Filter press for polishing sewage treatment

By setting annular grooves with embedded porous ceramic plates on the filter plate and using a dynamically adjustable hydraulic system, the problems of insufficient filtration accuracy and energy waste in traditional filter presses when treating polishing wastewater are solved, achieving efficient wastewater treatment.

CN224009130UActive Publication Date: 2026-03-20ZHEJIANG HANHUA SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-17
Publication Date
2026-03-20

AI Technical Summary

Technical Problem

Traditional filter presses suffer from insufficient filtration accuracy, energy waste, and excessively long dewatering cycles when treating polishing wastewater generated in semiconductor manufacturing.

Method used

It adopts a two-stage filtration structure with annular grooves embedded with porous ceramic discs on the working surface of the filter plate. Combined with a dynamically adjustable hydraulic system and telescopic mechanism, the filter chamber spacing can be adjusted. It is equipped with a PTFE membrane and dielectric sensor to improve filtration accuracy and efficiency.

Benefits of technology

It improves filtration accuracy and efficiency, reduces energy consumption, shortens the dehydration cycle, and extends the service life of the membrane.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a filter press for polishing sewage treatment, which belongs to the technical field of sewage treatment, and comprises a rack, a plurality of filter plates, a diaphragm plate, a pressing plate, a thrust plate, a hydraulic driving mechanism and a telescopic mechanism, parallel guide rails are arranged at the inner ends of two sides of the rack, and the plate surface of the pressing plate is fixedly connected with the filter plate close to a sewage input end; the two sides of the filter plates and the two sides of the pressing plates are in sliding connection with the parallel guide rails, one ends of the pressing plates are connected with the hydraulic driving mechanism, the membrane plates are fixedly installed on one sides of the filter plates, the filter plates and the membrane plates are alternately arranged, gaps between the adjacent filter plates form filter chambers, the plate face of the thrust plate is connected with the filter plate away from one end of the pressing plate, and the lower end of the thrust plate is fixedly connected with the rack. The telescopic mechanism is in linkage connection with each filter plate, and the distance between the filter chambers can be adjusted through the telescopic mechanism; an annular groove is formed in the working surface of the filter plate, and a porous ceramic chip is embedded in the annular groove, so that two-stage filtration is formed to improve the flux and the filtration precision, and the filtration efficiency is improved.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to the sewage treatment technical field, more specifically, relate to a polishing sewage treatment with filter press. BACKGROUND

[0002] In the semiconductor manufacturing industry, the polishing process of the silicon wafer produces sewage containing a large number of nanometer silicon particles, colloidal silicon dioxide and chemical additives, which has the characteristics of high turbidity, high viscosity and difficult settlement. The traditional filter press faces the following technical bottlenecks when treating such sewage: the filter precision is insufficient due to the filter cloth filtration plane filter plate structure; the traditional hydraulic system uses single high-pressure squeezing, resulting in energy waste in the initial stage of dewatering of high-viscosity sludge; the filter chamber spacing is fixed and cannot adapt to the change of sludge compression ratio, resulting in a long dewatering cycle. Therefore, a filter press with high filtration precision, dynamic pressure adjustment and high filtration efficiency is needed. SUMMARY

[0003] The technical problem to be solved by the utility model is to provide a polishing sewage treatment with filter press, which can meet the requirements of high filtration precision, dynamic pressure adjustment and high filtration efficiency.

[0004] The polishing sewage treatment with filter press of the utility model, comprising a rack, a plurality of filter plates, a membrane plate, a compression plate, a thrust plate, a hydraulic drive mechanism and a telescopic mechanism, the inner end of the two sides of the rack is provided with parallel guide rails, the compression plate surface is fixedly connected with the filter plate close to the sewage input end, the two sides of the plurality of filter plates and the compression plate are slidingly connected with the parallel guide rails, one end of the compression plate is connected with the hydraulic drive mechanism, the membrane plate is fixedly installed on one side of the filter plate, the filter plate and the membrane plate are alternately arranged, the gap between the adjacent filter plates forms a filter chamber, the thrust plate surface is connected with the filter plate away from one end of the compression plate, and the lower end is fixedly connected with the rack, the telescopic mechanism is linked with each filter plate, and the spacing of the filter chamber can be adjusted through the telescopic mechanism; the working surface of the filter plate is provided with an annular groove, and a porous ceramic sheet is embedded in the annular groove to form a two-stage filtration to improve the flux and filtration precision, thereby improving the filtration efficiency.

[0005] As a further improvement of the utility model, the depth of the annular groove is 0.5-1mm, which improves the filtration precision.

[0006] As a further improvement of the utility model, the holes of the porous ceramic sheet are trapezoidal holes, and the hole diameter decreases from 20μm to 10μm along the thickness direction, which avoids deep plugging and improves the particle retention efficiency.

