Ultrathin substrate positioning table

Abstract

The utility model discloses an ultrathin substrate positioning table, and relates to the technical field of positioning tables. The device comprises a bottom plate, a first motor, a first stroke plate, a second stroke plate, a second motor and an air pump, the first stroke plate and the second stroke plate are arranged above the bottom plate, the first motor is arranged at the upper end of the first stroke plate, a rotating shaft is arranged at the output end of the first motor, a rectangular cylinder is arranged at one end of the rotating shaft, a linkage rod is arranged above the stroke plates, and the linkage rod is connected with the motor. A rectangular rod is arranged on the linkage rod, a screw rod is arranged above the first stroke plate and the second stroke plate, nuts are installed on the outer wall of the screw rod in a threaded and sleeving mode, supporting cylinders are arranged at the upper ends of the nuts, adsorption holes are formed in the upper ends of the supporting cylinders, and an air pump is arranged at the upper end of the bottom plate. According to the utility model, the support cylinders which can be linked pairwise, can move relatively and reciprocally and transmit suction force through the adsorption holes are arranged, so that the ultrathin substrates with different specifications can be adsorbed and positioned, and the positioning table is flexible to use and the adaptability is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to positioning platform technical field, especially to super thin baseplate positioning platform. BACKGROUND

[0002] The super thin baseplate positioning platform is a high-precision work platform, which is specially used for fixing, aligning and processing super thin baseplate materials such as semiconductor wafers, flexible circuit boards, glass panels and ceramic substrates.

[0003] The super thin baseplate is fixed flat by vacuum adsorption, electrostatic adsorption or mechanical clamps to avoid bending or vibration. When the vacuum adsorption is used, the bottom of the super thin baseplate material is quickly positioned. However, when the adsorption hole distribution on the adsorption platform cannot be covered by the super thin baseplate material during use, the adsorption hole outside will supplement the pressure inside the negative pressure structure, affecting the use stability of the adsorption structure. Therefore, the technical personnel in the art provide an oyster peptide processing and separating device to solve the problems in the above background technology. SUMMARY

[0004] 1. Technical solution

[0005] To solve the above technical problems, the utility model is realized by the following technical scheme:

[0006] The utility model discloses a super thin baseplate positioning platform, which comprises a bottom plate, a motor one, a stroke plate one, a stroke plate two, a motor two and a gas pump, the bottom plate is provided with the stroke plate one and the stroke plate two above, the stroke plate one is provided with the motor one on the upper end, the motor one is provided with a rotating shaft at the output end, one end of the rotating shaft is provided with a rectangular cylinder, the stroke plate is provided with a linkage rod above, the linkage rod is provided with a rectangular rod slidingly installed in the rectangular cylinder, the stroke plate one and the stroke plate two are provided with screw rods with opposite distribution of outer wall threads above, the screw rod is provided with a nut in a sleeved manner, the nut is provided with a supporting cylinder on the upper end, the supporting cylinder is provided with equidistantly distributed adsorption holes in the inner upper end, the bottom plate is provided with the gas pump on the upper end, the gas pump is provided with a mounting pipe on the suction end, the mounting pipe is communicated with the supporting cylinder through a hose.

[0007] Further, the stroke plate one and the stroke plate two are provided with sliding seats on the upper ends, and the nut is provided with a sliding block slidingly installed in the sliding seat on the lower end.

[0008] Specifically, the nut is slidingly supported by the sliding block in the sliding seat on the lower end.

[0009] Further, one end of the screw is provided with a bevel gear two, outer walls of the rotating shaft and the linkage shaft are provided with bevel gear one engaged with the bevel gear two, and outer walls of the linkage shaft and the driving shaft are sleeved with electromagnetic brake;

[0010] Specifically, because the bevel gear one is engaged with the bevel gear two, when the rotating shaft and the linkage shaft rotate, the rotating force is transmitted to the screw by driving the bevel gear one to rotate and driving the bevel gear two to rotate, and the linkage shaft and the driving shaft are locked and fixed through the electromagnetic brake.

[0011] Further, upper ends of the stroke plate one and the stroke plate two are provided with bearing bracket two, and the rotating shaft and the linkage shaft are rotatably installed in the bearing bracket two;

[0012] Specifically, the rotating shaft and the linkage shaft are rotatably supported by rotating in the bearing bracket two.

[0013] Further, upper ends of the stroke plate one and the stroke plate two are provided with bearing bracket three distributed symmetrically, both ends of the screw are rotatably installed in the bearing bracket three, and the stroke plate one and the stroke plate two are embedded with sliding sleeve distributed symmetrically, and the bottom plate is provided with guide rod distributed symmetrically and slidingly installed in the sliding sleeve.

