Drying device for boron diffusion heating furnace body production
By designing the adjustment and clamping mechanism, the problem that existing devices cannot adapt to boron diffusion heating furnaces of different sizes has been solved, achieving a highly efficient drying effect for the boron diffusion heating furnace.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-02
- Publication Date
- 2026-03-24
AI Technical Summary
Existing boron diffusion heating furnace drying devices cannot adapt to boron diffusion heating furnaces of different sizes, resulting in low drying efficiency.
A drying device including an adjustment mechanism and a clamping mechanism was designed. The adjustment component and the clamping component enable effective clamping and rotation of boron diffusion heating furnace bodies of different sizes. The motor drive enables multi-point clamping and rotational drying.
It achieves efficient clamping and drying of boron diffusion heating furnace bodies of different sizes, thus improving drying efficiency.
Smart Images
Figure CN224034240U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to boron expansion heating furnace body technical field, specifically is a kind of drying device for boron expansion heating furnace body production. BACKGROUND
[0002] Boron expansion heating furnace body is a kind of industrial equipment for semiconductor or special material processing, mainly used for boron diffusion process. Its core function is to diffuse boron element to the surface of silicon wafer and other substrates by high temperature, form P-type doped layer, change the electrical properties of materials, furnace body is usually composed of high-temperature-resistant quartz tube, precision temperature control system, gas delivery device and sealing structure, ensure that boron element is uniformly penetrated. The technology is widely used in solar cells, integrated circuit manufacturing and other fields, and the control requirements of doping concentration and depth are extremely high, and it needs to be combined with strict anti-pollution and waste gas treatment design.
[0003] In the production process of boron expansion heating furnace body, drying is a crucial link. After boron expansion heating furnace body is initially formed, water or other volatile substances may remain on its surface. If not fully dried, it will affect the quality and performance of the furnace body. The existing drying device can only dry boron expansion heating furnace body of specific size or inner diameter. When different sizes of furnace body are encountered, effective clamping and drying cannot be performed, resulting in low drying efficiency. Therefore, a drying device capable of adapting to different sizes of boron expansion heating furnace body is needed.
[0004] Therefore, a drying device for boron expansion heating furnace body production is proposed to solve the problems mentioned above. INVENTION CONTENTS
[0005] In view of the deficiencies of the prior art, the utility model provides a drying device for boron expansion heating furnace body production, which can adapt to different sizes of boron expansion heating furnace body and has high drying efficiency.
[0006] To achieve the above purpose, the utility model provides the following technical scheme: a drying device for boron expansion heating furnace body production, including base, the base is provided with vertical plate, the top end of vertical plate is fixedly installed with drying box, the inside of drying box is provided with adjusting mechanism, the adjusting mechanism is provided with clamping mechanism, the clamping mechanism is clamped on the body of heating furnace, the adjusting mechanism includes adjusting assembly, the adjusting assembly includes first motor, the first motor is fixedly installed at the bottom end of drying box, the shaft end of first motor penetrates the inner wall of drying box and is fixedly installed with turntable, the turntable is rotatably connected with connecting rod, the inner wall of drying box is fixed with slide rod, the slide rod is slidably provided with sliding block, one end of connecting rod is rotatably connected with the bottom end of sliding block;
[0007] The clamping mechanism comprises a clamping assembly, the clamping assembly comprises a vertical plate, the vertical plate is fixedly installed at the top end of the sliding block, a box body is rotationally connected to the vertical plate, an inner wall of the box body is rotationally connected with a rotating rod through a bearing, the rotating rod is provided with a screw thread, a bracket is threadedly connected to the rotating rod, the bracket slides on the inner wall of the box body, and a clamping plate is arranged at one end of the bracket.
[0008] Preferably, the shape of the rotating disc is disc-shaped, and the number of the connecting rods is not less than two.
[0009] Preferably, the number of the sliding rods is not less than two, and the shape of the sliding rods is U-shaped.
[0010] Preferably, the shape of the sliding block is square block-shaped, and the number of the sliding blocks is not less than two.
[0011] Preferably, the vertical plate comprises a left plate and a right plate, a second motor is fixedly installed on the left plate, and the rotating shaft end of the second motor penetrates through the left plate and is fixedly connected with the box body.
[0012] Preferably, the number of the box bodies is not less than two, and the shape of the box bodies is cylindrical box-shaped.
[0013] Preferably, a first gear is fixed at one end of the rotating rod, a third motor is fixedly installed on the inner wall of the box body, a second gear is fixedly installed at the rotating shaft end of the third motor, and the second gear is engaged with the first gear.
