers 173 correspond one-to-one. The above embodiment is merely an example; the number of partition bars 172 can also be other than those described here.

[0101] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0102] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A vacuum suction platform, characterized by, The vacuum adsorption platform comprises: a substrate; a vacuum adsorption assembly installed on one side of the substrate along the thickness direction; a plurality of adjusting assemblies penetrating and installed in the vacuum adsorption assembly and the substrate; the adjusting assembly comprises a fastener, a sleeve, an adjusting column and a gasket; one end of the sleeve is connected with the vacuum adsorption assembly, and the adjusting column is axially movable relative to the sleeve; a spherical groove is formed on one end of the adjusting column close to the substrate; the gasket is installed between the adjusting column and the substrate, one side of the gasket has a convex spherical surface matched with the spherical groove, and the convex spherical surface is relatively rotatable around the spherical groove; the fastener penetrates the adjusting column, the gasket and the substrate to fixedly connect the adjusting column and the substrate.

2. The vacuum chuck platform of claim 1, wherein, The adjusting assembly further comprises a positioning pin; a plurality of first holes are formed on one side of the vacuum adsorption assembly close to the substrate, a first convex ring is arranged on one end of the sleeve close to the substrate, a first positioning hole is formed in the first convex ring along the axial direction of the first hole, a plurality of first recesses are formed on one side of the vacuum adsorption assembly close to the substrate, the first recesses correspond to the first holes one by one, the first recesses are communicated with the first holes, a second positioning hole is formed on the bottom wall of the first recess, the first convex ring is located in the first recess, the sleeve is located in the corresponding first hole, and the positioning pin penetrates the first positioning hole and the second positioning hole.

3. The vacuum chuck of claim 1, wherein, The adjusting assembly further comprises a locking member, the sleeve is provided with a locking hole in the radial direction, and the locking member is detachably penetrated in the locking hole and abuts against the adjusting column.

4. The vacuum chuck platform of claim 1, wherein, The substrate is provided with a plurality of second holes, the adjusting assembly further comprises a plurality of adjusting pads connected with the inner walls of the corresponding second holes, the fastener penetrates the adjusting pads, the adjusting pads are provided with a convex part on the outer periphery of one end close to the substrate, the substrate is provided with a plurality of second recesses on one side close to the vacuum adsorption assembly, the second recesses correspond to the second holes one by one, the second recesses are communicated with the second holes, the convex part is located in the second recess and matched with the second recess.

5. The vacuum chuck of claim 2, wherein, The vacuum adsorption assembly comprises a stage housing and a stage panel, the stage housing has a vacuum cavity with an opening away from the substrate, the stage panel covers the opening of the vacuum cavity, and the stage panel is provided with a plurality of adsorption holes communicated with the vacuum cavity; the stage housing is provided with a plurality of first holes on the bottom wall close to the substrate, the stage panel is provided with a plurality of third holes, the first holes and the third holes correspond to each other one by one, and the fastener penetrates the corresponding third holes and penetrates the corresponding adjusting column, the corresponding gasket and the substrate.

6. The vacuum chuck platform of claim 5, wherein, The vacuum adsorption assembly further comprises a plurality of positioning blocks arranged on the side of the stage panel away from the substrate and used for positioning the workpiece to be processed.

7. The vacuum chuck platform of claim 6, wherein, The vacuum adsorption assembly comprises two sets of positioning blocks, two sets of positioning grooves are formed on the side of the object table panel away from the substrate, and two sets of the positioning blocks are partially located in the two sets of positioning grooves one by one. The two sets of positioning grooves are arranged at intervals along a first direction and a second direction respectively, the first direction is perpendicular to the second direction, and the first direction is parallel to the side of the object table panel away from the substrate.

8. The vacuum chuck platform of claim 5, wherein, The vacuum adsorption assembly further comprises a plurality of partition strips, and the plurality of partition strips are located in the vacuum cavity and separate the vacuum cavity into a plurality of vacuum chambers.

9. The vacuum chuck platform of claim 8, wherein, The plurality of partition strips are gradually expanded in the first direction and the second direction around a point on the bottom wall of the vacuum cavity, the first direction and the second direction are not collinear, and the first direction is parallel to the side of the object table panel away from the substrate.

10. A vacuum suction system, characterized by The vacuum adsorption system comprises a plurality of vacuum generators, a plurality of pressure gauges, and the vacuum adsorption platform according to any one of claims 1-9. The plurality of vacuum generators and the plurality of pressure gauges are arranged outside the vacuum adsorption assembly, the plurality of vacuum generators are in communication with the inside of the vacuum adsorption assembly, and are used for vacuumizing the inside of the vacuum adsorption assembly. The plurality of pressure gauges are in communication with the inside of the vacuum adsorption assembly, and are used for detecting the vacuum degree of the inside of the vacuum adsorption assembly.

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