Lens device and exposure equipment

Abstract

The utility model discloses a lens device, and belongs to the technical field of exposure. The lens device comprises a collimating mirror assembly, a reflecting mirror assembly, a DMD assembly and a lens assembly, the collimating mirror assembly is assembled on the reflecting mirror assembly, the DMD assembly is assembled on the reflecting mirror assembly and can rotate relative to the reflecting mirror assembly, the lens assembly is assembled on the reflecting mirror assembly, and laser enters the reflecting mirror assembly after being processed by the collimating mirror assembly; and the light is reflected to the DMD assembly through the reflector assembly, is reflected to the lens assembly after being processed by the DMD assembly and is output after being processed by the lens assembly, and finally light spots can be output. The utility model further discloses exposure equipment which comprises the lens device. According to the utility model, the DMD assembly rotates relative to the reflection box so as to realize the adjustment of the light spot angle, and the device has the advantages of easy and convenient operation and the like.

Description

TECHNICAL FIELD

[0001] The utility model relates to exposure equipment technical field, especially a lens device and exposure equipment with the lens device. BACKGROUND

[0002] Exposure equipment is a kind of mechanical equipment by light and transfers the image information on film or other transparent body to the surface coated with photosensitive substance.Lens assembly is the important component of exposure equipment, it includes DMD (digital micro mirror) chip, laser is handled after DMD reflection, and can form light spot on workpiece.In actual application process, to meet certain demand, it is usually necessary to adjust the angle of light spot, because the angle of light spot will affect the resolution of exposure pattern and exposure efficiency, thus, by adjusting the angle of light spot, the resolution and exposure efficiency problem can be improved.At present, for the adjustment of light spot angle, the whole lens assembly is rotated along the axis to fine adjustment.However, when multiple lens assemblies are closely arranged, the gap between lens assemblies cannot let fingers in, and it is difficult to adjust the angle of light spot.

[0003] The information disclosed in this section is intended only to add an understanding of the general background to the present application, and should not be considered as admitting that this information constitutes prior art to the present application in any form. SUMMARY

[0004] The utility model is directed to provide a kind of lens device, can more easily, conveniently adjust the angle of light spot.

[0005] The utility model is directed to provide a kind of exposure equipment, including above-mentioned lens device, can more easily, conveniently adjust the angle of light spot.

[0006] To achieve the above object, the embodiment of the utility model provides a kind of lens device, comprising:

[0007] Collimating mirror assembly is configured to process laser and output to mirror assembly;

[0008] Mirror assembly is connected with collimating mirror assembly, and is configured to reflect laser to DMD assembly;

[0009] DMD assembly is assembled on mirror assembly and can rotate relative to mirror assembly, and is configured to process laser and reflect laser to lens assembly;

[0010] Lens assembly is connected with mirror assembly, and is configured to process laser and output.

[0011] In one or more embodiments of the present application, the mirror assembly comprises a reflecting box and an optical assembly located in the reflecting box, the DMD assembly comprises a rotating seat and a DMD chip, the rotating seat is rotatably installed in the reflecting box, and the DMD chip is installed in the rotating seat.

[0012] In one or more embodiments of the present application, the reflecting box is provided with a light passing hole, the rotating seat is rotatably arranged at the light passing hole, and the DMD chip is arranged at the rotating seat and corresponds to the light passing hole.

[0013] In one or more embodiments of the present application, the reflecting box is provided with a protruding part, the light passing hole is arranged on the protruding part, the rotating seat is provided with a recessed part matched with the protruding part, and the DMD chip is arranged at the recessed part.

[0014] In one or more embodiments of the present application, the reflecting box is provided with a recessed part, the light passing hole is arranged on the recessed part, the rotating seat is provided with a protruding part matched with the recessed part, and the DMD chip is arranged at the protruding part.

[0015] In one or more embodiments of the present application, a locking assembly configured to lock the rotating seat and the reflecting box is further included.

[0016] In one or more embodiments of the present application, the mounting plate is provided with a mounting groove configured to assemble the DMD chip.

[0017] In one or more embodiments of the present application, the protruding part is a cylindrical boss.