[0014] Compared with the prior art, the drying device for boron expansion heating furnace body production has the following beneficial effects:
[0015] 1. The adjusting mechanism is arranged, the distance between the two clamping mechanisms can be adjusted according to the size of the boron expansion heating furnace body, and the clamping mechanism can effectively clamp the boron expansion heating furnace body.
[0016] 2. The clamping mechanism is arranged, the purpose of clamping boron expansion heating furnace bodies with different inner diameters is achieved, the boron expansion heating furnace body can be dried, and the boron expansion heating furnace body can also be driven to rotate, so that the drying efficiency of the boron expansion heating furnace body is improved.
[0017] The parts not involved in the device are the same as or can be realized by the prior art, the drying device for boron expansion heating furnace body production has the advantages of simple structure and convenient operation. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 The overall structure of the drying device for boron expansion heating furnace body production is shown in the figure.
[0019] Figure 2The utility model provides a kind of drying device's drying box section view for boron expansion heating furnace body production;
[0020] Figure 3 The utility model provides a kind of adjusting assembly schematic diagram of drying device for boron expansion heating furnace body production;
[0021] Figure 4 The utility model provides a kind of box body schematic diagram of drying device for boron expansion heating furnace body production;
[0022] Figure 5 The utility model provides a kind of right plate section view of drying device for boron expansion heating furnace body production.
[0023] In the drawing: 1, base; 2, adjusting assembly; 21, first motor; 22, carousel; 23, slide; 24, sliding block; 25, connecting rod; 3, clamping assembly; 31, vertical plate; 32, box; 33, third motor; 34, clamping plate; 35, support; 36, first gear; 37, second gear; 38, rotating rod; 39, second motor; 4, vertical plate; 5, drying box; 6, heating furnace body. DETAILED DESCRIPTION
[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model. EMBODIMENT
[0025] Please refer to Figure 1 - Figure 5 A kind of drying device for boron expansion heating furnace body production in the embodiment, including base 1, base 1 is provided with vertical plate 4, vertical plate 4 top end fixed mounting has drying box 5, drying box 5 is provided with adjusting mechanism, adjusting mechanism is provided with clamping mechanism, clamping mechanism is clamped on heating furnace body 6, adjusting mechanism includes adjusting assembly 2, adjusting assembly 2 includes first motor 21, first motor 21 fixed mounting at the bottom end of drying box 5, the rotating shaft end of first motor 21 penetrates the inner wall of drying box 5 and is fixedly installed with carousel 22, carousel 22 is rotatably connected with connecting rod 25 on, the inner wall of drying box 5 is fixed with slide 23, slide 23 is provided with sliding block 24, one end of connecting rod 25 is rotatably connected with the bottom end of sliding block 24.
[0026] The shape of carousel 22 is disc, and connecting rod 25 is not less than two, and the shape of connecting rod 25 is strip-shaped rod.
[0027] The slide rod 23 is not less than two, and the shape of the slide rod 23 is U-shaped.
[0028] The shape of the slide block 24 is a square block, and the slide block 24 is not less than two.
[0029] During the production of the heating furnace body 6, when it is necessary to dry the heating furnace body 6, the drying box 5 is opened, and then the interval between the two clamping mechanisms is adjusted according to the length of the heating furnace body 6. The specific operation is as follows: the first motor 21 is started, the first motor 21 drives the rotating disc 22 to rotate, and the rotating disc 22 drives the two slide blocks 24 to move towards each other along the surface of the slide rod 23 through the connecting rod 25 until the clamping mechanisms on the two slide blocks 24 move to the appropriate interval.
[0030] The clamping mechanism comprises a clamping assembly 3, the clamping assembly 3 comprises a vertical plate 31, the vertical plate 31 is fixedly installed at the top end of the slide block 24, the vertical plate 31 is rotatably connected with a box body 32, the inner wall of the box body 32 is rotatably connected with a rotating rod 38, the rotating rod 38 is provided with a thread, the rotating rod 38 is threadedly connected with a bracket 35, the bracket 35 slides on the inner wall of the box body 32, and the bracket 35 is provided with a clamping plate 34 at one end.
[0031] The vertical plate 31 comprises a left plate and a right plate, the second motor 39 is fixedly installed on the left plate, and the rotating shaft end of the second motor 39 penetrates through the left plate and is fixedly connected with the box body 32.
[0032] The box body 32 is not less than two, and the shape of the box body 32 is a cylindrical box.