[0014] Specifically, the screw is rotatably supported by the bearing bracket three, and the stroke plate one and the stroke plate two are slidingly guided in the horizontal direction by the sliding sleeve sliding on the outer wall of the guide rod.

[0015] Further, the lower end of the stroke plate one is provided with tooth plate one distributed symmetrically, the lower end of the stroke plate two is provided with tooth plate two distributed symmetrically, the upper end of the bottom plate is provided with motor two and bearing bracket one distributed symmetrically, the output end of the motor two is provided with driving shaft rotatably installed in the bearing bracket one, the outer wall of the driving shaft is sleeved with gear body engaged with the tooth plate one and the tooth plate two, and the tooth plate one and the tooth plate two are oppositely distributed and located on the upper side and the lower side of the gear body.

[0016] Specifically, the gear body rotates to push the tooth plate one and the tooth plate two oppositely or in the opposite direction, the pushing force drives the stroke plate one and the stroke plate two to move oppositely or in the opposite direction through the tooth plate one and the tooth plate two, and the driving shaft is rotatably supported by the bearing bracket one.

[0017] 2. Beneficial effects

[0018] Compared with the prior art, the utility model has the advantages that:

[0019] In this invention, stroke plate one and stroke plate two, together with two sets of symmetrically distributed support cylinders, form a support and positioning platform for an ultra-thin substrate. The support cylinders in the same group move back and forth relative to each other or away from each other via nuts. When the motor drives the rotating shaft to rotate, it is slidably installed through rectangular cylinders and rectangular rods to achieve synchronous rotation of the rotating shaft and the linkage shaft. The sliding connector acts as a coupling for lateral movement. Stroke plate one and stroke plate two achieve lateral movement relative to each other and away from each other, allowing for adjustment of the positions of the two sets of support cylinders. The suction force of the negative pressure pump enters the support cylinder through the installation pipe and hose, and is adsorbed at the four lower corners of the ultra-thin substrate through the suction holes. This adapts to the specifications of the ultra-thin substrate for convenient and flexible adsorption and positioning, thus improving the flexibility of the positioning results of the ultra-thin substrate.

[0020] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a top view of the three-dimensional structure of the present invention;

[0023] Figure 2 This is a rear-view three-dimensional structural diagram of the present invention;

[0024] Figure 3 This is a top-view three-dimensional structural diagram of the air pump of this utility model;

[0025] Figure 4 This is a top-view three-dimensional structural diagram of the slide block of this utility model;

[0026] Figure 5 This is a top-view three-dimensional structural diagram of the gear body of this utility model.

[0027] The attached diagram lists the components represented by each number as follows:

[0028] 1, bottom plate; 2, sliding sleeve; 3, motor one; 4, stroke plate one; 5, rectangular cylinder; 6, rectangular rod; 7, linkage shaft; 8, electromagnetic brake; 9, stroke plate two; 10, screw rod; 11, mounting pipe; 12, gear body; 13, support cylinder; 14, guide rod; 15, toothed plate one; 16, motor two; 17, toothed plate two; 18, bevel gear two; 19, slide; 20, bearing support one; 21, bearing support two; 22, rotating shaft; 23, air pump; 24, drive shaft; 25, adsorption hole; 26, bearing support three; 27, sliding block; 28, nut; 29, bevel gear two. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned purposes, features and advantages of the present application more apparent and understandable, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0030] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in other ways that are not exactly as described in the present disclosure, and those skilled in the art can make similar extensions without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0031] Secondly, the present application is described in detail in combination with the schematic diagram. In the detailed description of the embodiments of the present application, the cross-sectional view of the device structure will be partially enlarged without the general proportion for the convenience of description, and the schematic diagram is only an example, which should not limit the scope of protection of the present application. In addition, the three-dimensional spatial dimensions including length, width and depth should be included in the actual manufacture.