[0018] In one or more embodiments of the present application, the lens assembly comprises at least one lens.

[0019] Embodiments of the present application provide an exposure device comprising the lens device.

[0020] Compared with the prior art, the present application rotates the DMD assembly relative to the reflecting box to adjust the angle of the light spot, which has the advantages of easy operation and convenient operation compared with the prior art of adjusting the light spot through the entire lens assembly. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of the lens device according to an embodiment of the present application;

[0022] Figure 2 is an exploded schematic view of part of the lens device according to an embodiment of the present application;

[0023] Figure 3 is a DMD assembly structure schematic diagram according to an embodiment of the utility model;

[0024] Figure 4 is a DMD assembly and reflection box assembly view after cutting according to an embodiment of the utility model.

[0025] Main figure mark explanation:

[0026] 10-collimating mirror assembly, 20-mirror assembly, 21-reflection box, 211-light hole, 212-boss part, 30-DMD assembly, 31-rotary seat, 311-recess, 32-DMD chip, 4-lens assembly, M-workpiece, P-gap, L-light spot. DETAILED DESCRIPTION

[0027] The specific embodiments of the utility model will be described in detail below in conjunction with the drawings, but it should be understood that the protection scope of the utility model is not limited by the specific embodiments.

[0028] Unless otherwise explicitly indicated, in the entire specification and claims, the term "comprises" or its variants such as "contains" or "includes" and the like will be understood to include the stated element or component, but not exclude other elements or components.

[0029] As Figures 1 to 4 shown, a lens device according to a preferred embodiment of the utility model is applied to an exposure equipment, and the light spot projected on the workpiece is convenient to adjust the angle according to actual demand.

[0030] Specifically, the lens device includes collimating mirror assembly 10, mirror assembly 20, DMD assembly 30 and lens assembly 40. Wherein, collimating mirror assembly 10 is connected with laser source (not shown in the figure), and it is structured to receive the laser generated by laser source and collimate the laser. Mirror assembly 20 is connected with collimating mirror assembly 10, and it is structured to receive the laser output by collimating mirror assembly 10 and reflect the laser to DMD assembly 30. DMD assembly 30 is assembled on mirror assembly 20 and can rotate relative to mirror assembly 20, and it is structured to process the laser and reflect the laser to lens assembly 40. Lens assembly 40 is connected with mirror assembly 20, and it is structured to process the laser and output.

[0031] In the embodiment, the laser generated by the laser source is input into the collimating mirror assembly 10, collimated by the collimating mirror assembly 10, output to the reflecting mirror assembly 20, reflected by the reflecting mirror assembly 20 into the DMD assembly 30, processed by the DMD assembly 30 and reflected to the lens assembly 40, processed by the lens assembly 40 and output to the external workpiece, and finally a light spot L is formed on the workpiece M. When the angle of the light spot M needs to be rotated, the DMD assembly 30 is rotated relative to the reflecting mirror assembly 20, that is, the DMD assembly 30 is rotated, so that the angle of the light spot L can be adjusted without rotating the entire lens device, which is more convenient and fast. Here, the angle adjustment generally refers to rotation around the center of the light spot L as the rotation center.

[0032] In combination Figures 1 to 3 As shown, the reflecting mirror assembly 20 includes a reflecting box 21 and an optical assembly (denoted as a first optical assembly) in the reflecting box 21, Figure 2 Only part of the reflecting box 21 is shown in the figure. The reflecting box 21 includes a first end, a second end opposite to the first end, and a side connecting the first end and the second end. The DMD assembly 30 is arranged at the first end, and the DMD assembly 30 can rotate relative to the reflecting box 21; the second end is provided with an outlet, and the lens assembly 40 is arranged at the outlet; and the side is provided with an inlet, and the collimating mirror assembly 10 is arranged at the inlet. In the embodiment, the laser output by the collimating mirror assembly 10 enters the reflecting box 21 through the inlet of the side, is processed by the first optical assembly and reflected to the DMD assembly 30, the laser is further processed by the DMD assembly 30, reflected to the outlet and enters the lens assembly 40, and finally a light spot is formed on the workpiece after being processed by the lens assembly 40. Since the DMD assembly 30 can rotate relative to the reflecting box 21, the angle of the finally formed light spot can be adjusted according to actual needs.