[0007] As a further improvement of the utility model, the membrane plate is provided with a PTFE film, and the membrane hole diameter is not greater than 2μm, which prolongs the service life of the membrane and improves the retention rate of suspended solids in the effluent.

[0008] As a further improvement of this utility model, the pressure drive mechanism includes a three-speed filter press pump, a hydraulic cylinder and several dielectric sensors. The three-speed filter press pump and the hydraulic cylinder are connected. The output end of the hydraulic cylinder is connected to a clamping plate. Several dielectric sensors are fixedly installed in the filter chamber and are signal-connected to the three-speed filter press pump. The pressure is dynamically adjusted to match the sludge dewatering characteristics, thereby reducing energy consumption.

[0009] As a further improvement of this utility model, the telescopic mechanism includes a hydraulic motor, several guide rods and a synchronous gear set. The two ends of the several guide rods are respectively fixedly connected between the remaining adjacent filter plates. One end of the guide rod between the filter plates is fixedly connected to the synchronous gear set. The output end of the hydraulic motor is connected to the synchronous gear set. The guide rods are driven by the hydraulic motor to change the filter chamber spacing, improve the filter plate's resistance to eccentric load, shorten the dewatering cycle, and improve the filtration efficiency.

[0010] As a further improvement of this utility model, the pressing plate is provided with a water injection hole that penetrates the plate body. The water injection hole is connected to an external sewage pump through a water inlet pipe on the side of the frame. The side of the pressing plate near the filter plate is connected to each filter chamber to achieve uniform distribution of sewage. The pressing plate, filter plate and thrust plate together form a closed filtration channel. The thrust plate is connected to the water outlet hole that penetrates the plate body for discharging filtrate. The piston rod end of the hydraulic cylinder is provided with a pressure holding valve, which automatically locks and maintains the pressure after pressing. Only then is the hydraulic motor of the telescopic mechanism allowed to operate, avoiding pressure interference between the two systems.

[0011] As a further improvement of this utility model, the guide rod is set as a composite rod combining a threaded sleeve and a threaded rod. The threaded sleeve is fixedly connected to one side of the filter plate, and the threaded rod is rotatably connected to the corresponding side of the filter plate. One end of the guide rod between the filter plates is connected to a synchronous gear set. The synchronous gear set includes several pairs of meshing gears and a synchronous rod. The gears are fixed to the end of the threaded rod through a keyway. The gears meshing with the threaded rod are connected sequentially through the synchronous rod. The synchronous rod is initially connected to a hydraulic motor to provide power to the synchronous gear set, so that the threaded rod rotates synchronously. When the hydraulic motor rotates, all guide rods rotate synchronously to achieve equidistant translation between the filter plates.

[0012] As a further improvement of this utility model, a sealing ring is provided on the contact surface of the filter plate and the membrane plate, which generates radial deformation to achieve static sealing when pressed by the hydraulic drive mechanism; a sealing sleeve is provided on the guide rod, and dynamic sealing is maintained by the expansion and contraction deformation of the sealing sleeve when the filter chamber spacing is adjusted.

[0013] Compared with the prior art, the filter plate has the following beneficial effects: the working surface of the filter plate is provided with a concentric annular groove, a porous ceramic sheet is embedded in the annular groove, two-stage filtration is formed to improve the flux and the filtering precision, and thus the filtering efficiency is improved; the holes of the porous ceramic sheet are trapezoidal holes, deep layer blockage is avoided, and the particle retention efficiency is improved; the membrane plate is provided with a PTFE film, the service life of the film is prolonged, and the retention rate of suspended solids in the effluent is improved; a three-gear filter press pump and a dielectric sensor are arranged, the sludge dewatering characteristics are dynamically matched to adjust the pressure, and the energy consumption is reduced; and the telescopic mechanism is arranged to improve the anti-uniform load capacity of the filter plate and shorten the dewatering period, so that the filtering efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structural schematic view of the utility model;

[0015] Figure 2 It is a front view structural schematic view of the utility model;

[0016] Figure 3 It is an explosion schematic view of the filter plate and the membrane plate structure of the utility model;

[0017] Figure 4 It is a filter plate structure front view of the utility model;

[0018] Figure 5 It is a right view sectional view of the porous ceramic sheet of the utility model;

[0019] Figure 6 It is a front view sectional view of the utility model;

[0020] Figure 7 It is a filter plate connection relationship schematic view of the utility model;

[0021] Figure 8 It is a Figure 7 Area enlarged sectional view;

[0022] Figure 9 It is a telescopic mechanism structure schematic view of the utility model.

