Pure titanium high-purity electronic material storage tank

Abstract

The utility model provides a pure titanium high-purity electronic material storage tank, which relates to the technical field of electronic material storage and comprises a storage tank, the storage tank is divided into an outer tank and an inner tank, the inner tank is in threaded connection with the outer tank, a suspension support is arranged in the inner tank, and a plurality of layers of sealing rings are arranged at the top ends of the outer tank and the inner tank. A supporting frame is installed on the outer wall of the storage tank, a humidity sensor is arranged at the bottom end of the storage tank, and the sensing end of the humidity sensor extends into the storage tank to be connected. The multi-layer sealing ring design is adopted and comprises the metal sealing ring, the fluororubber sealing ring and the polytetrafluoroethylene sealing ring, multiple sealing barriers are formed, the sealing failure caused by aging or abrasion of the sealing rings can be effectively prevented through the multi-layer sealing ring design, external air is thoroughly isolated from entering the tank body, material oxidation or pollution is avoided, and the service life of the tank body is prolonged. The long-term sealing performance of the tank body is obviously improved, and the material purity and performance stability are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to electronic material storage technical field especially relates to a pure titanium high purity electronic material storage jar. BACKGROUND

[0002] Pure titanium high purity electronic materials (such as high purity titanium target material, titanium foil, titanium powder, etc.) are widely used in the fields of semiconductor, aerospace, medical equipment, etc. These materials have extremely harsh requirements for storage environment, and any slight pollution, oxidation or physical damage can lead to performance degradation, even failure. Therefore, the design of the storage jar is crucial.

[0003] In the current application environment, there are still many problems in the design of the jar for storing high purity electronic materials, especially pure titanium high purity electronic materials. First, the single-layer sealing structure is a common solution in the industry, but in actual use, sealing failure caused by aging or wear is relatively common, which makes it possible for external air to enter the inside of the jar, thereby accelerating the oxidation of the material or introducing impurities, which will adversely affect the purity and performance of the material. Secondly, for external shock protection, although foam pads or other cushioning materials can absorb part of the shock, due to the effect of high frequency or strong impact, this protection measure is often not sufficient enough, which may cause damage to the internal structure of the high purity titanium material in the jar, thereby affecting the performance of the material. Therefore, we propose a pure titanium high purity electronic material storage jar. SUMMARY

[0004] The utility model discloses a pure titanium high purity electronic material storage jar, which solves the problems of single-layer sealing structure, aging or wear leading to sealing failure, external air entering the inside of the jar, accelerating the oxidation of the material or introducing impurities, and the like.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A pure titanium high purity electronic material storage jar, comprising a storage jar, the storage jar is divided into an outer jar and an inner jar, the inner jar is threadedly connected to the outer jar, a suspension bracket is arranged in the inner jar, a plurality of sealing rings are arranged at the top ends of the outer jar and the inner jar, a support frame is installed on the outer wall of the storage jar, a humidity sensor is arranged at the bottom end of the storage jar, and the sensing end of the humidity sensor extends into the storage jar.

[0007] Further, the outer tank bottom end is provided with a threaded block, the inner tank bottom end is provided with a threaded groove, and the threaded block and the threaded groove are matched with each other.

[0008] Further, the inner tank bottom end is provided with a threaded block, the inner tank bottom end is provided with a threaded groove, and the threaded block and the threaded groove are matched with each other.

[0009] Further, the suspension bracket and the inner tank are provided with a limiting block, the limiting block is made of silica gel, and the distance between the suspension bracket and the limiting block is 1mm-2mm.

[0010] Further, the limiting block is higher than the suspension bracket.

[0011] Further, the outer tank and the inner tank are filled with inert gas, the distance between the outer tank and the inner tank is equal to the width of the fluorine rubber sealing ring, and the diameter of the polytetrafluoroethylene sealing ring is equal to the diameter of the inner tank.

[0012] Further, the outer tank and the inner tank are filled with inert gas, the distance between the outer tank and the inner tank is equal to the width of the fluorine rubber sealing ring, and the diameter of the polytetrafluoroethylene sealing ring is equal to the diameter of the inner tank.

[0013] Further, the outer tank is made of high-strength composite material, the inner tank is made of high-purity titanium material, and the suspension bracket is made of high-strength lightweight material.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model discloses a multilayer sealing ring design, including metal sealing ring, fluorine rubber sealing ring and polytetrafluoroethylene sealing ring, forms multiple sealed barriers, and multilayer sealing ring design can effectively prevent the sealing failure caused by aging or abrasion of the sealing ring, completely isolates the external air from entering the tank body, avoids material oxidation or pollution, significantly improves the long-term sealing performance of the tank body, and ensures material purity and performance stability.