[0033] In the embodiment, the first optical assembly includes but is not limited to a reflecting mirror, such as Figure 1 As shown, a reflecting mirror is arranged in the reflecting box 21, and the laser entering from the inlet is reflected to the DMD assembly 30 through the reflecting mirror. The arrow in the figure represents the laser transmission path.

[0034] In combination Figures 2 to 4 As shown, the DMD assembly 30 includes a rotating seat 31 and a DMD chip 32. The rotating seat 31 is assembled on the reflecting box 21 and can rotate relative to the reflecting box 21, and is configured to carry the DMD chip 32. The DMD chip 32 is mounted on the rotating seat 31 and can rotate with the rotating seat 31. That is, the rotating seat 31 drives the DMD chip 32 to rotate during the rotation relative to the reflecting box 21. Through the rotation of the rotating seat 31, the rotation of the DMD chip 32 is driven, and finally the angle of the light spot generated by the lens device can be adjusted according to needs.

[0035] Combination Figures 2 to 4 As shown, in order to enable the laser processed by the first optical component to be reflected into the DMD chip, the reflection box 21 is provided with a light-transmitting hole 211 for the laser to pass through. The rotating seat 31 is rotatably disposed at the light-transmitting hole 211, and the DMD chip 32 on the rotating seat 31 corresponds to the light-transmitting hole 211 to facilitate receiving the laser.

[0036] Combination Figures 2 to 4 As shown, in order to enable the rotating base 31 to rotate relative to the reflecting box 21, the end of the reflecting box 21 that contacts the rotating base 31 protrudes outward to form a cylindrical boss 212. The rotating base 31 is provided with a recess 311 that cooperates with the boss 212. With the cooperation of the boss 212 and the recess 311, the rotating base 31 can rotate relative to the reflecting box 21. When the rotating base 31 rotates relative to the reflecting box 21 using this structure, the aforementioned light-transmitting hole 211 is provided on the boss 212 to allow light to pass through. At the same time, the DMD chip 32 on the rotating base 31 needs to be placed in the recess 311 and correspond to the light-transmitting hole 211 so as to receive the laser reflected from the first optical component and reflect the processed laser through the light-transmitting hole 211 to the light outlet of the reflecting box 21. By providing a protrusion 212 on the reflector box 21 and a recess 311 on the rotating base 31, the rotating base 31 can rotate relative to the reflector box 21. This achieves rotation with a simple structure and prevents debris generated during the rotation of the rotating base 31 relative to the reflector box 21 from entering the reflector box 21 through the light-transmitting hole 211 and affecting the first optical component. This is because, as... Figure 4 As shown, there is a certain gap between the rotating base 31 and the reflective box 21. When the rotating base 31 rotates relative to the reflective box 21, the debris generated by the friction between the two will enter the gap P under the obstruction of the boss part 212, and will not enter the reflective box 21 through the light-transmitting hole 211. Therefore, the impact of debris on the optical components in the reflective box can be avoided.

[0037] Of course, in other embodiments, a recessed portion 311 can be provided on the reflector box 21, and a cylindrical boss portion 212 can be provided on the rotating seat 31, to achieve rotation between the two. When using this solution, a light-transmitting hole 211 needs to be provided in the recessed portion 311 to allow light to pass through. At the same time, the DMD chip 32 on the rotating seat 31 needs to be disposed in the boss portion 212.

[0038] Of course, in other embodiments, a convex ring structure can also be provided on the reflector box 21. The convex ring structure can be a closed ring or a non-closed ring. The rotating seat 31 is provided with a recessed portion 311 that cooperates with the convex ring structure. With the cooperation of the two, the rotating seat 31 can rotate relative to the reflector box 21. In this scheme, a light-transmitting hole 211 is provided in the area enclosed by the convex ring structure to allow light to pass through. At the same time, the DMD chip 32 on the rotating seat 31 needs to be set in the protrusion portion 212.