[0032] In order to make the purposes, technical solutions and advantages of the present application more clear, the embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0033] Example 1

[0034] Please refer to Figures 1-5As shown, the embodiment is an ultra-thin substrate positioning table, which comprises a bottom plate 1, a motor 3, a stroke plate 4, a stroke plate 9, a motor 16 and a gas pump 23. The bottom plate 1 is provided with the stroke plate 4 and the stroke plate 9 above. The stroke plate 4 is provided with the motor 3 at the upper end. The motor 3 is provided with a rotating shaft 22 at the output end. The rotating shaft 22 is provided with a rectangular cylinder 5 at one end. The stroke plate is provided with a linkage rod above. The linkage rod is provided with a rectangular rod 6 slidingly installed in the rectangular cylinder 5. The stroke plate 4 and the stroke plate 9 are both provided with screw rods 10 with opposite distribution of outer wall threads above. The screw rods 10 are provided with nuts 28 with sleeve joint installation. The nuts 28 are both provided with support cylinders 13 at the upper end. The support cylinders 13 are both provided with adsorption holes 25 with equidistant distribution inside the upper end. The bottom plate 1 is provided with the gas pump 23 at the upper end. The gas pump 23 is provided with an installation pipe 11 at the suction end. The installation pipe 11 is communicated with the support cylinder 13 through a hose.

[0035] The stroke plate 4 and the stroke plate 9 are both provided with sliding seats 19 at the upper end. The nuts 28 are provided with sliding blocks 27 slidingly installed in the sliding seats 19.

[0036] The screw rods 10 are provided with conical gears 2 at one end. The rotating shaft 22 and the linkage shaft 7 are both provided with conical gears 1 engaging with the conical gears 2. The linkage shaft 7 and the drive shaft 24 are both provided with electromagnetic brake 8.

[0037] The stroke plate 4 and the stroke plate 9 are both provided with bearing supports 2 at the upper end. The rotating shaft 22 and the linkage shaft 7 are both rotatingly installed in the bearing supports 2.

[0038] The stroke plate 4 and the stroke plate 9 are both provided with bearing supports 3 symmetrically distributed at the upper end. The screw rods 10 are both rotatingly installed in the bearing supports 3. The stroke plate 4 and the stroke plate 9 are both embedded with sliding sleeves 2 symmetrically distributed inside. The bottom plate 1 is provided with guide rods 14 symmetrically distributed and slidingly installed in the sliding sleeves 2.

[0039] The stroke plate 4 is provided with tooth plates 1 symmetrically distributed at the lower end. The stroke plate 9 is provided with tooth plates 2 symmetrically distributed at the lower end. The bottom plate 1 is provided with a motor 16 and bearing supports 1 symmetrically distributed at the upper end. The motor 16 is provided with a drive shaft 24 rotatingly installed in the bearing supports 1 at the output end. The drive shaft 24 is provided with a gear body 12 engaging with the tooth plates 1 and the tooth plates 2. The tooth plates 1 and the tooth plates 2 are oppositely distributed and located above and below the gear body 12.

[0040] In this embodiment, the ultra-thin substrate is placed on the positioning table composed of the support cylinder 13, the suction holes 25 opened at the upper end of the support cylinder 13 are communicated with the air pump 23 through the hose, and after the air pump 23 is started, the negative pressure adsorption force acts on the bottom of the substrate through the suction holes 25 to achieve preliminary fixation. At this time, if the substrate size is small or irregular, the uncovered suction holes 25 will cause negative pressure leakage, affecting the adsorption stability.

[0041] By driving the gear body 12 to rotate through the motor 2 16, the meshing tooth plate 1 5 and the tooth plate 2 17 are engaged to drive the travel plate 1 4 and the travel plate 2 9 to move away from or towards each other, thereby adjusting the lateral spacing of the two groups of support cylinders 13. At the same time, the motor 1 3 drives the screw nut 28 to slide along the slide 19 through the transmission of the shaft 22, the bevel gear set and the screw 10, so that the support cylinders 13 in the same group are synchronized to move closer or farther away, further adapting to the length and width dimensions of the substrate. During this process, the sliding connection between the rectangular cylinder 5 and the rectangular rod 6 ensures that the shaft 22 and the linkage shaft 7 can still rotate synchronously when they are displaced laterally, maintaining the continuity of power transmission.

[0042] After the support cylinder 13 moves to the four corners of the substrate, the negative pressure adsorption force of the air pump 23 is concentrated on the area of the substrate effectively covered by the suction holes 25 through the hose, avoiding leakage of the peripheral holes. The equidistant suction holes 25 of the support cylinder 13 ensure uniform distribution of negative pressure. After positioning is completed, the substrate is in a horizontal and stable state, and high-precision operations such as photolithography, cutting and coating can be performed to avoid mechanical deviation.