[0023] Mark explanation in the drawing:

[0024] Rack 1; Parallel guide rail 11; Filter plate 2; Annular groove 21; Porous ceramic sheet 22; Sealing ring 23; Membrane plate 3; Pressing plate 4; Water injection hole 41; Thrust plate 5; Water outlet 51; Hydraulic drive mechanism 6; Three-gear filter press pump 61; Hydraulic cylinder 62; Pressure maintaining valve 621; Dielectric sensor 63; Telescopic mechanism 7; Hydraulic motor 71; Guide rod 72; Synchronous gear set 73; Sealing sleeve 74; Filter chamber 8. DETAILED DESCRIPTION

[0025] Specific embodiment one: please refer to Figures 1-9The utility model relates to a kind of filter presses for polishing sewage treatment, including rack 1, several filter plates 2, membrane plate 3, compression plate 4, thrust plate 5, hydraulic drive mechanism 6 and telescopic mechanism 7, parallel guide 11 is equipped in the inside end of rack 1 two sides, compression plate 4 board face is fixedly connected with the filter plate 2 close to sewage input end, the two sides of several filter plates 2 and compression plate 4 are slidably connected with parallel guide 11, compression plate 4 one end is connected with hydraulic drive mechanism 6, membrane plate 3 is fixedly installed in filter plate 2 one side, filter plate 2 and membrane plate 3 are alternately arranged, clearance is formed filter chamber 8 between adjacent filter plate 2, thrust plate 5 board face is connected with the filter plate 2 away from one end of compression plate 4, and lower end is fixedly connected with rack 1, telescopic mechanism 7 is linked with each filter plate 2, the spacing of filter chamber 8 can be adjusted by telescopic mechanism 7;The working surface of filter plate 2 is equipped with annular groove 21, porous ceramic sheet 22 is embedded in annular groove 21, and double-stage filtration is formed to improve flux and filtering accuracy, to improve filtration efficiency.

[0026] Further embodiments, as shown in Figure 4 Annular groove 21 depth is 1mm.

[0027] Further embodiments, as shown in Figure 3 The hole of porous ceramic sheet 22 is trapezoidal hole, and the hole diameter decreases from 20 μm to 10 μm along the thickness direction, to avoid deep blockage, and improve particle retention efficiency.

[0028] Further embodiments, as shown in Figure 3 And Figure 5 Membrane plate 3 is provided with PTFE film, and the membrane hole diameter is not more than 2 μm, to prolong the service life of membrane, and improve the retention rate of suspended solids in effluent.

[0029] Further embodiments, as shown in Figures 2-3 Hydraulic drive mechanism 6 includes three-gear filter press pump 61, hydraulic cylinder 62 and several dielectric sensors 63, three-gear filter press pump 61 and hydraulic cylinder 62 are connected, hydraulic cylinder 62 output end is connected with compression plate 4, several dielectric sensors 63 are fixedly installed in filter chamber 8, and dielectric sensor 63 and three-gear filter press pump 61 are signal connected, to dynamically match sludge dewatering characteristics to adjust pressure, to reduce energy consumption.

[0030] Further embodiments, Figures 7-9As shown, the telescopic mechanism 7 includes several guide rods 72 and synchronous gear sets 73. The two ends of the guide rods 72 are fixedly connected between the adjacent filter plates 2, respectively. The guide rods 72 are composite rods combined by threaded sleeves and threaded rods. The threaded sleeves are fixedly connected to one side of the filter plates 2, and the threaded rods are rotatably connected to the corresponding side of the filter plates 2. The one end of the guide rods 72 between the filter plates 2 is equipped with the synchronous gear sets 73. The synchronous gear sets 73 include several pairs of meshing gears and synchronous rods. The gears are fixedly connected to the ends of the threaded rods through key grooves. The gears meshing with each other are sequentially connected through the synchronous rods. The synchronous rods are initially connected with the hydraulic motor 71 to provide power for the synchronous gear sets 73, so that the threaded rods are synchronously rotated. The guide rods 72 are driven by the hydraulic motor 71 to change the distance between the filter chambers 8, improve the anti-unbalanced load capacity of the filter plates 2, shorten the dehydration period, and improve the filtration efficiency. The end of the piston rod of the hydraulic cylinder 62 is provided with a pressure maintaining valve 621. After being pressed, the pressure is automatically locked and maintained. At this time, the hydraulic motor 71 of the telescopic mechanism 7 is allowed to act, avoiding the interference of the pressure of the two systems.

[0031] In further embodiments, as shown in Figure 6 The pressing plate 4 is provided with a water injection hole 41 penetrating the plate body. The water injection hole 41 is connected with an external sewage pump. The side of the pressing plate 4 close to the filter plate 2 is communicated with each filter chamber 8, realizing uniform distribution of sewage. The pressing plate 4, the filter plate 2 and the thrust plate 5 jointly constitute a closed filter channel. The thrust plate 5 is connected with a water outlet hole 51 penetrating the plate body, for discharging filtrate.