[0016] 2. The inner tank bottom is provided with a gas pressure damper and a spring shock absorber, combined with a suspension bracket and a limiting block, to form a high-efficiency shockproof system. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 The utility model provides a whole structure schematic view of a pure titanium high-purity electronic material storage tank body.

[0018] Figure 2 A schematic diagram showing the connection between the outer and inner tanks of a pure titanium high-purity electronic material storage container provided by this utility model;

[0019] Figure 3 A schematic diagram of a suspension support structure for a storage tank for high-purity pure titanium electronic materials provided by this utility model;

[0020] Figure 4 A schematic diagram of a multi-layer sealing ring structure for a storage tank for high-purity pure titanium electronic materials provided by this utility model.

[0021] Legend: 1. Storage tank; 2. Outer tank; 3. Inner tank; 4. Multi-layer sealing ring; 101. Support; 301. Suspension support; 302. Air pressure damper; 303. Spring shock absorber; 304. Limiting block; 401. Metal sealing ring; 402. Fluororubber sealing ring; 403. Polytetrafluoroethylene sealing ring. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0023] To facilitate understanding of this utility model, a more comprehensive description of this utility model will be provided below with reference to relevant embodiments, and several embodiments of this utility model will be given. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of this utility model more thorough and complete.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] Embodiment 1

[0027] As Figure 1-4 shown, the utility model provides a technical scheme: a kind of pure titanium high-purity electronic material storage tank, including storage tank 1, storage tank 1 is divided into outer tank 2 and inner tank 3, inner tank 3 is threadedly connected on outer tank 2, suspension bracket 301 is provided in inner tank 3, material container is placed on the suspension bracket 301, external vibration is effectively absorbed, the top of outer tank 2 and inner tank 3 is provided with multilayer sealing ring 4, multilayer sealing ring 4 significantly improves the tank body tightness, reduces material oxidation and pollution risk.The outer wall of storage tank 1 is equipped with support frame 101, the bottom of storage tank 1 is provided with humidity sensor, and the sensing end of humidity sensor extends into storage tank 1 and is connected, the humidity in tank is monitored in real time, and humidity sensor provides real-time humidity data, so as to adjust the environment in tank in time.

[0028] Embodiment 2

[0029] As Figure 1-4 shown, the bottom end of outer tank 2 is provided with threaded block, the bottom end of inner tank 3 is provided with threaded groove, and the threaded block and the threaded groove are matched with each other, the inner tank 3 can be separately detached, so as to facilitate complete cleaning and maintenance, reduce damage to the inner wall of the tank during cleaning, avoid secondary pollution, inert gas is filled between the outer tank 2 and the inner tank 3, the inert gas isolates oxygen and moisture, prevents material oxidation and moisture, improves the overall sealing performance and environmental stability of the tank, the spacing between the outer tank 2 and the inner tank 3 is equal to the width of the fluorine rubber sealing ring 402, the diameter of the polytetrafluoroethylene sealing ring 403 is equal to the diameter of the inner tank 3, the outer tank 2 is made of high-strength composite material, the inner tank 3 is made of high-purity titanium material, the suspension bracket 301 is made of high-strength lightweight material, the inner tank 3 is compatible with high-purity titanium material, to avoid introducing impurities, the outer tank 2 provides mechanical protection, while reducing the overall weight, the suspension bracket 301 is designed to be lightweight, reducing the burden on the shockproof system.

[0030] The bottom end of the inner tank 3 is provided with an air pressure damper 302, a plurality of spring shock absorbers 303 are arranged equidistantly around the air pressure damper 302, the spring shock absorbers 303 and the air pressure damper 302 cooperate to absorb external vibration energy and reduce vibration transmitted to the material, the top end of the air pressure damper 302 and the spring shock absorber 303 is provided with a suspension bracket 301, a limiting block 304 is installed between the suspension bracket 301 and the inner tank 3, the limiting block 304 is made of silica gel, the spacing between the suspension bracket 301 and the limiting block 304 is 1mm-2mm, the height of the limiting block 304 is greater than the height of the suspension bracket 301, which significantly reduces the damage of high-frequency or strong impact to the internal structure of the material, and ensures the integrity of the material.