[0039] In this embodiment, the shape of the light-transmitting hole 211 can be set according to actual needs, such as... Figure 2 As shown, the light-transmitting hole 211 is a square hole; in other embodiments, a circular hole, etc., may also be used. The DMD chip 32 can be mounted and fixed on the rotating base 31 via a slot structure, such as... Figure 2 As shown, the rotating base 31 is provided with a mounting groove 312 located in the recess 311, and the DMD chip 32 is mounted on the rotating base 31 through the mounting groove 312.

[0040] Furthermore, in some embodiments, after the rotating base 31 has rotated a certain angle according to actual needs, a locking structure is required to ensure the stability of the light spot, thereby locking the rotating base 31 and the reflector box 21. That is, the rotating base 31 is relatively fixed relative to the reflector box 21 through the locking mechanism. In specific implementations, the locking mechanism can be a bolt, which achieves the locking between the two. Of course, in other embodiments, other structures can be used, as long as they can ensure that the rotating base 31 remains relatively fixed relative to the reflector box 21.

[0041] like Figure 1 As shown, the lens assembly includes a lens box and an optical component (denoted as the second optical component) located within the lens box. The second optical component here includes, but is not limited to, a lens.

[0042] The lens device described in this utility model achieves the adjustment of the light spot angle by rotating the DMD component 30 relative to the reflection box 21. Compared with the prior art, which adjusts the light spot by adjusting the entire lens component, it has the advantages of easy operation and convenient operation.

[0043] This utility model also discloses an exposure device, including the above-mentioned lens device. By rotating the DMD component 30 relative to the reflection box 21, the light spot angle can be adjusted. Compared with the prior art, which adjusts the light spot by rotating the lens component 40, it has the advantages of easy operation and convenient operation.

[0044] The foregoing description of specific exemplary embodiments of the present application is intended to be illustrative only and is not intended to limit the application to the precise forms disclosed. Many modifications and variations are possible in light of the above teachings without departing from the spirit or essential characteristics of the application. The exemplary embodiments were chosen and described in order to explain the principles of the application and its practical application and to allow others skilled in the art to understand the application for various exemplary embodiments with various modifications being applicable. The scope of the application is intended to be limited only by the claims submitted with this application and their equivalents.

Claims

1. A lens device, characterized in that, include: The collimating lens assembly is configured to process the laser and output it to the reflecting mirror assembly; A reflector assembly, connected to the collimating lens assembly, is configured to reflect laser light to the DMD assembly, the reflector assembly including a reflector box and optical components located within the reflector box; A DMD assembly, mounted on the reflector assembly and rotatable relative to the reflector assembly, is configured to process laser light and reflect it to a lens assembly. The DMD assembly includes a rotatable mount and a DMD chip. The rotatable mount is rotatably mounted on the reflector box, and the DMD chip is mounted on the rotatable mount. The lens assembly, connected to the mirror assembly, is configured to process and output the laser.

2. The lens device as claimed in claim 1, characterized in that, The reflector box is provided with a light-transmitting hole, the rotating base is rotatably disposed at the light-transmitting hole, and the DMD chip is disposed on the rotating base and corresponds to the light-transmitting hole.

3. The lens device as described in claim 2, characterized in that, The reflector box has a protrusion with a light-transmitting hole, and the rotating seat has a recess that mates with the protrusion, with the DMD chip disposed in the recess.

4. The lens device as claimed in claim 2, characterized in that, The reflector box has a recessed portion with a light-transmitting hole, and the rotating seat has a protrusion that mates with the recessed portion, with the DMD chip disposed on the protrusion.

5. The lens device as claimed in claim 1, characterized in that, It also includes a locking assembly configured to lock the rotating base to the reflector box.

6. The lens device as claimed in claim 1, characterized in that, The rotating base is provided with a mounting slot configured to assemble the DMD chip.

7. The lens device as claimed in claim 3, characterized in that, The protrusion is a cylindrical boss.

8. The lens device as claimed in claim 1, characterized in that, The lens assembly includes at least one lens.

9. An exposure apparatus, characterized in that, Includes the lens device as described in any one of claims 1 to 8.

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