[0032] In further embodiments, as shown in Figure 3 and Figure 8 The contact surface of the filter plate 2 and the membrane plate 3 is provided with a sealing ring 23. When the hydraulic driving mechanism 6 is pressed, the sealing ring 23 is radially deformed to realize static sealing. The guide rod 72 is provided with a sealing sleeve. When the distance between the filter chambers 8 is adjusted, the sealing sleeve 74 is deformed to maintain dynamic sealing.

[0033] In use, the three-stage filter press pump 61 is started, the hydraulic cylinder 62 is pushed to move the pressing plate 4 along the parallel guide rail 11 to the thrust plate 5, the filter plate 2 and the membrane plate 3 arranged alternately are pressed, and the dielectric sensor 63 monitors the dielectric constant of the sludge in the filter chamber 8 in real time. Feedback signal to the filter press pump 61 to dynamically adjust the pressing force, sewage is injected into the filter chamber 8 from the end of the pressing plate 4, after passing through the porous ceramic sheet 22 embedded in the annular groove 21, the sewage continues to penetrate the PTFE coating of the membrane plate 3, further retaining fine suspended solids, and the pressing plate 4 is automatically locked and maintained by the pressure maintaining valve 621 after pressing. The hydraulic motor 71 of the telescopic mechanism 7 is started and drives the guide rod 72 to fine-tune the spacing of the filter chambers 8, the dielectric sensor 63 detects the initial moisture content of the sludge, the three-stage filter press pump 61 applies low pressure to make water quickly pass through the porous ceramic sheet 22, as the dewatering resistance of the sludge increases, the three-stage filter press pump 61 automatically upgrades, the PTFE coating of the membrane plate 3 bears high pressure extrusion, and the bound water is deeply removed. After dewatering, the hydraulic motor 71 reverses the guide rod 72 to expand the spacing of the filter chambers 8, and the hydraulic drive mechanism 6 releases the pressing plate 4, and the filter cake is automatically removed.

Claims

1. A filter press for polishing wastewater treatment, characterized in that: The machine includes a frame (1), several filter plates (2), a membrane plate (3), a pressing plate (4), a thrust plate (5), a hydraulic drive mechanism (6), and a telescopic mechanism (7). Parallel guide rails (11) are provided on the inner ends of both sides of the frame (1). The surface of the pressing plate (4) is fixedly connected to the outermost filter plate (2). The sides of the several filter plates (2) and the pressing plate (4) are slidably connected to the parallel guide rails (11). One end of the pressing plate (4) is connected to the hydraulic drive mechanism (6). The membrane plate... (3) Fixedly installed on one side of filter plate (2), filter plate (2) and membrane plate (3) are arranged alternately, and the gap between adjacent filter plates (2) forms filter chamber (8). The surface of the thrust plate (5) is connected to the filter plate (2) at the end away from the pressure plate (4), and the lower end is fixedly connected to the frame (1). The telescopic mechanism (7) is linked to each filter plate (2). The working surface of the filter plate (2) is provided with an annular groove (21), and a porous ceramic sheet (22) is embedded in the annular groove (21).

2. The filter press for polishing wastewater treatment according to claim 1, characterized in that: The depth of the annular groove (21) is 0.5-1mm.

3. A filter press for polishing wastewater treatment according to claim 1, characterized in that: The holes in the porous ceramic sheet (22) are designed as trapezoidal holes.

4. A filter press for polishing wastewater treatment according to claim 3, characterized in that: The pore size of the porous ceramic sheet (22) decreases from 20 μm to 10 μm along the thickness direction.

5. A filter press for polishing wastewater treatment according to claim 1, characterized in that: The membrane plate (3) is covered with PTFE membrane, and the diameter of the membrane pores is no greater than 2μm.

6. A filter press for polishing wastewater treatment according to claim 1, characterized in that: The hydraulic drive mechanism (6) includes a three-speed filter press pump (61), a hydraulic cylinder (62) and several dielectric sensors (63). The three-speed filter press pump (61) and the hydraulic cylinder (62) are connected. The output end of the hydraulic cylinder (62) is connected to the clamping plate (4). Several dielectric sensors (63) are fixedly installed in the filter chamber (8) and the dielectric sensors (63) are connected to the three-speed filter press pump (61) via signal connection.

7. A filter press for polishing wastewater treatment according to claim 1, characterized in that: The telescopic mechanism (7) includes a hydraulic motor (71), several guide rods (72) and a synchronous gear set (73). The two ends of the several guide rods (72) are respectively fixedly connected between the other adjacent filter plates (2). One end of the guide rod (72) between the filter plates (2) is fixedly connected to the synchronous gear set (73). The output end of the hydraulic motor (71) is connected to the synchronous gear set (73).