[0031] The bottom of the multi-layer sealing ring 4 is provided with a metal sealing ring 401, the top end of the metal sealing ring 401 is provided with a fluorine rubber sealing ring 402, and the fluorine rubber sealing ring 402 is internally provided with a polytetrafluoroethylene sealing ring 403, the multi-layer sealing ring 4 significantly improves the long-term sealing performance of the tank body, and ensures material purity and stable performance.

[0032] The utility model discloses a work flow: when using a kind of pure titanium high-purity electronic material storage tank body, first, high-purity titanium material is placed in the material container in inner tank 3, and the material container is placed on the suspension support 301, and the inner tank 3 is fixed on the outer tank 2 by screw connection, to ensure that the inner tank 3 is tightly combined with the outer tank 2.

[0033] The sensing end of the humidity sensor extends to the inside of the storage tank 1, and the humidity in the tank is monitored in real time, and when the humidity sensor detects that the humidity exceeds the set threshold, the humidity can be reduced by adjusting the inert gas flow, to ensure that the tank is always in an ultra-low humidity state, to prevent high-purity titanium material from being damp or oxidized.

[0034] During transportation or handling of the storage tank 1, external vibration is first transmitted to the outer tank 2, and the spring shock absorber 303 and the air pressure damper 302 work together to absorb vibration energy and reduce vibration transmitted to the suspension support 301, and the suspension support 301 is limited in displacement by the limiting block 304 to prevent the material container from colliding with the inner tank 3.

[0035] When cleaning or maintenance is required, the inner tank 3 is detached from the outer tank 2 by screw connection, and the inner tank 3 and the inner wall are cleaned separately to avoid secondary pollution, and after cleaning is completed, the inner tank 3 is reinstalled and filled with inert gas to restore the sealing performance and environmental stability of the tank body.

[0036] Although embodiments of the utility model have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A storage container for high-purity titanium electronic materials, comprising a storage container (1), characterized in that: The storage tank (1) is divided into an outer tank (2) and an inner tank (3). The inner tank (3) is threadedly connected to the outer tank (2). A suspension bracket (301) is provided inside the inner tank (3). A multi-layer sealing ring (4) is provided at the top of the outer tank (2) and the inner tank (3). A support frame (101) is installed on the outer wall of the storage tank (1). A humidity sensor is provided at the bottom of the storage tank (1), and the sensing end of the humidity sensor extends into the storage tank (1).

2. The pure titanium high-purity electronic material storage container according to claim 1, characterized in that: The bottom of the outer can (2) is provided with a threaded block, and the bottom of the inner can (3) is provided with a threaded groove, and the threaded block and the threaded groove fit together.

3. The pure titanium high-purity electronic material storage container according to claim 1, characterized in that: A pneumatic damper (302) is installed at the bottom of the inner tank (3). Several spring dampers (303) are installed at equal intervals around the pneumatic damper (302). A suspension bracket (301) is installed at the top of the pneumatic damper (302) and the spring dampers (303).

4. The pure titanium high-purity electronic material storage container according to claim 1, characterized in that: A limiting block (304) is installed between the suspension bracket (301) and the inner tank (3). The limiting block (304) is made of silicone, and the distance between the suspension bracket (301) and the limiting block (304) is 1mm-2mm.

5. The pure titanium high-purity electronic material storage container according to claim 4, characterized in that: The height of the limiting block (304) is greater than the height of the suspension bracket (301).

6. The pure titanium high-purity electronic material storage container according to claim 1, characterized in that: The bottom of the multilayer sealing ring (4) is provided with a metal sealing ring (401), and a fluororubber sealing ring (402) is installed at the top of the metal sealing ring (401). A polytetrafluoroethylene sealing ring (403) is installed inside the fluororubber sealing ring (402).

7. The pure titanium high-purity electronic material storage container according to claim 6, characterized in that: The space between the outer tank (2) and the inner tank (3) is filled with an inert gas. The distance between the outer tank (2) and the inner tank (3) is equal to the width of the fluororubber sealing ring (402). The diameter of the polytetrafluoroethylene sealing ring (403) is equal to the diameter of the inner tank (3).

8. The pure titanium high-purity electronic material storage container according to claim 1, characterized in that: The outer tank (2) is made of high-strength composite material, the inner tank (3) is made of high-purity titanium material, and the suspension support (301) is made of high-strength lightweight material.

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