[0043] By covering the effective area of the substrate with the adjustable support cylinder 13, the problem of negative pressure leakage caused by the exposure of the suction holes 25 in traditional fixed tables is solved, and the adsorption efficiency and stability are improved. The motor 1 3 and the motor 2 16 are cooperatively controlled to realize synchronous adjustment of the support cylinder 13 in the lateral and longitudinal directions, adapt to different specifications of the substrate, and have significantly better flexibility than the fixed adsorption table. The bevel gear set composed of the bevel gear 1 8 and the bevel gear 2 29 and the sliding fit structure of the rectangular rod 6 and the rectangular cylinder 5 maintain power synchronization during displacement. By dynamically adjusting the adsorption area, negative pressure leakage is eliminated, especially for small size or irregular shaped substrates. Modular design supports rapid adjustment, reduces changeover time and manual intervention, and integrates negative pressure adsorption and mechanical adjustment. It not only solves the problem of negative pressure stability in the fixation of ultra-thin substrates, but also realizes the positioning requirements of high precision and high flexibility. It is suitable for high-end manufacturing fields such as semiconductors and display panels, and significantly improves the production versatility.

[0044] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term "arrangement", "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can indirectly connect through the intermediate medium, can be two elements inside the communication.For ordinary skilled in the art, can understand the specific meaning of the above terms in the utility model according to specific circumstances.

[0045] Finally, it should be noted that: the above only for the preferred embodiments of the utility model, and is not used to limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing embodiments, or equivalent replacement for part of the technical features.For any modification, equivalent replacement, improvement, etc.in the spirit and principles of the utility model, should be included in the protection scope of the utility model.

Claims

1. An ultra-thin substrate positioning stage, characterized in that: The system includes a base plate (1), a first motor (3), a first stroke plate (4), a second stroke plate (9), a second motor (16), and an air pump (23). The first stroke plate (4) and the second stroke plate (9) are arranged above the base plate (1). The first motor (3) is arranged at the upper end of the first stroke plate (4). The output end of the first motor (3) is provided with a rotating shaft (22). A rectangular tube (5) is provided at one end of the rotating shaft (22). A linkage rod is arranged above the stroke plate. The linkage rod is provided with a rectangular rod (6) that is slidably installed inside the rectangular tube (5). Both the first stroke plate (4) and the second stroke plate (9) are provided with screws (10) with relatively distributed outer wall threads. Nuts (28) are installed on the outer wall threads of the screws (10). Support cylinders (13) are provided on the upper end of the nuts (28). Adsorption holes (25) are evenly distributed inside the upper end of the support cylinders (13). An air pump (23) is provided on the upper end of the base plate (1). An installation pipe (11) is provided on the suction end of the air pump (23). The installation pipe (11) is connected to the support cylinder (13) by a flexible hose.

2. The ultrathin substrate positioning stage according to claim 1, characterized in that: Both the first stroke plate (4) and the second stroke plate (9) are provided with slide blocks (19) at their upper ends, and the lower end of the nut (28) is provided with a slider (27) that is slidably installed inside the slide block (19).

3. The ultrathin substrate positioning stage according to claim 1, characterized in that: One end of the screw (10) is provided with a bevel gear two (18), and the outer walls of the rotating shaft (22) and the linkage shaft (7) are provided with bevel gear one (29) that meshes with bevel gear two (18). The outer walls of the linkage shaft (7) and the drive shaft (24) are both fitted with electromagnetic brakes (8).

4. The ultrathin substrate positioning stage according to claim 1, characterized in that: Both the first stroke plate (4) and the second stroke plate (9) are provided with a bearing bracket (21) at their upper ends, and the rotating shaft (22) and the linkage shaft (7) are rotatably installed inside the bearing bracket (21).

5. The ultrathin substrate positioning stage according to claim 1, characterized in that: Both the first stroke plate (4) and the second stroke plate (9) are provided with symmetrically distributed bearing brackets (26) at their upper ends. Both ends of the screw (10) are rotatably installed inside the bearing brackets (26). Both the first stroke plate (4) and the second stroke plate (9) are embedded with symmetrically distributed sliding sleeves (2). The upper end of the base plate (1) is provided with symmetrically distributed guide rods (14) that are slidably installed inside the sliding sleeves (2).

6. The ultrathin substrate positioning stage according to claim 1, characterized in that: The lower end of the first stroke plate (4) is provided with symmetrically distributed toothed plates (15), the lower end of the second stroke plate (9) is provided with symmetrically distributed toothed plates (17), the upper end of the base plate (1) is provided with a motor (16) and symmetrically distributed bearing brackets (20), the output end of the second motor (16) is provided with a drive shaft (24) rotatably installed inside the bearing bracket (20), the outer wall of the drive shaft (24) is sleeved with a gear body (12) that meshes with the toothed plates (15) and the toothed plates (17), the toothed plates (15) and the toothed plates (17) are distributed opposite to each other and are located on the upper and lower sides of the gear body (12).

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