[0033] One end of the rotating rod 38 is fixedly connected with a first gear 36, the inner wall of the box body 32 is fixedly installed with a third motor 33, the rotating shaft end of the third motor 33 is fixedly installed with a second gear 37, and the second gear 37 is engaged with the first gear 36.
[0034] After the distance adjustment of the two-side clamping mechanism is completed, the heating furnace body 6 is placed between the two-side vertical plates 31, and then the first motor 21 is started again until the two-side clamping plates 34 are inserted into the inner wall of the heating furnace body 6. At this time, the third motor 33 is started, the third motor 33 drives the second gear 37 to rotate, the second gear 37 is engaged with the first gear 36, and the four first gears 36 are driven to rotate at the same time. When the first gear 36 rotates, the rotating rod 38 rotates, the rotating rod 38 is provided with threads, and the four supports 35 are driven to move dispersedly at the same time. The four supports 35 drive the four clamping plates 34 to move dispersedly, until the four clamping plates 34 contact and press the inner wall of the heating furnace body 6, so that the purpose of clamping the inner wall of one end of the heating furnace body 6 is achieved. Then the above operation is repeated to clamp and fix the other end of the heating furnace body 6. After the clamping and fixing of the heating furnace body 6 are completed, the second motor 39 is started, and the box body 32 on the left plate is driven to rotate by the second motor 39. Since the box body 32 on the right plate is rotationally connected to the right plate, when the box body 32 on the left plate rotates, the heating furnace body 6 is driven to rotate by the clamping plate 34, so as to quickly dry the heating furnace body 6.
[0035] The mounting mode, connection mode or setting mode disclosed in the embodiment are all common mechanical connection modes, and any mode that can achieve the beneficial effects can be implemented. In addition, the electrical components in the embodiment are electrically connected with the master controller and the power supply. The master controller can be a conventional known device such as a computer that can control. A person skilled in the art can control the electrical components through simple programming, and the existing disclosed power connection technology is also known in the art. Therefore, the specific structure and working principle of the embodiment will not be described in detail.
[0036] It should be noted that, in this document, relationship terms such as first and second are used only to differentiate one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the process, method, article or device including the element.
[0037] It should be noted that, in this document, relationship terms such as first and second are used only to differentiate one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the process, method, article or device including the element.
[0038] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A drying device for producing boron diffusion heating furnace bodies, comprising a base (1), characterized in that: A vertical plate (4) is provided on the base (1), and a drying box (5) is fixedly installed on the top of the vertical plate (4). An adjustment mechanism is provided inside the drying box (5), and a clamping mechanism is provided on the adjustment mechanism. The clamping mechanism clamps the heating furnace body (6). The adjustment mechanism includes an adjustment component (2), which includes a first motor (21). The first motor (21) is fixedly installed at the bottom of the drying box (5). The shaft end of the first motor (21) passes through the inner wall of the drying box (5) and is fixedly installed with a turntable (22). A connecting rod (25) is rotatably connected to the turntable (22). A sliding rod (23) is fixed to the inner wall of the drying box (5). A slider (24) is slidably arranged on the sliding rod (23). One end of the connecting rod (25) is rotatably connected to the bottom end of the slider (24). The clamping mechanism includes a clamping assembly (3), which includes a vertical plate (31). The vertical plate (31) is fixedly installed on the top of the slider (24). A box body (32) is rotatably connected to the vertical plate (31). A rotating rod (38) is rotatably connected to the inner wall of the box body (32) through a bearing. The rotating rod (38) is threaded. A bracket (35) is threaded onto the rotating rod (38). The bracket (35) slides on the inner wall of the box body (32). A clamping plate (34) is provided at one end of the bracket (35).
2. The drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: The turntable (22) is disc-shaped, and there are at least two connecting rods (25), which are strip-shaped.
3. The drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: There are at least two slide bars (23), and the slide bars (23) are U-shaped.
4. The drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: The slider (24) is a square block, and there are at least two sliders (24).
5. A drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: The vertical plate (31) includes a left plate and a right plate. A second motor (39) is fixedly installed on the left plate. The shaft end of the second motor (39) passes through the left plate and is fixedly connected to the box body (32).
6. The drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: There are at least two boxes (32), and the shape of the boxes (32) is a cylindrical box.
7. The drying device for boron diffusion heating furnace body production according to claim 1, characterized in that: One end of the rotating rod (38) is fixed with a first gear (36), and a third motor (33) is fixedly installed on the inner wall of the box (32). A second gear (37) is fixedly installed on the shaft end of the third motor (33), and the second gear (37) meshes with the first gear (36).